Atomic layer deposition system (UW-MAD) [19-0031]

The University of Wisconsin-Madison is seeking proposals for an Atomic Layer Deposition (ALD) System through a competitive Request for Proposal (RFP) process, with bid number 19-0031. The procurement is specifically for the Department of Physics and requires a sophisticated scientific instrument capable of depositing high-quality thin films using thermal, plasma-enhanced, and ozone-enhanced deposition methods. The system must accommodate 100mm substrates, achieve 12% deposition uniformity, and include an ICP remote pulsed plasma radical generator. Desired material deposition capabilities include dielectrics and superconducting thin films such as SiO2, HfO2, ZrO2, Al2O3, TiO2, NbN, TiN, and VO2, with specific performance requirements like electrical breakdown voltages and superconducting transition temperatures. The evaluation will be conducted on a 1,000-point scale, with 400 points allocated for film growth and material recipe demonstrations, 200 points for client references, 150 points for service quality, and 250 points for cost. Key dates include a written question deadline of February 19, 2019, an optional site visit on February 25, 2019, and a proposal submission deadline of March 7, 2019, at 2:00 PM CST, with award notification anticipated for March 15, 2019.

The University provides opportunities for Minority Business Enterprise (MBE), Woman-Owned Business Enterprise (WBE), and Disabled Veteran-Owned Business (DVB) certifications, which can receive a preferential weighting of 1.05 times during evaluation. The procurement requires vendors to include comprehensive warranty coverage for at least one year, on-site training, chamber maintenance plans, and consultation services for recipe development. Installation is specified for 1550 Engineering Drive in Madison, Wisconsin, with all delivery and installation charges to be included in the proposal price. Payment terms are anticipated to be either net 30 days upon acceptance or a milestone-based plan with 25% due at each of four stages: order acceptance, delivery, installation, and final acceptance. While no specific budget range is explicitly stated, the complexity of the required ALD system suggests a significant procurement value, likely in the hundreds of thousands of dollars. The University reserves the right to award based on best value, emphasizing technical capabilities and performance demonstrations over pure cost considerations.