Enclosure 3- SOW 12 ID White Beam Mirror.pdf

A r g o n n e N a t i o n a l L a b o r a t o r y | 9 7 0 0 S . C a s s A v e n u e | A r g o n n e , I L 6 0 4 3 9

12-ID High Heat Load Mirror System

Argonne Technical Representative (Tech Rep): Jonathan Knopp

Abstract – This document is a request for proposals to purchase a High Heat Load Mirror System for 12-ID Beamline. It outlines the technical specifications necessary for the system as well as Quality Assurance, Shipping requirements, and

Acceptance Criteria.

Revision Date Reason

0 11/26/2025 Original

Statement of Work Advanced

Photon Source

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Table of Contents

1 PROJECT DESCRIPTION

1.1 BACKGROUND

1.2 SCHEDULE

1.3 REPORTS AND DOCUMENTATION

1.3.1 Initial Meeting

1.3.2 Preliminary Manufacturing Design Review

1.3.3 Final Manufacturing Design Review

1.3.4 Monthly Progress Reports

1.3.5 Shipping

1.3.6 Contract Closeout

1.4 WARRANTY

2 FUNCTIONAL DESCRIPTION

2.1 APS COORDINATE SYSTEM

2.2 DESIGN CONCEPT

3 SPECIFICATIONS

3.1 MIRROR SPECIFICATIONS

3.2 MOTION CONTROL SPECIFICATIONS

A 1.1.1 Tolerances

3.3 COOLING

3.4 LIFTING FEATURES ............................................................................................... ERROR! BOOKMARK NOT DEFINED.

3.5 SPACE AND HEIGHT REQUIREMENTS

3.6 MIRROR BENDERS

4 VACUUM SPECIFICATIONS

4.1 PORTS

4.2 VACUUM COMPONENTS AND TASKS PROVIDED BY APS

5 QUALITY ASSURANCE

6 PACKING AND SHIPPING

7 MIRROR SYSTEM ACCEPTANCE TESTS

7.1 FACTORY ACCEPTANCE TESTS (FAT)

7.1.1 Vendor-based Optical Metrology Measurements

7.1.2 Mechanical Testing

7.1.3 Vacuum Integrity

7.2 ACCEPTANCE TESTS PERFORMED AT THE APS

7.2.1 Surface Roughness

7.2.2 Tangential and Sagittal slope error

7.2.3 Bender Calibration and Characterization

7.2.4 Vibrations

8 INSTALLATION AND ALIGNMENT

8.1 ON-SITE ASSEMBLY AND INSTALLATION

8.2 ALIGNMENT RELATIVE TO THE X-RAY BEAM

8.3 ON-SITE MECHANICAL TESTING

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1 Project Description

1.1 Background

This SOW is a request for proposals for the design, manufacture, testing, delivery, and installation of the High Heat Load Mirror System for the 12-ID beamline. The mirror system and vacuum system are to be designed such that the system mounts onto an existing optical table within the space constraints specified.

The level of technical detail in the vendor’s proposal should be sufficient to determine compliance with the specifications given in this document.

1.2 Schedule

The vendor is to provide a schedule for completion that covers the 7 major milestones. The schedule should ensure the mirror system arrives at APS no later than 52 weeks after contract has been awarded.

1. Initial Meeting

2. Preliminary Manufacturing Design Review

3. Final Manufacturing Design Review

4. Factory Acceptance Tests Approval

5. Shipping of mirror system from the vendor to the APS

6. Installation at the APS

7. Final Project Closeout

1.3 Reports and Documentation

The following documents and reports are to be provided by at the following stages:

1.3.1 Initial Meeting

• A schedule consistent with above milestones and schedule

1.3.2 Preliminary Manufacturing Design Review

• Preliminary Design Report (30-60% design completion) o Drawings with sufficient detail to support the device being specified at preliminary level o Description of all motion controls components

• Manufacturing drawings in PDF format

• 3D models in STEP format

• 2D assembly drawings in DWG or DXF format

1.3.3 Final Manufacturing Design Review

• Final Design Report (including the following) o Drawings sufficient to support the device being completely designed o Manufacturing drawings in PDF format

• Complete 3D models in STEP format (with ANL non-disclosure agreement)

• 2D assembly drawings in DWG or DXF format

• Electrical drawings in PDF format with schematics of all motor, encoder, piezo, and sensor wiring and connection panels

• Factory acceptance test procedures and schedule

• Vendor acceptance test procedures at APS Site

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1.3.4 Monthly Progress Reports

• Brief monthly progress reports will be submitted to APS. These reports may be a bulleted list in an email that details the manufacturing progress

1.3.5 Shipping

• Shipping and packaging plan one month prior to shipping

• Factory acceptance test sent to and approved by APS before shipping

• The vendor should prepare an Interface Requirements Document that describes the vendors technical support needs and infrastructure requirements during installation at the APS. (e.g.

