1333ND26QNB030563.pdf

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Solicitation for Gas Abatement System Federal contract opportunity
Solicitation number
1333ND26QNB030563
Issued by
Department of Commerce National Institute of Standards and Technology

About this file

This is a Request for Quotation (RFQ) for the procurement of a Gas Abatement System for the National Institute of Standards and Technology (NIST), Materials Measurement Laboratory. The solicitation number is 1333ND26QNB030563, issued on an unspecified date with quotations due by 10:00 AM Eastern Time on September 9, 2026. This is a 100% small business set-aside under NAICS code 333242 (Semiconductor Machinery Manufacturing) with a size standard of 1,500 employees. The acquisition is being conducted under FAR Overhaul Part 12 simplified acquisition procedures for commercial items.

The procurement requires one Gas Abatement System incorporating a dry bed absorber/scrubber in a cabinet with control/readout and an endpoint detector. The system must handle a specific gas matrix including hydrogen, helium, nitrogen, argon, oxygen, chlorine, tetrafluoromethane, trifluoromethane, hexafluoroethane, and sulfur hexafluoride at defined flow rates. Technical specifications include a minimum one-year canister lifetime at 25 sccm hexafluoroethane flow (1,560 process hours annually), negative pressure cabinet operation, removable/replaceable canister, continuous gas monitoring ensuring outlet concentrations remain below TLV and LEL thresholds, DN 25 or DN 40 ISO-KF inlet/outlet connections, and single-phase 100-125V, 50/60 Hz power (18 amps maximum). Delivery is FOB Destination within 12 weeks of award to NIST Gaithersburg (100 Bureau Drive, Building 221). The contractor must provide installation manual and schematics at award and conduct onsite training for up to five NIST users within 90 days of installation. A 12-month warranty commences upon government acceptance. Payment is 100% upon installation, acceptance, successful testing, and demonstration of performance per specifications. Quoters must have active SAM.gov registration and submit three separate volumes: Technical Quotation (demonstrating all requirements are met), Price Quotation (firm-fixed-price including all shipping and tariffs), and Terms and Conditions. Award will be made to the lowest-priced, technically acceptable quoter based on initial quotes without discussions.

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RFQ IFB RFP

WOMEN-OWNED SMALL BUSINESS

(WOSB) ELIGIBLE UNDER THE WOMEN-OWNED

SOLICITATION/CONTRACT/ORDER FOR COMMERCIAL ITEMS

OFFEROR TO COMPLETE BLOCKS 12, 17, 23, 24, & 30

1. REQUISITION NUMBER PAGE OF

2. CONTRACT NO. 3. AWARD/EFFECTIVE

DATE

4. ORDER NUMBER 5. SOLICITATION NUMBER 6. SOLICITATION ISSUE

DATE

7. FOR SOLICITATION

INFORMATION CALL:

a. NAME b. TELEPHONE NUMBER (No collect calls)

8. OFFER DUE DATE/

LOCAL TIME

9. ISSUED BY

13b. RATING

14. METHOD OF SOLICITATION

CODE

15. DELIVER TO 16. ADMINISTERED BY CODE

18a. PAYMENT WILL BE MADE BY CODEFACILITY

CODE

CODE

TELEPHONE NO.

17b. CHECK IF REMITTANCE IS DIFFERENT AND PUT SUCH ADDRESS IN

OFFER

18b. SUBMIT INVOICES TO ADDRESS SHOWN IN BLOCK 18a UNLESS BLOCK

BELOW IS CHECKED

SEE ADDENDUM

19.

ITEM NO.

20.

SCHEDULE OF SUPPLIES/SERVICES

21.

QUANTITY

22.

UNIT

23.

UNIT PRICE

24.

