19-0031 RFP.docx

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ATOMIC LAYER DEPOSITION SYSTEM (UW-MAD) [19-0031]
Solicitation number
19-0031
Issued by
Dane County, Madison City, Wisconsin

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RFP Summary

This is a Request for Proposal (RFP) issued by the University of Wisconsin-Madison Purchasing Services on behalf of the Department of Physics for the purchase of an Atomic Layer Deposition (ALD) System. The solicitation requests a single system capable of depositing dielectrics and superconducting thin films using thermal, plasma-enhanced, and ozone-enhanced deposition methods, with pre-optimized recipes for materials including SiO2, HfO2, ZrO2, Al2O3, TiO2, and NbN films. The system must accommodate 100mm substrates, achieve 12% deposition uniformity, and include an ICP remote pulsed plasma radical generator. Written questions were due February 19, 2019, with an optional site visit available on February 25, 2019. The proposal due date was March 7, 2019, at 2:00 PM CST, with award notification scheduled for March 15, 2019. Proposals were required to be submitted in six hard copies plus one email copy to the Purchasing Services office at 21 N. Park Street, Suite 6101, Madison, WI 53715-1218. Installation is required at 1550 Engineering Drive, Madison, WI 53706.

All delivery and installation charges, including packing, freight, insurance, setup, instruction manuals, and debris removal, must be included in the proposal price and delivered FOB Destination Installed at the contractor's expense. The University anticipated offering payment terms of either net 30 days upon acceptance or a milestone-based payment plan with 25% due upon order acceptance, 25% upon delivery, 25% upon installation, and 25% upon final acceptance. Proposals were evaluated on a 1,000-point scale with 400 points for ability to demonstrate film growth and material recipes, 200 points for client references, 150 points for service quality, training and warranty plans, and 250 points for cost. The University reserved the right to award based on best value and requested that the system include at least one year of comprehensive warranty coverage, on-site training, chamber maintenance plans, and consultation services for recipe development. Minority Business Enterprise (MBE), Woman-Owned Business Enterprise (WBE), and Disabled Veteran-Owned Business (DVB) certifications could receive preferential weighting of 1.05 times.

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Proposal No. 19-0031

UNIVERSITY OF WISCONSIN

MADISON, WISCONSIN 53715-1218

University of Wisconsin – Madison Request For Proposal

THIS IS NOT AN ORDER

OFFICIAL SEALED

Proposal Number: 19-0031

NO PUBLIC OPENING

Issued Date: 2/12/2019

Due Date: 03/07/2019 2:00 PM CST Agent: JEFF WHITMAN

Questions regarding this proposal – see Section 2.8

For Submittal Instructions & Proposal Response Format – see Section 2.2 and 2.3

Proposal prices and terms shall be firm for sixty (60) days from the date of the proposal to the opening, unless otherwise specified in this Request for Proposal by the UW-Madison Purchasing Services.

If NO BID (check here) ☐ and return.

ATOMIC LAYER DEPOSITION SYSTEM

In signing this bid, we have read and fully understand and agree to all terms, conditions and specifications and acknowledge that the UW-Madison Purchasing Services bid document on file shall be the controlling document for any resulting contract. We certify that we have not, either directly or indirectly, entered into any contract or participated in any collusion or otherwise taken any action in restraint of free competition; that no attempt has been made to induce any other person or firm to submit or not to submit a bid; that this bid has been independently arrived at without collusion with any other bidder, competitor or potential competitor; that this bid has not been knowingly disclosed prior to the opening of bids to any other bidder or competitor; that the stated statement is accurate under penalty of perjury. I certify that the information I have provided in this bid is true and I understand that any false, misleading or missing information may disqualify the bid.

By submitting a bid, the bidder certifies that no relationship exists between the bidder and the University that interferes with fair competition or is a Conflict of Interest, and no relationship exists between such bidder and another person or firm that constitutes a Conflict of Interest. Further, bidder certifies that no employee of the University whose duties relate to this request for bid assisted the bidder in preparing the bid in any way other than in his or her official capacity and scope of employment.

The Bidder certifies by submission of the bid that neither it nor its principals is presently debarred, suspended, proposed for debarment, declared ineligible, or voluntarily excluded from participation in this transaction by any federal department or agency.

Company Name:

Company Street Address:

Company City, State & Zip:
Date:

Signature:

Type or Print Name:

Title:

Telephone Number: ( )
Fax Number: ( )

Email address:

Fein Number :
DUNS #:

Table of Contents

1.General Information4
1.1.Purpose:4
1.2.Organization of this Solicitation Document:4
1.3.Definitions:4
1.4.VendorNet Registration:5
1.5.Parking:5
1.6.Reasonable Accommodations:5
2.Preparing and Submitting a Proposal6
2.1.Applicable Dates:6
2.2.Submittal Instructions:6
2.3.Proposal Response Format:7
2.4.Incurring Costs:7
2.5.Optional Site Visit:7
2.6.Oral Presentations, Product Demonstrations and Proposer Location Site Visits (Pre Award):8
2.7.Clarifications and/or Revisions through Designated Contact:8
2.8.Multiple Proposals:8
2.9.Proprietary Information:8
3.Terms and Conditions of Contract10
3.1.Entire Contract:10
3.2.Contract Administrator:10
3.3.Payment Terms:10
3.3.Payment Terms:11
3.4.F.O.B.:11
3.5.On Site Service:11
3.6.University Imports:11
3.7.Travel Per Diems:12
3.8.Campus Delivery Requirements:12
3.9.Acceptance and Test (Post Award):12
3.10.Insurance:12
3.11.Subcontracting:13
3.12.Fair Price Analysis:13
3.13.Severability:13
3.14.Environmentally Friendly (“Green”) Product:13
3.15.Supplier Diversity:13
3.16.Discriminatory Boycotts of Israel:14
3.17.Debarment:14
3.18.Promotional Materials/Endorsements:14
3.19.Additional Items/Services:14
4.Requirements and Specifications15
4.1.Atomic Layer Deposition System Requirements:15
5.Evaluation and Award of Contract17
5.1.Proposal Scoring17
5.2.Scoring Criteria and Method17
5.3.Best and Final Offers:18
5.4.Notification of Award:18
Attachment A: Vendor Information Form19
Attachment B: Cost Proposal Form21
Attachment C: Client Reference List22
Attachment D: Standard Terms and Conditions23
Attachment E: Applicable Federal Rules29

