AL-1777-2365A Technical Specification of the ALS-U M1 Mirrors for BL632 and BL1132.pdf

Advanced Light Source Upgrade Project

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Technical Specification of the ALS-U M1 Mirrors for

BL632 and BL1132

Alastair MacDowell

Release Date: Mar 18 2025 1:34:12 PM PDT

Document Number: AL-1777-2365 Revision: A

Document Status: Released

Document Type: NOTE

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Table of Contents

1 Revision History

2 Approvals

3 Abbreviations and Acronyms

4 Applicable Documents

5 Introduction

5.1 Requirement definition

5.2 Identification number

6 General

6.1 Description

6.2 Environment

6.3 Units and hardware policy

7 Technical Requirements

7.1 General

7.2 Optical specification

8 Factory Acceptance Test (FAT)

9. Shipping and Handling ci al ly R el ea se d to th e

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1 REVISION HISTORY

Rev. CM Number Description of Change

A Baseline

2 APPROVALS

The following individual(s) shall review or approve this document:

Reviewer Project Role

Chris Huschke ALS 2.0 Beamline 6.3.2 BL Engineer

Dean Kurilich ALS 2.0 Bend Magnet Beamlines Lead Engineer

Arnaud Allézy ALS 2.0 Chief Engineer

Approver Project Role

Daniele Cocco ALS 2.0 Beamline Instrumentation Lead

Windchill:

Checked by: APAllezy,dkurilich,chuschke

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3 ABBREVIATIONS AND ACRONYMS

ALS Advanced Light Source

ALS-U Advanced Light Source Upgrade

BL Beamline

CMM Coordinate-Measuring Machine

CAD Computer-Aided Design

DEF Definition

FAT Factory Acceptance Test

FATP Factory Acceptance Test Plan

HDPE High-Density PolyEthylene

ID Identification

IDBL Insertion Device Beamline

LBNL Lawrence Berkeley National Laboratory

N/A Not Applicable

NUM Number

PFA Perfluoroalkoxy Alkanes

PTFE Polytetrafluoroethylene

PMMA Poly(methyl methacrylate) or acrylic

RMS root-mean-squared

ROC Radius Of Curvature

SI International System of Units

UHV Ultra-High Vacuum

VIA Variable Included Angle

VLS Variable Line Spacing ci al ly R el ea se d to th e

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4 APPLICABLE DOCUMENTS

This section identifies applicable documents that are considered to be a part of this document. All information contained in an applicable document shall be valid to the full extent, unless specifically noted within this document.

Number Rev. Title

AL-1009-9880 B ALS-U Units Policy and Units Definition

30A180 A BL6.3.2 M1 Mirror, ALS-U

30A178 A BL11.3.2 M1 Mirror, ALS-U

AL-1220-7841 G UHV Chamber and Component Production Requirements ci al ly R el ea se d to th e

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5 INTRODUCTION

The purpose of this technical specification is to provide information needed by the

Subcontractor to fabricate, control and ship 2 synchrotron mirrors for the ALS-U project.

The mirrors will be installed as the first mirror in bend magnet beamlines BL6.3.2 and

BL11.3.2.

5.1 Requirement definition

Shall, should, may, and will are used to define every requirement listed in this document.

The definitions of these terms are as follows:

- Shall is a requirement that must be implemented

- Should indicates a desire and can be interpreted as ‘best effort’

- May indicates a desire and can be interpreted as ‘nice to have’

- Will is used to inform intent or declaration of purpose and is not a requirement

5.2 Identification number

Each requirement stated in this document shall have a unique ID NUM. Once an ID

NUM has been assigned to a specific requirement, the ID NUM cannot be changed or reassigned.

The ID NUM formant is as follows: QQQQ, where QQQQ is a unique four digit number.

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6 GENERAL

6.1 Description

Table 6.1 lists the mirrors described by this technical specification and the associated drawing. Both the BL6.3.2 and BL11.3.2 mirrors have the same external dimensions, but a different tangential radius for the single polished cylindrical optical surface, also called clear aperture. Figure 1 is a photo of an isometric view of the existing mirror assembly previously captured prior to an initial assembly. The optical specifications, including optical surface coating, radii of curvature, and associated tolerances are specified in section 7.2, while the dimensions are specified in the drawings in Table 6.1.

The mirrors are the first mirrors in the 2 nearly identical bend magnet beamlines and horizontally deflect and focus the light at a grazing angles of 2.584 deg. And 2.595 deg.

for 11.3.2 and 6.3.2 BL’s, respectively. The mounting of the mirror is to rest on a cooled horizontal flat shelf in UHV vacuum. As such, gravity is not expected to distort the mirror surface. Thermal connection between the mirror and cooled shelf is achieved via a liquid metal Ga/In/Sn eutectic. The mirror is thus single side cooled.

Figure 1. 6.3.2 and 11.3.2 mirror substrate and support flange assembled (left) and substrate placed forward from flange (right) ci al ly R el ea se d to th e

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Two quotes are requested per mirror for different tangential slope tolerances (0.5 and 1.0 μrad-RMS). The performance and price difference will be weighed, and the final required slope tolerance specified in the purchase contract.

