Attach 6 Advanced Measurement Laboratory Guidelines.pdf

National Institute of Standards and Technology Technology Administration

United States Department of Commerce

Advanced Measurement Laboratory

Facility Guidelines

March 1, 2005

AML Facility Guidelines i

Table of Contents Introduction

About the AML Guidelines

Conventions Used in these Guidelines

AML Facility

Building & Personnel Safety

Emergency Communications 2222

Occupant Emergency Plan, dated March 2000

Fire or Explosion

AML Facility Exit Plans

Refrigerant Monitoring

Safety Station (Not Established Yet, March 2004)

Lab Safety Procedures

NIST Open Flame Policy

Laser Safety

Safety Shower / Eyewash Stations

Eyewash / Drench Hose Units

Pull Stations

AML Facility Life Safety Plans

Chemical Storage & Handling

General Requirements

Maximum Allowable Quantities

Receiving Chemical and Gas Deliveries

Chemical Storage and Distribution

Hazardous Gas Storage and Distribution

Cryogen Storage and Distribution

Toxic Gas Monitoring

Building Systems

Architectural Systems

Structural System

Mechanical: Heating, Ventilation and Air Conditioning ii

Mechanical: Piping and Plumbing Systems

Electrical Systems

Signaling Systems

Building Automation System

Laboratory Furnishings

Laboratory Equipment Operation

Hoods - General

Chemical Fume Hoods

Clean Laminar Flow Hoods

Biological Safety Cabinets

Local Exhaust Ports

Vertical Laminar Flow Ceiling Modules

Flammable Storage Cabinet Operation

Special Areas of the Building

Service Galleys

Clean Rooms

EMI Sensitive Research Laboratories

Building Operations

Contact Directory

Plant Division Services

Accessibility Requirements

Notifications for Utility Outages

Restricted Access to Spaces

Appendix

Applicable Codes, Standards and Regulations

Gowning Room Procedure

Cleanroom Diagram

Section I

Introduction

Section I:

Introduction About the AML Guidelines

Conventions Used in these Guidelines

AML Facility

About the AML Guidelines These guidelines were assembled to help the user understand how the AML Facility functions are conducted, and to provide instructions for requesting and obtaining services from NIST department services located inside and outside the AML Facility. Much of the material in these guidelines is specific and unique to the AML Facility.

This document is intended to be a “User’s Guide” for the Advanced Measurement Laboratory (AML) Facility. Although the AML Facility is similar to other laboratories at NIST’s Gaithersburg Campus, it contains some features that make it unique. The AML Facility Guidelines explains these features and establishes operating procedures so you can use the building more safely and productively.

Objective ‘To develop a clear and concise, user-oriented, AML Facility Guideline document which will:

• Serve as a source document during fit-up design and future modifications;

• Be a comprehensive “user’s guide” for personnel; and

• Define operational parameters consistent with the objectives of personnel safety, scientific programs, applicable codes, and authorities having jurisdiction.

The AML Facility Guidelines is to be a “living document” to be evaluated and updated on a regular basis.’

Section I - Introduction

The Document Development Process The AML Guidelines was developed through collaboration between representatives of NIST Plant Division, and NIST Occupational Health & Safety Division.

References to Other Publications Some documents governing NIST policies and procedures are referenced throughout the guidelines rather than to repeat the instructions that they contain. The forms included in these guidelines are provided as examples only. If you need to use a form, you should contact the appropriate department to obtain the most current version.

This approach will help this document from containing instructions that are inconsistent with NIST site-wide policy when documents such as the Laboratory Safety Manual and Health Safety Instructions are updated. All references to publications in the AML Guidelines refer to “the latest edition” of that publication unless otherwise stated.

Updates to the AML Facility Guidelines If you have comments, corrections or suggestions for changes to this document please contact NIST Plant Division, Facilities Planning, Engineering & Construction Group on EXT. 4449 or EXT. 6829.

Conventions Used in these Guidelines

Conventions Used in these Guidelines Icons are used in the left margin to highlight certain kinds of information.

Here is a key to these symbols:

Reference to other publications.

Reference to another Section of the Laboratory Protocol Manual.

Lists of encouraged or required practices.

Lists of discouraged or prohibited practices.

References or excerpts from manufacturer’s “Operations and Maintenance” guides.

Specifications or statistics for AML building systems.

Features of the AML that are different from NIST General Purpose Laboratories.

Contact numbers or instructions.

Emergency Procedures.

See…

Do’s

Don’ts

O&M

Specs

AML Facility

Description The AML Facility is one of the most technologically advanced buildings in the world, providing combined features of close temperature control, vibration isolation, air cleanliness, and power quality. The AML Facility consists of five buildings wings (buildings 215 through 219), each with one occupiable scientific level. Two metrology wings (buildings 218 and

219) are below grade, two physical sciences wings (buildings 216 and

217) and a Cleanroom wing (building 215) are located above grade.

Building Facts

Building 215 – Cleanroom Wing Area: 8,520 gsm

Floor Levels: Four Levels

Basement Level: Clean Room Basement (Building Services)

Level One: Clean Room Labs

Distribution Level: Mechanical & Electrical Distribution

Penthouse Level: Mechanical Equipment

Air Cleanliness

Main Lab: M3.5 (Class 100)

Service Corridors: M4.5 (Class 1,000)

Temperature Control: ± 0.25°C

Humidity Control: ± 5%

Vibration Criteria: NIST-A (0.025 µm/s displacement for 1=ƒ=20Hz;

3 µm/s velocity for 20<ƒ=100Hz)

Building 216 – Instrument Lab East Wing Area: 9,529 gsm

Floor Levels: Three Levels

Level One: Instrument Labs and Offices

Distribution Level: Offices, Mechanical & Electrical Distribution

AML Facility

Penthouse Level: Mechanical Equipment

Air Cleanliness

Labs: Unclassified, HEPA filtered

Offices: Unclassified, 95% Filtered

Temperature Control: ± 0.25°C

Humidity Control: ± 5%

Vibration Criteria: NIST-A

Building 217 – Instrument Lab West Wing Area: 11,858 gsm

Floor Levels: Three Levels

Level One: Instrument Labs and Offices

Distribution Level: Offices, Mechanical & Electrical Distribution

Penthouse Level: Mechanical Equipment

Air Cleanliness

Labs: M3.5 (Class 100), M4.5 (Class 1,000), M5.5 (Class 10,000) or Unclassified, HEPA filtered