APS Survey Group, ANL Riggers, portable clean room, etc…). These should be sent to the APS one month before shipping.

• Schedule for APS installation activities

1.3.6 Contract Closeout

• As built drawings

• Manufacturing drawings in PDF format

• Complete 3D models in STEP format (with ANL non-disclosure agreement)

• 2D assembly drawings in DWG or DXF format

• Factory acceptance test procedures and report

• User’s manuals and procedures for system operation, maintenance, assembly, disassembly, storage, and on-site installation

• Manuals and warranties for all 3rd party components

• Manuals for precision motion components, if applicable

• APS site acceptance test procedures and report

• Quality Assurance Documents for the completed systems showing successful validation of each criterion listed in this document.

1.4 Warranty

The HHL Mirror system shall be warranted for 12 months after final acceptance at APS or 15 months from delivery, whichever comes first.

2 Functional Description

2.1 APS Coordinate System

A universally used coordinate system for APS beamlines is shown in Figure 1a. The positive Z direction points along the beam direction. The positive Y direction is a vertical axis pointing upward. The positive X direction is pointing outboard, away from the APS storage ring. θX, θY, and θZ are the rotations about X, Y, and Z axis, respectively.

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Figure 1a The APS coordinate system used at APS beamline and also in this document.

Figure 1b Schematic showing the coordinates of motion for the horizontally deflecting mirror

2.2 Design Concept

In order to minimize the photon loss during the focusing process, the mirror shall have a big angular acceptance to accept the full beam (4 widths, > 95% of intensity being collected), and mirror coatings shall give high reflectivity at the corresponding photon energy. The mirror will be located 28.737 m from the straight-section center, deflects the beam inboard (-X, toward the center of the storage ring). This mirror will provide a nominal 4.0 mrad deflection (2.0 mrad grazing-incidence angle) for x-rays in the 6–

35 KeV range. High reflectivity is achieved by employing three reflective coatings—palladium, silicon, and platinum on each mirror, together with a variable incident angle matched to the photon energy. To reduce, a proper bending mechanism is needed, and in order to protect the mirror coating, the mirror shall be in a high vacuum chamber.

The mirror requires three motorized motions, in X, Y, and a rotation around the Sagittal direction (Pitch rotation, y, as described in Figure 1b). The X and Y motions are to center the X-ray beam on the mirror

6 | P a g e and to select one of the three stripes as the reflecting surface, and the Pitch rotation is to adjust the incident/deflection angle. For the Pitch rotation, the axis of rotation shall be on the optical surface centered along the length of each mirror. The pitch rotation shall include a PZT-based actuator fine-tuning and for potential beam stabilization control. In addition, angular adjustment (not motorized) in roll and yaw shall be provided for alignment purposes. All motions of the mirror shall be completely independent of each other.

This mirror will be mechanically bendable. The bending mechanism for 12-ID HHL Mirror produces a surface figure that can be varied from flat to elliptical shape with minimal aberrations and produce concave shapes to focus the beam at various distances. The bending of the mirror needs to enable focusing to correct for mechanical deformation due to thermal loading.

2.3 YT Vertical Translation

Overall motorized motion of ±25 mm translation of YT of 12ID-MR-1 is required to select one of the stripes as the reflecting surface.

y Rotation Overall motorized motion of -0.002/+0.005 radians rotation of y of 12ID-MR-1 relative to the incoming beam is required to select the incident angle of the mirror. For this motion, the axis of rotation shall be on the optical surface centered along the length of the mirror. This motion needs to include fine scale piezo driven (PZT) motion so that feedback control can be used to actively maintain the beam position. The required total motion can be achieved through a combination of stepper and piezo driven motors.

x Rotation Overall motorized motion of of ±0.015 radians rotation of x of 12ID-MR-1 relative to the incoming beam is required to select the incident angle of the mirror. For this motion, the axis of rotation shall be on the optical surface centered along the length of the mirror.

z Rotation Overall manual motions of ±0.01 radians rotation of z of 12ID-MR-1 are required for alignment of the mirror.

2.7 Adjustable Hard Limits

Each motion of the mirror must be equipped with adjustable hard limits to restrict the range of motion once the mirror has been aligned. For compliance with the beamline Radiation Safety System, the y motion of the 12ID-MR-1 mirror has to be hard limited to less than or equal to 0.008 rad. For the same reason, the minimum bending radius of the 12ID-MR-1 mirror has to be hard limited to equal or greater than 7 km in concave setting.