1. General Information

1.1. Purpose:

The University of Wisconsin-Madison, hereinafter referred to as the “University”, through its Purchasing Services Department, hereinafter referred to as “Purchasing”, on behalf of the Department of Physics, hereinafter referred to as “Department”, requests bids for the purchase of an Atomic Layer Deposition System.

Scope - This RFP is for an atomic layer deposition (ALD) system that is capable of depositing dielectrics and superconducting thin films that can be used for electrostatic gate barriers, superconducting qubit devices, conformal coatings for surface control, semiconductor device manufacturing, and optical coatings. This tool will operate using several different modalities that allow for a wide range of precursors to be used, and utilize plasma, thermal and ozone enhanced deposition methods. The vendor is expected to provide calibrated deposition recipes for particular materials, as described in Section 4: Requirements and Specifications. This system will be installed in and maintained by the Nanoscale Fabrication Center at UW-Madison.

See Requirements and Specifications (Section 4) and/or Cost Proposal Form (Attachment B) for the minimum acceptable specifications for items/services desired. The estimated item quantities identified on the Cost Proposal Form are for proposal purposes only. The University does not guarantee to purchase any specific quantity or dollar amount. This contract must not be construed as mandatory upon any University campus, State agency or municipality. The University reserves the right to issue separate proposals when deemed in the best interest of the University.

1.2. Organization of this Solicitation Document:

This document is divided into five (5) main sections. The sections also refer to “Attachments” when such organization assists in making this document more fluid. The five (5) main sections are:

Section 1General Information (generally states the intent of the solicitation and submittal instructions)
Section 2Preparing and Submitting a Proposal.
Section 3Terms and Conditions of Contract (contains performance clauses that will become part of any awarded contract).
Section 4Requirements and Specifications (technical and other specifications for the proposal).
Section 5Evaluation and Award of Contract(s) (contains details of the evaluation process).

1.3. Definitions:

The following definitions are used throughout this document:

Agent means UW Madison Purchasing Agent responsible for this Request for Proposal. Full contact information can be found in Section 2.8.

Contractor means successful proposer awarded a contract.

Department means UW Madison Department of Physics.

DVB means Disabled Veteran-Owned Business.

MBE means Minority Business Enterprise.

Proposer means a firm submitting a Proposal in response to this Request for Proposal.

Purchasing card means State credit card.

Purchasing means the Purchasing Services Department in the Division of Business Services responsible for the procurement of goods and services on UW-Madison campus, located at 21 N. Park St., Madison, WI 53715.

RFP means Request for Proposal.
State means State of Wisconsin.
University and UW both mean University of Wisconsin-Madison.
WBE means Woman-Owned Business Enterprise.

1.4. VendorNet Registration:

Registration on the State of Wisconsin’s VendorNet System (http://vendornet.state.wi.us) is available free of charge to all businesses and organizations that want to sell to the state. Refer to Bidder Response: Registration and Sign-in Process for further instructions. Registration allows a vendor to:

1.4.1. Registration for a bidders list for commodities/services that the vendor wants to sell to the state.

1.4.2. Receive an automatic e-mail notification each time a state agency, including the University of Wisconsin System campuses, posts a Request for Bid (RFB) or Request for Proposal (RFP) with an estimated value over $50,000.00 in their designated commodity/service area(s).

1.4.3. Receive an e-mail notification of addendums/amendments relative to the RFB or RFP.

1.4.4. Only vendors registered, with a valid e-mail address, at the time of the RFB or RFP is posted will receive e-mail notifications of addendums/amendments. Vendors who obtain the RFB or RFP from a third party; through the public notice website; or other means assume responsibility for checking for updates to the RFB or RFP.

1.5. Parking:

University parking is very limited. Each Contractor and/or employee(s) shall make their own arrangements for parking through UW Transportation Services (website: http://transportation.wisc.edu/parking/parking.aspx) No additional costs will be allowed for parking fees or violations. Unauthorized vehicles parking in University lots or loading docks without permits will be ticketed and or towed.

1.6. Reasonable Accommodations:

The University will provide reasonable accommodations, including the provision of informational material in an alternative format, for qualified individuals with disabilities upon request.

2. Preparing and Submitting a Proposal

2.1. Applicable Dates:

Date

Event

2/12/2019
Date of Issue of the RFP
2/19/2019
Written questions due
2/25/2019
Site visit (Optional)
2/28/2019
Answers to Questions Sent to Proposers (Estimated)
03/07/2019 – 2:00 PM CST
RFP Due Date (Local Madison Time)
3/11/2019
Evaluations and Oral Presentations (if needed)
3/15/2019
Award notification

2.2. Submittal Instructions:

PROPOSALS MUST BE DELIVERED TO:

Purchasing Services, 21 N. Park Street, Suite 6101, Madison, WI 53715-1218.

NUMBER OF COPIES TO BE SUBMITTED:

Six (6) hard copies of the completed proposals, including the signed original, may be mailed, delivered by Proposer, or by a third-party/courier service in a sealed envelope or package with the RFP number on the outside OR One (1) email copy of the proposal may also be submitted. Proposal must be received and date/time stamped prior to 2:00 p.m. CST on the stated proposal due date. Proposals not so date/time stamped shall be considered late. Late proposals shall be rejected.

