1333ND26QNB030236updated.pdf

RFQ IFB RFP

WOMEN-OWNED SMALL BUSINESS

(WOSB) ELIGIBLE UNDER THE WOMEN-OWNED

SOLICITATION/CONTRACT/ORDER FOR COMMERCIAL ITEMS

OFFEROR TO COMPLETE BLOCKS 12, 17, 23, 24, & 30

1. REQUISITION NUMBER PAGE OF

2. CONTRACT NO. 3. AWARD/EFFECTIVE

DATE

4. ORDER NUMBER 5. SOLICITATION NUMBER 6. SOLICITATION ISSUE

DATE

7. FOR SOLICITATION

INFORMATION CALL:

a. NAME b. TELEPHONE NUMBER (No collect calls)

8. OFFER DUE DATE/

LOCAL TIME

9. ISSUED BY

13b. RATING

14. METHOD OF SOLICITATION

CODE

15. DELIVER TO 16. ADMINISTERED BY CODE

18a. PAYMENT WILL BE MADE BY CODEFACILITY

CODE

CODE

TELEPHONE NO.

17b. CHECK IF REMITTANCE IS DIFFERENT AND PUT SUCH ADDRESS IN

OFFER

18b. SUBMIT INVOICES TO ADDRESS SHOWN IN BLOCK 18a UNLESS BLOCK

BELOW IS CHECKED

SEE ADDENDUM

19.

ITEM NO.

20.

SCHEDULE OF SUPPLIES/SERVICES

21.

QUANTITY

22.

UNIT

23.

UNIT PRICE

24.

AMOUNT

(Use Reverse and/or Attach Additional Sheets as Necessary)

25. ACCOUNTING AND APPROPRIATION DATA 26. TOTAL AWARD AMOUNT (For Govt. Use Only)

28. CONTRACTOR IS REQUIRED TO SIGN THIS DOCUMENT AND RETURN

DELIVER ALL ITEMS SET FORTH OR OTHERWISE IDENTIFIED ABOVE AND ON ANY

ADDITIONAL SHEETS SUBJECT TO THE TERMS AND CONDITIONS SPECIFIED

29. AWARD OF CONTRACT: REF.

DATED . YOUR OFFER ON SOLICITATION

(BLOCK 5), INCLUDING ANY ADDITIONS OR CHANGES WHICH ARE

SET FORTH HEREIN, IS ACCEPTED AS TO ITEMS:

30a. SIGNATURE OF OFFEROR/CONTRACTOR

30b. NAME AND TITLE OF SIGNER (Type or print) 30c. DATE SIGNED

31a. UNITED STATES OF AMERICA (SIGNATURE OF CONTRACTING OFFICER)

31b. NAME OF CONTRACTING OFFICER (Type or print) 31c. DATE SIGNED

AUTHORIZED FOR LOCAL REPRODUCTION

PREVIOUS EDITION IS NOT USABLE

STANDARD FORM 1449 (REV. 2/2012)

Prescribed by GSA - FAR (48 CFR) 53.212

COPIES TO ISSUING OFFICE. CONTRACTOR AGREES TO FURNISH AND

OFFER

13a. THIS CONTRACT IS A

RATED ORDER UNDER

DPAS (15 CFR 700)

11. DELIVERY FOR FOB DESTINA-

TION UNLESS BLOCK IS

MARKED

SEE SCHEDULE

12. DISCOUNT TERMS

ARE ARE NOT ATTACHED

ARE ARE NOT ATTACHED

27a. SOLICITATION INCORPORATES BY REFERENCE FAR 52.212-1, 52.212-4. FAR 52.212-3 AND 52.212-5 ARE ATTACHED. ADDENDA

27b. CONTRACT/PURCHASE ORDER INCORPORATES BY REFERENCE FAR 52.212-4. FAR 52.212-5 IS ATTACHED. ADDENDA

17a CONTRACTOR/

OFFEROR.

CODE

8 (A)

SIZE STANDARD:

NAICS:

% FOR:SET ASIDE:UNRESTRICTED OR

SERVICE-DISABLED

VETERAN-OWNED

SMALL BUSINESS

HUBZONE SMALL

BUSINESS

SMALL BUSINESS

10. THIS ACQUISITION IS

EDWOSB

SMALL BUSINESS PROGRAM

STANDARD FORM 1449 (REV. 2/2012) BACK

19.

ITEM NO.

20.

SCHEDULE OF SUPPLIES/SERVICES

21.

QUANTITY

22.

UNIT

23.

UNIT PRICE

24.

AMOUNT

32a. QUANTITY IN COLUMN 21 HAS BEEN

RECEIVED INSPECTED ACCEPTED, AND CONFORMS TO THE CONTRACT, EXCEPT AS NOTED:

41a. I CERTIFY THIS ACCOUNT IS CORRECT AND PROPER FOR PAYMENT

32b. SIGNATURE OF AUTHORIZED GOVERNMENT

REPRESENTATIVE

32c. DATE

41b. SIGNATURE AND TITLE OF CERTIFYING OFFICER 41c. DATE

42a. RECEIVED BY (Print)

42b. RECEIVED AT (Location)

42c. DATE REC'D (YY/MM/DD) 42d. TOTAL CONTAINERS

40. PAID BY

32d. PRINTED NAME AND TITLE OF AUTHORIZED GOVERNMENT

REPRESENTATIVE

32e. MAILING ADDRESS OF AUTHORIZED GOVERNMENT REPRESENTATIVE 32f. TELPHONE NUMBER OF AUTHORZED GOVERNMENT REPRESENTATIVE

32g. E-MAIL OF AUTHORIZED GOVERNMENT REPRESENTATIVE

33. SHIP NUMBER 34. VOUCHER NUMBER 35. AMOUNT VERIFIED

CORRECT FOR

PARTIAL FINAL

37. CHECK NUMBER

38. S/R ACCOUNT NO. 39. S/R VOUCHER NUMBER

36. PAYMENT

COMPLETE PARTIAL FINAL

SCHEDULE Continued

ITEM NO. SUPPLIES/SERVICES QUANTITY UNIT UNIT PRICE AMOUNT

0001 Custom Diffractometry and FP Endstation in accordance with the incorporated Statement of Work

1.00 EA

0002 OPTION 1: Camera Manipulation Stages Upgrade (CMS

Upgrade) in accordance with incorporated Statement of work.