AMOUNT

(Use Reverse and/or Attach Additional Sheets as Necessary)

25. ACCOUNTING AND APPROPRIATION DATA 26. TOTAL AWARD AMOUNT (For Govt. Use Only)

28. CONTRACTOR IS REQUIRED TO SIGN THIS DOCUMENT AND RETURN

DELIVER ALL ITEMS SET FORTH OR OTHERWISE IDENTIFIED ABOVE AND ON ANY

ADDITIONAL SHEETS SUBJECT TO THE TERMS AND CONDITIONS SPECIFIED

29. AWARD OF CONTRACT: REF.

DATED . YOUR OFFER ON SOLICITATION

(BLOCK 5), INCLUDING ANY ADDITIONS OR CHANGES WHICH ARE

SET FORTH HEREIN, IS ACCEPTED AS TO ITEMS:

30a. SIGNATURE OF OFFEROR/CONTRACTOR

30b. NAME AND TITLE OF SIGNER (Type or print) 30c. DATE SIGNED

31a. UNITED STATES OF AMERICA (SIGNATURE OF CONTRACTING OFFICER)

31b. NAME OF CONTRACTING OFFICER (Type or print) 31c. DATE SIGNED

AUTHORIZED FOR LOCAL REPRODUCTION

PREVIOUS EDITION IS NOT USABLE

STANDARD FORM 1449 (REV. 2/2012)

Prescribed by GSA - FAR (48 CFR) 53.212

COPIES TO ISSUING OFFICE. CONTRACTOR AGREES TO FURNISH AND

OFFER

13a. THIS CONTRACT IS A

RATED ORDER UNDER

DPAS (15 CFR 700)

11. DELIVERY FOR FOB DESTINA-

TION UNLESS BLOCK IS

MARKED

SEE SCHEDULE

12. DISCOUNT TERMS

ARE ARE NOT ATTACHED

ARE ARE NOT ATTACHED

27a. SOLICITATION INCORPORATES BY REFERENCE FAR 52.212-1, 52.212-4. FAR 52.212-3 AND 52.212-5 ARE ATTACHED. ADDENDA

27b. CONTRACT/PURCHASE ORDER INCORPORATES BY REFERENCE FAR 52.212-4. FAR 52.212-5 IS ATTACHED. ADDENDA

17a CONTRACTOR/

OFFEROR.

CODE

8 (A)

SIZE STANDARD:

NAICS:

% FOR:SET ASIDE:UNRESTRICTED OR

SERVICE-DISABLED

VETERAN-OWNED

SMALL BUSINESS

HUBZONE SMALL

BUSINESS

SMALL BUSINESS

10. THIS ACQUISITION IS

EDWOSB

SMALL BUSINESS PROGRAM

STANDARD FORM 1449 (REV. 2/2012) BACK

19.

ITEM NO.

20.

SCHEDULE OF SUPPLIES/SERVICES

21.

QUANTITY

22.

UNIT

23.

UNIT PRICE

24.

AMOUNT

32a. QUANTITY IN COLUMN 21 HAS BEEN

RECEIVED INSPECTED ACCEPTED, AND CONFORMS TO THE CONTRACT, EXCEPT AS NOTED:

41a. I CERTIFY THIS ACCOUNT IS CORRECT AND PROPER FOR PAYMENT

32b. SIGNATURE OF AUTHORIZED GOVERNMENT

REPRESENTATIVE

32c. DATE

41b. SIGNATURE AND TITLE OF CERTIFYING OFFICER 41c. DATE

42a. RECEIVED BY (Print)

42b. RECEIVED AT (Location)

42c. DATE REC'D (YY/MM/DD) 42d. TOTAL CONTAINERS

40. PAID BY

32d. PRINTED NAME AND TITLE OF AUTHORIZED GOVERNMENT

REPRESENTATIVE

32e. MAILING ADDRESS OF AUTHORIZED GOVERNMENT REPRESENTATIVE 32f. TELPHONE NUMBER OF AUTHORZED GOVERNMENT REPRESENTATIVE

32g. E-MAIL OF AUTHORIZED GOVERNMENT REPRESENTATIVE

33. SHIP NUMBER 34. VOUCHER NUMBER 35. AMOUNT VERIFIED

CORRECT FOR

PARTIAL FINAL

37. CHECK NUMBER

38. S/R ACCOUNT NO. 39. S/R VOUCHER NUMBER

36. PAYMENT

COMPLETE PARTIAL FINAL

SCHEDULE Continued

ITEM NO. SUPPLIES/SERVICES QUANTITY UNIT UNIT PRICE AMOUNT

0001 Gas Abatement System inclusive of delivery, training and

1-year warranty in accordance with the Statement of Work (SOW)

FOB : Destination

1.00 EA

0002 Shipping and handling in accordance with the SOW

NTE NTE

0003 Transportation and other related expenses for delivery to the USA. Not to Exceed (NTE) amount.

PAGE 3 OF 25 1333ND26QNB030563

Table of Contents

STATEMENT OF WORK (SOW)