RETAIN A COPY OF YOUR BID RESPONSE FOR YOUR FILES

If hand delivering to Purchasing Services, please come to 6th Floor Reception Desk in Suite 6101 and call 608-262-1526 for assistance.

Proposals may be dropped off at Purchasing Services, 21 N. Park Street, Suite 6101, Madison, WI 53715-1218, between the hours of 7:00 AM and 4:00 PM prior to the due date and time.

FAXED OR EMAILED RESPONSES WILL BE ACCEPTED.

If faxing and emailing, the University will accept completed proposals e-mailed to bids@bussvc.wisc.edu and faxed to (608) 262-4467, provided they are date/time stamped prior to 2:00 p.m. CST on the stated bid due date and the number of copies indicated above are mailed or hand delivered to Purchasing Services, 21 N. Park Street, Suite 6101, Madison, WI 53715-1218 by 2:00 p.m. CST on the next business day following stated bid due date.

Submitting a proposal to any other e-mail address than mailto:bids@bussvc.wisc.edu does not constitute receipt of a valid proposal by Purchasing Services. Proof of transmission doesn't constitute proof of receipt. E-mail submissions must be a scanned copy of the document with ACTUAL signatures and initials (not typed or electronic signatures), or those pages that require signatures and/or initials must be signed and returned via fax (608-262-4467) and should be received prior to 2:00 p.m. CST on the stated due date.

VENDOR NOTE: FOR THE PURPOSE OF THE RETURN ADDRESS LABEL, IF THE ADDRESS IS THE SAME AS YOU LISTED ON THE REQUEST FOR PROPOSAL FORM – YOU DO NOT NEED TO FILL OUT THE RETURN ADDRESS LABEL.

RETURN ADDRESS LABEL:

Below is a label that can be taped to the outside of your sealed proposal response. If returning your proposal response by mail or in person, please fill out the information and tape to the outside of your bid package.

OFFICIAL SEALED PROPOSAL

NUMBER: 19-0031

DUE DATE: 03/07/2019
TIME: 2:00 PM CST

SHIP FROM:

VENDOR NAME HERE:

ADDRESS:

SHIP TO:

UNIVERSITY OF WISCONSIN-MADISON

PURCHASING SERVICES

21 N PARK ST, SUITE 6101

MADISON, WI 53715-1218

2.3. Proposal Response Format:

Proposals should be typed and submitted on 8.5 by 11 inch paper and bound securely. The response should be organized and presented in the following order. Each section should be separated by tabs or otherwise clearly marked. The contents within each tab should reference the section or attachment number assigned in the RFP. Failure to submit as indicated may disqualify your proposal.

Tab 1:

· Request for Proposal form signed by an authorized representative of proposing company - Cover Page.

· Vendor Information Form, Attachment A

· Client Reference List, Attachment C Tab 2: Responses to specifications in Section 4. – Requirements and Specifications (Section 4.1.)

Tab 3: Cost Proposal, Attachment B Tab 4: Other

RETAIN A COPY OF YOUR PROPOSAL RESPONSE FOR YOUR FILES

2.4. Incurring Costs:

The State of Wisconsin is not liable for any cost incurred by proposers in replying to this RFP.

2.5. Optional Site Visit:

Proposer should visit the job site prior to submitting a proposal to assure themselves and the University that they fully understand all requirements of the project. No additional charges shall be allowed by the Contractor for lack of information or misunderstanding information if the Prosper does not attend the Prosper conference or site visit. Contact Dan Christensen at (608) 262-6877 and arrange a visit to the job site.

2.6. Oral Presentations, Product Demonstrations and Proposer Location Site Visits (Pre Award):

The University at its sole discretion, may require oral presentations, product demonstrations and/or proposer location site visits to validate information submitted with the proposals. Failure of a proposer to conduct a presentation on the date scheduled or allow an on-site/proposer site visit may result in rejection of the proposal. These events cannot be used as an opportunity to alter proposals submitted.

2.7. Clarifications and/or Revisions through Designated Contact:

All communications and/or questions in regard to this request should be in writing and must reference the proposal number. Proposers are encouraged to FAX or e-mail written questions to the Agent. Verbal questions when permitted must be directed to the Agent.

If a Proposer discovers any significant ambiguity, error, conflict, discrepancy, omissions or other deficiency in this RFP, they have five (5) business days after the RFP issue date and time to notify, in writing, the Agent at the address shown below of such error and request modification or clarification of the RFP document.

ADMINISTRATIVE:

Jeff Whitman

UW Purchasing

21 N Park St, Suite 6101

Madison, WI 53715-1218

E-mail: jeff.whitman@wisc.edu

PHONE (608)262-6120 – FAX 608/262-4467

If a Proposer fails to notify the Purchasing Office of an error in the RFP document which is known to the Proposer, or which must have reasonably been known to the Proposer, then the Proposer shall submit a response at the Proposer’s risk and if awarded a contract, shall not be entitled to additional compensation or time by reason of the error or its later correction.

In the event that it becomes necessary to provide additional clarifying data or information, or to revise any part of this RFP, supplements or revisions will be posted on http://vendornet.state.wi.us and publicnotices.wi.gov.

Any contact with University employees concerning this RFP are prohibited, except as authorized RFP manager during the period from date of release of the RFP until the notice of award is released. Contacting anyone other than the Designated Contacts(s) above may disqualify your RFP.

2.8. Multiple Proposals:

Proposers who wish to submit more than one proposal may do so, provided that each proposal stands alone and independently complies with the instructions, conditions and specifications of the request. If multiple responses are submitted, the University reserves the right to select the most advantageous proposal to the University.