Offices: Unclassified, 95% Filtered

Temperature Control: ± 0.25°C, Offices ± 1°C

Humidity Control: ± 5%

Vibration Criteria: NIST-A

Building 218 – Dynamic Metrology Lab East Wing Area: 8,470 gsm

Floor Levels: Two Levels below grade

Lower Level: Metrology Labs

Basement Level: Mechanical Distribution

Air Cleanliness: M3.5 (Class 100), M4.5 (Class 1,000), M5.5 (Class 10,000) or Unclassified, HEPA filtered

Temperature Control: ± 0.01°C, ± 0.1°C, or ± 0.25°C

Humidity Control: ± 1% or ± 5%

Vibration Criteria: NIST-A for slab on grade

NIST-A1 for slab on air springs (6µm/s for ƒ=5Hz; 0.75µm/s for 5<ƒ=100Hz)

Building 219 – Quiet Metrology Lab West Wing Area: 9,103 gsm

Floor Levels: Two Levels below grade

Lower Level: Metrology Labs

Basement Level: Mechanical Distribution

Air Cleanliness: M3.5 (Class 100), M4.5 (Class 1,000), M5.5 (Class 10,000) or Unclassified, HEPA filtered

Temperature Control: ± 0.01°C, ± 0.1°C, or ± 0.25°C

Humidity Control: ± 1% or ± 5%

Vibration Criteria: NIST - A for slab on grade;

NIST - A1 for slabs on air springs

Section II

Building & Personnel Safety

Section II:

Building and Personnel Safety Emergency Communications 2222

Occupant Emergency Plan, dated March 2000

Fire or Explosion

AML Facility Exit Plans

Refrigerant Monitoring

Safety Station

Lab Safety Procedures

NIST Open Flame Policy

Laser Safety

Safety Shower / Eyewash Stations

Eyewash / Drench Hose Units

Pull Stations

AML Facility Life Safety Plans

Emergency Communications 2222 For all emergencies (24 hours a day, 7 days a week), call the Emergency Console Operator, EXT. 2222.

STAY CALM.

• Be sure to get yourself and all nearby personnel out of any dangerous areas before calling the Emergency Console. Stay on the phone if possible. If you must hang up stay near the phone.

• Speak clearly and slowly when talking with the Console Operator.

Section II – Building & Personal Safety

• If a phone is not nearby or it is not safe to use a phone, pull the nearest manual fire alarm and go to the Main Entrance (lobby located between buildings 215 and 216) of the building to direct the emergency service personnel.

For complete instructions, refer to the NIST publication “Occupant Emergency Plan, dated March 2000”.

Occupant Emergency Plan, dated March 2000 Procedures to be followed in an emergency are defined in the NIST publication “Occupant Emergency Plan, dated March 2000”.

The plan covers the emergency warning system, organization and responsibilities for protective actions, evacuations and early dismissal instructions applicable to several major categories of emergencies that could affect personnel and facilities at Gaithersburg:

(1) Fire or Explosion;

(2) Natural Disaster;

(3) Bomb Threats;

(4) Civil Disturbance; or

(5) Hazardous Materials Spill.

Fire or Explosion The following procedures are excerpted from the NIST publication “Occupant Emergency Plan, dated March 2000”. Please refer to that document for complete instructions.

Emergency Procedures

• Activate nearest fire alarm.

• Leave building using nearest exit.

• If time permits,

• Call 2222; if busy, dial 9-911. When calling 9-911, the location on the NIST campus must be identified. Due to possible confusion with NIH, make sure that the operator understands it is NIST.

• Notify supervisor immediately.

Fire or Explosion

Extinguisher-Trained Personnel Only

• Dial 2222; if busy, dial 9-911

• If fire is small and you are trained, you may attempt to extinguish it.

• Use only ONE extinguisher, and then exit the building.

In the AML Facility, fire extinguishers are typically located inside the laboratories near an exit to the Personnel Corridor.

Building Fire Detection and Suppression The AML is fully sprinklered, with an automatic sprinkler system.

The building also has a fire detection and alarm system.

AML Facility Exit Plans The AML Facility is organized in five laboratory blocks flanking a circulation spine, which connects to the existing GPL Building 220. The lab areas are located on a single floor, while offices are stacked on two levels (first and mezzanine level). These five laboratory blocks or buildings consist of; two instrument lab buildings (Bldgs. 216 and 217), one clean room building (Bldg. 215), and two underground metrology lab buildings (Bldgs. 218 and 219).

The doors in the corridors will shut automatically upon the activation of a fire alarm. Do not prop these doors open or otherwise prevent them from functioning properly.

In general, each laboratory unit has two means of egress. The temperature-controlled rooms with ± 0.01°C and ± 0.01°C tolerances have one means of egress.

The backs of most laboratories have doors leading to a Service Galley.

The Service Galley is a corridor that can be used as an emergency exit if the other laboratory door is inaccessible. The Service Galleys have exits to the corridor at both ends.

Elevators are NOT to be used in a fire emergency.

Building 215 – Cleanroom Facility Exits The building is composed of four levels; one level is below ground level and functions as a service area to support the cleanroom functions. The first level is at ground level and functions as the occupied Cleanroom area.

The third level serves as mechanical & electrical distribution and the fourth level houses mechanical equipment. The third and fourth levels are not normally occupied except during maintenance of the building systems.

The Lower Level has four exits:

• Two exits discharging occupants directly to the exterior of the building. These two exits are located at opposite sides at the South end of the building via Stairs No. 13 and 14.

• One exit discharges occupants vertically through Stair No. 1A located at the Northwest end of the building.

• One exit discharges occupants horizontally through a pair of fire-rated doors located at the Northeast end of the building.

Don’t

Don’t

AML Facility Exit Plans

Level One has six exits:

• Two exits discharge occupants directly to the exterior of the building. One exit is located at the Northwest end of the building, and the other exit is located at the Northeast end of the building.

