NIST Questions and Answers.docx

NIST Questions and Answers Question 1. The Schedule (RFQ page 3) and the Statement of Work identify eight line items: CLIN 0001 (base endstation); optional CLINs 0002 through 0007 (CMS closed-loop θcam; WMS electrostatic chuck; WMS ZR axes; WMS XY axes; EUV camera; installation and training); and CLIN 0008 (shipping). Instructions to Offerors paragraph (V) (RFQ page 16) instead directs offerors to price four line items: CLIN 0001 (endstation), CLIN 0002 (optional installation and training), CLIN 0003 (shipping), and CLIN 0004 (other transportation-related charges, NTE). Question: Which CLIN structure governs Volume II pricing? If both apply, please provide a mapping so that SOW optional CLINs 0002–0007 are priced as separately exercisable options and so that shipping and any tariff/NTE transportation charges are identified.

NIST Answer: The structure on page 3 is correct. The Instructions to offerors section has been revised to indicate to use the page 3 CLIN structure.

Question 2. SOW Section II, Delivery Terms, requires FOB Destination delivery not later than 120 days after receipt of order. The Schedule of Deliverables requires: (1) initial design drawings two months after receipt of offer; (2) final design drawings one month after Government acceptance of the initial design; and (3) the custom endstation ten months after acceptance of the final design drawings (approximately thirteen months). Question: Which delivery schedule governs CLIN 0001 hardware? Specifically, is the 120-day ARO term superseded by the Schedule of Deliverables, and is hardware delivery measured from award, from acceptance of final design drawings, or from another date?

NIST Answer: The delivery date of 120 days is the final delivery of the product described in CLN 0001. The schedule of deliverables breaks out all the deliverables that will happen for the acquisition during that time.

Question 3. If CLIN 0007 is not exercised at award, what is the payment trigger for CLIN 0001 (and any other exercised CLINs)? May CLIN 0001 be invoiced upon delivery and Government acceptance if installation is not exercised?

NIST Answer: If not exercised at award then the payment trigger would be after acceptance of the fully delivered system.

Question 4. Will the Government consider a milestone payment schedule submitted with the quotation (for example, after CAD approval, factory test, delivery, and acceptance)?

NIST Answer: Yes, payment schedules will be considered. In particular any payment schedule that aligns with the deliverable schedule would be acceptable.

Question 5. Please confirm that the two-week installation clock runs from delivery of the endstation, not from the date CLIN 0007 is exercised. In particular: if 0007 is exercised at award, or otherwise before the hardware exists or has been delivered, on-site performance is not required until after delivery.

NIST Answer: Installation is within 2 weeks of delivery of the endstation if exercised at time of award. No onsite performance is required until after delivery.

Question 6. If CLIN 0007 is exercised after delivery (so that “two weeks after delivery” has already started or passed), when does the two-week period begin, and what advance notice will the contractor receive before on-site work must start? Please confirm that 0007 is not a same-day or continuous on-site standby obligation.

NIST Answer: If CLIN 0007 is exercised after award, it is the intention of the Government that this would be exercised before delivery. If not exercised before delivery, installation would be performed within 2 weeks of exercise of the option period.

Question 7. SOW Section III, Minimum Requirements, states that all items must be new; that used or remanufactured equipment will not be considered; that experimental, prototype, or custom items will not be considered; and that gray-market components are not acceptable. Question: Please confirm that custom design and fabrication of the endstation and its subsystems in accordance with the SOW is acceptable, and that the prohibition applies to used, remanufactured, gray-market, experimental, or prototype items that are not built to the SOW.

NIST Answer: I can confirm that custom design and fabrication of the endstation and its subsystems in accordance with the SOW is acceptable, and that the prohibition ONLY applies to used, remanufactured, gray-market, experimental, or prototype items that are not built to the SOW.

Question 8. Option CLIN 0006 Please clarify the intended QE specification. In particular, is the required range a photon-energy range, a wavelength range, or QE at 13.5 nm? If the “11.5 eV” figure is a typographical error, please state the intended value (for example, 11.5 nm, or 11.5–100 nm, or QE at 13.5 nm / ~92 eV).

NIST Answer: NIST intended a specification of at least 55% QE between 11.5 eV and 100 eV.

Question 9. CLIN 0001 θcam resolution and Option CLIN 0002. SOW CLIN 0001 a.ii.2 specifies motorized axis θcam range 5° to 70°, resolution 0.1° or better, and “Feedback: Closed loop requested.” Option CLIN 0002 modifies that specification so that θcam shall have closed-loop feedback. Question: Please confirm that 0.1° (6 arcmin) is the minimum acceptable θcam resolution for the base CLIN, and whether Option CLIN 0002 is limited to adding required closed-loop feedback or is also intended to impose a tighter resolution requirement.

NIST Answer: The resolution specification for CLIN0001 is 0.1° (6 arcmin). Option CLIN 0002 is limited to adding required closed-loop feedback. NIST chose not to set a repeatability specification for θcam in either CLIN0001 and CLIN0002.

Question 10. Is CLIN 0006 intended to be a Teledyne/Princeton PI-MTE3 2K (or identical), i.e. a brand lock written as a performance spec?

NIST Answer: For CLIN0001 a.ii.1., the camera holder is specified for an existing PI-MTE3 at NIST. It was an oversight in Option CLIN 0006 to not address the potential need for an additional camera holder corresponding to this weight and dimensions of this camera. Vendors shall include the cost of this additional bracket in CLIN0002.