2.9. Proprietary Information:

Any information contained in the Proposer’s response that is proprietary must be detailed separately on form DOA-3027. Marking of the entire response as proprietary will neither be accepted nor honored. The University cannot guarantee that all such material noted remains confidential, particularly if it becomes a significant consideration in contract award. Information will only be kept confidential to the extent allowed by State of Wisconsin Public Disclosure Law (refer to Standard Terms and Conditions, Section 27.0). A copy of the form needed to designate portions of your submission as proprietary can be found at: http://vendornet.state.wi.us/vendornet/doaforms/doa-3027.doc.

3. Terms and Conditions of Contract

3.1. Entire Contract:

A contract will be awarded based on the criteria established in this Request for Proposal, including attachments and any amendments issued. The RFP, the proposal response, and written communications incorporated into the contract constitute the entire contract between the parties. The hierarchy of documents in descending order for resolution is as follows:

A. Official Purchase Order B. Original Request for Proposal Number 19-0031 dated, 2/12/2019 including amendments/attachments C. Proposer response to RFP Any other terms and conditions provided by the Proposer with the proposal or for future transactions against this contract, including but not limited to click on agreements accepted by the Customer; shrink wrapped agreements; or terms submitted with quotations, order acknowledgements, or invoices; will be considered null and void and will not be enforceable by the Contractor unless agreed to in a written amendment signed by the University Purchasing Department. Any exceptions to this RFP should be submitted with your response and alternative language proposed.

Deviations and exceptions from original text, terms, conditions, or specifications shall be described fully, on the bidder's/proposer's letterhead, signed, and attached to the proposal response as an attachment. Each deviation and exception must be identified by the section, page and paragraph to which it applies. In the absence of such statement, the bid/proposal shall be accepted as in strict compliance with all terms, conditions, and specifications and the bidder/proposer shall be held liable.

Submitting a standard Proposer contract or term and condition as a complete substitute or alternative for the language in this solicitation will not be accepted and may result in rejection of the proposal.

The University reserves the right to negotiate contractual terms and conditions or reject the Proposer‘s response and proceed to the next qualified proposer.

3.2. Contract Administrator:

Any correspondence must include reference to Contract number 19-0031 and be sent to the Contract Administrator. The Contractor Administrator is authorized to give the approvals required under this contract on behalf of the University.

A. University The Contract Administrator for the University is:

Jeff Whitman

University of Wisconsin-Madison

Purchasing Services

21 N Park St, Suite 6101

Madison, WI 53715-1218

E-mail: jeff.whitman@wisc.edu

PHONE (608)262-6120 – FAX 608/262-4467

3.3. Payment Terms:

Final payment will not be made until the item service is determined to meet all specifications and has been accepted by the University of Wisconsin-Madison. The University will pay the Contract Net 30 days as accepted by the University.

-OR-

3.3. Payment Terms:

The University may pay the Contractor based upon a payment plan accepted by the University in accordance with milestones and achievements. A typical payment plan could include:

· 25% due upon acceptance of order by vendor

· 25% due upon delivery at UW-Madison

· 25% due upon installation

· 25% due upon acceptance of item by UW Madison

3.4. F.O.B.:

All deliveries shall be FOB Destination and Installed. Delivery and installation charges and risk of loss shall be borne by the Contractor.

Items are to be installed at 1550 Engineering Drive, Madison, WI 53706, F.O.B. DESTINATION INSTALLED. Proposal prices must include all packing, freight, insurance, set-up, instruction and operation manual charges, excluding any import/export costs. Items must be set in place connected to utilities as applicable, installed in the area designated by University personnel, demonstrated to be in operating condition, and approved by University personnel. All debris must be removed from the University premises and properly disposed of by the Contractor. Upon installation, all operating instructions and operating and maintenance manuals must be furnished to University personnel as identified.

Indicate on the Cost Proposal Form the Country of Origin and Shipping Point.

For University Imports: See Section 3.6 Failure to bid FOB DESTINATION INSTALLED, delivery and installation charges and risk of loss borne by the Contractor in price may disqualify your proposal.

3.5. On Site Service:

In carrying out the scope of this Contract, the Contractor shall be required to perform services on University property. Proposers cost must include all transportation charges.

3.6. University Imports:

Definitions:

Custom Charges/Fees: typically includes, but is not limited to, United States duties, if applicable; port of entry documentation fees; custom clearance fees; applicable tax; etc.

University Imports: When the University is the Importer of Record or has responsibilities for paying Custom Charges/Fees for products purchased directly from a foreign country.

Proposals must include costs from proposer’s door to port of destination and local delivery charges. Custom Charges/Fees should not be included in the proposal price. The University will be responsible for determining Custom Charges/Fees from a University designated customs broker and adding the cost to the proposal price. If these charges are identified in your proposal, they will be deducted from your total proposal price and the University’s estimate added instead. This adjusted total cost will serve as the basis for award.

The University will be responsible for arranging the payment of all United States Custom Charges/Fees, if applicable. The awarded Contractor must use the University's contracted customs broker, as identified on the purchase order. Customs charges will not be paid to the awarded Proposer or anyone other than the University’s designated customs broker under any circumstances, unless previously agreed to in writing by the University.

3.7. Travel Per Diems:

All of the Contractor’s travel and per diem expenses shall be the Contractor’s sole responsibility. Payment to the Contractor by the University shall not include an additional amount for this purpose.

3.8. Campus Delivery Requirements:

3.8.1. Delivery of orders shall be made to the University departments five days per week, Monday through Friday, during normal University business hours.