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3 Specifications

3.1 Mirror Specifications

Table 3.1.1

Parameters 12ID-MR-1

Mirror type Flat, with elliptical bender

Mirror deflection orientation Horizontal Inboard

Nominal angle of incidence 2.0 mrad

Typical length of beam footprint 600 mm

Mirror

Optical Surface size 600 mm × 45 mm

Mirror Material Si, single crystal

Stripes Pd, Si, Pt

Stripe configuration Each stripe should be 15 mm wide and extend the entire length of the mirror along the beam direction.

Typical Coating Thickness Specifications:

Pd/Pt 500Ǻ ± 10% over a Cr binding layer 100Ǻ ± 20%

The stripe material density should be > 95% bulk density. A witness substrate shall be coated along with the stripes and returned to the APS for characterization and approval before the mirror is shipped from the supplier.

Non-optical ground surface finish Ra (average roughness) < 0.25 µm

Optical Surface

Tangential radius Flat, R > 300 km

Sagittal radius Flat, R > 20 km

Tangential RMS slope error with optical coating

(frequency 1/L~0.5 mm-1) ≤0.1 µrad

Tangential RMS height error ≤1.5 nm

Sagittal RMS slope error (frequency 1/W~0.5 mm-1) <1 µrad

RMS micro-roughness after coating <0.15 nm

Surface Quality

Mirror bender

Minimum bending radius R > 10 km

Total tangential slope error with bending <0.12 µrad (Removing 3rd order polynomial best fit)

Tangential surface figure cylindrical

Twist angle* <100 µrad

*Defined as the angle between the upstream end edge and the downstream end edge, see Section 3.6 for details about the twist angle adjustment.

3.2 Motion Control Specifications

All remotely controlled motions for the 12-ID Mirror will be performed using stepping motors for coarse motion and PZT actuators for fine motion if needed. All stages should be internal to the vacuum chamber or fit within the space claim listed in section 3.5.

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The vendor shall supply motor drivers controllable with differential step and direction signals. The motor drivers should use power supplies limited to 48Vdc. These drivers should be used for all factory acceptance testing as described in Section 7.1. The vendor may suggest controller-driver combinations as long as the controller is compatible with EPICS (http://www.aps.anl.gov/epics/). The controls group from APS will review the system for approval.

The motors/motions will be monitored via position feedback devices, equipped with limit switches and hard stops. Position feedback devices examples include but are not limited to absolute or relative encoders, capacitive sensors, or Linear Variable Differential Transformers (LVDT). All motors and position feedback devices must be compatible with EPICS supported motor controllers. Limit switches must be

‘normally closed’ and both the switches and the hard stops must be accessible for adjustments. Hard stops are defined as physical barriers that prevent system from driving past them in the case limit switches fail.

Position feedback devices must have a communication interface, preferably BiSS, Ethernet, or RS-232, but not USB. Since these devices and their electronics can be sensitive to radiation, they should be situated or shielded to protect them from white beam radiation scattered by any component inside the mirror tank or reflection off the mirror tank. All cabling must be sufficiently shielded and grounded to prevent charge build up from damaging the devices The vendor must specify all motorized hardware in the PDR to allow verification of APS compatibility.

All electrically energized systems shall be listed by a nationally recognized testing laboratory (NRTL). A

Nationally Recognized Testing Laboratory list may be found at https://www.osha.gov/dts/otpca/nrtl/nrtllist.html. All connections and terminations need to be NFPA 70 latest edition compliant. If integrated assemblies of electrical components have not been tested, the supplier must be able to demonstrate that the assemblies or individual components have been constructed according to applicable standards such as those associated with Underwriters Laboratories

(UL), the American National Standards Institute (ANSI), the Institute of Electrical and Electronic Engineers

(IEEE), the National Electrical Manufacturers Association (NEMA), Semiconductor Equipment

Manufacturers International (SEMI), or comparable standards organizations located outside the United

States. If the system is not listed by a NRTL, it will be inspected by the Argonne Designated Electrical

Equipment Inspectors (DEEI) program. If the electronics need to be inspected by Argonne DEEI personnel, this should be identified during the PDR/FDR process.

https://www.osha.gov/dts/otpca/nrtl/nrtllist.html

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Table 3.2.1

Parameters Value

12ID-MR-1

X Translation Horizontal (motorized motion) (mm) [XT]

Range ±5

Resolution* 0.002

Repeatability ≤ 0.005

Y Translation Vertical (motorized motion) (mm) [YT]

Range ±25

Resolution 0.002

Repeatability ≤ 0.005 y Rotation (motorized motion w/ fine scale piezo motion) (radians)

PZT Range +5.0e-5

PZT Resolution 1.0e-7

Motorized Total Range -0.002/+0.005

Motorized Resolution* 1e-6

Motorized Repeatability ≤ 2e-6 x Rotation (manual motion) (radians)

Range ±0.015

Resolution* 1e-4

Repeatability ≤ 2.5e-4 z Rotation (manual motion) (radians)

Range ±0.01

Resolution* 5.0e-6

Repeatability ≤ 2.0e-5

*Resolution=Minimum Step size, **Repeatability is unidirectional, i.e., when backlash correction is used.

