Automatic Thin Film Mapping Tool

The Department of Energy Office of Science seeks quotation for an Automatic Thin Film Mapping Tool, with proposals due June 29, 2026. This is an unrestricted procurement under NAICS 334513, Instruments and Related Products Manufacturing.

Place of performance is Argonne National Laboratory, Lemont, Illinois. The vendor must have an installed base of at least 50 units with three U.S. references, 24-hour support availability, and field service engineers based in the United States. The system must operate on 100-240 VAC, 50-60Hz power with a spectrometer spanning 190-1100nm wavelength using D2 and Halogen light sources. Hardware specifications include minimum 1.4GHz processor, USB 2.0 interface, Windows 11 compatibility, 250-micron microscope aperture, motorized turret with 10X and 20X objectives, integrated autocalibration, safety enclosure with door interlock, spare lamps, 300nm oxide standard, and high-pass filter wheel. The software must support multiple user account layers (Admin/Tech/User) and include fully automated pattern recognition with deskew correction, center offset compensation, edge exclusion, and multi-site within-die measurements. The system shall measure multilayer stacks of 10 to 50+ layers with +/10-micron accuracy and 1nm or 0.2% measurement accuracy. An automated X-Y stage accommodates maximum 200mm samples with vacuum chuck, achieving 5-point navigation in 5 seconds and 25-point navigation in 14 seconds.

Delivery must occur within three months of award to building 440 loading dock, with vendor responsible for all packaging and transportation. All on-site contractor personnel must be U.S. citizens with acceptable identification (Real ID or Passport). Contractors must maintain Commercial General Liability at $2,000,000 per occurrence, Automobile Liability at $1,000,000 combined single limit, and Workers Compensation at statutory limits plus $1,000,000 employer liability. Tariff charges must be included in unit pricing; they cannot be submitted as separate line items per Department of Energy policy. Submission requires signed RFQ page one, completed Representations and Certifications (ANL-70A), published price list or redacted invoice supporting pricing, country of origin verification, shipping method confirmation with HTS codes for international shipments, and lead time confirmation.