Maskless Optical Writer *No Substitutes*

Closed Solicitation Posted

Solicitation number
AH477809
Agency
Responses due
Set-aside
No set-aside

Opportunity facts

Place of performance
Upton, New York 11973, United States

Notice details come from SAM.gov. Updated .

About this opportunity

Brookhaven Science Associates, LLC, operator of Brookhaven National Laboratory under a Department of Energy prime contract, is soliciting firm fixed price quotes for one Maskless Optical Writer with no substitutes, with quotes due June 17, 2026 at 5:00 PM EST and questions due June 12, 2026 at 5:00 PM EST.

Place of performance is Upton, New York. This is a full and open competition under NAICS 334413, Semiconductor and Related Device Manufacturing. The anticipated delivery date is December 30, 2026, with a 22-week completion schedule following award that includes final technical design approval by week 4, factory acceptance testing by week 16, equipment delivery by week 18, commissioning by week 20, and end item documentation by week 22.

The equipment is a tabletop maskless optical writer designed to pattern photoresist thin films to sub-micrometer resolution using optical exposure without a physical photomask. Technical requirements include raster and vector writing modes, substrate accommodation from 5 × 5 mm² to 150 × 150 mm², minimum feature sizes of 600 nanometers or smaller, raster mode write speeds of 10 mm²/min or higher with edge roughness down to 100 nanometers, vector mode spot sizes down to 600 nanometers with edge roughness down to 50 nanometers and linear write speeds up to 200 mm/s, alignment accuracy to existing structures of 500 nanometers or better, and grayscale exposure capability up to 256 levels.

Mandatory qualifications require references for at least 10 successfully fabricated and tested systems of comparable complexity; demonstration of a robust U.S. service engineer network with qualified technicians; ISO 9001 certification or equivalent quality assurance program; documentation of pattern writing quality meeting edge roughness specifications; and documentation of alignment accuracy capability. The contractor must complete installation, testing, commissioning, and provide a one-year warranty on all parts and labor. All electrical equipment must hold Nationally Recognized Testing Laboratory certification and comply with NFPA 70, NFPA 70E, laser safety standards (Class 3b/4), and 21 CFR 1040. Payment terms are Net 30 with FOB Destination freight prepaid. All pricing must be all-inclusive in U.S. dollars quoted FOB Brookhaven National Laboratory, including freight, import duties, and customs costs, and remain firm for 60 days.

Notice text

Hello,

Kindly participate in an “FFP” (Firm Fixed Price) RFQ by Brookhaven Science Associates, LLC (herein known as “BSA”), operator of Brookhaven National Laboratory (BNL) under a Prime Contract (DE-SC0012704) with the U.S. Department of Energy (DOE) herewith solicits your quote for   Maskless Optical Writer *No Substitutes* as more fully described in the Solicitation (AH477809) dated 6/02/2026.

**Please see ALL Attachments**

This will be the only notification made requesting such solicitation for this RFQ.

Please confirm (via e-mail) receipt of this request and if your company will be participating.

  

Upon an award the attached Terms and Conditions will apply.

A prompt response is greatly appreciated.

Thank you,

Files

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