• Two exits discharge occupants descending through Stairs No. 13 and 14. Stairs No. 13 and 14 are located at the Southeast and Southwest corners of the building, respectively.

• Two exists discharge occupants horizontally through a pair of fire-rated doors. One horizontal exit is located at the Northeast end of the building and opens directly into Building 216. The second horizontal exit is located at the Northwest end of the building and opens directly into Building 217.

Distribution Level has 5 exits:

• Two exists discharge occupants descending through Stairs No. 13 and 14. Stairs No. 13 and 14 are located at the Southeast and Southwest corners of the building, respectively.

• One exit discharges occupants descending through Stair 1A located at the Northwest corner of the building.

• Two exists discharge occupants horizontally through a pair of fire-rated doors. One horizontal exit is located at the Northeast end of the building and opens directly into Building 216 Distribution. The second horizontal exit is located at the Northwest end of the building and opens directly into Building 217 Distribution.

Penthouse Level has 4 exits:

• Two exists discharge occupants descending through Stairs No. 13 and 14. Stairs No. 13 and 14 are located at the Southeast and Southwest corners of the building, respectively.

• One exit discharges occupants descending through Stair 1A located at the Northwest corner of the building.

• One exit discharges occupants horizontally through a pair of fire-rated doors located at the Northeast end of the building and opens directly into Building 216 Penthouse.

Figures 2-4 through 2-7 show the AML Exit Plans - including exits and exit stair locations, path of egress and fire ratings.

Building 216 – Instrument Lab East Facility Exits The building provides one level for occupancy at ground level and a mezzanine level. The building is located adjacently to Building 215’s Northeast corner.

Level One has eight exits:

• Seven exits discharge occupants directly to the exterior of the building. Two exits are provided at the North, East, and South ends of the building. One exit is provided at the West end of the building.

• One exit discharges occupants horizontally through a pair of fire-rated doors located at the Northwest end of the building opening directly into Building 215.

The Mezzanine Level has two office space clusters, each at the North and South ends of the building. The North and South office space clusters are separated by a mechanical/electrical interstitial space (Distribution) between them.

The North office cluster has four exits:

• One vertical exit discharges occupants to the exterior of the building though Stair No. 7

• Two vertical exits discharge occupants to the floor below through Stairs No. 10, and 12.

• One horizontal exit discharges occupants through a pair of fire-rated doors located at the Northwest end of the building opening directly into Building 215.

The South office cluster has four exits:

• Two vertical exits discharge occupants to the exterior of the building through Stairs 8 and 12A.

• Two vertical exits discharge occupants to the floor below through Stairs No. 9, and 11.

Figures 2-5 through 2-7 show the AML Exit Plans - including exits and exit stair locations, path of egress and fire ratings.

Building 217 – Instrument Lab West Facility Exits The building provides one level for occupancy at ground level and a mezzanine level. The building is located adjacently to Building 215’s Northwest corner. The building has eight exits.

Level One has eight exits:

• Six exits discharge occupants directly to the exterior of the building. Two exits are provided at the North, South, and West ends of the building.

• Two exits discharge occupants horizontally through a pair of fire-rated doors. One exit is located at the Southwest end of the building and opens directly into Building 215. The second exit is located at the Northwest end of the building and is located at the East end of the corridor leading toward Building 220’s basement.

The Mezzanine Level has two office space clusters, each at the North and South ends of the building. The North and South office space clusters are separated by a mechanical/electrical interstitial space (Distribution) between them.

The North office cluster has four exits:

• Two vertical exits discharge occupants directly to the exterior of the building through Stairs No. 2 and 20.

• Two vertical exits discharge occupants to the floor below through Stairs No. 16 and 18.

The South office cluster has four exits:

• One vertical exit through Stair 19

• Two vertical exits discharge occupants to the floor below through Stairs No. 15 and 17.

• One horizontal exit discharges occupants through a pair of fire-rated doors located at the Southeast end of the building opening directly into Building 215.

Figures 2-5 through 2-7 show the AML Exit Plans - including exits and exit stair locations, path of egress and fire ratings.

Building 218 – Metrology Lab East Facility Exits The building is located North of Building 216 and provides one level for occupancy below ground level. This building is completely underground.

The building has four exits.

• Three exits discharge occupants vertically through stairs no. 5, 6, and 21. Stair No. 5 is located at the Northeast corner of the building, Stair No. 6 is located at the Southeast corner of the building, and Stair No. 21 is located at the Southwest corner of the building.

• One exit discharges occupants horizontally through a pair of fire-rated doors located at the Northwest end of the building and opens directly into Building 219.

Figures 2-3 & 2-4 shows the AML Exit Plans - including exits and exit stair locations, path of egress and fire ratings.

Building 219 – Metrology Lab West Facility Exits The building is located North of Building 217 and provides one level for occupancy below ground level. This building is completely underground.

The building has four exits.

• Three exits discharge occupants vertically through stairs no. 2, 3, and 4. Stair No. 2 is located at the Southeast corner of the building, Stair No. 3 is located at the Southwest corner of the building, and Stair No. 4 is located at the Northwest corner of the building.

• One exit discharges occupants horizontally through a pair of fire-rated doors located at the Southeast end of the building and opens directly into Building 218.

Figures 2-3 & 2-4 shows the AML Exit Plans - including exits and exit stair locations, path of egress and fire ratings.

Fire Ratings In order to slow the spread of fire within a building, codes require the use of construction assemblies that have been tested to assure certain levels of fire resistance. These levels are referred to as fire ratings. The fire ratings of the AML are shown in Figures 2-8 thru 2-10.

It is essential that any modifications to laboratories requiring penetrations through walls or floors be accomplished with the assistance of the Plant Division to assure that required fire-ratings are maintained. See Section VIII: Building Operations for additional information on renovations.

