VTR 7000+ Furnace Upgrade

The Defense Microelectronics Activity is soliciting proposals under solicitation number HQ072723QNR04 to upgrade a Thermco/SVG/Aviza VTR 7000+ high temperature 3-zone furnace to operate up to 1250 degrees Celsius at various locations. Proposals are due by June 20, 2023 and must include pricing to replace aging furnace equipment and allow for installation and employee training before the end of the calendar year. Evaluation will be based on price, and award will be made to the responsible offeror providing the best value to the government.

This is a total small business set-aside opportunity under NAICS code 333298, Other Industrial Machinery Manufacturing. The solicitation seeks upgrading one existing vertical furnace by adding an unused gas line for potential future use with nitric oxide and retaining existing wafer and quartz component loading capabilities. Installation, training, documentation, warranty, and full service support must be provided. The place of performance is McClellan Park, California, and relevant experience providing similar electronics manufacturing equipment to government agencies will be considered favorably in the award decision.