0003 OPTION 2: Wafer Manipulation Stages Chuck upgrade

(WMS Chuck) in accordance with incorporated Statement of work.

0004 OPTION 3: Wafer Manipulation Stages ZR Axes Upgrade

(WMS ZR upgrade) in accordance with incorporated

0005 OPTION 4: Wafer Manipulation Stages XY Axes Upgrade

(WMS XY upgrade) in accordance with incorporated

0006 OPTION 5: Integrate New EUV Camera into Endstation

(EUV Camera Upgrade) in accordance with incorporated

OPT

0007 OPTION 6: On-site installation

Period of Performance: 07/01/2026 to 09/30/2027

0008 Shipping and receiving

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Table of Contents

REVISED STATEMENT OF WORK

INSTRUCTIONS TO OFFERORS AND EVAL CRITERIA

APPLICABLE PROVISIONS AND CLAUSES

PAGE 4 OF 33 1333ND26QNB030236

CLAUSES

REVISED STATEMENT OF WORK

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Statement of Work Title: CHIPS R&D Custom Diffractometry and Fourier Ptychography Endstation

Lab: PML, NDCD 683.12

I. BACKGROUND INFORMATION

The Nanoscale Device Characterization Division (NDCD) develops and advances the measurement and knowledge infrastructure to characterize nano- and atom-scale engineered materials and solid-state devices for innovation in information processing, sensing, and future quantum technologies. The NDCD’s technical activities span atom scale devices, nanoscale spectroscopy, advanced electronics, nanoscale processes and measurements, and alternative computing. This acquisition will allow the NDCD to expand its measurement capabilities using extreme-ultraviolet (EUV) diffractometry and Fourier ptychography. The problem being solved by this EUV metrology technique is the non-destructive three-dimensional measurement of nanoscale periodic, non-periodic features in support of the American semiconductor industry.

To meet mission requirements, the NDCD needs to acquire a customized diffractometry end station, which will be a new experimental apparatus that will harness short wavelength EUV light for the non-destructive three-dimensional measurement of the smallest features of computer chips, their transistors. This procurement supports the CHIPS R&D Metrology Program's Grand Challenge 2 to advance metrology for future microelectronics manufacturing and project 2.07, “EUV Scatterometry.” The application of the required end station is the accurate quantitative reconstruction of dimensional structure of periodic and other patterned features from the reflective diffraction off a sample under test using EUV light, which will only propagate in a vacuum.

II. PURPOSE

The NDCD is developing capabilities for performing non-destructive optical three-dimensional measurements of the sizes of smallest features in a computer chips (its transistors) for industrial semiconductor manufacturing process control. We are using extreme-ultraviolet (EUV) wavelengths, 10x shorter than those used by the industry today, and current optical approaches using visible and UV wavelengths cannot adequately measure future semiconductor transistors. Our CHIPS project requires EUV-capable instrumentation, with the primary constraint that the apparatus must work in a vacuum, as air absorbs these wavelengths. This procurement is for a required custom diffractometry and Fourier ptychography endstation for our EUV HHG source, which will demonstrate the feasibility of EUV diffraction-based three-dimensional metrologies to the US semiconductor industry.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

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Line Item 0001:

Description: Custom Diffractometry and Fourier Ptychography Endstation Quantity: 1 Technical Specifications

a. The “Custom diffractometry and Fourier ptychography endstation” shall be comprised of:

a.i. A custom vacuum chamber body, removable top flange, and custom breadboard a.i.1. Chamber body and top flange: when mated, shall have dimensions

28” (interior) x 40” (interior), Height 23.5” minimum (interior).

a.i.2. Base breadboard with 1” spaced tapped holes 1/4-20” minimum 26” x

38”.

a.i.3. Kinematic mounting at three points on interior floor of chamber body to mount the base breadboard.

a.i.4. Materials: Stainless steel (SS) for body, Al for removable top side, SS for base breadboard.

a.i.5. Viewports:

a.i.5.i. Top flange Al: (quantity 1) ISO-250 bulkhead a.i.5.ii. Chamber body: (quantity 4) KF-40 bulkheads, (quantity 2)

ISO-100 bulkheads, (quantity 2) ISO-160 bulkheads, (quantity 8) ISO-200 bulkheads a.i.5.iii. These 17 bulkheads can be converted to ConFlat ports or ISO-K by mutual consent.

a.i.6. Vacuum performance:

a.i.6.i. Capable of high vacuum (HV), defined herein as capable of attaining a 10-6 Torr base pressure.

a.i.6.ii. Shall be leak tight in leak testing down to 1 x 10-6 Torr∙L/s.

a.i.6.iii. Welds shall be leak tested and exhibit no virtual leaks.

