Addendum and Acknowledgement Doc.doc
DOC document 2 MB Posted
- Attached to
- Sputtering Tool System
- Solicitation number
- 5-S176-Q-00760-00
- Issued by
-
Department of Energy Office of Science
About this file
This document is an Addendum to a Request for Quotation (RFQ) from Argonne National Laboratory for a Sputtering Tool System. The solicitation seeks a sophisticated sputtering system capable of handling multiple substrate sizes from 150mm to wafer pieces, with specific technical requirements including a 3" circular sputter source, four magnetrons, power supplies operating in DC and pulsed DC (0-100kHz), and a substrate heater capable of reaching 800°C. Key technical clarifications in the addendum include: no CSA SPE-1000 certification requirement, confirmation that each magnetron needs a physical disconnect method, CE marking is not mandatory, and the system should support co-sputtering with a 4-way switch allowing independent power supply configurations.
The solicitation is issued by the Department of Energy Office of Science, with proposals due by 09/26/2023 at 5:00 CDT to Molly Hunter (mollyhunter@anl.gov). Submission requirements include Reps and Certs, ANL-70B form, Request for Quotation form, and documentation demonstrating technical compliance. Evaluation will prioritize technical acceptability and country of origin before considering pricing. Potential vendors must submit a signed copy of this addendum with their proposal and be prepared to meet the detailed technical specifications outlined in the document.
View the file
Other files
| File | Type | Posted |
|---|---|---|
| ANL-70 Request for Quotation.doc | DOC document | |
| Acceptance Criteria_9.18.2025.pdf | ||
| G5-255002 Instructions for Offerors.docx | DOCX document | |
| Appendix A-71COM-13-FEB-2023.PDF | ||
| Statement of Work_9.18.25.pdf | ||
| ANL-70B Reps and Certs Long-14-FEB-2025.PDF |
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Text version
MOLLY HUNTER
Procurement Specialist 3 Office of the Chief Financial Officer
Procurement Department
Argonne National Laboratory
9700 South Cass Avenue, Bldg. 201
Lemont, IL 60439
(630)252-3094 mollyhunter@anl.gov
09/23/2025
TO ALL OFFERORS:
Subject:
Request for 5-S176-Q-00760-00 No.
Addendum No. 001 Attached herewith for your information and use in preparing your proposal for subject project is one (1) copy of Addendum No. 001.
Kindly acknowledge receipt of this Addendum by signing and returning one (1) copy of this letter.
Please email receipt to Procurement at mollyhunter@anl.gov .
Sincerely, MOLLY HUNTER
Procurement Specialist 3 Procurement Department
Receipt Acknowledged:
Company:
By:
cc:
File
CF
Addendum No.
TO
REQUEST FOR 5-S176-Q-00760-00
FOR
Argonne National Laboratory
BLDG. 201 OCF
9700 S. Cass Ave.
Lemont, IL 60439
09/23/2025 This addendum is being issued to modify the subject REQUEST FOR Quotation (RFQ) 5-S176-Q-00760-00 as follows:
Response to questions as follows:
1. Request for Extension denied.
2. We're assuming this system is for installation at ANL. Is CSA SPE-1000 certification truly required considering it is a Canadian code?
No, it is not required.
3. Could you please explain the required titled "disconnect for targets"? Do you mean each magnetron requires a physical method to allow it to be disconnected from the power supply prior to changing of targets?
Yes. Each magnetron needs to be physically disconnected prior to changing target. We prefer the power supplies cord that can be physically unplugged or some other type of breaker.
4. Is CE marking a hard requirement considering such system is not being sold in the EU/EC?
No. Not a hard requirement.
5. Sputter source is identified as a 3" circular sputter source. Are you looking for a specific brand source here, or can we integrate our own? We ask because the description "Mag II Circular" seems to reference a specific brand/model.
The source needs to be able to handle a 3" round target 1/4" thick without any modification.
6. The frequency range for the pulsed DC power supply does not seem to match a commercially available model. We've been integrated AE power supplies for decades. Their spec is 5-350kHz.
It must be capable of running in DC and well as pulsed DC 0-100Khz
7. Since the system is configured with 4 power supplies to 4 magnetrons, please help define the co-sputtering requirement so we can scope out the necessary switch. Is the intent to run up to 4 magnetrons in either RF or Pulsed DC?
We are looking for a 4-way switch that each source can be connected to any of the 4 power supplies. Co-sputter of 2 sources from their own independent power supply. Ex. Both DC. both RF, or one DC and one RF.
8. Is the 800C specified for the substrate heating the temperature of the heater or desired temperature of the substrate? If the latter, much will depend on the substrate itself, e.g. possible with Si but not with transparent materials. Being a user facility, the substrate heater is the only requirement as we use different substrates. The heater must be able to reach 800C.
U. S. Department of Energy laboratory managed by UChicago Argonne, LLC
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