NOTICE OF INTENT TO SOLE SOURCE: RIE05-Electrical Static Chuck Based Deep Reactive Ion Etching System

The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate, on a sole source basis, with SPTS Technologies Inc. of 2381 Bering Drive, San Jose, California 95131 for the purchase of the following system. The statutory authority for this acquisition is 41 USC 3304(a)(1), as implemented under the authority of 41 U.S.C. 1901. 

1 QTY, RIE05-Electrical Static Chuck Based Deep Reactive Ion Etching System.

1 QTY, RIE05-Electrical Static Chuck Based Deep Reactive Ion Etching System Service Contract. 5 year warranty (one-year base + 1 four-year option)

Based on the Government’s market research, only SPTS Technologies Inc. can provide a commercially available product that meets the following combined minimum specifications:

• The Electrical Static Chuck (ESC) based deep reactive ion etching (DRIE) system uses the Bosch silicon deep etch processes provided with the system with as little as 1.0% silicon exposed area as well as non-Bosch processes and waferless chamber cleaing processes.
• The system includes dual Inductive Couple Plasma (ICP) Radio Frequency (RF) sources and a bias RF source with independent RF control.

The NanoFab User Facility user base is currently trained in the operation of an ESC based DRIE system and is heavily used to fabricate a wide variety of silicon-based devices. However, the current system is approaching the end of life. Software can no longer be upgraded, and some hardware are becoming obsolete. To provide uninterrupted support to NanoFab users and minimize tool down time, the NanoFAb needs a replacement system that can utilize the experience already developed by users on the existing ESC based deep silicon etching system and provide similar results. Changing the etch system would require retraining staff and every user, to include requiring the redevelopment and re-qualification of each process used by each user which would severely impair timely research progress.

SPTS Technology Inc is the sole manufacturer and distributor of the commercial equipment that meets the required minimum specifications.  

The North American Industry Classification System (NAICS) code for this acquisition is 333242 – Semiconductor Machinery Manufacturing, with a small business size standard of 1,500employees.  

A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government.  Information received will be considered solely for the purpose of determining whether to conduct a competitive procurement.   

No solicitation package will be issued.  This notice of intent is not a request for quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. Interested parties that believe they can satisfy the requirements listed above must identify their capability in writing before the response date of this notice. Only responses received by 1:00 p.m. Mountain  Standard Time on February 16, 2023 will be considered by the government.  Responses shall be submitted via email to angela.hitt@nist.gov and forest.crumpler@nist.gov.

Contracting Office Address: 

100 Bureau Drive 

Bldg. 301, Mail Stop 1640 

Gaithersburg, Maryland 20899-0001