a.i.6.iv. Shall reach pressure < 7.5 x 10-7 Torr (< 1.0 x 10-4 Pa) in room temperature testing. Testing to be performed prior to shipment using vendor pumps (not included).

a.i.7. Vendor shall include all gaskets, blank flanges, and hardware (bolts, washers, nuts, etc.) required for the custom vacuum chamber.

a.i.8. Safety:

a.i.8.i. The clear hole pattern for the rectangular chamber body shall have a minimum of four holes into which 5/8-11 Helical Inserts (or mutually agreed-upon equivalent) shall be installed for NIST-supplied Hoist Rings.

a.i.8.ii. The top Al flange shall have eight specially identified holes clear hole pattern for the rectangular body into which 1/2 -13 Keensert (or mutually agreed-upon equivalent) shall be installed for NIST-supplied Hoist Rings.

a.i.8.iii. Specifications (A.i.8.i) and (A.i.8.ii) are subject to subject to confirmation by the vendor to ensure lid and chamber movement, which is safe and does not damage the chamber.

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a.i.9. Consistent with industry practices, vendor shall generate more highly detailed three-dimensional CAD drawings beyond those provided by NIST. Approval by NIST of these detailed supplier-generated CAD drawings will be required prior to manufacturing components.

a.i.10. Finish Specifications for the SS body: Finish may be brushed, polished, or electropolished with confirmation of contamination free inside the chamber.

a.i.11. Two large o-ring gaskets (viton, vulcanized seams not glued) and bolts to connect the endplates to the chamber are to be included.

a.i.12. Industry-standard practices for maintaining vacuum cleanliness of these parts must be maintained through manufacturing and delivery.

Flanges shall be installed for transport.

a.ii. Camera manipulation stages (CMS) a.ii.1. The CMS shall be designed to manipulate an existing NIST-owned PI-

MTE3 EUV camera body.

a.ii.1.i. A holder for this camera shall be mounted to the CMS stage.

a.ii.1.ii. An additional holder for 1” OD optics shall be attached to camera holder, with the optic holder centered to the camera sensor.

PI-MTE3 weight and dimensions, per its datasheet:

Camera weight: 2.31 kg (5.10 lbs) Camera head dimensions (L x W x H): 217.6 mm (8.56”) x

102.3 mm (4.03”) x 73.9 mm (2.91”) a.ii.2. The CMS shall have a minimum of 4 degrees of freedom, - 3 DOF having a HV-compatible motorized stage and 1 DOF with a HV-compatible manual stage:

a.ii.2.i. Motorized Axis #1: qcam – the angle of the camera detector normal to the X-Y plane of the 300 mm wafer. [e.g., Camera looking down on wafer is qcam = 90°].

a.ii.2.i.i.1. Range: qcam = 5° to qcam = 70° a.ii.2.i.i.2. Resolution: Dqcam = 0.1° or better a.ii.2.i.i.3. Feedback: Closed loop requested a.ii.2.i.i.4. Rotation radius: R = 13” minimum from the center on the wafer a.ii.2.i.ii. Motorized Axis #2: Ycam – lateral displacement of the camera body in Y a.ii.2.i.ii.1. Range: about +/- 0.5 ” a.ii.2.i.ii.2. Resolution: 1 μm or better a.ii.2.i.ii.3. Feedback: Closed loop required a.ii.2.i.iii. Axis #3: Zcam – lateral displacement of the camera body tangential to the arc. [Zcam = Z cos(qcam)+ X sin(qcam) ] a.ii.2.i.iii.1. Range: about +/- 0.5 ”.

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a.ii.2.i.iii.2. Resolution: 1 μm or better a.ii.2.i.iii.3. Feedback: Closed loop required a.ii.2.i.iv. Axis #4: Xcam – lateral displacement of the camera (Manual) a.ii.2.i.iv.1. Range: about +/- 1 ”.

a.ii.2.i.iv.2. Resolution: 1 μm or better a.ii.2.i.iv.3. Feedback: Manual a.ii.3. The CMS shall be affixable and removable to the custom breadboard.

a.ii.4. The CMS shall nominally (best effort) point the camera detector at the top surface in X-Y-Z of the 300 mm wafer.

a.ii.5. Vendor shall provide motion controllers, power supplies, vacuum feedthroughs, and cabling that are required to enable motion control inside the custom endstation.

a.ii.6. Vendor shall provide the required libraries or dll files to enable NIST to develop computer control of the individual axes.

a.iii. Wafer manipulation stage (WMS)

1. The WMS shall have shall be designed to manipulate a 300 mm diameter silicon wafer.

a.i.1.a. The interface between the 300 mm wafer at minimum shall be a metal plate.

a.i.1.b.The force holding the 300 mm wafer at this interface shall be gravity.

2. The WMS shall have a minimum of two degrees of freedom, each DOF having a HV-compatible motorized axis.

a.i.1.a. Axis #1: Ywaf – the lateral displacement of the 300 mm wafer in Y a.i.1.a.i. Range: minimum +/- 3” a.i.1.a.ii. Resolution: at least 1 μm or better a.i.1.a.iii. Positioning: axis centered on chamber body a.i.1.a.iv. Feedback: Closed loop required a.i.1.b.Axis #2: Xwaf – the lateral displacement of the 300 mm wafer in X a.i.1.b.i. Range: minimum +/- 3” a.i.1.b.ii. Resolution: at least 1 μm or better a.i.1.b.iii. Positioning: axis centered on chamber body a.i.1.b.iv. Feedback: Closed loop required

3. The WMS shall be affixable and removable to the custom breadboard.

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4. WMS shall nominally (best effort) place the top surface of the wafer center X-Y-Z with the nominal bets effort aim of the camera detector (CMS) at acute angle qcam.