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Motion tolerances are listed in tables below:

Table 3.2.2

Parameters Value

Allowable induced error after vertical translation 12ID-MR-1

X (mm) 0.005 z (radians) ≤ 1e-5 y (radians) ≤ 1e-6 x (radians) ≤ 5e-5

Table 3.2.3 Parameters Value

Allowable induced error after bending from flat to the minimum radius

12ID-MR-1

X (mm) 0.005 z (radians) ≤ 1e-5 y(radians) ≤ 1e-6 x (radians) ≤ 5e-5

Table 3.2.4

Parameters* Values

Vibrational and Drift Dynamics 12ID-MR-1

Natural vibration frequency of vessel and vessel support structure >100 Hz

Natural vibration frequency of mirror bender/support structure >100 Hz θy stability (1-2500 Hz) [RMS] < 50 nrad

Long term (>1 hr) θy stability [RMS] < 100 nrad

*Specifications measured with x-ray beam are done without feedback

3.3 X-ray Parameters

Table 3.3.1

Parameters (For reference only) Value

Source location (m) (Origin at the center of the straight section) -1.25

Nominal white-beam height measured from the floor (mm) 1400

Undulator periods (mm) 28

Length of undulator (m) 2.1

Deflection parameter for highest operation power K 2.458

Number of periods 74

Front end aperture size (mm H x mm V) 2.0 x 2.0

Front end aperture location (m) 25.4

Operational White beam slit (mm H x mm V) 1.2 x 1.0

White beam slit location (m) 27.2

12ID-MR-1 location (m) 28.737

Beam size at the 12ID-MR-1 1.268 x 1.057

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3.4 Cooling

The preferred method for cooling the 12ID-MR-1 is a eutectic bath. There must be a shield to prevent from spilling of eutectic to the mirror surface. If however examples are provided of alternative cooling methods for bendable mirror that are able to meet all other specifications then these methods will be considered.

All cooling methods and geometries must be designed to reduce the thermally induced slope error in the worst-case operational power load listed in Table 3.4.1. The vendor may choose to adjust the mirror length so that it is either fully or partially illuminated, as long as the optical surface meets the requirements in

Table 3.1.1 and < 0.1 µrad thermally induced Tangential slope error on the mirror (after removal of the best-fit cylinder within the optical length). At the same time, the vibration amplitude in the mirror y must the specification in Table 3.2.4 even with the chiller operating and water flowing through the cooling lines at the maximum expected flow rate.

The temperature of the mirror and mask must be monitored via type K thermocouples, attached in regular distances along the length of the component, and connected to the outside of the vacuum chamber via vacuum feedthroughs.

Table 3.4.1 Thermal Parameters

Parameters Value

Thermal and Vacuum Management 12ID-MR-1

Maximum absorbed power under nominal operation (W)* 315

Peak power density on the mirror surface under nominal operation (W/mm2)*

0.474

Maximum normal incidence total power (W)** 1045

Peak normal incidence power density (W/mm2)** 309

Allowable thermal induced slope error, within 80% central active length, remove best-fit cylinder (µrad)

< 0.10

Preferred cooling method Eutectic Bath ***

Cooling contact material InGa eutectic

Baking compatibility assembly without mirror/cooling (°C) 120C

Baking compatibility with mirror/cooling (°C) 100C

Vacuum pressure at room temperature (Torr) < 2 × 10-9

Vacuum pressure during operation (Torr) < 4 × 10-9

* The maximum absorbed power is the power under which the mirrors need to meet all specifications.

Beam defined by 1.2 mm × 1.0 mm white beam slit.

** The maximum normal incidence power and peak power densities are the highest powers and densities that may be incident on the mirrors. Beam defined by 2 mm × 2 mm front end exit aperture at 25.4 m. X-ray source parameters see Table 3.3.1.

*** Eutectic Bath must have shield to prevent splashing or spilling onto optical surface

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3.5 Mirror Masks and Compton Shielding

A water-cooled mask is needed to protect the upstream face of the mirror from miss-steered beam exposure. Water piping should be designed to be in accordance with ASME B31.3. This mask shall be located inside the mirror tank, its shallow edge protruding beyond the upstream edges of the mirror by a few microns, carefully aligned so as not to shadow the useful length of the mirror above a mirror angle of

1 mrad. The mask must be able to withstand the maximum incident power and it shall be equipped with type K thermocouples for temperature measurement. The total maximum incident white beam power to the mirror is 1045 W with a peak power density of 309 (W/mm2). These calculations are based on the total power through the 2 mm × 2 mm front end exit aperture with the maximum closed gap. All other relevant parameters are listed in Table 3.3.1.