INSTRUCTIONS TO QUOTERS AND EVALUATION CRITERIA

APPLICABLE PROVISIONS AND CLAUSES

PAGE 4 OF 25 1333ND26QNB030563

CLAUSES

STATEMENT OF WORK (SOW)

PAGE 5 OF 25 1333ND26QNB030563

STATEMENT OF WORK

Title: Gas Abatement System

Lab: Materials Measurement Laboratory (MML)/646

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps the National Institute of Standards and Technology (NIST) will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

This is a CHIPS Metrology procurement that supports Project 5.04 for Grand Challenge 5, Modeling and Simulating Semiconductor Manufacturing Processes. The CHIPS RF Waveform and Rapid Frequency Comb Diagnostics for Plasma Etching Project (5.04) was undertaken to identify methods to improve efficiencies of plasma etching processes. This project is focused on using advanced measurements to characterize the plasma environment by correlating time-dependent optical measurements to be performed at NIST Gaithersburg and time-dependent plasma power measurements to be performed at NIST Boulder. These advanced (in some cases unique) measurements are to be performed in situ during etch processes using commercially-important plasma chemistries. The gas abatement system that has been requested will permit the use of plasma chemistries relevant to commercial processes but hazardous to researchers if not properly treated at the outlet of the plasma chamber.

II. PURPOSE

The purpose of this solicitation contract is to purchase a gas abatement system that can render safe the exhaust from an etch chamber employing commercial etch gases. This equipment will enable the Chemical Sciences Division in the Material Measurement Laboratory to perform advanced optical measurements of species in a plasma etch system as used in the fabrication of commercial semiconductor devices.

Plasma chemistries that are employed in commercial semiconductor fabrication processes can produce hazardous by-products, including toxic, carcinogenic, and flammable compounds, that are exhausted from the plasma vacuum chamber during process runs. Therefore, a suitable gas abatement system, including scrubbers and filters, is required to permit safe operation of the plasma chamber.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Gas Abatement System Description: The gas abatement system incorporates a dry bed absorber/scrubber in a canister enclosed in a cabinet with control/readout and with an endpoint detector in the canister exhaust.

Quantity: One (1)

A. Technical Specification

PAGE 6 OF 25 1333ND26QNB030563

a. Abatement type: dry bed absorber/scrubber

b. Concentrations of all hazardous gases at the system outlet are less than or equal to the respective threshold limit value (TLV)

c. Concentrations of all flammable gases at the system outlet are less than or equal to the respective lower explosive limit (LEL)

d. The gas matrix to be abated is listed in Table 1 below

e. Absorber/scrubber canister lifetime to be one (1) year minimum for an average flow rate of 25 sccm of hexafluoroethane assuming 1560 process hours per year (6 hr/day for 5 days/week for 52 weeks)

f. Absorber/scrubber canister and associated components, e.g., plumbing and valves, contained in a cabinet designed to operate under negative pressure

g. The absorber/scrubber canister is removable/replaceable in the field

h. Gas flow design in the cabinet incorporates a canister by-pass so that a used canister can be removed/replaced while the system is under purge

i. Inlet pressure sensor on flow system

j. System control/monitor console located on the cabinet exterior

k. Continuous gas monitoring of the abated exhaust gas to ensure abatement gases are below the respective TLV or LEL

l. No active heating of the absorber/scrubber canister

m. No waste water production

n. Gas inlet (from process) connection flange: DN 25 ISO-KF or DN 40 ISO-KF

o. Gas outlet (to building exhaust) connection flange: DN 25 ISO-KF or DN 40 ISO-KF

p. House nitrogen and air connections: Swagelok ¼” or ½” tube fitting

q. Power requirement: single phase, 100-125 V, 50/60 Hz, 18 amps or less

r. Installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system shall be submitted at the time of award

s. Training provided by the Contractor at the NIST Gaithersburg site after installation by

NIST

Table 1. The potential gas matrix to be abated

Gas Species Maximum flow rate (standard cm3)