5. Vendor shall provide motion controllers, power supplies, vacuum feedthroughs, and cabling that are required to enable motion control inside the custom endstation.

6. Vendor shall provide the required libraries or DLL files to enable NIST to develop computer control of the individual axes.

a.iv. Adjustable base

7. The chamber shall be placed on this base, and the base is designed for placing next to the source optical table.

8. The base shall be capable of adjusting height and level of the custom chamber. The height range is determined by mutual consent.

The following are optional items that the Government will make a determination to exercise at award.

Line Item 0002: OPTION 1 Description: Camera Manipulation Stages Upgrade (CMS Upgrade) Quantity: 1 Technical Specifications

a. Rationale: The “Camera Manipulation Stages Full Upgrade” (CMS Upgrade) is intended to provide closed-loop feedback for the qcam axis.

b. This option modifies CLIN0001 a.ii.2.i.3 such that axis qcam shall have closed-loop feedback.

a. Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.

Line Item 0003: OPTION 2 Description: Wafer Manipulation Stages Chuck upgrade (WMS Chuck) Quantity: 1 Technical Specifications

a. Rationale: A tradeoff has been made in CLIN0001 to allow for the 300 mm wafer to sit on a metal plate held by gravity. This option seeks to incorporate a vacuum-compatible electrostatic wafer chuck into the WMS.

b. The “Wafer Manipulation Stages Chuck Upgrade” (WMS Chuck) shall be comprised of the following modifications to the specifications of CLIN0001:

a.i. Replacement of the metal gravity-held sample plate with a vacuum-compatible electrostatic wafer chuck. (modifies CLIN0001 a.iii.1)

c. Vendor shall provide any power supplies, vacuum feedthrough, and cabling that are required to engage the electrostatic wafer chuck inside the custom endstation.

d. Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.

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Line Item 0004: OPTION 3 Description: Wafer Manipulation Stages ZR Axes Upgrade (WMS ZR upgrade) Quantity: 1 Technical Specifications

a. Rationale: The “Wafer Manipulation Stages ZR Axes Upgrade” (WMS ZR Axes upgrade) is intended to provide two additional degrees of freedom to wafer movement for the Zwaf and qwaf (also known as R, rotation) axes.

b. The added height in Z of the WMS from this additional stage shall be accounted for in the CMS. The X-Y position of the CMS is not affected.

c. The “Wafer Manipulation Stages Axes Upgrade” shall be comprised of the following modifications to the specifications of CLIN0001:

a.i. Inclusion of a third and fourth degree of freedom (modifies CLIN0001 A.iii.2) with the following added:

a.i.1. Axis #3: Zwaf – height displacement of the 300 mm wafer a.i.1.a. Range: about +/- 0.2” (about +/- 5 mm).

a.i.1.b. Resolution: 10 nm or better a.i.1.c. Feedback: Closed loop required a.i.2. Axis #4: qwaf – rotation about the nominal center of the 300 mm wafer in the X-Y plane.

a.i.2.a. Range: 360°.

a.i.2.b. Resolution: 0.02° or better a.i.2.c. Feedback: Closed loop required

e. Vendor shall provide motion controllers, power supplies, vacuum feedthroughs, and cabling that are required to enable motion control inside the custom endstation.

f. Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing. Vendor may also include any net cost from the higher load requirement on these Z-R axes from the potential selection of CLIN0003.

Line Item 0005: OPTION 4 Description: Wafer Manipulation Stages XY Axes Upgrade (WMS XY upgrade) Quantity: 1 Technical Specifications

a. Rationale: A tradeoff has been made in CLIN0001 to allow for +/- 3” travel for the WMS, allowing positioning the CMS closer to the wafer center. This reduces the size of the vacuum chamber and the WMS but limits the wafer travel. This option seeks to extract more wafer travel from the WMS.

b. The “Wafer Manipulation Stages XY Axes Upgrade” (WMS XY Axes upgrade) shall be comprised of the following modifications to the specifications of

CLIN0001:

a.ii. Extension of the potential travel of the X-Y stages a.ii.1. Ywaf -

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a.ii.1.a. Range: +/- 6” (+/- 150 mm) (modifies CLIN0001 a.iii.2.a.i) a.ii.2. Xwaf -a.ii.2.a. Range (away from CMS): 5” to 6” (modifies

CLIN0001 a.iii.2.b.i) a.ii.2.b. Range (toward CMS): 3”. It is recognized that the CMS will block further travel.

a.ii.2.c. Vendor may choose to provide a 200 mm stage to allow 8” (200 mm) of X travel, or provide 12” (300 mm) of travel in X, with NIST responsible for limiting the utilized range.

c. Vendor shall provide motion controllers, power supplies, vacuum feedthroughs, and cabling that are required to enable motion control inside the custom endstation.

d. Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing. Vendor may also include any net cost from the higher load requirement on these X-Y axes from the possible selections of CLIN0003 and CLIN0004 here.

The following are optional item that the Government will either exercise at award or within 2 years of purchase issuance.

Line Item 0006: OPTION 5 Description: Integrate New EUV Camera into Endstation (EUV Camera Upgrade) Quantity: 1 Technical Specifications

a. Rationale: A tradeoff has been made in CLIN0001 to allow for the design of this chamber and is Camera Manipulation System around an existing NIST-owned Princeton Instruments PI-MTE3 camera. The best, fullest development of the Diffractometry and Fourier ptychography end station would include a fully dedicated, in-vacuum EUV camera.

b. The “EUV Camera upgrade” shall amend Specification (CLIN 0001 a.) to add the following:

“a. v: Full in-vacuum EUV camera

- High vacuum compatibility.