Fig. 2-1

AML

Facility Overview

Building 217

Instrument West

Building 216

Instrument EastBu ild ing

Cle an roo m

Building 219Building 219

Metrology WestMetrology West

Building 218Building 218

Metrology EastMetrology East

AML Facility Boundary

Building 220Building 220

Building 221Building 221

Bldg. 217

Instrument West

Bldg. 219

Metrology West

Bldg. 215

Cleanroom

Bldg. 216

Instrument East

Bldg. 218

Metrology East

Fig. 2-2

AML

Facility Cross-section

Fig. 2-3

AML

Buildings 218 & 219 Lower Level Exit Plan

CORRIDOR

STAIR

NO.2

Fig. 2-4 AML Buildings 215 Basement, 218 & 219 Basement Level (Distribution)

Fig. 2-5

215, 216 & 217 Level One

Fig. 2-6

215, 216 & 217 Distribution / Mezzanine Level

Fig. 2-7

215, 216 & 217 Penthouse

Fig. 2-8

218 & 219 Lower Level Occupancy Summary Plan

Fig. 2-9

215 Basement, 218 & 219 Basement Level (Distribution)

Fig. 2-10

215, 216 & 217 Level One

Refrigerant Monitoring

Refrigerant Monitoring A Refrigerant Monitoring system is used in the Chiller Room located at the South end on Building 215, Level 1. The system monitors the level of refrigerant in the air and activates the alarm if the refrigerant limit is met or exceeds a predetermined limit. An amber colored alarm light is mounted above each door entrance of the Chiller Room. A self-contained breathing apparatus (SCBA) is also located next to the door entrance of the Chiller Room (CR3011).

Safety Station (Not Established Yet, March 2004) Room [Designated Room Number] has been designated as a Safety Station. This room contains equipment and supplies (ie. first aid kit, stretcher, Oxygen bottle, spill kit) that could be helpful in some medical or chemical spill emergencies.

The NIST Safety Office will control the inventory contained in the space, which may be different from the specific safety items listed above.

Lab Safety Procedures Lab Safety Procedures are defined in the NIST publication “Lab Safety Manual”. That document augments safety policy set forth in the NIST Administrative Manual, with the goal of making the workplace safe and keeping it safe. The Lab Safety Manual includes the following topics:

• General Lab Safety;

• Hazards Review and Risk Assessment;

• Personal Protection;

• Chemical Safety;

• Electrical Safety;

• Mechanical Safety;

• Ionizing Radiation Safety;

• Non-Ionizing Radiation Safety;

• Biosafety; and

• Cryosafety.

NIST Open Flame Policy On October 24, 1997, the NIST Safety Office issued safety requirements governing the use of Bunsen/Meeker burners as open-flame heating devices. The requirements will be incorporated into NIST’s internal safety reference documents. AML users must adhere to these requirements. If you have not received a copy of these requirements, contact your Division Safety Officer or the NIST Safety Office.

Laser Safety Policies governing the safe use of lasers are set forth in two NIST publications: NIST Health and Safety Instruction (HSI) #13 “Laser Safety” and the “Laboratory Safety Manual.”

For questions on Laser Safety contact NIST’s Health Physics Office.

Safety Shower / Eyewash Stations

Safety Shower / Eyewash Stations Safety Shower and Eyewash Stations are provided in the service galleys for emergency use. Emergency Safety Showers and Eyewash Stations are also located along the East-West corridors. See Figures 2-14 through 2-15 in Section II: Building and Personnel Safety for a diagram of Safety Shower locations.

• NIST safety procedures must be followed when using the safety shower. Refer to the NIST “Laboratory Safety Manual.”

• Safety showers must only be used in the event of an emergency.

• All emergencies must be reported to the appropriate NIST personnel through the Emergency Console Operator and contact with the appropriate NIST emergency personnel. (Safety, Fire, Security)

• Refer to NIST emergency procedures standards dealing with life safety and chemical spills. Refer to the NIST “Laboratory Safety Manual”

Figure 2-11 shows the unit as installed in the corridor of the AML. To activate the safety shower, pull down on the triangular pull rod. To activate the eyewash, squeeze “handle” valve actuator located on eyewash.

Fig. 2-11 Safety Shower and Eyewash

Eyewash / Drench Hose Units

Eyewash / Drench Hose Units The combination eyewash and drench hose unit provided at most laboratory sinks meets the requirements of ANSI Standard Z358.1 for both an eyewash and a drench hose. The units that have been installed are manufactured by WaterSaver Faucet Co. and the following features address ANSI Z358.1 requirements:

• Outlet Heads are protected from airborne contaminants.

• Controlled, low velocity flow completely rinses eyes and is not injurious to the user.

• Valve actuator is easily located and operated by the user.

• The units deliver at least 3.0 gallons [11.36 Liters] of water per minute for 15 minutes.

• Units are identified with a highly visible sign.

Figure 2-12 shows the unit as installed at a lab sink in the AML Facility.

To activate the eyewash, squeeze the squeeze handle. A locking clip will keep the squeeze handle depressed to allow hands-free operation.

To use the unit as a drench hose, lift and pull the unit toward you to extend the hose. Then squeeze the squeeze handle to start the water flow.

The eyewash/drench hose units in laboratories are to be tested at least weekly by the lab occupant.

Fig. 2-12 Eyewash / Drench Hose Unit

Pull Stations Pull stations are to be used in the event of a fire or other emergency as instructed in the NIST publications “Occupant Emergency Plan, dated March 2000” and “Laboratory Safety Manual”.

Pull stations are provided at the locations shown in Safety Plans, Figures 2-14 through 2-15. Figure 2-13 shows an image of a pull station as installed in the AML.

Figures 2-14 through 2-15 diagram the locations of Pull Stations and Safety Showers on each floor in addition to Fire Alarm Control Panel, Fire Alarm Annunciator Panel and Gas Detection Control Panel locations.

Fig. 2-13 Pull Station

Fig. 2-14 AML Lower Level Safety Plan

Fig. 2-15 AML Level One Safety Plan

Section III

Chemical Storage & Handling

Section III:

Chemical Storage and Handling General Requirements

Maximum Allowable Quantities

Receiving Chemical and Gas Deliveries

Chemical Storage and Distribution

Hazardous Gas Storage and Distribution

Cryogen Storage and Distribution

Toxic Gas Monitoring

General Requirements The Advanced Measurement Laboratory must be operated in a safe manner according to general practices, NIST Standards, and Federal Codes. The NIST “Laboratory Safety Manual” contains instructions for the safe storage and handling of chemicals and gases. This section contains additional protocol that is specific to the AML facility.