Compton scattering is a significant source of heat. When scattered radiation strikes a mirror support, the component could drift, resulting in a change of the mirror angle. The mirror supports therefore shall be designed to minimize exposure to scattered radiation and be protected by the placement of appropriate shields. Compton shields should be water cooled and thermocouples should be in place to monitor their temperature.

3.6 Support Structure and Lifting

The mirror should be isolated from vibration of upstream and downstream beamline components. The mirror should be mounted on stable support structure(s), such that ground vibrations are not significantly amplified. In a laboratory environment where the temperature is stabilized to ±0.5°C, the y angle of the mirror system should not drift by more than 0.5 µrad over a 24-hr period.

The chamber and support must include lugs/eyes for lifting. In the highest position, the 12-ID-A crane hook is 2.47 m (96”) from the floor. The 12-ID-A crane has a load capacity of 2000 pounds. The support structure must include matching hole pattern for Flexello Jacking Casters Model No: JA6SUB. The hole pattern must be positioned such that the support structure can be mounted on the casters from the floor and be raised at least 2”.

Lifting of the mirror lid for removal must be compatible with this lifting hook and crane and must clear all mirror components located inside the chamber.

3.7 Space and Height Requirements

The 12-ID Mirror system is located within the 12-ID-A hutch. The center of the mirror (vertical mirror) center at 28.737 m. The maximum inboard extension of the mirror system from the X-ray beam shall be no greater than 500 mm. The maximum outboard extension of the mirror system from the X-ray beam shall be no greater than 540 mm. The total length of the mirror systems from flange to flange should be less or equal to 1800 mm. The nominal beam height at the first mirror location is 1400mm from the ground. Footprints are to be reviewed by the APS prior to final design review.

3.8 Mirror Benders

Mirrors shall be equipped with two-moment mechanical benders to achieve an elliptical surface in the tangential plane. Position feedback devices shall be provided to ensure the repeatability and stability of

13 | P a g e the bending mechanism. Once the user has selected or adjusted the desired bending, the new bending radius should be fixed and stable to better than 1% over 24 hrs. The mirror bender shall provide continuous bending from flat to the maximum bending. When unbent, the mirror surface should be flat

(as specified in Sect. 3.1, flat means tangential R < -100 km and sagittal R > 20 km).

The bender shall be equipped with a twist angle adjustment motion if the twist angle specification in Table

3.1.1 cannot be satisfied. A manual twist adjustment (or shimming correction) is required for the initial mounting and alignment of the mirror in the mirror bender so that the twist angle is <100 µrad. If this twist angle specification (<100 µrad) cannot be satisfied in the entire bending range, a motorized twist angle adjustment shall be required.

4 Vacuum Specifications Design, material, fabrication, cleaning, handling, tests, and packaging of the vacuum system and components shall conform to the following APS documents included as attachments with this SOW:

• APS ICMS Document No. APS_2018473, APS-U Engineering Standard Vacuum Designs

• APS ICMS Document No. APS_066006, Technical Specification for Fabrication of UHV Front End and Beamline Components, Revision 1.

All parts of the 12-ID Mirror system, such as motor wiring and other non-metal materials, in-vacuum motion parts, viewports etc. must be compatible with high vacuum (HV) standards. On bolted joints, the bottom of the tapped hole and the annular space around the shank of the bolt in the thru-hole section of the joint must both be vented.

All flanges must be Conflats, manufactured from 304 or 316 stainless steel and sealed with copper gaskets, except for the large vessel flange(s) that may use a viton seal as long as the viton is well shielded from radiation (e.g., a cm or more of stainless steel flange). The vessel must be fabricated from dull polished

304 grade stainless steel plates with full penetration welds, cleaned, and prepared in accordance with standard HV requirements.

The base pressure for the 12ID mirror without internal components must be less than 1x10-7 Torr at room temperature.

Prior to shipping, the vendor shall assemble, pump down, and vacuum test the entire HV assembly.

Organic adhesives and sealants, which could result in contamination of the mirror surfaces, shall not be incorporated into the in-vacuum assembly. Material that degrades under the radiation environment encountered in an APS undulator beamline shall not be used for the mounting fixtures and attachments.

All materials used, including in-vacuum labeling of components, must be disclosed to and approved by the

APS technical representative. No direct liquid-to-vacuum seals are allowed inside the chambers.

To allow compatibility with the beamline vacuum system, the vendor will supply ion pumps from Gamma

Vacuum LLC, and either cold cathode gauges from Televac or hot cathode gauges from Granville-Phillips.