- 2k x 2k pixel resolution or better with a depth of 16-bit or more.

- Sensor diagonal is 1” or larger.

- QE ~ 85% – 55% or higher for EUV wavelengths 11.5 eV ~ 100 eV.

- Frame rates of at least about 3 fps with 2kx2k resolution.

- Maximum readout frequency of 16 MHz or better.

- Read noise of 6.5 e- rms or less at about -10 °C.

- In-vacuum connection accessories included.

- Include control electronics, software, and cables to allow a NIST-provided computer to collect image data.”

c. Vendor shall not include a chiller to cool down the EUV camera sensor.

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d. Vendor shall provide a vacuum feedthrough to connect the camera electrically to the control electronics and to cooling water. For this feedthrough vendor may substitute a ConFlat DN100 (6”) adapter for one of the ISO100 Bulkheads in (CLIN0001 A.i.5.ii), or another flange by mutual consent.

e. Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.

The following are optional items that the Government will either exercise at award or within 1 year of purchase issuance.

Line Item 0007: OPTION 6 Description: Installation and Training Quantity: 1

a. The system shall be installed by the Contractor and meet contract specifications no later than 2 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD.

b. The contractor shall conduct training session for up to two users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8:00 am to 5 00 pm immediately after installation and demonstration of specifications and must be completed no later than 5 days after installation.

c. Vendor shall indicate net increase or decrease in cost from this option, including CAD drafting, materials, manufacture, and testing.

I. SCHEDULE OF DELIVERABLES

Deliverabl e Number Description Quantity Due Date Place of Delivery

1 Initial design of the custom chamber with components based on the design provided by

NIST

One set of initial design drawings

2 months after receipt of offer

(ARO)

NIST Gaithersburg

2 Final design of the custom endstation

One set of final design drawings

1 month after receipt of acceptance of initial design drawings

NIST Gaithersburg

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3 Custom Endstation with all components

One (1) 10 months of acceptance of final design drawings

NIST Gaithersburg

4 OPTIONS 0002-

0005 – CAD

drawings of options in final design

One (1) Each Delivery within at the same time at CLIN

NIST Gaithersburg

5 OPTION 0006 –

EUV Camera

One (1) Each Delivery within 3 months of issuance of a contract modification to exercise option.

NIST Gaithersburg

6 OPTION

CLIN0007 is selected:

Installation and Training

Performance at

NIST

Gaithersburg

2 weeks after delivery

NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 5 business days of receipt of deliverable.

II. DELIVERY TERMS

Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 120 days after receipt of order (ARO).

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

National Institute of Standards and Technology 100 Bureau Drive, BLDG 301 (Receiving) Gaithersburg, MD 20899

III. INSPECTION & ACCEPTANCE

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In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

A. The system will be inspected for damage and contamination and then inspected for compliance with the machine drawing design.

B. If the manufactured endstation matches the design, the chamber will be blanked off at its ports and pumped out to test if it can reach the required room temperature base pressure of < 7.5 x 10-7 Torr.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government.

The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 business days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IV. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

V. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

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1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

ATTACHMENTS:

1) Updated basic schematics for the Endstation.pdf

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INSTRUCTIONS TO OFFERORS AND EVAL CRITERIA

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(I) This is a solicitation for commercial products or commercial services prepared in accordance with the format in Revolutionary FAR Overhaul (RFO) Part 12 - Acquisition of Commercial Products and Commercial Services as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued.

(II) The solicitation number is 1333ND26QNB030236 and this solicitation is a Request for Quotation (RFQ). This acquisition is being solicited as unrestricted competition.

(III) The solicitation document and incorporated provisions and clauses are those in effect through the RFO.

(IV) The associated North American Industrial Classification System (NAICS) code for this procurement is 334519 with a small business size standard of 600 employees.

(V) All offerors shall provide a firm-fixed-price quotation for the following line item(s):

Contract Line Item Number

(CLIN)

QTY UNIT UNIT PRICE APPLICABLE

DISCOUNTS

TOTAL

CLIN 0001 – Custom Diffractometry and Fourier Ptychography Endstation IAW Attachment #1.

1 Each

CLIN 0002 – OPTIONAL

Installation and Training IAW Attachment #1.

1 Lot

CLIN 0003: Shipping, 1 Lot CLIN 0004: Other transportation related charges (Not-to-Exceed amount)

1 Lot NTE

TOTAL:

(VI) The requirements for the line items to be acquired above are in the attached Statement of Work document.

Attachment #1: STATEMENT OF WORK/REQUIREMENTS DOCUMENT AND DRAWINGS, CHIPS R&D Custom Diffractometry and Fourier Ptychography Endstation Attachment #2: Applicable Provisions and Clauses

(VII) Date(s) and place(s) of delivery and acceptance and FOB point are required in accordance with the attached Statement of Work document.

(VIII) Quoters/Contractors must possess an ACTIVE registration in the System for Award Management, www.SAM.gov, when submitting a quotation and shall continue to hold an active registration until time of award, during performance, and through final payment of any purchase order or contract resulting from this solicitation. This acquisition office will verify that quoters have an active registration through www.sam.gov upon receipt of the quotation. If the SAM.gov registration is not active, the quotation will not be considered for award.

