SOW.docx

Argonne National Laboratory Statement of Work Title: Angled Evaporator Date: 12/10/2025

1.0 Background

An angled evaporator, hereafter referred to as the “Instrument,” provides high-precision superconducting thin-film deposition by combining controlled electron-beam evaporation with finely adjustable substrate orientation. This Instrument can deposit superconducting thin film on various substrates including the ones with pre-defined patterns. The deposition process involves loading substrates to the loading lock without interruption of the main chamber vacuum, and subsequently, a focused electron beam locally heats source materials, generating a flux of evaporated atoms that travel through high vacuum toward the substrate. By adjusting the substrate tilt and rotation, this Instrument enables highly directional and conformal deposition, making it well suited for shadow evaporation, multilayer junction fabrication, and structures requiring controlled overlap geometry. The Instrument can accommodate multiple source materials, allowing sequential deposition without breaking vacuum, as well as high quality in-situ oxidation and ion milling. This technique will enable the Center for Nanoscale Materials (CNM) researchers and users to achieve high-quality deposition of pure and heterogeneous superconducting thin films, as well as precise fabrication of Josephson junctions, all of which are critical for advancing cutting-edge research in quantum information science (QIS) and microelectronics.

2.0 Scope

This Statement of Work (SOW) will be the basis for the procurement of an Angled Evaporator System for the CNM at Argonne National Laboratory (ANL). The contractor will engineer, manufacture and assemble the Instrument. The contractor shall first test the Instrument at the contractor’s facility to demonstrate that the Instrument meets the required technical specifications under the Acceptance Test Requirements. The contractor shall then deliver, reassemble, test and commission the Instrument at CNM. It is the contractor’s responsibility to ensure that the Instrument complies with all the specification requirements and the safety codes and standards.

3.0 Pre-Delivery Tasks

· The contractor shall be responsible for supplying all materials, including (but not limited to) the construction of all tools, jigs, fixtures, and test equipment required to complete the engineering, manufacturing, assembly, inspecting, testing, delivery, and installing of the Instrument.

· Prior to delivery to ANL, the Instrument shall be tested at the contractor’s facility to demonstrate operation of the Instrument to match the criteria defined in the Technical Specifications under the Acceptance Test Requirements and provide a factory acceptance test report (FAT). The Instrument shall be fully assembled and be representative of the final as-delivered configuration for this Factory Acceptance Test (FAT).

· All test data and images shall be documented in the FAT reports and sent to ANL prior to the Instrument delivery. Acceptance of the test data is contingent upon data review and written approval by the technical representative prior to shipment of the Instrument.

· The contractor shall work with the CNM technical representative to create work control documents (e.g. Job Safety Analysis) for the installation of the Instrument at CNM.

· Disassemble the Instrument at the contractor’s site and ship the Instrument to CNM.

4.0 Tool Installation

ANL will supply personnel for the following installation tasks at CNM:

· Supply all required facilities including electrical, process chilled water, compressed air and process gases.

· Unload containers and trucks after receiving shipment.

· Stage the Instrument at the installation site at CNM.

· Perform final connections of utilities to the tool after placement.

The contractor shall:

· Reassemble all components of the system disassembled for transportation to CNM.

· Return the Instrument to operating status at CNM.

· Demonstrate operation of the Instrument to match the criteria defined in the Technical Specifications under Acceptance Test Requirements, and provide a site acceptance test report (SAT). Comment by Young, Jim: I remember you saying you were working on this. Am I correct?

· Provide training for the staff at the CNM on the operation of the tool, any common maintenance practices to ensure that the tool performs well, and troubleshooting techniques to identify problems as they arise.

· Provide maintenance and operating manuals to the tool scientific contact.

5.0 Electrical Requirements

· All electrical equipment must conform to U.S. standards, comply with NFPA70 and be approved by the ANL Electrical Authority Having Jurisdiction (EAHJ). All electrical work must be performed by qualified electrical workers.

· Contractors needing to perform electrical work must meet the ANL qualification requirements, including submitting proof of training such as for NFPA 70E, OSHA 10-hr, Cardio-Pulmonary Resuscitation/First Aid, lockout/tagout, depending on the nature of the electrical work.

· Labeling by a Nationally Recognized Testing Laboratory (NRTL) is preferred. In the case of equipment that is not NRTL listed as delivered from the Contractor, it will be subjected to an ANL electrical safety inspection by a Designated ANL EAHJ approved Electrical Equipment Inspector, whose approval will be required before the equipment is allowed to be energized.

· Contractor shall mark the equipment which includes the NRTL certification mark/Field Evaluation mark, Manufacturer, model number, manufacturing date, drawing number, current draw, power, frequency voltages entering and leaving the control cabinets, and equipment. Caution, Warning, or Danger labels shall be affixed to the exterior describing specific hazards and safety concerns. Refer to ANSI Z535, Series of Standards for Safety Signs and Tags, for more information on precautionary marking of electrical system or equipment.

· The Contractor must ensure all requirements of OSHA 1910 Control of Hazardous Energy Standard (1910.147) and those additional requirements found in the ANL laboratory management system (LMS) electrical safety and hazardous energy control manuals, including Lock/Tag/Verify are met.

· Controls for energy sources must be able to accommodate the use of lock and lockout hardware.

· Additionally, depending on the energy of capacitors contained within the equipment, written shut down and start up procedures may be required to be supplied. Contact ANL qualified electrical worker or electrical safety subject matter expert for further direction.

6.0 Process Piping Requirements

· For process piping requirements, the contractor shall use ASME B31.3 or an equivalent standard. The gaseous nitrogen and helium, and cooling water lines shall be designed to ASME B31.3 requirements.

· In all cases, 100% proof testing shall be completed on each component to 150% of the maximum working pressure for hydrostatic tests, or 110% of the maximum working pressure for pneumatic tests.

· All potential pressure system safety requirements shall be identified and addressed utilizing pressure system safety subject matter experts as required.

7.0 Hoisting and Rigging

· The Contactor shall provide lifting eyes, either permanent or removable, on each piece of equipment or stand of sufficient capacity and number to allow the equipment to be safely lifted in the fully assembled condition.

· All equipment and activities involving hoisting and rigging shall meet all applicable requirements of ANL including, but not limited to, inspection of attachment points and lifting fixtures by qualified ANL hoisting and rigging personnel.

· All lifting fixtures must meet the requirements specified in ASME B30.26 (Rigging Hardware) and ASME BTH-1 (Design of Below-the-Hook Lifting Devices, Design Category “A”).

8.0 Warranty and Service

· The contractor shall provide a one (1)-year warranty on all parts and labor commencing with ANL’s acceptance of the installed and tested Instrument. A recommended spare parts list shall be available from the contractor.

· Remote diagnosis and troubleshooting from contractor shall be available upon request within 48 hours during regular workdays.

9.0 Reports, Data and Deliverables

· Acceptance Test Reports (FAT and SAT)

· Work Control Documents for installation

· Training on operation of the tool

· Maintenance manual with spare parts list