Solicitation Q and A 9-9-26.docx

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Attached to
Solicitation for Gas Abatement System Federal contract opportunity
Solicitation number
1333ND26QNB030563
Issued by
Department of Commerce National Institute of Standards and Technology

About this file

This is a Questions and Answers document (Amendment 02) for NIST's Gas Abatement System solicitation 1333ND26QNB030563, issued September 9, 2026. The document clarifies technical requirements and system design specifications for contractors responding to the RFQ.

Key technical clarifications include: the Nonmanufacturer Rule does not apply to this solicitation; the system must abate F-containing reaction by-products (specifically HF) using a dry scrubber rather than burn/wet or plasma/wet scrubbers, as the system is not required to abate parent molecules CF4, CHF3, C2F6, and SF6; listed gas flow rates in the matrix represent individual maximums rather than simultaneous flows; all compounds requiring abatement must be treated in a single canister; and ballast nitrogen from the vacuum pump will not exceed 50 sccm beyond the specified 100 sccm N2 in the SOW. The revised response deadline is September 15, 2026 at 10:00 AM EST. Quotations must follow the Quotation Preparation Instructions detailed in Volumes I-III of the original solicitation for the Gaithersburg, MD campus requirement.

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Amendment 02 to Solicitation 1333ND26QNB030563 Gas Abatement System Questions and Answers (Q&A) September 9, 2026

1. Can you please confirm whether the Nonmanufacturer Rule (NMR) applies to Solicitation?

Answer: The Nonmanufacturer Rule does not apply to this solicitation.

2. The RFQ for a dry scrubber is not the correct abatement based on the process gases NIST provided. Is the correct abatement instead for a burn/wet or plasma/wet scrubber (does not require fuel)?

Answer: The system is required to abate F-containing reaction by-products and not the parent molecules. F-containing by-products can be abated with a dry scrubber. A burn/wet or plasma/wet scrubber is not necessary since the system is not required to abate CF4, CHF3, C2F6, and SF6.

3. Does the Government expect all gases listed in the gas matrix to be present at the same time at their maximum flow rates, or are the listed flow rates individual maximums?

Answer: The listed flow rates are individual maximums. The gases listed will not be present at the same time at the respective maximum flow rate.

4. For the CF4, CHF3, C2F6, and SF6 listed as “HF by-product,” should the system be designed primarily to abate HF, or the unreacted process gases themselves?

Answer: For these compounds, the system should be designed to abate HF. The system is not required to abate CF4, CHF3, C2F6, and SF6.

5. Please confirm whether HF, Cl2, CF4, CHF3, C2F6, and SF6 are all required to be treated in the same single canister.

Answer: All compounds to be abated should be treated with the same canister. The system is not required to abate CF4, CHF3, C2F6, and SF6.

6. The SOW lists N2 at 100 sccm. Is there any additional ballast/diluent N2 from the vacuum pump? If yes, please provide the expected flow rate.

Answer: Ballast from the vacuum pump will not exceed 50 sccm.

File details come from the government source that posted it. Updated .