ANL-70 Request for Quotation 6-B187-Q-00311-00.pdf
PDF 249 KB Posted
- Attached to
- Automatic Thin Film Mapping Tool
- Solicitation number
- 6-B187-Q-00311-00
- Issued by
-
Department of Energy Office of Science
About this file
This is a Request for Quotation (RFQ) issued by UChicago Argonne, LLC, operator of Argonne National Laboratory, for thin-film measurement equipment and related components. The RFQ is dated June 25, 2026, with a quotation deadline of June 29, 2026. The inquiry number is 6-B187-Q-00311-00, and quotations should be submitted to Jazlyn Mangis at jmangis@anl.gov or (630) 252-6884.
The RFQ requests pricing for a Filmetrics F54-XY thin-film measurement system and 19 associated components and services, including objectives (10x and 20x), motorized turret, sample stage assembly, calibration software, light sources, fiber optics, reference standards, spare parts (D2 lamp and TH1 bulbs), installation and training, and warranty coverage. All items are quoted on a unit basis with extended pricing required. Offerors must provide signed page one of the RFQ, completed representations and certifications (ANL-70A), a published price list or redacted invoice supporting pricing, country of origin verification, shipping method confirmation, HTS codes for international shipments, lead time commitment, and confirmation of any available DOE or GSA contract discounts. Payment terms are Net 30 days with 100% payment upon delivery. The RFQ is governed by Argonne Terms and Conditions for Commercial Items (ANL-71COM, dated October 22, 2025), Moderate Risk On-Site Supplemental Conditions (ANL-366M, dated October 1, 2024), and an Acceptance Criteria Listing (ANL-266, dated June 9, 2025). Tariff charges, if applicable, must be included in unit pricing and cannot be submitted as separate line items per Department of Energy policy.
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Text version
ANL-70 (February 22, 2013)
UCHICAGO ARGONNE, LLC
OPERATOR OF
ARGONNE NATIONAL LABORATORY
BLDG. 201 OCF, 9700 S. Cass Ave., Lemont, IL 60439
(CONTRACT NO. DE-AC02-06CH11357)
FAX NO.
REQUEST FOR QUOTATION
THIS IS NOT AN ORDER
NOTICE:
1. The right is reserved to accept or reject quotations on each item separately unless your quotation states otherwise.
2. The right is reserved to accept minor deviations from specifications herein listed or referenced.
3. Firm prices are requested. If other than firm prices are quoted, conditions of escalation are to be stated.
4. If material is packaged in returnable containers the amount of deposit, if any, is to be stated together with instructions for returning.
5. Terms and Conditions referenced below will apply to any resulting Purchase Order.
Address Reply To: Jazlyn Mangis
PHONE: (630)252-6884
Date 06/25/2026 Inquiry
No.
6-B187-Q-00311-00 Quotation must be received by: 06/29/2026
ITEM
NO.
QUANTITY DESCRIPTION
UNIT
PRICE
TOTAL
Please furnish quotation to supply the materials and/or services indicated on page two
(2), review the applicable documentation, and return any required documents to jmangis@anl.gov.
Any inquiries are to be directed to Jazlyn Mangis, (630) 252-6884, jmangis@anl.gov
Applicable Documentation:
1. Appendix “A” Argonne Terms and Conditions for Commercial Items, ANL-71COM, dated October 22, 2025. Review and Accept
2. Appendix “B” Argonne Statement of Work, SOW, dated June 12, 2026.
Review
3. Attachment 1, Technical Requirements and Specifications, dated June 12, 2026. Review
4. Moderate Risk On-Site Supplemental Conditions, ANL-366M, dated
October 1, 2024. Review and Accept
5. Acceptance Criteria Listing, ANL-266, dated June 9, 2025. Review and
Accept
6. Pre-Award Information, Representations and Certifications, ANL-70A, dated January 13, 2025. Complete and Return
Offeror to furnish a published price list to support quoted pricing.
The attached RFP/RFQ and only Argonne Terms and Conditions will govern any resultant order.
Any resulting Purchase Order will be subject to the Argonne Terms and Conditions attached hereto and made part of hereof and will be exempt from Illinois Occupation and Use Taxes and from
Manufacturers and Retailers Excise Taxes.
Lead Time days from receipt of order.