The vendor must submit the ion pump and controller model numbers to the APS for approval prior to purchasing. The ion pump and the ion gauge shall not be positioned in a direct line of sight to the optical surface of the mirror. This might require addition of a permanent baffle to limit line of sight, but must be done to minimize impact on ion pumps conductance. Vendor shall provide glow discharge screen on ion pump. Protect knife-edges from dents, nicks, and scratches, and protect flanges with foil and plastic caps.

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4.1 Ports

The vacuum chamber shall have the following CF ports: 6” beam inlet and outlet, vacuum pump port, turbo pump, RGA, ion gauge, roughing venting and leak-check, spare 2-3/4”(2). Additonal flanges for feedthroughs are expected.

Inspection windows shall be placed such that there is a clear view of the mirror surfaces from the exterior of the vacuum chamber. These windows shall be quartz to avoid discoloration due to radiation damage. A third window should be positioned to illuminate the interior of the vacuum chamber.

4.2 Vacuum components and Tasks Provided by APS

Calibrated vacuum instruments and equipment are required for factory acceptance testing at the fabrication facility. The vendor shall provide a list of equipment and instruments to be used for factory acceptance testing for approval by the APS prior to use. The vacuum instruments and equipment shall be calibrated and traceable to the U.S. National Institute of Standards and Technology or equivalent standards laboratory. The vendor shall provide copies of the calibration certificates or records for the equipment being used to perform the acceptance tests. APS will provide the relative testing instruments.

5 Quality Assurance The vendor shall adhere to all quality control requirements as specified in this document. Any deviations from these specifications must be communicated to the tech rep for approval prior to proceeding.

6 Packing and Shipping The vendor is responsible for properly packing and shipping all components. The KB Mirror System will be used in a high vacuum environment and shall remain HV clean during shipping.

The mirrors and the chambers must be packaged in separate containers. The mirrors must be securely fastened in hermetically sealed shipping containers to prevent chafing that could damage the mirror and/or generate contaminating particles. The vacuum chambers shall be sealed with blank flanges. The assemblies shall be securely fastened, padded, boxed, and crated. The shipping container shall have indicators for shock and tip on the exterior of the crate and an orientation arrow. The gross weight of the container with units clearly indicated shall be written on the side and top of the crate.

The crates shall be suitable for lifting and transportation without damage using a forklift or crane during delivery. They must allow storage of the items for a period of 3 months in an indoor environment.

The vendor shall prepare a plan describing the shipping, lifting, and handling of the assemblies. APS shall review and approve the plan prior to shipment.

Each shipping container shall also contain the quality assurance records specified in the ANL-407 form.

For shipping from other countries, the use of an experienced customs agent or customs-bonded freight forwarder is highly encouraged.

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7 Mirror System Acceptance Tests

7.1 Factory Acceptance Tests (FAT)

The APS reserves the option to be present (physically or virtually) during factory acceptance testing of the mirror system. The vendor shall give at least an 8-week notice prior to any factory test date to allow for the necessary travel arrangements to be made.

The mirror system shall be fully tested at the vendor’s facilities prior to delivery to APS. The factory acceptance test procedures shall be prepared in advance and submitted to APS for approval before starting the testing work. The test results must demonstrate that all specifications described in Section

Error! Reference source not found. have been met. All tests must be properly recorded on test certificates and the results submitted to the APS Technical Representative for approval.

These reports shall contain the signature and title of the authorized contract representative of the agency performing the tests and shall be approved by Supplier Quality Assurance. The data submitted shall also be transmitted in electronic PDF format to the APS technical representative. Any non-conformances resulting from the testing process shall be reported to the technical representative within 72 hours of discovery.

7.1.1 Vendor-based Optical Metrology Measurements

Mirror figure errors and surface micro-roughness must be measured by the vendor after polishing and coating. The vendor shall prepare a plan describing the metrology techniques. The APS Technical

Representative shall review and approve the plan prior to implementation. If a subcontractor is used to manufacture the mirror substrate, these measurements shall be carried out by the subcontractor, and the results shall be approved by APS prior to delivery of the substrate to the vendor.

The metrology data collection requirements are given below

• Tangential slope errors o Measured over the range: 1 mm – full active optical length o Parallel line scans along tangential direction, minimum of 3 scan lines, cover the entire active optical width, measurements shall be performed after coating. The measurement lines should be parallel to the central line of the mirror surface within 1 mrad.

• Sagittal slope errors o Measured over the range: 1 mm – full active optical width o Parallel line scans along the sagittal direction, a minimum of 5 scan lines, cover the entire active length.

• Roughness o Measured over the sampling length range: 1 µm – 1 mm o Measured at a minimum of 10 (ten) distributed locations within the active area, recording

(approximately) the measurement location. Measurements shall be performed after coating.