The AML Facility is divided in two occupancies or zones to handle different amounts and types of chemicals and hazardous gases. These zones are:

• The Basement Level and Level 1 of the Cleanroom wing (Building 215), classified as a Hazardous Production Materials (HPM) facility.

• The rest of the AML Facility (both Instrumentation and Metrology Laboratory wings), classified as a Group B (Business) occupancy.

The chemicals and hazardous gases intended for use in one zone cannot be transported, used, or stored in the other zone. All chemicals and hazardous gases must enter or exit AML Facility through the loading dock located at the Basement Level of Building 215.

Section III – Chemical Storage and Handling

The following general rules apply to handling of chemicals and hazardous gases:

• The chemical safety cabinets are to be used to store the chemicals that are used on a daily basis in the laboratories.

• Only chemicals to be used for that day should be kept outside of the laboratory chemical safety cabinets.

• All NIST procedures for removing chemicals from their designated area must be followed.

• Hazardous chemicals are to be stored in the designated chemical safety cabinets in the laboratories.

• Hazardous gases are to be stored only in approved gas cabinets.

• Incompatible chemicals may not be stored in proximity to one another.

• Additional chemical safety cabinets can not be added to laboratories or service galleys without review and approval by the NIST Hazards Review Committee. The role of the Hazards Review Committee (HRC) is described in the Laboratory Safety Manual. You may contact current NIST HRC representatives through the NIST Laboratory Office.

• Fume hoods are not intended for chemical storage, nor as an adjunct to chemical storage. Hazardous Waste Cans are permitted to be retained in fume hoods as a safety measure. All storage of hazardous waste is subject to the review and approval of the NIST Safety Office.

• No storage of chemicals is to occur in office spaces. If packages of chemicals are received at the Group Office, they must be taken to the laboratories immediately.

• Hazardous gas cylinders (containing toxic, flammable, or pyrophoric gases) not in use may not be stored in service chases or the Basement Level outside of approved cabinets.

Refer to the NIST “Laboratory Safety Manual” for general chemical safety rules and procedures including Special Materials Handling Problems, Disposal of Hazardous Waste and Chemical Spills and Cleanup.

Definitions The following definitions are used throughout this section of the AML Facility Guidelines.

• HPM: Hazardous Production Materials. A solid, liquid, or gas that has a degree of hazard rating in health, flammability, or reactivity of Class 3 or 4 as ranked by NFPA 704 which is used in research, General Requirements laboratory, or production processes which have as their end produc t, materials which are not hazardous;

• Flammable Liquid. Any liquid with a flash point below 100 °F (38 °C) and with a vapor pressure not exceeding 40 psia (276 kPa) at 100 °F (38 °C), further defined as follows:

− Class IA – flash point below 73 °F (23°C), boiling point below 100 °F (38 °C);

− Class IB – flash point below 73 °F (23°C), boiling point at or above 100 °F (38 °C);

− Class IC – flash point at or above 73 °F (23 °C) and below 100 °F (38 °C);

• Combustible Liquid. Any liquid with a flash point at or above 100 °F (38 °C), further defined as follows:

− Class II – flash point at or above 100 °F (38 °C) and below 140 °F (60 °C);

− Class IIIA – flash point at or above 140 °F (60 °C) and below 200 °F (93 °C);

− Class IIIB – flash point at or above 200 °F (93 °C);

• Organic Peroxide. An organic compound that contains the bivalent double-bonded oxygen structure and which is considered to be a structural derivative of hydrogen peroxide where one or both hydrogen atoms have been replaced by an organic radical;

• Oxidizer. A material that is capable of enhancing the combustion of other materials, generally by yielding oxygen;

• Flammable Gas. A gas that is either a mixture of 13 percent or less by volume with air or with a flammable range wider than 12 percent;

• Pyrophoric Gas: A gas that spontaneously ignites in air at or below a temperature of 130 °F (54 °C);

• Toxic Gas: A gas that has a median lethal concentration (LC50) in air of more than 200 parts per million (ppm) but not more than 2,000 ppm. A highly toxic gas has a median lethal concentration in air of 200 ppm(v) in air or less;

• Restrictive Flow Orifice (RFO): A device used in hazardous compressed gas cylinders to restrict gas flow;

• Control Area: Spaces within a building that are enclosed by exterior walls, fire walls, fire separation assemblies, and roofs (or a combination thereof) where quantities of hazardous materials not exceeding exempt amounts are stored, handled, dispensed, or used;

• Open System: Use of a solid or liquid hazardous material in a vessel or system that is continuously open to the atmosphere during normal operation, such as dispensing from or into open containers or beakers;

• Closed System: Use of hazardous materials in a vessel that remains closed during normal operation, and all uses of hazardous compressed gases.

Maximum Allowable Quantities

Introduction The maximum allowable quantities of hazardous chemicals or gases that can be used and/or stored in the AML Facility are limited by the code requirements of BOCA (Building Officials and Code Administrators International) Building and Fire Prevention Codes. Keep in mind that there are two designated occupancy types as described in the General Requirements paragraphs at the beginning of this section.

The information below is intended to give AML laboratory users a general understanding of these restrictions. For a more detailed and comprehensive description, see the NIST AML Fire Protection Engineering Analysis and the related National Fire Protection Association (NFPA) and BOCA documents. Refer also to the AML Facility Building Code Analysis for a detailed description of construction type and occupancy separation.

For purposes of calculating maximum allowable quantities of hazardous materials, the AML Facility is considered one building (consisting of the five laboratory blocks) of one type of construction, housing several occupancies.

• The Metrology and Instrument lab blocks are designed under the classification of Business Use Group B with the exception of conference rooms with populations of greater than 50.

• The Cleanroom is subject to the special provisions of the “HPM” Special Use occupancy. (See Figures 3-1 and 3-2 for defining the HPM zone).

