CHIPS R&D Custom Diffractometry and Fourier Ptychography Endstation

Closed Solicitation Posted Jun 15, 2026

Solicitation number: 1333ND26QNB030236
Agency: National Institute of Standards and Technology Department of Commerce
Responses due: Sep 9, 2026, 11:00 AM ET
Set-aside: No set-aside

Opportunity facts

NAICS code: 334519 Other Measuring and Controlling Device Manufacturing
PSC: 6640 Laboratory Equipment And Supplies
Place of performance: Gaithersburg, Maryland 20899, United States
Points of contact: Tracy Retterer tracy.retterer@nist.gov (301) 575-8448

Donald Collie donald.collie@nist.gov (301) 975-6458

Notice details come from SAM.gov. Updated Aug 28, 2026.

About this opportunity

Written by GovTribe AI · Aug 28, 2026

The National Institute of Standards and Technology is soliciting firm-fixed-price quotations for a custom diffractometry and Fourier ptychography endstation to support the CHIPS R&D Metrology Program, with proposals due September 9, 2026. The procurement is unrestricted competition; no set-aside applies.

Place of performance is Gaithersburg, Maryland. The primary deliverable (CLIN 0001) is a complete EUV metrology endstation comprising a stainless steel vacuum chamber with removable aluminum top flange capable of achieving 10−6 Torr base pressure, a camera manipulation stage (CMS) with motorized 4 degrees of freedom to position an existing PI-MTE3 EUV camera, a wafer manipulation stage (WMS) with motorized X-Y axes and minimum 2 degrees of freedom for positioning 300mm silicon wafers with 3-inch travel range, and an adjustable base. Interior chamber dimensions are 40 inches wide by 28 inches deep by 23.5 inches minimum height. Five optional CLINs (0002–0006) provide closed-loop camera feedback, electrostatic wafer chuck, Z-axis and rotational movement for the wafer stage, extended wafer X-Y travel, and integration of a new in-vacuum EUV camera. CLIN 0007 covers optional on-site installation and training services with performance through September 30, 2027.

Quotations must be submitted electronically in three volumes: Technical Quotation, Price Quotation (with firm-fixed prices valid 90 days, FOB Destination, and identified tariffs for foreign-manufactured items), and Terms and Conditions acceptance or exceptions. Award goes to the lowest-priced, technically acceptable offeror. All items must be new; prototypes, demonstration models, used, refurbished, or gray-market equipment are ineligible. Delivery is required within 120 days of receipt of order. Payment is 100 percent upon installation, acceptance, and successful testing. A minimum 1-year warranty is required. NAICS code 334519, PSC 6640, small business size standard 600 employees. Contact: tracy.retterer@nist.gov and Donald.collie@nist.gov. Amendment 0003 extended the deadline to September 9, 2026, and added NIST Questions and Answers clarification.

Notice text

5 versions

As posted on SAM.gov.

Update #5 · Latest · Aug 28, 2026

Amendment 0003: The purpose of this amendment is to provide responses to industry submitted questions and extend the solicitation response date to September 9, 2026. See NIST Questions and Answers and updated SF144 for details.

Amendment 0002: Update the Statement of Work based on reuqirement changes, add a SF1449 document to replace exisitng soliciation document and procie an updated vacuum chamber component schematic.

Amendment 0001: Extend response date to July 13, 2026.

Added vacuum chamber component.pdf attachment.