Hydrogen, H2 90 Helium, He 90 Nitrogen, N2 100

Argon, Ar 90 Oxygen, O2 70 Chlorine, Cl2 70

Tetrafluoromethane, CF4 (HF by-product) 100 Trifluoromethane, CHF3 (HF by-product) 100 Hexafluoroethane, C2F6 (HF by-product) 80 Sulfur hexafluoride SF6 (HF by-product) 100

IV. SCHEDULE OF DELIVERABLES

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PAGE 7 OF 25 1333ND26QNB030563

Deliverable Number Description Quantity Due Date

Place of Delivery

1 Installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system

1 At time of award NIST (Gaithersburg)

2 Gas abatement system 1 12 weeks ARO NIST (Gaithersburg)

3 Onsite Training for up to 5 NIST users 1 Within 90 days after installation

NIST

(Gaithersburg)

PLACE OF PERFORMANCE

All equipment manufacture shall be completed at the Contractor’s facility.

Equipment will be delivered to 100 Bureau Dr. Building 221, Gaithersburg, MD 20899.

Training shall be conducted at the NIST Gaithersburg site during regular business hours after installation by NIST.

Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

C/O/ POC/COR: TBD, 221/B320

VI. TRAINING

The contractor shall conduct training session for up to five users at NIST after the system passes the site acceptance test. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during regular operating hours and must be completed no later than 90 days after NIST installation.

VII. INSPECTION & ACCEPTANCE

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PAGE 8 OF 25 1333ND26QNB030563

In addition to the inspection and acceptance terms articulated in the specific FAR clause, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Performance tests involve confirming that the system control/monitoring is functioning properly and that all alarms are active.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST Technical Point of Contact (TPOC) to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within fifteen (15) business days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of twelve (12) months in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

IX. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. CYBERSECURITY PRIVACY REQUIREMENTS

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PAGE 9 OF 25 1333ND26QNB030563

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident.

Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of

SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

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INSTRUCTIONS TO QUOTERS AND EVALUATION CRITERIA

PAGE 10 OF 25 1333ND26QNB030563

(I) This is a solicitation for commercial products or commercial services prepared in accordance with Revolutionary FAR Overhaul (RFO) part 12. This announcement constitutes the only solicitation; quotes are being requested and a separate written solicitation will not be issued.

(II) This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov, and as otherwise noted in the attached provisions and clauses.

(III) The solicitation number is 1333ND26QNB030563 and is a Request for Quotation (RFQ). This acquisition is 100% set-aside for small business.

(IV) The associated North American Industrial Classification System (NAICS) code for this procurement is 333242, Semiconductor Machinery Manufacturing, with a small business size standard of 1,500 employees.

(V) All quoters shall provide a firm-fixed-price quotation for the line item(s) detailed in the Schedule of Line Items contained in the SF1449 and its continuation page. Quoters may propose an alternative structure that is consistent with their standard commercial practice, if applicable.

(VI) The requirements for the line items detailed in the Schedule of Line Items within the SF1449 are in the attached Statement of Work (SOW) document.

Statement of Work Applicable Provisions and Clauses

(VII) Date(s) and place(s) of delivery and acceptance and FOB point are required in accordance with the attached SOW document.

(VIII) Quoters/Contractors must possess an ACTIVE registration in the System for Award Management system, www.SAM.gov, when submitting a quotation and shall continue to be registered until time of award, during performance, and through final payment of any contract resulting from this solicitation. The Contracting Officer shall confirm that quoters have an “active” registration at the www.sam.gov website upon receipt of the quotation. If the SAM.gov registration is not active, the quotation will not be considered for award

(IX) The provision at FAR 52.212-1, INSTRUCTIONS TO OFFERORS—COMMERCIAL PRODUCTS AND COMMERCIAL SERVICES (DEVIATION Jan 2026), applies to this acquisition. Addenda to this provision is as follows:

DUE DATE FOR QUOTATIONS

Quoters shall submit their electronic quotations via email, so that NIST receives them not later than 10:00 am Eastern Time (ET) on September 9, 2026. E-mail quotations shall be submitted directly to the Contract Specialist, Nina Lin, at nina.lin@nist.gov and Contracting Officer, Tracy Retterer, at tracy@reterrer@nist.gov.

Please reference the RFQ number in the subject line of email communications. Quotations shall not be deemed received by the Government until the quotation is received in the e-mail inbox set forth above.