Maximum Allowable Quantities

Limitations on HPMs – Cleanroom Facility Building 215 The total amount of HPM permitted in the Cleanroom Facility must not exceed the quantities listed in Table 416.5(1) or the densities in Table 416.5(2) of the 1999 edition of the BOCA National Building Code, whichever is the larger amount (exception: the maximum amount of flammable, toxic, and poisonous gases combined is limited to the “maximum quantity” basis amount of 9,000 cubic feet at STP, regardless of HPM zone area). A reproduction of these tables is shown below in Tables 3-1 and 3-2.

Fig. 3-1

HPM

Basement Level Boundary Area

Fig. 3-2 HPM Level One Boundary

Material Maximum Quantity

Flammable liquids Class I-A 90 gallons Class I-B 180 gallons Class I-C 270 gallons

Combination flammable liquids containing not more than the exempt amounts of Class I-A, I-B, or I-C flammable liquids. 360 gallons

Combustible liquids Class II 360 gallons Class III-A 750 gallons

Flammable gases 9,000 cubic feet at one Atmosphere of pressure at 70°F

Liquefied flammable gases 180 gallons Flammable Solids 1,500 pounds Corrosive liquids 500 gallons Oxidizing materials - gases 18,000 cubic feet Oxidizing material – liquids 150 gallons Oxidizing material – solids 1,500 pounds Organic peroxides 30 pounds Highly toxic material and poisonous gas Included in the aggregate for flammables as noted above

Note: 1 gallon = 3.8L; 1 cubic foot = 0.028m3; 1 pound = 0.454 kg;

degree C = [(degrees F)-32]/1.8

State Units d Flammable Oxidizer Corrosive

Solid Pounds per square foot 0.001 0.003 0.003 Liquid Gallons per square foot 0.04b 0.03 0.08 Gas Cubic feet per square foot 1.250 1.250 3.000

Note a: HPM within piping shall not be included in the calculated quantities.

Note b: The maximum permitted quantities of flammable and combustible liquids shall not exceed the following quantities:

Class (I-A) + (I-B) + (I-C) (Combination Flammable Liquids)................. = 0.025 however Class I-A shall not exceed................................................ = 0.0025 Class II.................................................................................................. = 0.01 Class III-A.............................................................................................. = 0.02 Note c: Highly toxic materials and poisonous gases shall be limited by the maximum quantities specified in Table 416.5 (1) Note d: 1pound per square foot = 4.882 kg/m2; 1 gallon per square foot = 40.6 L/m2; 1 cubic foot per square foot = 0.301 m3/m2

Table 3-1 Table 416.5(1) – Permitted Amounts of HPM in a single fabrication Area – Quantity Basis

Table 3-2 Table 416.5(2) – Permitted Amounts of HPM in a single fabrication Area – Density Basis a,c

For the total HPM zone area in Building 215, these maximum allowable quantities of each material type are as indicated in Table 3-3. The total HPM zone area used for the purpose of calculating maximum amounts on a density basis is 6,013 square meters (64,745 square feet). Note that these amounts represent the total amount of materials in storage and use in the entire facility, including HPM cutoff room, Subfab, chemical storage rooms, and Fab.

Material Unit Maximum

Amount Remark

Flammable Liquids

Class IA Gal 160

Class IB Gal -- Not separately limited, subject to maximum combined amount

Class IC Gal -- Not separately limited, subject to maximum combined amount

Combination Gal 1,600

Combustible Liquids

Class II Gal 650

Class IIIA Gal 1,300

Organic Peroxides Lbs 30

Oxidizing Liquids Gal 1,940

Corrosive Liquids Gal 5,175

Oxidizing Gases Cu Ft 80,900 At STP

Corrosive Gases Cu Ft 194,175 At STP

Flammable Gases Cu Ft 9,000 At STP

Pyrophoric Gases Cu Ft 2,000 At STP (from 2000 IBC)

Toxic and Poisonous Gases Cu Ft 9,000 At STP

Note : STP : standard temperature and pressure

A summary of the quantities of flammable, pyrophoric, toxic, and poisonous gases that are initially planned for the facility is presented in Table 3-4. The total quantity of toxic and poisonous gases in the HPM zone in Building 215 may not exceed 9,000 cubic feet at STP. The total quantity of flammable gases may not exceed 80,900 cubic feet at STP.

Table 3-3 Permitted Amounts of HPM in Bldg. 215

Material Hazard

Sp Vol at STP

(cu ft/lb)

Cylinder Content

(Lbs)

Cu. Ft.

per Cyl at STP

Silane (100%) PY 12.1 4.4 54

Silane 5% in He PY 3.6 60 216

Dichlorosilane PY, P 3.9 10 39

Hydrogen F 192.5 1.34 258

Forming Gas F 209

Subtotal – Flammable/Pyrophoric 776

Ammonia T, C 22.6 5 113

Chlorine T, P 5.4 40 216

Boron Trichloride T, P 3.3 40 132

Subtotal – Toxic/Poisonous 461

Hazard Key:

T Toxic PY Pyrophoric P Poisonous C Corrosive F Flammable

Limitations on HPMs – Instrumentation and Metrology Labs Buildings 216 - 219

The total amount of chemicals permitted in the Instrumentation and Metrology Laboratories (Business Use Group B Occupancy) must not exceed the quantities listed in Table 307.8(1) of the 1999 edition of the BOCA National Building Code. A reproduction of the table is shown in Table 3-5. These quantities include amounts in storage and use.

Each building (216, 217, 218, and 219) is comprised of a single control area, so the maximum allowable quantities indicated in Table 3-5 are permitted in each building. Amounts are adjusted considering that the buildings are fully sprinklered and materials are stored in approved enclosures or safety cans. Note that the amount of material in storage and use cannot exceed the maximum amount allowed for storage.

