AL-1778-6137B Technical Specification of the ALS-U M1 Mirrors for BL5321 and BL5322.pdf

Advanced Light Source Lawrence Berkeley National Laboratory

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left corner of the document's pages.

Printed hard copies of this document are for reference only.

Technical Specification of the ALS-U M1 Mirrors for

BL5321 and BL5322

Alastair MacDowell

Release Date: May 7 2025 12:32:24 PM PDT

Document Number: AL-1778-6137 Revision: B

Document Status: Released

Document Type: NOTE

Category Code: AL6102

ALS - BEND MAGNET BEAMLINES

BL 5.3.2 BRANCH LINE

O ffi ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

I

Downloaded by: Windchill Watermarker

AL-1778-6137 Rev. B Doc. Status: Released Page 2 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

TABLE OF CONTENTS

1 Revision History

2 Approvals

3 Abbreviations and Acronyms

4 Applicable Documents

5 Introduction

5.1 Requirement definition

5.2 Identification number

6 General

6.1 Description

6.2 Environment

6.3 Units and hardware policy

7 Technical Requirements

7.1 General

7.2 Optical specification

8 Factory Acceptance Test (FAT)

9 Shipping and Handling ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 3 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

1 REVISION HISTORY

Rev. CM Number Description of Change A Baseline B C

2 APPROVALS

The following individual(s) shall review this document:

Reviewer Project Role Stefan Soezeri ALS 2.0 Beamline 5.3 Front End Engineer Dean Kurilich ALS 2.0 Bend Magnet Beamlines Lead Engineer Arnaud Allézy ALS 2.0 Chief Engineer Approver Project Role Daniele Cocco ALS 2.0 Optical Scientist Windchill:

Checked by: APAllezy,dkurilich,ssoezeri Released by: dcocco ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 4 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

3 ABBREVIATIONS AND ACRONYMS

ALS Advanced Light Source

ALS-U Advanced Light Source Upgrade

CMM Coordinate-Measuring Machine

CAD Computer-Aided Design

DEF DEFinition

FAT Factory Acceptance Test

FATP Factory Acceptance Test Plan

HDPE High-Density PolyEthylene

ID Identification

LBNL Lawrence Berkeley National Laboratory

N/A Not Applicable

NUM Number

PMMA polymethyl methacrylate

PFA perfluoroalkoxy alkanes

PTFE Polytetrafluoroethylene rms root-mean-squared

ROC Radius Of Curvature

SI International System of Units

UHV Ultra-High Vacuum

VIA Variable Included Angle

VLS Variable Line Spacing ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 5 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

4 APPLICABLE DOCUMENTS

This section identifies applicable documents that are considered to be a part of this document. All information contained in an applicable document shall be valid to the full extent, unless specifically noted within this document.

Number Rev. Title AL-1009-9880 B ALS-U Units Policy and Units Definition AL-1220-7841 G UHV Chamber and Component Production Requirements AL-1788-5220 A BL5.3.2.1 M1 Mirror AL-1789-9198 A BL5.3.2.2 M1 Mirror ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 6 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

5 INTRODUCTION

The purpose of this technical specification is to provide information needed by the

Subcontractor to fabricate, test, and ship two synchrotron mirrors. The mirrors will be installed as the first mirror in bend magnet beamlines BL5.3.2.1 and BL5.3.2.2.

5.1 Requirement definition

Shall, should, may, and will are used to define every requirement listed in this document.

The definitions of these terms are as follows:

- Shall is a requirement that must be implemented

- Should indicates a desire and can be interpreted as ‘best effort’

- May indicates a desire and can be interpreted as ‘nice to have’

- Will is used to inform intent or declaration of purpose and is not a requirement

5.2 Identification number

Each requirement stated in this document shall have a unique ID NUM. Once an ID

NUM has been assigned to a specific requirement, the ID NUM cannot be changed or reassigned.

The ID NUM formant is as follows: QQQQ, where QQQQ is a unique four digit number.

ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 7 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

6 GENERAL

6.1 Description

Table 1 lists the mirrors described by this technical specification and the associated drawings. Both the BL5.3.2.1 and BL5.3.2.2 mirrors have the same external dimensions but different radii for the single polished toroidal optical surface, also called clear aperture

(CA). Figure 2 is a projected view of the mirror, while the mirror dimensions are specified in the drawings in Table 1. The optical specifications, including optical surface coating, radii of curvature, and associated tolerances, are specified in section 7.2.

The mirrors are the first mirrors of two similar bend magnet beamlines. The mirrors horizontally deflect and focus the light at a grazing angle of 1.754 deg. and 3.110 deg. for

BL5.3.2.1 and BL5.3.2.2 mirrors respectively. The mirror mounting and cooling scheme is the same at each beamline. The “back” surface of each mirror is in contact with three spherical points of contact on a cooled vertical surface. The slots on the mirror ends are used to lightly clamp the mirror against these three points. Cooling of each mirror is accomplished by clamping copper water cooled plates to the top and bottom mirror surfaces. Thermal connection between the top and bottom cooled plates is ensured via a thin film of gallium/indium/tin (GaInSn) eutectic. With this mounting scheme, gravity is not expected to significantly distort the mirror.

Figure 1. 5.3.2.2 (left) and 5.3.2.1 (right) CAD assemblies (AL-0130-1356).

The two new mirrors described by this specification replace the existing M1 mirrors at

BL5.3.2.1 and BL5.3.2.2, so the mirror foci are fixed. To reduce the amount of adjustment ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 8 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left and realignment when installing the new mirrors, the toroidal radii have a tight tolerance.

Quotations for radii tolerance of ±1% and ±0.5% are requested.

Tangential and sagittal curvatures refers to those illustrated in Figure 3.

Table 1 Mirror labels and associated detailed drawings.

Beamline Label Optical Shape Drawing

5.3.2.1 5321M1 Toroidal AL-1788-5220

5.3.2.2 5322M1 Toroidal AL-1789-9198

Figure 2. ISO view of mirror, per AL-1788-5220.

ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 9 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

Figure 3. Mirror illustration representing tangential and sagittal curvature

(image source: http://www.lasertechn.com/index.php/toroidal-mirrors).

6.2 Environment

The mirrors will operate in UHV and should be handled and shipped accordingly.

Products used during mirror fabrication, for polishing and/or cleaning, should not leave residue that will compromise UHV performance of the mirror vacuum system. The mirrors shall be cleaned for UHV, as well as components that interface with the mirror, e.g. inner components of the shipping container.

6.3 Units and hardware policy

AL-1009-9880 specifies that the SI system of units shall be implemented for this

Subcontract. All documents generated shall use the SI system.

ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 10 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

7 TECHNICAL REQUIREMENTS

7.1 General

ID

NUM Requirement

0005 The mirror shall be bakeable at 120°C

0010 The mirror shall be shipped clean and ready for use in UHV

The mirror shall be fabricated per the drawing noted in

The mirror should be made in single-crystal silicon, polished surface to be the <100> crystal plane.

0025 All non-optical surfaces shall be fine ground and wet chemical etched

0030 All requirements listed hereinafter shall be met before and after coating

7.2 Optical specification

ID

NUM Requirement

The clear aperture shall be polished on the mirror’s optical face per the drawings in Table 1 and the specifications below.

No scratches larger than 20 mm long shall be visible within the clear aperture under an illuminance of 15000 lumen.m-2 for all possible relative positions/orientations of inspection

Less than 10 scratches less than 20 mm long or point defects shall be permitted within the clear aperture under an illuminance of 15000 lumen.m-2 for all possible relative positions/orientations of inspection