PRE-QUOTE INQUIRIES (CAR 1352.215-72)

Quoters must submit all questions concerning this solicitation in writing to both the Contract Specialist, and the Contracting Officer through email. Questions should be received no later than 4 calendar days after the issuance date of this solicitation. All responses to the questions will be made in writing, without identification of the

PAGE 11 OF 25 1333ND26QNB030563

questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the responses included in the amendment to the solicitation will govern performance of the contract.

QUOTATION PREPARATION INSTRUCTIONS

All quotations shall conform to solicitation provisions/clauses and be prepared in accordance with this section.

The quotation shall be clearly and concisely written as well as be neat, indexed (cross-indexed as appropriate) and logically assembled. Note: The term “indexed” refers to a table of contents that lists sections and page numbers. In the event that the quoter is unable to create an indexed quotation, an alternative approach such as a Table of Contents shall suffice. All pages of the quotation shall be appropriately numbered. A cover letter may be included in addition to Volumes I-III discussed below. There are no page limits.

In preparing the quotation, each volume shall stand on its own. The quoter’s quotation shall be clearly divided into the following distinct volumes:

Volume I – Technical Quotation Volume II – Price Quotation Volume III- Terms and Conditions

Volume I - Technical Quotation:

The quoter shall submit one (1) copy of their technical quotation, electronically, via E-mail to the Contract Specialist and Contracting Officer identified above. The technical quotation shall address the following:

The quoter shall submit technical approach and capability documentation which may include a narrative, charts, graphs, tables, drawings, product / service literature, and as applicable, demonstrated authority to provide the necessary items and perform the required services identified in the Statement of Work (Attachment 1). The documentation shall clearly describe, in sufficient detail, the quoter's authority, proposed items, resources and methods to successfully fulfill the requirements including specifications, performance capability requirements, delivery schedules, warranties, and all service requirements. The submission shall clearly identify each line item above. The submission must demonstrate that the proposed system meets or exceeds each minimum requirement described within the attached SOW document by providing a citation between the SOW paragraph and the relevant section of the technical description or product literature. The quoter must not simply state they will meet or exceed the requirement; evidence must be provided. If applicable, evidence that the quoter is authorized by the manufacturer to provide the item(s) in the quotation shall be included.

Volume II - Price Quotation:

The pricing quotation shall be separate from any other portion of the quotation. The quoter shall propose a firm-fixed-price quotation for each line item detailed in the Schedule of Line Items contained in the SF1449 and its continuation page to include all shipping costs (FOB Destination) and tariffs, if applicable. Price quotations shall remain valid for a period of 90 days from the date quotations are due.

Quoters that are proposing products manufactured outside of the United States must identify any other or unknown charges that may be applicable to the sale of these products (here indicated as Line Item 0003) as a separate line item on price quotes/proposals. This price element may be listed as part of the cost of the product or as a sub-total element but must be clearly identified. This price element must only apply to the total value of the goods identified for customs processing. Only include the country of origin and the tariff percentage currently in place or the expected amount at time of delivery for that country. Price quotes shall clearly identify the relevant tariffs in terms of percentage and total cost. If there are multiple countries of origins and associated tariffs, identify each separately.

PAGE 12 OF 25 1333ND26QNB030563

Volume III – Terms and Conditions:

The quoter shall review the Applicable Provision and Clauses attachment and complete any required information as record via a separate volume response to this solicitation.

Note: System updates may lag policy updates. The System for Award Management (SAM) may continue to require entities to complete representations based on provisions that are not included in this solicitation.

Contracting officers will rely on representations from offers based on provisions in the solicitation. Entities are not required to, nor are they able to, update their entity registration to remove these representations in SAM.

(X) The provision at FAR 52.212-2 EVALUATION—COMMERCIAL PRODUCTS AND COMMERCIAL SERVICES (DEVIATION Jan 2026), applies to this acquisition. Addenda to this provision is as follows:

The Government intends to award a single firm fixed price purchase order (PO) from this solicitation utilizing simplified acquisitions procedures in accordance with RFO part 12. The Government reserves the right not to award a PO and to make an award without discussions based solely upon initial quotes.

BASIS FOR AWARD

Award shall be made to the responsible quoter who: (1) Meets all required technical specifications as determined by a review of documentation submitted in accordance with this solicitation; (2) proposes the lowest price. Award shall be made to the lowest priced, technically acceptable quoter.

