Updated basic schematics for the Endstation.pdf
PDF 345 KB Posted
- Attached to
- CHIPS R&D Custom Diffractometry and Fourier Ptychography Endstation Federal contract opportunity
- Solicitation number
- 1333ND26QNB030236
About this file
This document is a contract requirements summary for a Custom Diffractometry and Fourier Ptychography Endstation with multiple optional upgrades.
The base contract (CLIN 0001) requires design and manufacture of a specialized laboratory endstation containing four primary components: a vacuum chamber, a wafer manipulation stage (WMS) with motorized 2-degree-of-freedom (DOF) control on X and Y axes, a camera manipulation stage (CMS) with motorized 4-DOF control on Z, Y, and rotational axes plus manual X-axis control, and an adjustable base. The system is designed to accommodate a NIST-supplied 300mm wafer and features specified dimensions of 40 inches wide by 28 inches deep by 24 inches high. Five optional upgrades are available: CLIN 0002 adds closed-loop feedback to the camera rotation axis (θ_cam); CLIN 0003 replaces the gravity-held metal plate with an electrostatic wafer chuck; CLIN 0004 adds Z-axis and rotational (θ) movement capability to the wafer stage while adjusting camera system height; CLIN 0005 expands the XY motion range of the wafer manipulation stage; and CLIN 0006 integrates an EUV camera into the endstation. For options CLIN 0002, 0004, 0005, and 0006, vendors must indicate the net cost increase or decrease including CAD drafting, materials, manufacture, and testing. Complete specifications for all CLINs are contained in the accompanying Statement of Work (SOW).
View the file
Other files for this federal contract opportunity
| File | Type | Posted |
|---|---|---|
| 1333ND26QNB030236updated.pdf | ||
| NIST Questions and Answers.docx | DOCX document | |
| 1333ND26QNB030236.pdf | ||
| Basic schematics for the vacuum chamber.pdf | ||
| Attachment 2- Applicable Provisions and Clauses.docx | DOCX document | |
| Solicitation_1333ND26QNB680229.docx | DOCX document | |
| Statement of Work.docx | DOCX document |
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Text version
CLIN 0001:
Custom Diffractometry and Fourier Ptychography Endstation
(summary)
1) Vacuum chamber
2) Wafer manipulation stage (WMS) metal plate to rest wafer upon (green)
Motorized stage (purple) with 2 DOF, axes : Xwaf and Ywaf
3) Camera manipulation stage (CMS) Motorized stage (blue) with 4 DOF, axes : Zcam, Ycam and cam.
with Manual stage with Xcam
4) Adjustable Base (dark red)
Full specifications in SOW NIST-supplied 300 mm wafer in Yellow.
Adjustable base
Xwaf
24”
Ycam
Ywaf
Xwaf
28”
Top-down view
Z
X y
X
Xcam
40”
Side view
Xwaf
OPTION CLIN 0002:
Camera Manipulation Stages Upgrade (CMS Upgrade)
CMS Upgrade shall be comprised of the following modification to the specifications of CLIN0001: (summary)
1) Ensure closed loop feedback on cam
Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.
Full specifications in SOW
Adjustable base
Xwaf
24”
Ycam
Ywaf
Xwaf
28”
Top-down view
Z
X y
X
Xcam
40”
Side view
Xwaf
Closed loop feedback
OPTION CLIN 0003:
Wafer Manipulation Stages Chuck upgrade (WMS Chuck)
Xcam
24”
28”
Xwaf
Top-down view
Z
X y
X
40”
Side view
Ycam
Ywaf
Xwaf y
Wafer Manipulation Stages Chuck
Upgrade shall be comprised of the following modifications to the specifications of CLIN0001: (summary)
1) Replace the metal gravity-held sample plate with an electrostatic wafer chuck (orange).
Full specifications in SOW
Adjustable base
Zwaf waf
Xwaf
24”
Xwaf
Z
X
Side view
OPTION CLIN 0004:
Wafer Manipulation Stages ZR Axes Upgrade (WMS ZR upgrade)
Xcam
28”
Top-down view
X y
40”
Ycam
Ywaf
Xwaf y
Wafer Manipulation Stages ZR Axes
Upgrade shall be comprised of the following modifications to the specifications of CLIN0001: (summary)
1) Inclusion of new axis Zwaf (red)
2) Inclusion of new axis waf (red)
3) Ensure height of camera manipulation system is adjusted (magenta).
Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.
Adjustable base
OPTION CLIN 0005:
Wafer Manipulation Stages XY Axes Upgrade (WMS XY upgrade)
Adjustable base
Xwaf
24”
Ycam
Ywaf
Xwaf
28”
Top-down view
Z
X y
X
Xcam
40”
Side view
Xwaf
Expanded Xwaf, Ywaf range
Wafer Manipulation Stages XY Axes
Upgrade shall be comprised of the following modifications to the specifications of CLIN0001: (summary)
1) Full expansion of Ywaf range (purple)
2) Limited expansion of Xwaf range (purple)
Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.
OPTION CLIN 0006:
Integrate New EUV Camera into Endstation (EUV Camera Upgrade)
Adjustable base
Xwaf
24”
Ycam
Ywaf
Xwaf
28”
Top-down view
Z
X y
X
Xcam
40”
Side view
Xwaf
Expanded Xwaf, Ywaf range
The “EUV Camera Upgrade” shall amend
CLIN 0001 to add the following: (summary)
1) EUV camera (burnt orange)
Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.
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File details come from the government source that posted it. Updated .