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(IX) The provision at FAR 52.212-1, Instructions to Offerors—Commercial Products and Commercial Services, applies to this acquisition. Addenda to this provision is as follows:

DUE DATE FOR QUOTATIONS

Offerors shall submit their electronic quotations, via email, so that NIST receives them not later than date and time on page 1 of the solicitation document. E-mail quotations shall be submitted directly to the Contract Specialist at tracy.retterer@nist.gov and Contracting Officer at Donald.collie@nist.gov

Please reference the RFQ number in the subject line of email communications. Offerors quotations shall not be deemed received by the Government until the quotation is entered in the e-mail inbox set forth above.

PRE-QUOTE INQUIRIES (CAR 1352.215-72):

Offerors must submit all questions concerning this solicitation in writing to both the Contract Specialist, and the Contracting Officer, listed above. Questions should be received no later than 5 calendar days after the issuance date of this solicitation. All responses to the questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the responses included in the amendment to the solicitation will govern performance of the contract.

QUOTATION PREPARATION INSTRUCTIONS:

All quotations shall conform to solicitation provisions/clauses and be prepared in accordance with this section. The quotation shall be clearly and concisely written as well as be neat, indexed (cross-indexed as appropriate) and logically assembled. Note: The term “indexed” refers to a table of contents that lists sections and page numbers. In the event that the Offeror is unable to create an indexed quotation, an alternative approach such as a Table of Contents shall suffice.

All pages of the quotation shall be appropriately numbered. A cover letter may be included in addition to Volumes I-III discussed below.

In preparing the quotation, each volume shall stand on its own. For each given evaluation factor, the Government will only evaluate the information provided in the corresponding section of the quotation. The Offeror’s quotation shall be clearly divided into the following distinct volumes:

Volume I – Technical Quotation Volume II – Price Quotation Volume III- Terms and Conditions

Volume I - Technical Quotation:

The offeror shall submit one (1) copy of their technical quotation, electronically, via E-mail to the Contract Specialist and Contracting Officer identified above. The technical quotation shall address the following:

Technical Capability:

The quoter shall submit technical approach and capability documentation which may include a narrative, charts, graphs, tables, drawings, product / service literature, and as applicable, demonstrated authority to provide the necessary items and perform the required services identified in the statement of work (Attachment 1). The documentation shall clearly describe, in

PAGE 18 OF 33 1333ND26QNB030236

sufficient detail, the vendor's authority, proposed items, resources and methods to successfully fulfill the requirements including specifications, performance capability requirements, delivery schedules, warranties, and all service requirements. The submission shall clearly identify each line item above. The submission must demonstrate that the proposed system meets or exceeds each minimum requirement described within the attached statement of work document by providing a citation between the statement of work paragraph and the relevant section of the technical description or product literature. The offeror must not simply state they will meet or exceed the requirement; evidence must be provided. If applicable, evidence that the offeror is authorized by the manufacturer to provide the item(s) in the quotation shall be included.

Volume II - Price Quotation:

The offeror shall submit one (1) copy of their entire quotation, electronically, via E-mail to the Contract Specialist and Contracting Officer identified above. The pricing quotation shall be separate from any other portion of the quotation. The offeror shall propose a firm-fixed-price quotation for each CLIN to include all shipping costs (FOB Destination) and tariffs, if applicable.

Price quotations shall remain valid for a period of 90 days from the date quotations are due.

Offerors that are proposing products manufactured outside of the United States must identify any other or unknown charges that may be applicable to the sale of these products (here indicated as CLIN 0004 - Other transportation related expenses) as a separate line item on price quotes/proposals. This price element may be listed as part of the cost of the product or as a sub-total element but must be clearly identified. This price element must only apply to the total value of the goods identified for customs processing. Only include the country of origin and the tariff percentage currently in place or the expected amount at time of delivery for that country.

Price quotes shall clearly identify the relevant tariffs in terms of percentage and total cost. If there are multiple countries of origins and associated tariffs, identify each separately.

Volume III – Terms and Conditions:

The offeror shall review the provision and clauses attachment and complete any required information as record via a separate volume response to this solicitation.

Note: System updates may lag policy updates. The System for Award Management (SAM) may continue to require entities to complete representations based on provisions that are not included in this solicitation. Contracting officers will rely on representations from offers based on provisions in the solicitation. Entities are not required to, nor are they able to, update their entity registration to remove these representations in SAM.

Acceptance of Terms and Conditions:

If the offeror objects to any of the terms and conditions contained in this solicitation, the offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following:" [Offeror shall list exception(s) and rationale for the exception(s)]. It is the sole responsibility of the offeror to identify in their quotation any exceptions to the terms and conditions of the solicitation. If the offeror does not include such a statement, the submission of a quotation in response to this solicitation will be regarded as the Offeror's acceptance of the Government's terms and conditions for inclusion into the resultant purchase order (PO).

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This procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an Offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the proposed price.

However, the terms and conditions stated herein will be included in any resultant purchase order, not the terms and conditions of the Offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation.

(X) 52.212-2 EVALUATION CRITERIA

The Government intends to award a single firm fixed price purchase order (PO) from this solicitation utilizing simplified acquisitions procedures in accordance with RFO Part 12. The Government reserves the right not to award a PO and to make an award without discussions based solely upon initial quotes.

Basis for Award:

Award shall be made to the responsible offeror who: (1) Meets all required technical specifications as determined by a review of documentation submitted in accordance with this solicitation; (2) proposes the lowest price. Award shall be made to the lowest priced, technically acceptable offeror.

An Offeror's failure to address any factor may be considered indicative of the Offeror's lack of understanding of the Government's requirements and may result in the offer being determined unacceptable.

