ANL-70 Request for Quotation 6-B187-Q-00311-00.pdf

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Automatic Thin Film Mapping Tool
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6-B187-Q-00311-00
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This is a Request for Quotation (RFQ) issued by UChicago Argonne, LLC, operator of Argonne National Laboratory, for thin-film measurement equipment and related components. The RFQ is dated June 25, 2026, with a quotation deadline of June 29, 2026. The inquiry number is 6-B187-Q-00311-00, and quotations should be submitted to Jazlyn Mangis at jmangis@anl.gov or (630) 252-6884.

The RFQ requests pricing for a Filmetrics F54-XY thin-film measurement system and 19 associated components and services, including objectives (10x and 20x), motorized turret, sample stage assembly, calibration software, light sources, fiber optics, reference standards, spare parts (D2 lamp and TH1 bulbs), installation and training, and warranty coverage. All items are quoted on a unit basis with extended pricing required. Offerors must provide signed page one of the RFQ, completed representations and certifications (ANL-70A), a published price list or redacted invoice supporting pricing, country of origin verification, shipping method confirmation, HTS codes for international shipments, lead time commitment, and confirmation of any available DOE or GSA contract discounts. Payment terms are Net 30 days with 100% payment upon delivery. The RFQ is governed by Argonne Terms and Conditions for Commercial Items (ANL-71COM, dated October 22, 2025), Moderate Risk On-Site Supplemental Conditions (ANL-366M, dated October 1, 2024), and an Acceptance Criteria Listing (ANL-266, dated June 9, 2025). Tariff charges, if applicable, must be included in unit pricing and cannot be submitted as separate line items per Department of Energy policy.

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ANL-70 (February 22, 2013)

UCHICAGO ARGONNE, LLC

OPERATOR OF

ARGONNE NATIONAL LABORATORY

BLDG. 201 OCF, 9700 S. Cass Ave., Lemont, IL 60439

(CONTRACT NO. DE-AC02-06CH11357)

FAX NO.

REQUEST FOR QUOTATION

THIS IS NOT AN ORDER

NOTICE:

1. The right is reserved to accept or reject quotations on each item separately unless your quotation states otherwise.

2. The right is reserved to accept minor deviations from specifications herein listed or referenced.

3. Firm prices are requested. If other than firm prices are quoted, conditions of escalation are to be stated.

4. If material is packaged in returnable containers the amount of deposit, if any, is to be stated together with instructions for returning.

5. Terms and Conditions referenced below will apply to any resulting Purchase Order.

Address Reply To: Jazlyn Mangis

PHONE: (630)252-6884

Date 06/25/2026 Inquiry

No.

6-B187-Q-00311-00 Quotation must be received by: 06/29/2026

ITEM

NO.

QUANTITY DESCRIPTION

UNIT

PRICE

TOTAL

Please furnish quotation to supply the materials and/or services indicated on page two

(2), review the applicable documentation, and return any required documents to jmangis@anl.gov.

Any inquiries are to be directed to Jazlyn Mangis, (630) 252-6884, jmangis@anl.gov

Applicable Documentation:

1. Appendix “A” Argonne Terms and Conditions for Commercial Items, ANL-71COM, dated October 22, 2025. Review and Accept

2. Appendix “B” Argonne Statement of Work, SOW, dated June 12, 2026.

Review

3. Attachment 1, Technical Requirements and Specifications, dated June 12, 2026. Review

4. Moderate Risk On-Site Supplemental Conditions, ANL-366M, dated

October 1, 2024. Review and Accept

5. Acceptance Criteria Listing, ANL-266, dated June 9, 2025. Review and

Accept

6. Pre-Award Information, Representations and Certifications, ANL-70A, dated January 13, 2025. Complete and Return

Offeror to furnish a published price list to support quoted pricing.

The attached RFP/RFQ and only Argonne Terms and Conditions will govern any resultant order.

Any resulting Purchase Order will be subject to the Argonne Terms and Conditions attached hereto and made part of hereof and will be exempt from Illinois Occupation and Use Taxes and from

Manufacturers and Retailers Excise Taxes.

Lead Time days from receipt of order.

Cash Terms Net 30 days-100% upon Delivery Will Ship Via* Country of Origin

*If Shipment will not be made via FedEX, UPS, or USPS, Please provide estimate of weight and volume

# cft

COMPLETE AND RETURN ONE COPY

PLEASE MARK “NO BID” IF YOU CANNOT QUOTE DATE AUTHORIZED SIGNATURE

mailto:jmangis@anl.gov mailto:jmangis@anl.gov

Provide the following with your quotation:

1. Signed Page one of the RFQ (ANL-70).

2. Completed Representations and Certifications (ANL-70A).

3. Provide a published price list or a redacted invoice showing pricing for the quoted, to prove price reasonableness.

4. Verify the country of origin.

5. Are these shipping domestically? If shipping internationally, please confirm ship from location and HTS code.

6. Will you accept Pre-Pay and Add Shipping Charges to Invoice: Domestic (FOB Destination) or International (DAP Destination)?