The mirror figure errors and surface roughness specifications are listed in Table 3.1.1. A few general requirements are listed below:

• There should be no dominant peaks in the power spectral density of the tangential figure errors

• <0.5 scratches or points per cm2 to the unaided eye over 99% of the optical surface o within the active optical area

16 | P a g e o under illuminance of 15000 lumen/m2 or greater for all possible relative positions of inspection lighting and observation

7.1.2 Mechanical Testing

All motorized motions shall be tested and verified to be in conformance with Appendix Tables 3.2.1, 3.2.2, 3.2.3, and 3.2.4.

7.1.3 Vacuum Integrity

The base pressure shall be measured using cold cathode gauges from Televac or hot cathode gauges from

Granville-Phillips or equivalent. The base pressure for the 12ID Mirror vacuum chamber must be less than

2x10-7 Torr at room temperature. The helium leak rate must be less than 2x10-10 mbar L/s when the part is surrounded by helium for 3 minutes. The leak-rate background should be measured before the vessel is exposed to helium.

7.2 Acceptance Tests Performed at the APS

The acceptance tests will be used to determine compliance with the specifications listed in Section Error!

Reference source not found.. The vendor must provide a detailed procedure to ready the mirrors for measurements from its shipping constraints. Mirror roughness may be verified prior to mounting. The mirror figure errors and bending response must be measured in their holders.

On-Site acceptance tests will include measurements of the following properties:

• Surface Roughness (APS responsibility)

• Tangential and sagittal slope error and radius tolerances (APS responsibility)

• Bender calibration and characterization (APS responsibility)

• Allowable mirror twist angle during bending between flat and the nominal focusing (APS responsibility)

• Allowable induced error after y translation (vendor Responsibility with APS Present)

• Allowable induced error during bending between flat and the nominal focusing (vendor Responsibility with APS Present)

• Vibrations (vendor Responsibility with APS Present, see Section Error! Reference source not found.)

• Vacuum Integrity (vendor Responsibility with APS Present, see Section Error! Reference source not found.)

• Motion controls, encoders, and sensors (vendor Responsibility with APS Present)

7.2.1 Surface Roughness

Surface roughness will be measured using a calibrated phase-shifting microscope interferometer - a Zygo

NexView™ system. Two different objective lenses with different magnifications (50× and 5.5×) will be used. The 50× objective lens has a 0.16 µm resolution and a field of view of 170 µm × 170 µm. The 5.5× has a 1.47 µm resolution and a field of view of about 1.5 mm × 1.5 mm. NexView™ has a zoom capability of 0.5×, 1×, and 2×.

The mirror surface clear aperture will be measured at 10 widely distributed locations. Raw 2-D data will have tilt and power subtracted prior to RMS roughness calculation and averaging.

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7.2.2 Tangential and Sagittal slope error

The figure error measurements will be performed using a combination of slope-measuring profilometry and 2-D phase measuring Fizeau and microscope interferometry with subaperture stitching. Slope error data will be acquired using the APS slope measuring system, which is equipped with three autocollimator-based slope sensors operating in the Nanometer Optical Measuring (NOM) measurement mode. The system has an angle resolution of 20 nrad rms. Multiple measurements will be carried out and integrated to extract the mirror height profile. 2-D phase measurements will be carried out using the calibrated Zygo

Verifre™ HDX interferometer at normal incidence for <150 mm and at grazing incidence for the longer mirrors.

Where required, microstitched superaperture measurements will be performed using the APS NexView™ profiler, which will be equipped with a 2.75× objective lens, which has 2.93 µm optical resolution and a field of view up to 6 mm × 6 mm.

The mirrors will be evaluated in their mounting support and deflecting configuration as specified in this

SOW. The above measurements will be used to verify vendor measurements and determine compliance with the specifications.

7.2.3 Bender Calibration and Characterization

The bender calibration shall be carried out at the APS Metrology Facility with a vendor representative present to assemble the bender and mount the mirror substrate. If there are schedule conflicts with the

APS metrology facility, a third-party facility may be contracted. The following parameters will be measured:

• NOM profiling will provide tangential slope error data at the nominal focusing radius

• Hysteresis and repeatability will be conducted. These tests will include 5 cycles from unbent to the nominal focusing condition

• A calibration curve between the encoders and the bent mirror shape will be measured

• Stability over 24 hours will be measured at the nominal focusing condition

• Parasitic motions in θx, θy, θz and translation during bending between flat and the nominal focusing condition will be measured

7.2.4 Vibrations

The vendor shall perform vibration measurements on the mirror to demonstrate that the mirror assembly meets the tolerances listed in Table 3.2.4. The intention is for the vendor to consider the vibration performance during the design process. The APS floor vibrations are quantified in the attached document:

“A Survey of Floor Vibration Noise at all Sectors in the APS Experiment Hall,” LS-344, S. Kearney, and

D. Shu. ICMS Document No. APS_1699863. The average data across all sectors, shown in Figure 2 should be used to inform the mirror design. These data are also available electronically.