Evaluation Factors:

Technical Capability: No prototypes, demonstration models, used or refurbished instruments will be considered. Evaluation of technical capability shall be based on the information provided in the quotation. NIST will evaluate whether the offeror has demonstrated that its proposed equipment meets or exceeds all minimum requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. If an offerors technical description and/or product literature does not indicate whether its proposed equipment meets a certain minimum requirement, NIST will determine that it does not meet the requirements.

Price: The proposed price will be evaluated. The evaluation will determine whether the proposed prices are reasonable in relation to the solicitation requirements. Prices must be entirely compatible with the technical portion of the quotation.

APPLICABLE PROVISIONS AND CLAUSES

PAGE 20 OF 33 1333ND26QNB030236

PROVISIONS AND CLAUSES

52.252-1 Solicitation Provisions Incorporated by Reference.

As prescribed in 52.107(a), insert the following provision:

SOLICITATION PROVISIONS INCORPORATED BY REFERENCE (FEB 1998)

This solicitation incorporates one or more solicitation provisions by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. The offeror is cautioned that the listed provisions may include blocks that must be completed by the offeror and submitted with its quotation or offer. In lieu of submitting the full text of those provisions, the offeror may identify the provision by paragraph identifier and provide the appropriate information with its quotation or offer. Also, the full text of a solicitation provision may be accessed electronically at this/these address(es):

FAR Overhaul (DEVIATIONS JAN 2026): https://www.acquisition.gov/far-overhaul/far-part-deviation-guide CAR: https://www.ecfr.gov/current/title-48/chapter-13

(End of provision)

52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998)

This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es):

FAR Overhaul (DEVIATIONS JAN 2026): https://www.acquisition.gov/far-overhaul/far-part-deviation-guide CAR: https://www.ecfr.gov/current/title-48/chapter-13

(End of clause)

CLAUSES/ PROVISIONS INCORPORATED BY REFERENCE:

ALT I 52.203-6, Restrictions on Subcontractor Sales to the Government (Nov 2021) 52.203-17 Contractor Employee Whistleblower Rights (Nov 2023) 52.203-11 Certification and Disclosure Regarding Payments to Influence Certain Federal Transactions (Sept 2024) 52.203-12 Limitation on Payments to Influence Certain Federal Transactions (Jun 2020) 52.203-17 Contractor Employee Whistleblower Rights (Nov 2023) 52.203-18 Prohibition on Contracting with Entities that Require Certain Internal Confidentiality Agreements or Statements-Representation. (DEVIATION JAN 2026) 52.203-19, Prohibition on Requiring Certain Internal Confidentiality Agreements or Statements (Jan 2017) 52.204-7 System For Award Management (DEVIATION JAN 2026) 52.204-10 Reporting Executive Compensation and First-Tier Subcontract Awards(DEVIATION JAN 2026) 52.204-13 System For Award Management Maintenance (Deviation Jan 2026)

PAGE 21 OF 33 1333ND26QNB030236

52.204-19 Incorporation By Reference Of Representations And Certifications (Dec 2014) 52.209-2, Prohibition on Contracting with Inverted Domestic Corporations—Representation(DEVIATION

JAN 2026)

52.209-5 Certification Regarding Responsibility Matters (DEVIATION JAN 2026) 52.209-6 Protecting the Government's Interest When Subcontracting With Contractors Debarred, Suspended, Proposed for Debarment, or Voluntarily Excluded (DEVIATION JAN 2026) 52.209-7 Information Regarding Responsibility Matters (DEVIATION JAN 2026) 52.209-9 Updates of Publicly Available Information Regarding Responsibility Matters (DEVIATION JAN 2026) 52.209-10, Prohibition on Contracting with Inverted Domestic Corporations (DEVIATION JAN 2026) 52.209-11 Representation by Corporations Regarding Delinquent Tax Liability or a Felony Conviction under any Federal Law. (DEVIATION JAN 2026) )**Filled in SAM** 52.212-1 Instructions To Offerors--Commercial Products And Commercial Services (DEVIATION JAN 2026) 52.219-8, Utilization of Small Business Concerns (DEVIATION JAN 2026) 52.219-28, Post-award Small Business Program Rerepresentation (DEVIATION JAN 2026) 52.222-3, Convict Labor (Jun 2003) 52.222-18 Certification Regarding Knowledge of Child Labor for Listed End Products (DEVIATION JAN 2026) 52.222-19, Child Labor—Cooperation with Authorities and Remedies (DEVIATION JAN 2026) 52.222-35, Equal Opportunity for Veterans (DEVIATION JAN 2026) 52.222-36, Equal Opportunity for Workers with Disabilities (DEVIATION JAN 2026) 52.223-23, Sustainable Products and Services (May 2024) 52.222-37, Employment Reports on Veterans (DEVIATION JAN 2026) 52.222-40, Notification of Employee Rights Under the National Labor Relations Act (Dec 2010) 52.222-50, Combating Trafficking in Persons (DEVIATION JAN 2026) 52.222-90 Addressing DEI Discrimination by Federal Contractors (DEVIATION April 2026) 52.225-4 Trade Agreements (DEVIATION JAN 2026) 52.226-7 Drug-Free Workplace (May 2024) 52.226-8, Encouraging Contractor Policies to Ban Text Messaging While Driving (May 2024) 52.232-33, Payment by Electronic Funds Transfer-System for Award Management (Oct2018) 52.232-39 Unenforceability of Unauthorized Obligations (JUNE 2013) 52.232-40, Providing Accelerated Payments to Small Business Subcontractors (Mar 2023) 52.233-3, Protest After Award (DEVIATION JAN 2026) 52.233-4, Applicable Law for Breach of Contract Claim (Oct 2004) 52.244-6 Subcontracts for Commercial Products and Commercial Service (DEVIATION April 2026) 52.252-5 Authorized Deviations In Provisions (NOV 2020) 52.252-6 Authorized Deviations In Clauses (NOV 2020) 1352.201-70 Contracting Officer Authority (APR 2010) 1352.209-73 Compliance With The Laws (APR 2010) 1352.209-74 Organizational Conflict Of Interest (APR 2010)

