Questions and Answers to RFQ 461380 dated 4-9-2025.pdf

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461380 - Microscope Endstation Vacuum Chamber
Solicitation number
461380
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This document is a Questions and Answers (Q&A) file for Request for Quote (RFQ) 461380 regarding a Microscope Endstation Vacuum Chamber. The Q&A addresses a technical specification related to chamber wall deflection measurement, specifically clarifying how wall deflection should be verified. The response indicates that wall deflection can be initially predicted using Finite Element Analysis (FEA) during the design stage, but must ultimately be physically measured using a dial gauge after chamber fabrication. The measurement process involves zeroing the dial gauge against a wall face at atmospheric pressure, then reading the gauge after the chamber is pumped to the specified test pressure of <6.6x10^-3 mbar, with a maximum allowable wall deflection of 0.5 mm.

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Questions and Answers to RFQ 461380- Microscope Endstation Vacuum Chamber

1. Q. In Enclosure 1, Section 8.2 Mechanical Specifications and Section 8.5 Acceptance Testing, it is specified that the chamber walls must not deflect >0.5 mm at a pressure of <6.6x10^-3 mbar. I had the impression that this could be verified using finite-element analysis, but the technical team may want us to physically measure the deflection of the chamber walls. Can you please confirm how they want us to verify that we meet this spec?

A. The wall deflection can be predicted using FEA in the design stage, but then is typically measured using a dial gauge once the chamber is fabricated. The dial gauge is zeroed against a wall face with the chamber at atmospheric pressure and the dial is read after the chamber is pumped to the indicated test pressure

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