7. If any tariff charges will be applied to this order, the charge must be included in the unit price on the quote. We are unable to accept a tariff charge as a separate line item, as the Department of Energy considers this an unallowable cost.

8. Confirm lead time.

9. Are there any available discounts for DOE or does this order fall under GSA contract pricing (if yes, please include contract # and expiration date)?

ITEM NAME MODEL/PART

QTY UNIT UNIT PRICE EXTENDED

PRICE

DESCRIPTION

0018 Model, Filmetrics F54-

XY

1158855-000 1 Each Model, Filmetrics F54-XY

0019 F54-XY-200-UV 1158901-000 1 Each F54-XY-200-UV Thin-Film Small-Spot Mapping

System for Samples up to 200mm x 200mm. 190-

1100nm version. Req's objective lens.

0021 Deuterium-

Tungsten

LightSource

1147516-000 1 Each Deuterium-Tungsten LightSource - External Light

Source, UV

0022 FO-PAT-SMA-

SMA-600-1

- 1 Each FO-PAT-SMA-SMA-600-1 - Fibers - Patch Fiber, SMA Connectors, 600um core, 1 Meter

0023 TS-Focus-SiO2-

4-3100

1147422-000 1 Each TS-Focus-SiO2-4-3100 - MReflectance and

Thickness Stds - SiO2-on-Si thickness standard with focus area, approx 3100A thick, 4" wafer

0024 TS-SiO2-6-Multi 1147434-000 1 Each TS-SiO2-6-Multi - Reflectance and Thickness

Stds - SiO2-on-Si thickness standard: 125A, 250A, 500A, 1000A, 5000A, and 10000A (+/-10%), 6"

0025 Aperture-MA-

Cmount-250um

1147463-000 1 Each Aperture-MA-Cmount-250um - Microscope

Apertures - 250um round aperture for MA-

Cmount

0026 OBJ-10X-UVX 1147523-000 1 Each OBJ-10X-UVX - Objective Options - 10x-UVX

Reflective Microscope Objective

ITEM NAME MODEL/PART

QTY UNIT UNIT PRICE EXTENDED

PRICE

DESCRIPTION

0027 OBJ-20X-UVX 1147525-000 1 Each OBJ-20X-UVX - Objective Options - 20x-UVX

Reflective Microscope Objective

0028 Turret-

Motorized-F54-

XY

1158943-000 1 Each Turret-Motorized-F54-XY - Turret Options -

Three-position turret with software-controlled objective selection.

0029 AutoCal

Included

1147569-000 1 Each AutoCal Included - AutoCal

0030 Sample Stage

Assembly-

200mm

1158958-000 1 Each Sample Stage Assembly-200mm - Wafer Chuck -

Sample Stage Assembly, 200mm, with Ref

Standards

0031 UPG-F54-XY-

PatternRecogniti on

1159005-000 1 Each UPG-F54-XY-PatternRecognition - Pattern recognition software F54-XY (motorized turret is recommended)

0032 Regular

Warranty

WRFILM-01 1 Each Regular Warranty - Standard KLA 13-month warranty. Coverage is 8 hours per day, 5 days per week, Monday - Friday. Holiday coverage is not included. Warranty begins upon shipment.

0033 EXW Factory EXW Factory 1 Each EXW Factory

0034 SPFILM-02 SPFILM-02 1 Each SPFILM-02

0035 Spare D2 Lamp

(LAMP-D2-LS-

DT2)

1159058-000 1 Each Spare D2 Lamp (LAMP-D2-LS-DT2)

0036 Spare TH1 Bulbs

5 Pak (LAMP-

TH

1159059-000 1 Each Spare TH1 Bulbs 5 Pak (LAMP-TH1-5PAK)

0037 Installation and

Training

1165313-000

BILLING

1 Each For Installation and Training

SOURCE TITLE AND DATE

ANL-70A Reps and Certs Short Reps and Certs Short Form (03/26/25)

Appendix A-71COM Appendix A Terms and Conditions for Commercia (10/22/25)

ANL-366M (on-site mod risk) Moderate Risk Work by Contractors on the Argo (10/01/24)

File details come from the government source that posted it. Updated .