Table 6.1. Mirror labels and associated detailed drawings.

Beamline Label Optical Shape Drawing

6.3.2 632M1 Tangential Cylinder 30A180

11.3.2 1132M1 Tangential Cylinder 30A178

6.2 Environment

The mirrors will operate in UHV and should be handled and shipped accordingly.

Products used during mirror fabrication, for polishing and/or cleaning, should not leave residue that will compromise UHV performance of the mirror vacuum system. The mirrors shall be cleaned for UHV, as well as components that interface with the mirror, e.g. inner components of the shipping container.

6.3 Units and hardware policy

AL-1009-9880 specifies that the SI system of units shall be implemented for this

Subcontract. All documents generated shall use the SI system.

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7 TECHNICAL REQUIREMENTS

7.1 General

ID

NUM Requirement

0005 The mirror shall be bake-able at 120°C

0010 The mirror shall be shipped clean and ready for use in UHV

0015 The mirror shall be fabricated per the drawing noted in Table 6.1

The mirror should be made in single-crystal silicon, polished surface to be the <100> crystal plane.

0025 All non-optical surfaces shall be fine ground and wet chemical etched

0030 All requirements listed hereinafter shall be met before and after coating

7.2 Optical specification

ID

NUM Requirement

The clear aperture shall be polished on the mirror’s optical face per the drawings in Table 6.1, which includes the dimensions, the position, and the tolerances

No scratches larger than 20 mm long shall be visible within the clear aperture under an illuminance of 15000 lumen.m-2 for all possible relative positions/orientations of inspection

Less than 10 scratches less than 20 mm long or point defects shall be permitted within the clear aperture under an illuminance of 15000 lumen.m-2 for all possible relative positions/orientations of inspection

0050 Coating shall cover, at a minimum, the entire clear aperture ci al ly R el ea se d to th e

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ID

NUM DEF Requirement Description

BL6.3.2

M1

BL11.3.2

M1 Unit

0055 Shall Shape profile

Tangential Cylinder

Tangential Cylinder

N/A

0060 Shall Tangential ROC 251.1+-0.5m 249.3+-0.5m m

0065 Shall Residual sagittal ROC ≥ |1| ≥ |1| km

0070 Shall Tangential slope error

≤ 1.0 and ≤0.5

≤ 1.0 and ≤0.5 μrad-rms

0075 Shall Sagittal slope error ≤ 5.0 ≤ 5.0 μrad-rms

0080 Shall Coating material Gold Gold N/A

0085 Shall Coating thickness 100 +/-5 100 +/-5 nm

0090 Shall Roughness Coated Optical Surface ≤ 0.3 ≤ 0.3 nm-rms

0095* Shall Coating release/binding layer Required Required Specify

0095* The binding layer shall be approved by LBNL and shall guarantee a perfect adhesion of the coating to the Silicon substrate as well as the chemical removal of the coating if necessary, without any mechanical action or need of repolishing.

8 FACTORY ACCEPTANCE TEST (FAT)

The Subcontractor shall develop a Factory Acceptance Test (FAT) Plan that demonstrates all requirements listed throughout this specification are met. The FAT shall be performed on all mirrors. All FAT shall be reported in written form and an electronic copy of all results and raw data shall be provided.

ID NUM Requirement

0100 A visual inspection shall look for scratches or point defects within the clear aperture

The ROC and slope errors shall be measured along 3 tangential lines as shown in Figure 2. Include spatial wavelengths of 2 mm to the full length of the clear aperture

The ROC and slope errors shall be measured along 5 sagittal lines as shown in Figure 2.

Include spatial wavelengths of 1 mm to the full length of the clear aperture

The mid-spatial frequency roughness, including wavelengths of 1 µm to 1 mm, shall be measured at 10 random locations within the clear aperture

The vendor’s desired measurement device should have the capability to measure and control the dimensional and geometric tolerances of the mirrors with a resolution and uncertainty better than 10% of the stated requirement.

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Figure 2. Lines for RMS slope error measurements on the mirror surface.

9. SHIPPING AND HANDLING

The Subcontractor shall be responsible for shipping all units to LBNL in boxes that shall prevent damage and contamination of the mirrors during transportation and storage. The design and materials used in the shipping container should also permit long term storage

(>1 year) of the mirror, without significant risk of dust or hydrocarbon contamination.

ID NUM Requirement

Finished optic shall be fitted with a custom cover assembly enclosing the entire optic and protecting the optical surface. The optic, with cover assembly, shall be bagged and back-filled with dry nitrogen. The bagged assembly shall be fitted into a suitable shipping container.

No volatile adhesives are to be used in the packaging of the substrates. Only UHV-compatible materials shall be used inside and for the box. No material may be used that may produce vapors, particularly organics, which may contaminate the optic. For example: for the cover assembly, PMMA is prohibited, lexan or HDPE is acceptable, PFA or PTFE is preferred.

0135 The optical surface should not be in contact with any materials

0140 The mirror label shall be indicated on the box exterior ci al ly R el ea se d to th e

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