3.8.2. The University of Wisconsin-Madison no longer permits access to trucks over 30 ft. in length on several designated streets on this campus. The exceptions are trucks necessary for the delivery or pick up of perishable commodities, private construction vehicles, vehicles carrying radioactive materials, and campus service vehicles. For specific policy language, a campus map and restrictions, see the University Transportation Services website at http://transportation.wisc.edu/resources/large_truck.aspx.

3.8.3. This contract requires that Contractor deliver goods to the stated delivery address in accordance with the 30’ truck policy referenced in Section 3.13.2 above. Any unique delivery arrangements must be pre-approved by contacting the ordering department or Material Distribution Services (MDS) at (608) 497-4432. MDS reserves the right to charge Contractor reasonable material handling fees for any deliveries they make for the Contractor.

3.9. Acceptance and Test (Post Award):

Acceptance testing will occur within 30 days after the item/service has been installed. Acceptance testing will be performed by the University by the University and will consist of verification of the specifications and performance requirements.

If the item/service does not meet specification or performance requirements, the Contractor will have 30 days to meet requirements. If after this time period the item/service still does not meet specifications or performance requirements, the Contractor agrees to remove the item and return any payments that may have been made.

Victor Brar, or his designee, is the only authorized person who can sign an acceptance form. The warranty period will begin following the successful acceptance testing.

3.10. Insurance:

The Contractor shall maintain insurance levels as required in Standard Terms and Conditions, Section 22.0 A certificate of insurance must be provided upon award.

The Contractor shall add: “The Board of Regents of the University of Wisconsin System, its officers, employees and agents as an ‘additional insured’ under the commercial general, automobile liability policies." The certificate holder shall be listed as the University of Wisconsin-System Administration or System campus for their respective purchases.

3.11. Subcontracting:

3.11.1. Any Contract resulting from this proposal shall not be, in whole or in part, subcontracted, assigned, or otherwise transferred to any Subcontractor without prior written approval by Purchasing. Upon request Contractor must provide Subcontractor’s complete contact information including EIN# (TIN#, SS#) and signed W-9 for.

3.11.2. The Contractor shall be directly responsible for any subcontractor's performance and work quality when used by the Contractor to carry out the scope of the job. University reserves the right to assess Contractor damages in excess of the contract amount for Subcontractor’s failure to perform or inability to complete required project milestones.

3.11.3. Subcontractors must abide by all terms and conditions under this Contract.

3.12. Fair Price Analysis:

Purchases made under this contract may require further fair price analysis. The awarded Proposer will be required to provide documentation (i.e. published price list, list of previous buyers, etc.) to allow the University to complete this analysis.

3.13. Severability:

If any provision of this contract shall be, or shall be adjudged to be, unlawful or contrary to public policy, then that provision shall be deemed to be null and separable from the remaining provisions, and shall in no way affect the validity of this contract.

3.14. Environmentally Friendly (“Green”) Product:

Contractors are encouraged to identify products that are made of recycled products, that use environmentally friendly production methods, or that can be recycled at the end of their service life. The UW will make every effort to purchase “Green” products wherever feasible or possible based on individual project needs and funding available.

3.15. Supplier Diversity:

3.15.1. Minority Business Enterprise Program (MBE)

The State of Wisconsin is committed to the promotion of minority business in the state's purchasing program and a goal of placing 5% of its total purchasing dollars with certified minority businesses. Authority for this program is found in ss. 15.107(2), 16.75(4), 16.75(5) and 560.036(2), Wisconsin Statutes. The University of Wisconsin-Madison is committed to the promotion of minority business in the state's purchasing program.

The State of Wisconsin policy provides that Wisconsin Certified minority-owned business enterprises should have the maximum opportunity to participate in the performance of its contracts. The supplier/contractor is strongly urged to use due diligence to further this policy by awarding subcontracts to minority-owned business enterprises or by using such enterprises to provide goods and services incidental to this agreement, with a goal of awarding at least 5% of the contract price to such enterprises.

The Supplier/contractor may be requested to provide information about its purchases from Wisconsin certified MBEs.

A listing of certified minority businesses, as well as the services and commodities they provide, is available from the Department of Administration, Office of the Minority Business Program, 608/267-7806. To view all MBE firms go to https://wisdp.wi.gov/search.aspx select the MBE box and click search.

3.15.2. Woman Owned Business (WBE)

The State of Wisconsin is committed to the promotion of Woman-Owned Businesses as outlined in 560.035, Wisconsin Statutes.

The State of Wisconsin policy provides that Woman-Owned Businesses certified by the Wisconsin Department of Commerce should have the maximum opportunity to participate in the performance of its contracts. The supplier/contractor is strongly urged to use due diligence to further this policy by awarding subcontracts to Woman-Owned Businesses or by using such businesses to provide goods and services incidental to this agreement.

3.15.3. Disabled Veteran Owned Business (DVB)

The State of Wisconsin policy provides that Disabled Veteran-Owned Business Enterprises certified by the Wisconsin Department of Administration should have the maximum opportunity to participate in the performance of its contracts. The supplier/contractor is strongly urged to use due diligence to further this policy by awarding subcontracts to Disabled Veteran-Owned Businesses or by using such enterprises to provide goods and services incidental to this agreement, with a goal of awarding at least 1% of the contract price to such enterprises.

The supplier/contractor may be requested to provide information about its purchases from Wisconsin certified DVBs.

A listing of certified minority businesses, as well as the services and commodities they provide, is available from the Department of Administration, State Supplier Diversity Program, 608/267-9550. To view all DVB firms, go to https://wisdp.wi.gov/search.aspx, select the DVB box, and click search.

3.16. Discriminatory Boycotts of Israel:

Effective October 27, 2017, consistent with 2017 Wisconsin Executive Order 261, contractor agrees it is not engaged in a boycott of the State of Israel and further, contractor will not during the term of the contract engage in a boycott of the State of Israel. State agencies may not execute a contract and reserve the right to terminate an existing contract with a business entity that is not compliant with this provision. This provision applies to all contracts of all values.