Question 11. CLIN 0006, Will any other in-vacuum EUV camera (Greateyes LOTTE-i, sCMOS, etc.) be found technically unacceptable under LPTA even if individual shalls are met?

NIST Answer: NIST did not specify a brand name (PI, Greateyes) or detector technology (e.g., CCD, sCMOS) but listed the most important specifications that will allow us to meet or exceed current capabilities. Over the two-year option period, it is anticipated even more models may meet or exceed specifications.

Question 12. CLIN 0006, Must 16 MHz, ~3 fps, and 6.5 e⁻ be met in the same operating mode (PI-MTE3 quotes 6.5 e⁻ at 100 kHz, not at 16 MHz)?

NIST Answer: 16 MHz, ~3 fps, and 6.5 e⁻ - These do not need to met within the same operating mode.

Question 13. Option exercise windows and firm-fixed-price duration. Please confirm those exercise windows.

NIST Answer: All the noted exercise of option dates are correct.

Question 14. If CLIN 0006 is not exercised at award, does the quoted firm-fixed price remain binding for the full two-year window if the camera OEM’s price increases after award, or if the quoted model is discontinued and replaced with a higher-priced unit?

NIST Answer: It is intended the pricing is valid for up to two years from award. However, the Government will issue a notice of intent to exercise the option prior to issuance of a modification. If during that time it is noted by the Contractor that the price has increased and cannot be honored a price negotiation can be considered at the discretion of the Contracting Officer.

Question 15. (c) If CLIN 0007 is not exercised at award, does the quoted firm-fixed price remain binding for the full one-year window if labor or travel cost increases after award? (Payment timing, and when the two-week on-site clock starts if 0007 is exercised early or after delivery, is question 3.)

NIST Answer: It is intended the pricing is valid for up to two years from award. However, the Government will issue a notice of intent to exercise the option prior to issuance of a modification. If during that time it is noted by the Contractor that the price has increased and cannot be honored a price negotiation can be considered at the discretion of the Contracting Officer.

Question 16. How does the two-year CLIN 0006 window relate to the period of performance ending 30 September 2027? May the option be exercised after that date?

NIST Answer: The 30 September 2027 date is the intended installation date, not the intended ‘period of performance’ for the entirety of the purchase order. The CLIN dates are intended to keep the purchase order active for two years from the date of award.

Question 17. Is three-month delivery after a CLIN 0006 exercise modification mandatory even if the camera OEM’s then-current lead time is longer?

NIST Answer: It is intended for this to be the lead time, but if this is not possible it can be altered at issuance of the modification to align with lead times applicable at that time.

Question 18. Would the Government accept, in Volume III, the following exception: CLIN 0006 is firm-fixed-price if exercised at award or within 180 days of award (matching the OEM quotation); if exercised later, the price is the then-current OEM price plus a stated McAllister integration amount? If that exception will not be granted, please confirm that offerors are required to hold a 24-month firm-fixed price on CLIN 0006 with no adjustment.

NIST Answer: It is acceptable to put this language in the Volume II response.

Question 19. If a 24-month firm-fixed price is required, are option CLIN prices (including 0006) included in the lowest-price technically acceptable evaluation total, or is evaluation limited to CLIN 0001 (and other CLINs exercised at award)?

NIST Answer: The option pricing will be considered in the overall lowest price technically acceptable price evaluation.

Question 20. May an offeror omit CLIN 0006 from the quotation, or must every CLIN be priced?

NIST Answer: If the vendor chooses to not price this quotation it is possible that they will be considered technically unacceptable. However, if the vendor indicates a reason why this will not be considered that will be taken under consideration.

Question 21. If CLIN 0006 is exercised after the endstation has shipped (or after Government acceptance of CLIN 0001), is the contractor required to perform on-site integration at NIST Gaithersburg, or is destination delivery of the camera and accessories sufficient?

NIST Answer: Onsite integration will not be required by the Contractor in this instance.

Question 21. If on-site integration is required in that case, is it included in CLIN 0006, in CLIN 0007, or a separate modification? CLIN 0007’s one-year window is shorter than CLIN 0006’s two-year window; please confirm what applies if 0007 was not exercised, was already performed, or has expired when 0006 is exercised.

NIST Answer: Onsite integration will not be required by the Contractor in this instance.

Question 22. Will NIST loan the Government-owned PI-MTE3 to the contractor for fit-up, alignment, and factory acceptance of CLIN 0001 (and return shipment at whose cost and risk)?

NIST Answer: No, NIST cannot loan out the existing PI-MTE3.

Question 23. If a loan is not available, what evidence of mechanical/optical fit will the Government accept at factory test (datasheet dimensions only, dummy mass model, or first fit at NIST after delivery)?

NIST Answer: NIST will accept either vendor development of a dummy mass model or First fit at NIST after delivery.

Question 24. Option CLIN 0004 wafer rotation (360°) specifies θwaf range 360°, resolution 0.02° or better, closed loop. Q15704 quoted ±180° non-continuous rotation. Continuous 360° travel in vacuum with motor and encoder cables typically requires a slip-ring; a cable-wrap stage can reach 360° once but is not continuously rotatable. Question: Is CLIN 0004 intended to require continuous unlimited rotation (slip-ring or equivalent), or is a limited rotary stage that can reach any angle in a 360° range (cable-wrap / ±180° plus crossing) acceptable?

NIST Answer: A limited rotary stage that can reach any angle in a 360° range (cable-wrap / ±180° plus crossing) is acceptable.