B1. Technical_Specification_(DLW)_ECS_final.pdf

TECHNICAL SPECIFICATIONS

TABLE-TOP MASKLESS OPTICAL WRITER

Aaron Stein Chief of Staff Center for Functional Nanomaterials

Chang-Yong Nam Group Leader, Electronic Nanomaterials

Wai-Lin Ng ESH Coordinator Center for Functional Nanomaterials

Nikhil Tiwale Technical Representative

Nicole Magliulo Quality Engineer, Quality Management Office

March 12, 2026 Rev 0

Brookhaven National Laboratory

This document contains BNL procurement requirements and specifications for solicitation and technical evaluation. The information is high-level and does not include the detail necessary for ‘development’ or ‘production’ as defined under 15 CFR §772.1, 22 CFR §120.33, or 10 CFR part 810; therefor it does not constitute export-controlled technology or technical data.

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Table of Contents

1 GENERAL

2 CONFIGURATION OF THE EQUIPMENT

3 POWER, ENVIRONMENT AND SAFETY

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Technical Specifications

1 General

1.1 This specification describes the requirements for a table-top maskless optical writer equipment at the

Center for Functional Nanomaterials (CFN) at Brookhaven National Laboratory (BNL). This equipment shall be designed for optical exposure of photoresist thin films as per given pattern design.

The equipment shall be capable of operating in both raster and vector mode with selection of optical sources on wide ranging substrate sizes.

1.2 The maskless optical writer equipment will enable –

i. 2D photolithography without requiring a photomask for exposure

ii. Fast writing using raster scan mode

iii. Low edge roughness patterning in vector scan mode

iv. 3D patterning with limited grayscale levels

v. Overlay exposure for patterning in alignment with prior patterns

2 Configuration of the equipment The physical dimensions of the entire equipment shall fit approximately 60” (W) × 30” (D) space currently available at CFN. Required utilities provided by CFN will consist of compressed dry air and vacuum supply.

2.1 Physical system

The equipment shall come equipped with -

i. Stage system controllable through linear motors.

ii. Vacuum chucks for holding substrate sizes from 5 X 5 mm2 to 150 X 150 mm2 with thickness between 0.1 to 12 mm.

iii. Anti-vibration table for optical system and separate table for controller computer etc.

2.2 Optical system

2.2.1 Optical sources -

i. At least one 365 nm UV LED for raster mode exposure with output power of 5W or higher

ii. One or more diode lasers (wavelengths between 350-410 nm) for vector mode exposures with output power 70 mW or higher.

2.2.2 Intensity Measurement Unit for light power verification of optical sources

2.2.3 Overview camera with a field of view of at least 10 X 10 mm2

2.2.4 Camera system for alignment to existing structures with alignment accuracy down to 500 nm for 5

X 5 mm2 and 1 μm over 50 X 50 mm2 area.

2.3 Exposure system

2.3.1 Capability to expose area up to 150 X 150 mm2

2.3.2 Optical autofocus with dynamic range of 180 μm or better.

2.3.3 Achievable minimum feature size of 600 nm or smaller

2.3.4 Raster mode with choice of different write speeds (10 mm2/min or more) at different minimum feature sizes (resolution) with achievable edge roughness down to 100 nm

2.3.5 Vector mode with choice of different spot sizes down to 600 nm, edge roughness down to 50 nm and linear write speed up to 200mm/s

2.3.6 Gray scale exposures capability up to 256 levels

2.4 Computer and Software

2.4.1 The equipment shall include a state-of-the-art computer (windows 11) with graphical user interface and software to enable equipment control (including all the instrumentation), data conversion and exposure.

3 Power, Environment and Safety

3.1 Vendor shall be responsible for installation of all components and provision of all interconnecting power, communication, control and instrument cabling, and all piping, and tubing between components and to the supply points identified by BSA.

3.2 The equipment shall be compatible to use standard electrical wall socket (110 VAC, 15A).

3.3 All electrical installations shall comply with applicable codes and shall be certified for safe use

(NRTL approval and certification).

3.4 Equipment shall be designed with protective housing to contain UV and laser radiation, safety interlocks and access controls where applicable, labels and warnings in accordance with industry standards (21 CFR 1040, IEC 60825 standards)