3.17. Debarment:

Federal Executive Order (E.O.) 12549 “Debarment“ requires that all contractors receiving individual awards, using federal funds, and all subrecipients certify that the organization and its principals are not debarred, suspended, proposed for debarment, declared ineligible, or voluntarily excluded by any Federal department or agency from doing business with the Federal Government. By signing this document, you certify that your organization and its principals are not debarred. Failure to comply or attempts to edit this language may disqualify your bid. Information on debarment is available at the following websites: www.sam.gov and https://acquisition.gov/browsefar.

3.18. Promotional Materials/Endorsements:

Contractor agrees that they will not use any promotional or marketing material which states expressly or implies that the University endorses either the Contractor or any party related to the Contractor or this Contract.

3.19. Additional Items/Services:

Similar items/services may be added to this Contract provided it was mutually agreeable to both Purchasing Services and the Contractor. Scope of work and pricing (including discounts) must be consistent with the current contract items/services.

4. Requirements and Specifications Requirements that include the word “must” or “shall” describe a mandatory requirement. Failure to meet a mandatory requirement may disqualify your proposal.

Proposer must: 1) indicate agreement on each mandatory requirement and, if requested, describe how the specifications will be met and/or provide additional information, 2) complete any required form(s) and 3) provide a complete and detailed response to any non-mandatory requirement that can be fulfilled. If supplemental materials will be provided, clearly mark all supplements with the corresponding section number.

The Proposers response to this Section must clearly demonstrate the capacity to handle the needs stated in this RFP in addition to the Proposers current workload. The University reserves the right to request supplementary information deemed pertinent to assure Proposers competence, business organization, and financial resources are adequate to successfully perform.

4.1. Atomic Layer Deposition System Requirements:
Meets Requirements
ITEM
DESCRIPTION
YES
NO
4.1.1
Must include all equipment necessary for automated deposition of thin films for atomic layer deposition (ALD) using conventional thermal methods, plasma enhanced techniques, and ozone enhanced methods.
4.1.2
System must be capable of automated deposition of film of oxide films including SiO2, HfO₂, ZrO₂, Al₂O₃ and TiO₂. System must include complete pre-optimized recipes for growth of each of the above-listed materials.
4.1.3
Must include at least 4 plasma gas lines and one carrier gas mass flow controller.
4.1.4
Reactor must be able to accept 100 mm (4”) diameter substrates.
4.1.5
System must demonstrate a deposition uniformity of <1.5% across a 100mm wafer.
4.1.6
Must have at least 6 precursor lines that can accommodate solid, liquid or gas precursors. Each line must be able to be independently heated up to 200° C. Must allow for rapid exchange of precursors.
4.1.7
System must include an option for low vapor pressure deposition, allowing for low vapor pressure precursors < 0.01torr.
4.1.8
Must include a load lock with independent pumping system for loading samples.
4.1.9
System must be able to heat substrate to temperatures up to 500° C.
ITEM
DESCRIPTION
YES
NO
4.1.10
System must be capable of growing TiN films with intrinsic (single photon, millikelvin-temperature) quality factor in excess of 10^6 at microwave frequencies. System must include complete pre-optimized recipe for growth of TiN films.
4.1.11
System must be capable of growing NbN films with superconducting transition temperatures > 12k. System must include complete pre-optimized recipe for growth of NbN films.
4.1.12
System must be capable of growing VO2 films that exhibit a thermochromic, metal-to-insulator transition near 68° C. System must include complete pre-optimized recipe for growth of VO2 films.
4.1.13
System must include an ICP remote pulsed plasma radical generator.
4.1.14
System must be capable of depositing gate dielectrics including SiO2, HfO₂, and Al₂O₃ on graphene. System must include complete pre-optimized recipes for growth of gate dielectrics on graphene.
4.1.15
Vendor of system must provide consultation services for the development of recipes for ALD deposition of SrTiO3.
4.1.16
Vendor must demonstrate the repeatability of system performance, with film deposition that is not dependent on previously run processes.
4.1.17
System must include on-site training. Systems with more comprehensive training will be scored higher.
4.1.18
System must include a maintenance plan for cleaning of the growth chamber.
4.1.19
The system must be fully covered under warranty for at least one year after installation, and systems with longer warranty periods – or that allow for extension of the warranty period – will be scored higher. After installation, the vendor must demonstrate that the system can meet a number of acceptance tests that demonstrate the deposition of TiN, HfO2, and SiO2.
4.1.20
System must include all supporting infrastructure - including cabinets, computers, safety features, automatic data logging, power supplies, special tools, electronics racks – for safe, repeatable, and self-contained ALD operation.

5. Evaluation and Award of Contract

5.1. Proposal Scoring

Proposals meeting mandatory requirements will be reviewed by an evaluation committee and scored against the stated criteria. If no proposer is able to comply with a given specification or mandatory requirement, Purchasing reserves the right to delete that specification or mandatory requirement. In the event that all proposers do not meet one or more of the mandatory requirements, Purchasing reserves the right to continue the evaluation of the proposals and to select the proposal which most closely meets the requirements specified in this RFP. The committee may, at its sole discretion, review references, request oral presentations, and conduct an on-site visit and use the results in scoring the proposals. Proposals from certified Minority Business Enterprises or Disabled Veteran-Owned businesses may have points weighted by a factor 1.05 to provide a five percent (5%) preference to these businesses (Wis. Stats. 16.75(3m)). The evaluation committee's scoring will be tabulated and proposals ranked based on the numerical scores calculated.

