PWS 23-3B6.pdf
PDF 210 KB Posted
- Attached to
- VTR 7000+ Furnace Upgrade
- Solicitation number
- HQ072723QNR04
- Issued by
-
Defense Microelectronics Activity
About this file
This performance work statement outlines requirements for upgrading an existing vertical furnace for the Defense Microelectronics Activity. The contractor shall upgrade a Thermco/SVG/Aviza VTR 7000+ furnace to operate up to 1250 degrees Celsius with a 3-zone heater element. Additional requirements include adding an unused gas line for potential future use with nitric oxide and retaining existing capabilities such as loading 150mm wafers and quartz components. The contractor must provide installation, training, documentation, warranty, and full service support. Related federal contract opportunity HQ072723QNR04 from the Defense Microelectronics Activity seeks these furnace upgrade services.
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| File | Type | Posted |
|---|---|---|
| HQ072723QNR04.pdf | ||
| JA 23-3B6.pdf |
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Text version
SOW PWS Template 20161116.doc
PERFORMANCE WORK STATEMENT (PWS)
DMEA 23-3B6
17 May 2023
Project Engineer:
Contract Officer Representative:
1.0 SCOPE:
1.1 TITLE: Thermco/SVG/Aviza VTR 7000+ High Temperature 3-zone Furnace Upgrade
1.2 APPLICABILITY: ARMS Foundry SiC
1.3 PURPOSE: To upgrade one of DMEA’s existing vertical furnaces to >1000°C capable and add an extra MFC gas line for a possible future nitric oxide (NO) gas line. NO gas and >1000°C capabilities are known requirements to successfully produce SiC MOSFETs for post oxidation anneal (POA) of the SiC gate oxide.
2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES:
2.1 GOVERNMENT DOCUMENTS:
Document No. Date Title eB 100714 ARMS Cleanroom Protocol
2.2 GOVERNMENT FURNISHED EQUIPMENT:
None
2.3 GOVERNMENT FURNISHED FACILITIES/ACCESS:
Facility/Access Date DMEA 4234 54th Street, McClellan, CA 95652-2100 Upon installation
3.0 REQUIREMENTS:
3.1 GENERAL REQUIREMENTS:
a. The contractor shall provide the tool and include all items required for installation (e.g. hardware, software, and other documentations) as listed in the tool purchase package
b. The contractor shall verify that only genuine hardware and software shall be provided with no non-OEM or counterfeit items substituted. A written guarantee and corresponding paperwork shall be provided to DMEA at contract award.
c. The contractor shall provide full system installation including connection to system facilities and hardware validation with marathon run.
d. Correct or fix any hardware or software problems encountered during initial installation and testing
e. Be operational and functional in accordance to tool vendor specifications
f. The contractor shall provide DMEA personnel with training (including but not limited to operational, routine maintenance, upkeep, and other pertinent functions) to effectively use the tool
g. The contractor shall provide tool user manuals (softcopy and/or hardcopy)
h. The contractor shall provide DMEA with tool warranty and support clause
i. The contractor shall provide DMEA with User Licenses and License Agreement
j. The contractor shall provide full service support, upgrades, replacement guarantees, a valid software license and full warranty.
k. Contractor travel is required to perform installation and training.
3.2 PROGRAM MANAGEMENT: None
3.3 TASK REQUIREMENTS:
SOW PWS Template 20161116.doc
3.3.1 TOOL REQUIREMENT: The existing DMEA tool model name VTR 7000+ shall be upgraded to be capable of: performing oxidations above 1000°C on SiC with extra MFC gas line for a possible future NO POA for SiC MOSFET gate oxides with a 3-zone heater element in addition to the tool’s existing capabilities.
The tool once upgraded shall be capable of operating at maximum temperature of 1250 °C.
The tool once upgraded shall use a 200mm 3-zone heater element.
The tool once upgraded shall be capable of flowing N2, O2, H2, DCE, and N2O gases.
The tool once upgraded shall have one additional unused capped MFC gas line for a possible future NO gas.
The tool once upgraded shall use 150mm SiC boats and baffles.
The tool once upgraded shall use 150mm high temperature quartz pedestals.
The tool once upgraded shall use a high temperature element insulation kit.
The tool once upgraded shall use a 200mm high temperature Cinnamon Roll Tube quartz tube.
The tool once upgraded shall use a 200mm polysilicon liner.
The tool once upgraded shall fit in a footprint no larger than the existing standard tool footprint for a VTR
7000+.
The tool once upgraded shall retain the capability to process 150mm wafers.
The tool once upgraded shall retain the capability to process batches of ≥150 product wafers per run.
The tool once upgraded shall retain the capability to process at atmospheric conditions.
The tool once upgraded shall retain an external torch where H2 and O2 gas can combine to form steam prior to entering the process tube.
The tool once upgraded shall retain the capability to process to flow H2 and O2 gas ratios of 1.67:1 and lower.
The tool once upgraded shall retain the capability to automatically load wafers from cassette load stations.
3.4 PROGRAM SUMMARY: None
4.0 POINTS OF CONTACT:
DMEA/ MEBA / PE:
DMEA/ MEBA / COR:
File details come from the government source that posted it. Updated .