0050 Coating shall cover, at a minimum, the entire clear aperture ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

ID

NUM

DEF Requirement Description

BL5.3.2.1

M1

BL5.3.2.2

M1

Unit

0055 Shall Shape profile Toroidal Toroidal N/A

0060 Shall Tangential ROC 134.77m 169.32m m

0065 Shall Sagittal ROC 0.4196m 0.6906m m

0070 Shall Tolerance Tangential ROC ≤±1% and ≤±0.5% ≤±1% and ≤±0.5% %

0075 Shall Tolerance Sagittal ROC ≤±1% and ≤±0.5% ≤±1% and ≤±0.5% %

0080 Shall Tangential slope error ≤ 1.0 ≤ 1.0 μrad-rms

0085 Shall Sagittal slope error ≤ 3.0 ≤ 3.0 μrad-rms

0090 Shall Plane of toroid parallelism to mirror longitudinal side

<±0.5 <±0.5 mrad

The “plane of the toroid” describes the line along the center of the clear aperture in the tangential direction. This should be parallel to the indicated top and bottom surfaces of the substrate to the specified amount. (Equivalent to say that the axis of rotation perpendicular to the tangential plane must be perpendicular to the top and bottom faces within the specified amount).

0095 Shall Coating material Gold Nickel N/A

0100 Shall Coating thickness 50 50 nm

0105 Shall Coating thickness variation

<5 Peak to Valley <5 Peak to Valley nm

0110 Shall Roughness Coated Optical Surface

≤ 0.5 ≤ 0.5 nm-rms

0115 Shall Coating release/binding layer

Required Required Specify

The binding layer shall be approved by LBNL and shall guarantee a perfect adhesion of the coating to the Silicon substrate as well as the chemical removal of the coating if necessary, without any mechanical action or need of re-polishing.

ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 12 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

8 FACTORY ACCEPTANCE TEST (FAT)

The Subcontractor shall develop a Factory Acceptance Test (FAT) Plan that demonstrates all requirements listed throughout this specification are met. The FAT shall be performed on all mirrors. All FAT shall be reported in written form and an electronic copy of all results and raw data shall be provided.

ID NUM Requirement

0120 A visual inspection shall look for scratches or point defects within the clear aperture

The ROC and slope errors shall be measured along 3 tangential lines as shown in Figure 2.

Include spatial wavelengths of 2 mm to the full length of the clear aperture

The ROC and slope errors shall be measured along 4 sagittal lines as shown in Figure 2.

Include spatial wavelengths of 1 mm to the full length of the clear aperture

The mid-spatial frequency roughness, including wavelengths of 1 µm to 1 mm, shall be measured at 10 random locations within the free aperture

The vendor’s desired measurement device should have the capability to measure and control the dimensional and geometric tolerances of the mirrors with a resolution and uncertainty better than 10% of the stated requirement.

Measurement of the direction of the largest radius of curvature (a.k.a. the axis of symmetry) with respect to one of the long edges of the mirror.

Figure 4. Lines for RMS slope error measurements on the mirror surface.

ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H

AL-1778-6137 Rev. B Doc. Status: Released Page 13 of 13

All officially released LBNL documents are watermarked and contain LBNL Document Control Center release information in the lower-left

9 SHIPPING AND HANDLING

The Subcontractor shall be responsible for shipping all units to LBNL in boxes that shall prevent damage and contamination of the mirrors during transportation and storage. The design and materials used in the shipping container should also permit long term storage

(>1 year) of the mirror, without significant risk of dust or hydrocarbon contamination.

ID NUM Requirement

Finished optic shall be fitted with a custom cover assembly enclosing the entire optic and protecting the optical surface. The optic, with cover assembly, shall be bagged and back-filled with dry nitrogen. The bagged assembly shall be fitted into a suitable shipping container.

No volatile adhesives are to be used in the packaging of the substrates. Only UHV-compatible materials shall be used inside and for the box. No material may be used that may produce vapors, particularly organics, which may contaminate the optic. For example: for the cover assembly, PMMA is prohibited, LEXAN or HDPE is acceptable, PFA or PTFE is preferred.

0160 The optical surface should not be in contact with any materials

0165 The mirror label shall be indicated on the box exterior ci al ly R el ea se d to th e

LB

N L

D oc um en t C on tr ol

C en te r

Re le as ed

: M ay th

, 2

D

C C

A ut h K ey : R

W Z8

U 3P

U H