Full Text Provision and Clauses:

FAR 52.212-4 TERMS AND CONDITIONS—COMMERCIAL PRODUCTS AND COMMERCIAL

SERVICES (DEVIATION DATE)

(a) Definitions. The clause at Federal Acquisition Regulation (FAR) 52.202-1, Definitions, is incorporated by reference.

PAGE 22 OF 33 1333ND26QNB030236

(b) Inspection/Acceptance. The Contractor shall only tender for acceptance those items that conform to the requirements of this contract. The Government reserves the right to inspect or test any supplies or services that have been tendered for acceptance. The Government may require repair or replacement of nonconforming supplies or reperformance of nonconforming services at no increase in contract price.

If repair/replacement or reperformance will not correct the defects or is not possible, the Government may seek an equitable price reduction or adequate consideration for acceptance of nonconforming supplies or services. The Government must exercise its post acceptance rights—

(1) Within a reasonable time after the defect was discovered or should have been discovered; and

(2) Before any substantial change occurs in the condition of the item, unless the change is due to the defect in the item.

(c) Assignment. The Contractor or its assignee may assign its rights to receive payment due as a result of performance of this contract to a bank, trust company, or other financing institution, including any Federal lending agency in accordance with the Assignment of Claims Act (31 U.S.C. 3727). However, when a third party makes payment (e.g., use of the Governmentwide commercial purchase card), the Contractor may not assign its rights to receive payment under this contract.

(d) Changes. Changes in the terms and conditions of this contract may be made only by written agreement of the parties.

(e) Disputes. This contract is subject to 41 U.S.C. chapter 71, Contract Disputes. Failure of the parties to this contract to reach agreement on any request for equitable adjustment, claim, appeal, or action arising under or relating to this contract shall be a dispute to be resolved in accordance with the clause FAR 52.233-1, Disputes, which is incorporated in this contract by reference. The Contractor shall proceed diligently with performance of this contract, pending final resolution of any dispute arising under the contract.

(f) Excusable delays. The Contractor shall be liable for default unless nonperformance is caused by an occurrence beyond the reasonable control of the Contractor and without its fault or negligence.

Examples of occurrences include acts of God or the public enemy, acts of the Government in either its sovereign or contractual capacity, fires, floods, epidemics, quarantine restrictions, strikes, unusually severe weather, and delays of common carriers. When an excusable delay occurs, the Contractor shall

(1) Notify the Contracting Officer in writing as soon as possible;

(2) Remedy the delay as quickly as possible; and

(3) Notify the Contracting Officer when the occurrence is over.

(g) Invoice. The Government will handle invoices according to the Prompt Payment Act (31 U.S.C.

3903) and 5 CFR part 1315. The Contractor shall submit invoices to the address designated in the contract to receive invoices. An invoice must include the information required by 5 CFR part 1315.9(b).

(h) Patent indemnity. The Contractor shall indemnify the Government and its officers, employees, and agents against liability, including costs, for actual or alleged direct or contributory infringement of, or inducement to infringe, any United States or foreign patent, trademark, or copyright, arising out of the performance of this contract, provided the Contractor is reasonably notified of such claims and proceedings.

(i) Payment—

(1) Items accepted. Payment shall be made for items accepted by the Government that have been delivered to the delivery destinations set forth in this contract.

PAGE 23 OF 33 1333ND26QNB030236

(2) Prompt payment. The Government will make payment in accordance with the Prompt Payment Act ( 31 U.S.C. 3903) and prompt payment regulations at 5 CFR part 1315.

(3) Discount. In connection with any discount offered for early payment, time shall be computed from the date of the invoice. For the purpose of computing the discount earned, payment shall be considered to have been made on the date that appears on the payment check or the specified payment date if an electronic funds transfer payment is made.

(4) Overpayments. If the Contractor becomes aware of a duplicate contract financing or invoice payment or that the Government has otherwise overpaid on a contract financing or invoice payment, the Contractor shall—

(i) Remit the overpayment amount to the payment office cited in the contract along with a description of the overpayment including the—

(A) Circumstances of the overpayment (e.g., duplicate payment, erroneous payment, liquidation errors, date(s) of overpayment);

(B) Affected contract number and delivery order number, if applicable;

(C) Affected line item or subline item, if applicable;

(D) Contractor point of contact; and

(ii) Provide a copy of the remittance and supporting documentation to the Contracting Officer.

(5) Interest.(i) All amounts that become payable by the Contractor to the Government under this contract shall bear simple interest from the date due until paid unless paid within 30 days of becoming due. The interest rate shall be the interest rate established by the Secretary of the Treasury as provided in 41 U.S.C. 7109, which is applicable to the period in which the amount becomes due, as provided in (i)(6)(v) of this clause, and then at the rate applicable for each six-month period as fixed by the Secretary until the amount is paid.

(ii) The Government may issue a demand for payment to the Contractor upon finding a debt is due under the contract.

(iii) Final decisions. The Contracting Officer will issue a final decision as required by FAR part 33 if–

(A) The Contracting Officer and the Contractor are unable…