5.2. Scoring Criteria and Method

For each response required of the Proposer in Section #4, the points provided in parentheses represents the total possible points available for each response. The responses will be evaluated based on the relative merits to the needs of the University (rather than relative to competing Proposer’s responses). The proposals will be scored independently by each committee member and the resulting scores will be averaged to determine the highest scoring proposal.

Supplier Diversity Preferences State of Wisconsin agencies may make awards to certified Minority Business Enterprise (MBE), or Disabled Veteran-Owned Business (DVB) firms submitting the lowest qualified proposal when that qualified proposal is not more than 5% higher than the apparent low proposal or the proposal is no more than 5% lower than the apparent high point score. Authority for this program is found in ss. 16.75(3m)(b)2,3, 16.75(3m)(c)(4) and 560.0335(1)(b)(3), 15.107(2), 16.75(4), 16.75(5) and 560.036(2), Wisconsin Statutes.

Pricing

5.2.1. The lowest priced proposal will receive 100% of the allotted cost points. All other proposals will be scored using the formula as follows:

Lowest Proposed Cost
X
Maximum evaluation points given to cost
= SCORE

Other Proposer’s Cost (Varies according to proposal being scored)

Calculation of points awarded to subsequent proposals will use the lowest dollar proposal amount as a constant numerator and the dollar amount of the firm being scored as the denominator. This result will always be less than one. The result is then multiplied by the number of points given to the cost section of the RFP.

5.2.2. For all other non-pricing related responses, points will be awarded relative to the needs of the State of Wisconsin, as solely determined by the evaluation committee members.

Points Evaluation and selection of a proposal will be based on the assignment of points by the evaluation committee which is then combined with the Cost Proposal points for a final score. (See Point Matrix below.)

Points Matrix
Description
Points Available
4.1.
Ability to demonstrate film growth and provide recipes for materials discussed in proposal, with stated metrics (if stated).
400
Attachment C
References for system
200
4.1
Quality of service, training and warranty plans
150
Attachment B
Cost
250
Total available points
1000

5.3. Best and Final Offers:

At the sole discretion of the University, those proposer(s) most likely to be awarded a contract may be requested to submit a Best and Final Offer in order to further clarify the deliverables, contract language, or costs presented in the Proposer’s RFP. If Best and Final Offers are requested, they will be evaluated against the stated criteria. There is no obligation on the part of the University to request Best and Final Offers from any or all of the Proposers responding to the RFP.

5.4. Notification of Award:

All proposers who respond to this RFP will be notified in writing of the University’s award contract(s) as a result of this RFP. After notification by Purchasing of the notice of award, file copies of proposals will be available for public inspection. Proposers must schedule document inspection with the Contract Administrator responsible for managing this RFP.

Attachment A: Vendor Information Form VENDOR NOTE: BOTH PAGES OF THIS FORM MUST BE COMPLETED AND RETURNED WITH YOUR BID RESPONSE.

1. Company and Contact Information

Company Name:

Company Website

Contact for questions regarding this Bid Name:

Telephone:

Fax

Email

Contract Renewals / Problems Name:

Telephone:

Fax

Email

Sales Representative Name:

Telephone:

Fax

Email

Ordering / Expediting Name:

Telephone:

Fax

Email

Returns Name:

Telephone:

Fax

Email

Invoice Information Name:

Telephone:

Fax

Email

Affirmative Action (see Section 17 in Standard Terms and Conditions)

Name:

Address:

City/State/Zip:

Telephone:

Fax

Email

Supplier Diversity Reporting (see Section 3.15) Name:

Address:

City/State/Zip:

Telephone:

Fax

Email

2. In accordance with Wisconsin Statutes 560.035, 560.0335 and 560.036, indicate below if you are a Wisconsin certified Minority Business Enterprise (MBE), Work Center (WC), Disabled Veteran-Owned Business (DVB) or Woman-owned Business Enterprise (WBE) (see websites:

https://wisdp.wi.gov/Home.aspx or http://stateuseprogram.wi.gov/section.asp?linkid=1424&locid=65).

____ Minority (MBE)____ Work Center (WC)____Disabled Veteran-Owned Business (DVB)
____ Woman Owned Business Enterprise (WBE)___ Not applicable
(If no answer is indicated above, we will assume that you are none of the above when making the award.)

3. Pursuant to Public Law 95-507, indicate which of the following classifications apply to your organization. All vendors are considered Large Business unless otherwise indicated (see website: www.sba.gov/). (Check √ all that apply.)

____________ LARGE BUSINESS (LG)
____________ SMALL BUSINESS (SB)
____________ VETERAN OWNED SMALL BUSINESS (VOSB)
____________ SERVICE DISABLED VETERAN OWNED SMALL BUSINESS (SDVOSB)
____________ HISTORICALLY UNDER UTILIZED BUSINESS ZONE (HUBZONE)
____________ SMALL DISADVANTAGED BUSINESS (SDB)
____________ WOMAN-OWNED SMALL BUSINESS (WOSB)

4. AMERICAN MADE: Wisconsin Statutes S. 16.754, directs the state to purchase materials which are manufactured to the greatest extent in the United States when all other factors are substantially equal. “Substantially equal” means when bids are tied or proposal scores are equal. Indicate whether the material covered in your bid/proposal were manufactured in whole or in substantial part within the United States, or the majority of the component parts thereof were manufactured in whole or in substantial part in the United States.

____________ YES ____________ NO ____________ UNKNOWN

5. RECYCLED PRODUCTS/PACKAGING/DISPOSAL TECHNIQUES: The University is committed to promote environmentally sound procurement, usage and disposal methods which are in compliance with State of Wisconsin County, and Municipal regulations. Currently the University has a recycling program for starch and Styrofoam packing peanuts. The University’s preference is to receive starch peanuts whenever possible. The Contractor shall not use INSTAPAK (or similar), Vermiculite or mix starch and Styrofoam peanuts under any circumstances. Each product shall be separately pre-packed in accordance with commercially accepted methods. Small products may be packaged in protective envelopes (Mail-Lite or Bubble-Jet packs).