Table 3-4 Projected HPM Gas Totals in Bldg. 215

Storage Closed Use Open Use

Material Class Liquids (gals)

Gas (cu ft)

Liquids (gals)

Gas (cu ft)

Liquids (gals)

Combustible Liquid II 480 -- 240 -- 60

Combustible Liquid IIIA 1,320 -- 660 -- 160

Combustible Liquid IIIB Not Limited -- Not Limited -- Not Limited

Flammable Gas -- 4,000 a -- 3,000 b --

Flammable Liquid IA 120 -- 60 -- 20

Flammable Liquid IB 240 -- 120 -- 30

Flammable Liquid IC 360 -- 180 -- 40

Combination IA, IB, IC

480 c -- 240 c -- 60 c

Organic Peroxide UD 2 lbs -- 0.25 lb -- 0.25 lb

Organic Peroxide I 20 lbs -- 2 lbs -- 2 lbs

Organic Peroxide II 200 lbs -- 100 lbs -- 20 lbs

Organic Peroxide III 500 lbs -- 250 lbs -- 50 lbs

Oxidizer 4 2 lbs -- 0.25 lb -- 0.25 lb

Oxidizer 3 40 lbs -- 4 lbs -- 4 lbs

Oxidizer 2 1,000 lbs -- 500 lbs -- 100 lbs Oxidizer 1 16,000 lbs -- 8,000 lbs -- 2,000 lbs

Oxidizer - Gas -- 6,000 -- 6,000 --

Pyrophoric - Gas -- 100 a -- 20 --

Unstable 4 2 lbs 20 0.25 lb 4 0.25 lb

Unstable 3 20 lbs 200 2 lbs 40 2 lbs

Unstable 2 200 lbs 1,000 100 lbs 1,000 20 lbs

Water Reactive 3 20 lbs -- 10 lbs -- 2 lbs

Water Reactive 2 200 lbs -- 100 lbs -- 20 lbs

Corrosive 2,000 3,240 a 1,000 3,240 a 200

Highly Toxic 4 lbs 20 2 lbs 20 0.5 lb

Irritant Not Limited 3,240 a Not Limited 3,240 a Not Limited

Toxic 2,000 lbs 3,240 a 1,000 lbs 3,240 a 250 lbs

Notes:

(a) Assumes storage in approved gas cabinet

(b) Closed use only

(c) Cannot include more than exempt amounts of Class IA, IB or IC

Table 3-5 Exempt Amounts of Hazardous Liquids and Gases Per Control Area (per

BOCA

Tables 307.8(1) and (2)

Typical Chemicals and Gases The preceeding four tables indicate allowable quantities of hazardous materials by hazard classification (flammable liquid, organic peroxide, etc). Examples of chemicals and gases in each classification commonly found in facilities similar to AML are indicated in Table 3-6.

Material Class Examples

Flammable Liquids I-A Trichlorosilane, Ethylene Dichloride, Acetaldehyde, Ethyl Chloride, Ethyl Ether (Diethyl Ether), Diethyl Ether (Ethyl Ether), Isoprene, Pentene, Hexane (n-Hexane), Isopropyl Acetate, Isopropyl Alcohol (IPA; 2-Propanol), Methyl Alcohol (Methanol), Methyl Ethyl Ketone (MEK), Methyl(2-)-1Pentene, Piperidine, Toluene

Flammable Liquids I-B Acetone, Benzene, Butyl Alcohol, Cyclohexane, Dichloroethane, Ethyl Alcohol (Ethanol), Ethylbenzene, Ethyldichlorosilane, Hexamethyldisilazane (HMDS)

Flammable Liquids I-C Butanol (1-Butanol), Chlorobenzene, Methyl Isobutyl Ketone (MIBK), Propyl Alcohol, Trichloroethylene (TCE), Xylene

Combustible Liquids II Acetic Acid, Hydrazine, Mineral Spirits, Morpholine, Photo Resist, Propionic Acid

Combustible Liquids III-A Aniline, Dichlorobenzene, Hexanol, Phenol

Organic Peroxides Acetyl Peroxide, Peroxyacetic Acid

Oxidizing Liquids Bromine Trifluoride, Chlorine, Ferric Nitrate Solution, Hydrogen Peroxide, Nitric Acid, Perchloric Acid

Corrosive Liquids Acetic Acid, Ammonium Hydroxide, Bromine, Buffered Oxide Etchant, Hydrochloric Acid, Hydrofluoric Acid, Nitric Acid, Phosphoric Acid, Sodium Hydroxide, Sulfuric Acid, Tetramethylammonium Hydroxide (TMAH)

Water Reactive Liquids 2 Sulfuric Acid, Methyltrichlorosilane

Flammable Gases Hydrogen, Forming Gas, Methane

Pyrophoric Gases Silane, Dichlorosilane, Phosphine, Germane

Toxic Gases Ammonia –Anhydrous , Boron Trichloride, Boron Trifluoride, Carbon Tetrachloride, Chlorine, Chlorine Dioxide, Ethylene Oxide, Hydrogen Fluoride, Hydrogen Sulfide, Methyl Bromide, Silicon Tetrafluoride, Sulfur Tetrafluoride, Nitrogen Trifluoride

Highly Toxic Gases Arsine, Dichlorosilane, Fluorine, Germane, Hydrogen Cyanide, Nitric Oxide, Nitrogen Dioxide, Ozone, Phosphine, Silicon Tetrachloride

Oxidizing Gases Oxygen, Nitrous Oxide

Table 3-6 Typical Chemicals and Gases

Receiving Chemical and Gas Deliveries

Cleanroom Facility (Bldg. 215)

General Requirements

Gas cylinders and chemicals (in quantities generally not exceeding four liters) will be delivered to the AML dock from Building 301 on an as-needed basis, and transported to gas cabinets, gas manifolds, or the Chemical Storage Room in Building 215.

Transport of chemicals to the Cleanroom will follow a segregated path through the Cleanroom basement to a dumbwaiter to be lifted to a distribution room adjacent to the Cleanroom on Level 1.

Pyrophoric, flammable, and toxic gas cylinders are to be stored and dispensed from dedicated gas cabinets in the Basement Level. Inert gases are to be dispensed from gas manifold panels in the Basement Level or in the Cleanroom service chases.

The DOT (Department of Transportation) packaging and Hazard Classification Label, which is used for shipping chemicals, should not be removed until you are ready to place the chemicals in the appropriate storage cabinet.

