Solicitation for Gas Abatement System

Closed Solicitation Posted

This opportunity was awarded. See the award notice from .

Solicitation number
1333ND26QNB030563
Agency
National Institute of Standards and Technology Department of Commerce
Responses due
Set-aside
Total Small Business

Opportunity facts

NAICS code
333242 Semiconductor Machinery Manufacturing
PSC
5961 Semiconductor Devices And Associated Hardware
Place of performance
Gaithersburg, Maryland 20899, United States
Points of contact

Notice details come from SAM.gov. Updated .

About this opportunity

The National Institute of Standards and Technology seeks quotation for a Gas Abatement System at its Gaithersburg, Maryland campus, with responses due September 15, 2026 at 10:00 am EST. This is a 100% small business set-aside under NAICS 333242 with a size standard of 1,500 employees.

Place of performance is NIST Gaithersburg, 100 Bureau Drive, Building 221, Maryland 20899. The system must incorporate a dry bed absorber/scrubber in a cabinet with control/readout and endpoint detector, handling a defined gas matrix (hydrogen, helium, nitrogen, argon, oxygen, chlorine, tetrafluoromethane, trifluoromethane, hexafluoroethane, and sulfur hexafluoride) at specified flow rates. The system must abate F-containing reaction by-products, specifically HF, using a dry scrubber; parent molecules CF4, CHF3, C2F6, and SF6 are not required to be abated. All compounds requiring abatement must be treated in a single canister with a minimum one-year lifetime at 25 sccm hexafluoroethane flow. The cabinet operates at negative pressure with a removable/replaceable canister, DN 25 or DN 40 ISO-KF inlet/outlet connections, and requires single-phase 100–125V, 50/60 Hz power (18 amps maximum). Continuous gas monitoring must ensure outlet concentrations remain below TLV and LEL thresholds. Delivery is FOB Destination within 12 weeks of award. The contractor must provide installation manual and schematics at award and conduct onsite training for up to five NIST users within 90 days of installation. A 12-month warranty commences upon government acceptance. Payment is 100% upon installation, acceptance, successful testing, and performance demonstration. This is a commercial item acquisition under FAR Part 12. Award is made to the lowest-priced, technically acceptable quoter based on initial quotes without discussions. Responses to technical questions were posted September 9, 2026; the Nonmanufacturer Rule does not apply.

Notice text

3 versions

Update #3 · Latest ·

9/9/26: Amendment 02- Responses to all questions have been posted (See Solicitaiton Q and A), and the response due date has been extended to September 15, 2026 at 10:00 am EST.

9/3/26: Amendment 01- The response due date has been extended to September 10, 2026 at 2:00 pm EST.

The National Institute of Standards and Technology (NIST) has a requirement at its Gaithersburg, MD campus for a gas abatement system. Please see attached Solicitation# 1333ND26QNB030563 for full details, and submit a quotation in accordance with the Quotation Preparation Instructions on pages 11-12 of the solicitation which detail the information required in each of the Volumes I-III of the quotation. Thank you!

Update #2 ·

9/3/26: Amendment 01- The response due date has been extended to September 10, 2026 at 2:00 pm EST.

The National Institute of Standards and Technology (NIST) has a requirement at its Gaithersburg, MD campus for a gas abatement system. Please see attached Solicitation# 1333ND26QNB030563 for full details, and submit a quotation in accordance with the Quotation Preparation Instructions on pages 11-12 of the solicitation which detail the information required in each of the Volumes I-III of the quotation. Thank you!

Update #1 ·

The National Institute of Standards and Technology (NIST) has a requirement at its Gaithersburg, MD campus for a gas abatement system. Please see attached Solicitation# 1333ND26QNB030563 for full details, and submit a quotation in accordance with the Quotation Preparation Instructions on pages 11-12 of the solicitation which detail the information required in each of the Volumes I-III of the quotation. Thank you!

Attachments

Files attached to this notice, newest first
File Type Posted
Solicitation Q and A 9-9-26.docx DOCX document
1333ND26QNB030563.pdf PDF

Notice history

Notices posted for this opportunity, newest first
Notice Type Posted
Award Notice for Gas Abatement System Award Award Notice
Solicitation for Gas Abatement System This notice · Latest solicitation Solicitation

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