Cash Terms Net 30 days-100% upon Delivery Will Ship Via* Country of Origin
*If Shipment will not be made via FedEX, UPS, or USPS, Please provide estimate of weight and volume
# cft
COMPLETE AND RETURN ONE COPY
PLEASE MARK “NO BID” IF YOU CANNOT QUOTE DATE AUTHORIZED SIGNATURE
mailto:jmangis@anl.gov mailto:jmangis@anl.gov
Provide the following with your quotation:
1. Signed Page one of the RFQ (ANL-70).
2. Completed Representations and Certifications (ANL-70A).
3. Provide a published price list or a redacted invoice showing pricing for the quoted, to prove price reasonableness.
4. Verify the country of origin.
5. Are these shipping domestically? If shipping internationally, please confirm ship from location and HTS code.
6. Will you accept Pre-Pay and Add Shipping Charges to Invoice: Domestic (FOB Destination) or International (DAP Destination)?
7. If any tariff charges will be applied to this order, the charge must be included in the unit price on the quote. We are unable to accept a tariff charge as a separate line item, as the Department of Energy considers this an unallowable cost.
8. Confirm lead time.
9. Are there any available discounts for DOE or does this order fall under GSA contract pricing (if yes, please include contract # and expiration date)?
ITEM NAME MODEL/PART
QTY UNIT UNIT PRICE EXTENDED
PRICE
DESCRIPTION
0018 Model, Filmetrics F54-
XY
1158855-000 1 Each Model, Filmetrics F54-XY
0019 F54-XY-200-UV 1158901-000 1 Each F54-XY-200-UV Thin-Film Small-Spot Mapping
System for Samples up to 200mm x 200mm. 190-
1100nm version. Req's objective lens.
0021 Deuterium-
Tungsten
LightSource
1147516-000 1 Each Deuterium-Tungsten LightSource - External Light
Source, UV
0022 FO-PAT-SMA-
SMA-600-1
- 1 Each FO-PAT-SMA-SMA-600-1 - Fibers - Patch Fiber, SMA Connectors, 600um core, 1 Meter
0023 TS-Focus-SiO2-
4-3100
1147422-000 1 Each TS-Focus-SiO2-4-3100 - MReflectance and
Thickness Stds - SiO2-on-Si thickness standard with focus area, approx 3100A thick, 4" wafer
0024 TS-SiO2-6-Multi 1147434-000 1 Each TS-SiO2-6-Multi - Reflectance and Thickness
Stds - SiO2-on-Si thickness standard: 125A, 250A, 500A, 1000A, 5000A, and 10000A (+/-10%), 6"
0025 Aperture-MA-
Cmount-250um
1147463-000 1 Each Aperture-MA-Cmount-250um - Microscope
Apertures - 250um round aperture for MA-
Cmount
0026 OBJ-10X-UVX 1147523-000 1 Each OBJ-10X-UVX - Objective Options - 10x-UVX
Reflective Microscope Objective
ITEM NAME MODEL/PART
QTY UNIT UNIT PRICE EXTENDED
PRICE
DESCRIPTION
0027 OBJ-20X-UVX 1147525-000 1 Each OBJ-20X-UVX - Objective Options - 20x-UVX
Reflective Microscope Objective
0028 Turret-
Motorized-F54-
XY
1158943-000 1 Each Turret-Motorized-F54-XY - Turret Options -
Three-position turret with software-controlled objective selection.
0029 AutoCal
Included
1147569-000 1 Each AutoCal Included - AutoCal
0030 Sample Stage
Assembly-
200mm
1158958-000 1 Each Sample Stage Assembly-200mm - Wafer Chuck -
Sample Stage Assembly, 200mm, with Ref
Standards
0031 UPG-F54-XY-
PatternRecogniti on
1159005-000 1 Each UPG-F54-XY-PatternRecognition - Pattern recognition software F54-XY (motorized turret is recommended)
0032 Regular
Warranty
WRFILM-01 1 Each Regular Warranty - Standard KLA 13-month warranty. Coverage is 8 hours per day, 5 days per week, Monday - Friday. Holiday coverage is not included. Warranty begins upon shipment.
0033 EXW Factory EXW Factory 1 Each EXW Factory
0034 SPFILM-02 SPFILM-02 1 Each SPFILM-02
0035 Spare D2 Lamp
(LAMP-D2-LS-
DT2)
1159058-000 1 Each Spare D2 Lamp (LAMP-D2-LS-DT2)
0036 Spare TH1 Bulbs
5 Pak (LAMP-
TH
1159059-000 1 Each Spare TH1 Bulbs 5 Pak (LAMP-TH1-5PAK)
0037 Installation and
Training
1165313-000
BILLING
1 Each For Installation and Training
SOURCE TITLE AND DATE
ANL-70A Reps and Certs Short Reps and Certs Short Form (03/26/25)
Appendix A-71COM Appendix A Terms and Conditions for Commercia (10/22/25)
ANL-366M (on-site mod risk) Moderate Risk Work by Contractors on the Argo (10/01/24)
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