Loading Dock Area

The Loading Dock is to be used for the purposes of loading and unloading chemicals and gas cylinders from trucks for use in the laboratory. Users must adhere to the following rules:

• There will be a sign posted in the Loading Dock area which will give instructions for making deliveries. Delivery personnel will be instructed to phone the person who ordered the products or to phone the Group Office if that person is unavailable;

• Chemicals delivered to the Loading Dock must be immediately transported to the final place of storage;

• Gas cylinders delivered to the Loading Dock and must be either secured in the appropriate cylinder storage room or moved to the use positions;

• Empty gas cylinders are to be secured in the allotted space in the Loading Dock area for a brief time until they are picked up for proper disposal;

• Following NIST’s standard procedure, place a call to safety officer arranging pick up for empty chemical containers for proper disposal;

Receiving Chemical and Gas Deliveries

• Partially full chemical containers to be picked up should be kept in the designated room for that type of chemical.

• General storage is not permitted on the Loading Dock;

• Storage of full gas cylinders on the Loading Dock or Receiving Area is not permitted;

• Smoking, eating and drinking are not permitted on the Loading Dock.

Instrument and Metrology Labs (Bldgs. 216 –219) Chemicals will be delivered, in quantities generally not exceeding four liters, to the AML dock from Building 301 on an as-needed basis. From the dock, solvents going to the Instrument Labs and Metrology Labs are to be delivered by designated rubber tire carts and stored directly in OSHA approved flammable storage cabinets adjacent to fume hoods. Corrosives are to be similarly transported and stored in ventilated cabinets below chemical fume hoods.

• The largest quantity of chemicals allowed for delivery to the AML Facility is four liters.

• Small quantities of chemicals can be received at the lab user’s Mailstop, provided they are taken directly and stored in the appropriate container. Division Chiefs or Division Safety Officers may define the size and quantity of items permitted to be delivered to the lab user’s Mailstop.

Don’ts

Fig. 3-3 Loading Dock Area

Loading Dock

Receiving Area

• Pyrophoric gases are not allowed at any time within the Instrument and Metrology laboratories;

• Cryogenic tanks (dewars) and gas cylinders should be transported from the Loading Dock to the Instrument and Metrology laboratories using the Service Elevators and the Service Galleys. Do not use the Passenger Elevators to transport cryogenic tanks and gas cylinders.

Chemical Storage and Distribution

Cleanroom Facility (Bldg. 215) Chemicals delivered to the Cleanroom Facility are to be immediately transported from the Loading Dock to the Chemical Storage Room (Room CR3013) for staging or temporary storage prior to movement to the end-use location in the Cleanroom. This is the designated area for storage of chemicals that will be used within the Cleanroom Facility. The types of chemicals to be stored in this room include flammable liquids, acids, bases and toxic chemicals.

To transport the chemicals to this room, chemicals must be delivered through the Loading Dock, and then transported into the Cleanroom Facility from the Basement Level via the chemical dumbwaiter located in room CR2013. Chemicals will be lifted to room CR3014 located directly above on Level One, then moved to the appropriate storage cabinet in CR3013 or in the Cleanroom fume hood or service chase.

CR-3013

CR-3014

Bldg.

Lobby

Don’ts

Fig. 3-4 Chemical Dumbwaiter

Chemical Storage and Distribution

Users must adhere to the following rules:

• The chemicals are to be separated and contained in approved chemical storage cabinets;

• The storage cabinets are used to limit the quantities of liquids stored in one place and to separate chemical incompatibilities;

• The chemical storage cabinets are to be kept locked for safety purposes and control of chemical use and distribution;

• Administrative procedures will be developed by EEEL governing the allocation of chemical storage cabinets and establishing procedures for keys;

• Empty or partially used chemical containers are to be stored in the Chemical Storage Room until they are picked up for proper disposal.

• The Chemical Storage Room is not to be used to store compressed gases or flammable gases;

• Don’t store items outside of cabinets;

• This room is not to be used for general storage purposes;

• Food and drink are not permitted in the Chemical Storage Room;

• The Chemical Storage Room is electrically classified as Class 1, Division 2. No equipment shall be permitted in this room without prior authorization of NIST;

• If packages of chemicals are received at the Group Office, they need to be taken to the laboratories immediately;

• No storage of chemicals is to occur outside the defined HPM envelope (see Figures 3-1 and 3-2).

• Safety Office personnel.

Instrument and Metrology Labs (Bldgs. 216 –219) There is no central Chemical Room serving the Instrument and Metrology laboratories. After transport from the Bldg. 215 Loading Dock, chemicals must be stored in the appropriate chemical cabinets located in the laboratories or approved storage cabinets in the service galley.

The maximum allowable quantity of hazardous chemicals allowed in any one building at one time, either in storage or use, cannot exceed the amounts listed in Table 3-5 of this section.

Hazardous Waste Removal Hazardous waste chemicals are to be stored in a hazardous waste can inside in a chemical fume hood. Hazardous waste chemicals are collected by the NIST Environmental Compliance Group. To request a chemical pick up, contact the NIST Environmental compliance Group through the NIST internal web page. Allow 3 to 5 days from time of request until pick up will occur.

Storage of hazardous waste containers in any area is subject to the review and approval of the NIST Safety Office.

For additional instructions, refer to NIST Health and Safety Instruction (HSI) #16 “Hazardous Chemical Waste Disposal” and the NIST “Laboratory Safety Manual”.

Hazardous Gas Storage and Distribution

Cleanroom Facility (Bldg. 215) Hazardous gases delivered to the Cleanroom Facility are to be immediately transported from the Loading Dock to the HPM cutoff room (in the case of pyrophoric gases) or the designated gas cabinets in the Subfab (Basement Level) in the case of toxic or flammable gases. The HPM Cutoff Room is indicated in Figure 3-5.

The HPM Cutoff Room (Room CR2008) is to be used to store the following pyrophoric gases listed in Table 3-7.

Fig. 3-5 HPM Cutoff Room

Loading Dock

CR-2028

Gas Storage Room

Hazardous Gas Storage and Distribution

Cabinet

No.

Material Formula No.

Cylinders Feeds

VMB

HH-1 Silane (100%) SiH4 1 n/a

HH-3 Dichlorosilane SiH2Cl2 1 n/a

HH-9 Silane/Helium Mix (5%)

SiH4/He 1 n/a

One additional gas cabinet can be installed in the HPM Cutoff Room. The number and size of additional gas cylinders that can be located in this room is subject to the limitation on total quantity of flammable, pyrophoric, toxic, and…