The lowest natural frequency (eigenfrequency) of the entire mechanical system, including the vacuum chamber, shall be greater than 100 Hz. A relatively high eigenfrequency of 100 Hz will not be excited by floor vibrations that are typically lower than 40 Hz at the APS.

For all vibration tests, the mirror shall be mounted as installed at the APS. The chamber itself shall be mounted on a honeycomb breadboard.

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The APS shall be notified at least 8 weeks in advance of the tests.

The vendor shall make the following measurements and vibration data analyses:

• Simultaneous ambient vibration level measurements of the tabletop and the mirror support base.

• The magnitude of the transmissibility between the floor and the mirror in each of the X, Y, and Z directions.

• Simultaneous ambient vibration level measurements of the floor and the mirror (mirror surrogate or on the mirror holder are acceptable).

• Impact frequency response function (FRF) measurements of the mirror to determine the natural frequencies in X, Y, and Z directions.

The vendor shall propose a testing procedure for each of these measurements for review by an APS engineer prior to making the measurements.

8 Installation and Alignment

8.1 On-Site Assembly and Installation

On-site assembly of the 12ID Mirror system, including the optics and installation of the system into the beamline, will be carried out by the vendor. At least one vendor technician shall be available for five working days. Beamline representatives and APS staff will be available to assist in the acceptance and installation process. The vendor shall supply a handling and rigging plan. The vendor will submit a service contract Job Safety Analysis (JSA) for this work activity as a high-risk service contract. Upon arrival at ANL, vendor personnel shall take ANL Contractor Safety Training and satisfy all APS safety requirements before beginning installation and any other work activities associated with the installation and testing procedures.

A half-day should be allocated at the beginning of the installation for ANL Contractor Safety Training and a pre-job safety briefing and inspection.

All motion components, vacuum and mechanical fabricated components, and their assembly must be inspected by the vendor at the APS for damage and wear before testing and site installation.

At installation, the APS will supply the following vacuum related items/equipment: Vacuum components such as turbo pumps, leak checker, valves, vacuum gauges, cables, power supplies, controllers, pressure read-out electronics, and right-angle valves.

8.2 Alignment Relative to the X-ray Beam

The design of the 12ID Mirror chamber shall have an easy means to align the mirrors relative to the X-ray beam. Prior to alignment, the APS Survey and Alignment Group will fiducialize the mirror surface in its nominal position. Fiducials located on the main support structure of the mirror will be referenced to the mirror’s planar surface and orientation with respect to the nominal beam centerline. The fiducials should be easily accessible, distributed widely across the component and as near to the position of the adjustment mechanisms as possible to increase the accuracy. A line of sight to the mirror surface should be provided such that a Laser Autocollimator can measure both mirrors θZ either directly or through a pentamirror to ensure orthoganality. Support from the APS survey group will be available during installation.

Machined features that may be utilized as fiducials include:

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• Precision holes with a precise diameter of 0.2500”; +0.0003” / -0.0000” drilled normal to a flat seating surface. The flat surface must meet the “machined flat” tolerance given above. The holes will accept various alignment fixtures for use with laser trackers, CMM arms, and/or optical instruments.

Fixed, prefabricated fiducial monuments are commercially available and are preferred, as they provide increased measurement repeatability and reproducibility. The monuments may be permanently welded to a component or adhered with glue. Vendors include:

• Hubb’s Machine and Manufacturing

• Brunson Instrument Company

The placement of and number of fiducial points will be approved by the APS Survey and Alignment group as part of the PDR and FDR.

8.3 On-site Mechanical Testing

Motion testing of all motorized axes, pump-down, vacuum, and pressure testing of all fittings and seals will be carried out by the vendor after installation into the beamline. Helium leak checking to 2 x10-10 mbar l/s will be done using an APS-supplied leak detector.

Attachments

[1] “APS Engineering Standard vacuum Designs”, ICMS Document No.: APS_2018473.

[2] “Technical Specification for Fabrication of UHV Front End and Beamline Components”, Revision 1. APS ICMS Document No. APS_066006

[3] “A Survey of Floor Vibration Noise at all Sectors in the APS Experiment Hall,” LS-344, S. Kearney and D. Shu. ICMS Document No. APS_1699863 https://hubbsmachine.com/laser-tracker-5-sphere-mount-/142-5-dn.html https://brunson.us/metrology-3d-measurement-smr-target-holders-0-5-thdn-t-drift-nest-tie-down.html