Attachment B: Cost Proposal Form

Cost which are not specifically identified below will not be compensated under any Contract awarded pursuant to this RFP.

ITEM
QTY.
DESCRIPTION
PRICE

1.

ATOMIC LAYER DEPOSITION SYSTEM

Manufacturer:

Model No.:

MAINTENANCE AFTER EXPIRATION OF WARRANTY:

YEAR 2 $

YEAR 3 $

YEAR 4 $ _______________________

Country of Origin

Shipping Point

Attachment C: Client Reference List

Bidder Name:

The Bidder must provide a minimum of three (3) business references.

1. Reference Name: Contact:

Address:

Phone #: ( ) E-mail address:

Fax/Internet address:

Description and date(s) of commodities and services provided:

2. Reference Name: Contact:

Address:

Phone #: ( ) E-mail address:

Fax/Internet address:

Description and date(s) of commodities and services provided:

3. Reference Name: Contact:

Address:

Phone #: ( ) E-mail address:

Fax/Internet address:

Description and date(s) of commodities and services provided:

References may be contacted to confirm the Bidder’s abilities and qualifications as stated in the Bidder’s response. The University may perform due diligence by contacting any applicable business reference, including references from within the UW System, state agencies, or other state public institutions. The University reserves the right to disqualify any Bidder whose references don’t support their stated claim of qualifications in their response.

Attachment D: Standard Terms and Conditions

1.0 SPECIFICATIONS: The specifications in this request are the minimum acceptable. When specific manufacturer and model numbers are used, they are to establish a design, type of construction, quality, functional capability and/or performance level desired. When alternates are bid/proposed, they must be identified by manufacturer, stock number, and such other information necessary to establish equivalency. The UW-Madison shall be the sole judge of equivalency. Bidders/proposers are cautioned to avoid bidding alternates which may result in rejection of their bid/proposal.

2.0 DEVIATIONS AND EXCEPTIONS: Deviations and exceptions from original text, terms, conditions, or specifications shall be described fully, on the bidder's/proposer's letterhead, signed, and attached to the request. Each deviation and exception must be identified by the section, page and paragraph to which it applies. In the absence of such statement, the bid/proposal shall be accepted as in strict compliance with all terms, conditions, and specifications and the bidder/proposer shall be held liable.

3.0 QUALITY: Unless otherwise indicated in the request, all material shall be first quality. Items which are used, demonstrators, obsolete, seconds, or which have been discontinued are unacceptable without prior written approval by the University.

4.0 QUANTITIES: The quantities shown on this request are based on estimated needs. The University reserves the right to increase or decrease quantities to meet actual needs.

5.0 PRICING AND DISCOUNT: The University qualifies for governmental discounts and its educational institutions also qualify for educational discounts. Unit prices shall reflect these discounts.

5.1 Unit prices shown on the bid/proposal or contract shall be the price per unit of sale (e.g., gal., cs., doz., ea.) as stated on the request or contract. For any given item, the quantity multiplied by the unit price shall establish the extended price, the unit price shall govern in the bid/proposal evaluation and contract administration.

5.2 Prices established in continuing agreements and term contracts may be lowered due to general market conditions, but prices shall not be subject to increase for ninety (90) calendar days from the date of award. Any increase proposed shall be submitted to the University thirty (30) calendar days before the proposed effective date of the price increase, and shall be limited to fully documented cost increases to the Contractor which are demonstrated to be industry-wide. The conditions under which price increases may be granted shall be expressed in bid/proposal documents and contracts or agreements.

5.3 In determination of award, discounts for early payment will only be considered when all other conditions are equal and when payment terms allow at least fifteen (15) days, providing the discount terms are deemed favorable. All payment terms must allow the option of net thirty (30).

6.0 UNFAIR SALES ACT: Prices quoted to the University are not governed by the Wisconsin Unfair Sales Act.

7.0 ACCEPTANCE-REJECTION: The University reserves the right to accept or reject any or all bids/proposals, to waive any technicality in any bid/proposal submitted, and to accept any part of a bid/proposal as deemed to be in the best interest of the State of Wisconsin.

8.0 ORDERING: Purchase orders or releases via purchasing cards shall be placed directly to the Contractor by University. No other purchase orders are authorized.

9.0 PAYMENT TERMS AND INVOICING: The University normally will pay properly submitted vendor invoices within thirty (30) days of receipt providing goods and/or services have been delivered, installed (if required), and accepted as specified.

9.1 Invoices presented for payment must be submitted in accordance with instructions contained on the purchase order including reference to purchase order number and submittal to the correct address for processing. Invoice payment processing address is shown on the upper left corner of the purchase order. Send invoices to the Accounts Payable address on the purchase order. Do not send invoices to the ship to address.

9.2 Payment shall be considered timely if the payment is mailed, delivered, or transferred within thirty (30) days after receipt of a properly completed invoice, unless the vendor is notified in writing by the agency of a dispute before payment is due.

9.3 Bidders/proposers shall include discounts for early payment (See 5.3) as a percent reduction of invoice. Invoice discounts shall be determined, where applicable, from the date of acceptance of goods and/or the receipt of invoice, whichever is later. Discounts for early payment terms stated on the bid/proposal must be shown plainly on the invoice; discounts for early payment not shown on the invoice will be taken.

9.4 Invoices submitted not in accordance with these instructions will be removed from the payment process and returned within ten (10) days.

9.5 Payment terms and invoicing for purchasing card will be made in accordance with the purchasing card contact.

10.0 TAXES: The University,…

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