The Government will evaluate quotations, beginning with the lowest-priced quotation, for technical acceptability. If the lowest-priced quotation is found to be 'Acceptable,' no further technical evaluations of other quotations will be performed, and the award will be made to that quoter. If the lowest-priced quotation is deemed 'Unacceptable,' the Government will evaluate the next lowest-priced quotation, repeating this process until a technically acceptable quotation is identified. Therefore, the Government may not evaluate the technical quotations of all quoters.

A quoter's failure to address any factor may be considered indicative of the quoter's lack of understanding of the Government's requirements and may result in the offer being determined unacceptable.

EVALUATION FACTORS

Technical Capability: No prototypes, demonstration models, used or refurbished instruments will be considered. Evaluation of technical capability shall be based on the information provided in the quotation.

NIST will evaluate whether the quoter has demonstrated that its proposed equipment meets or exceeds all minimum requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. If a quoters technical description and/or product literature does not indicate whether its proposed equipment meets a certain minimum requirement, NIST will determine that it does not meet the requirements.

Price: The proposed price will be evaluated. The evaluation will determine whether the proposed prices are reasonable in relation to the requirements of solicitation. Prices must be entirely compatible with the technical portion of the quotation.

APPLICABLE PROVISIONS AND CLAUSES

PAGE 13 OF 25 1333ND26QNB030563

PROVISIONS AND CLAUSES

52.252-1 SOLICITATION PROVISIONS INCORPORATED BY REFERENCE (FEB 1998)

This solicitation incorporates one or more solicitation provisions by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. The offeror is cautioned that the listed provisions may include blocks that must be completed by the offeror and submitted with its quotation or offer. In lieu of submitting the full text of those provisions, the offeror may identify the provision by paragraph identifier and provide the appropriate information with its quotation or offer. Also, the full text of a solicitation provision may be accessed electronically at this/these address(es):

FAR Overhaul (DEVIATIONS JAN 2026): https://www.acquisition.gov/far-overhaul/far-part-deviation-guide CAR: https://www.ecfr.gov/current/title-48/chapter-13

(End of provision)

52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998)

This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es):

FAR Overhaul (DEVIATIONS JAN 2026): https://www.acquisition.gov/far-overhaul/far-part-deviation-guide CAR: https://www.ecfr.gov/current/title-48/chapter-13

(End of clause)

CLAUSES/PROVISIONS INCORPORATED BY REFERENCE:

52.203-17, Contractor Employee Whistleblower Rights (Nov 2023) 52.203-18, Prohibition on Contracting with Entities that Require Certain Internal Confidentiality Agreements or Statements-Representation. (DEVIATION JAN 2026) 52.203-19, Prohibition on Requiring Certain Internal Confidentiality Agreements or Statements (JAN 2017) 52.204-7, System For Award Management (DEVIATION JAN 2026) 52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards (DEVIATION JAN 2026) 52.204-13, System For Award Management Maintenance (Deviation Jan 2026) 52.204-19, Incorporation By Reference Of Representations And Certifications (Dec 2014) 52.208-90, Government Supply Sources (DEVIATION JAN 2026) 52.209-2, Prohibition On Contracting With Inverted Domestic Corporations-Representation (NOV 2015) 52.209-6, Protecting the Government's Interest When Subcontracting With Contractors Debarred, Suspended, Proposed for Debarment, or Voluntarily Excluded (DEVIATION JAN 2026) 52.209-10, Prohibition on Contracting with Inverted Domestic Corporations (DEVIATION JAN 2026) 52.209-11, Representation by Corporations Regarding Delinquent Tax Liability or a Felony Conviction under any Federal Law. (DEVIATION JAN 2026) )**Filled in SAM** 52.212-1, Instructions To Offerors--Commercial Products And Commercial Services (DEVIATION JAN 2026) 52.219-6 Notice of Total Small Business Set-Aside (DEVIATION FEB 2026) 52.219-28, Post-award Small Business Program Rerepresentation (DEVIATION FEB 2026) 52.222-3, Convict Labor (Jun 2003) 52.222-18, Certification Regarding Knowledge of Child Labor for Listed End Products (DEVIATION JAN 2026)

PAGE 14 OF 25 1333ND26QNB030563

52.222-19, Child Labor—Cooperation with Authorities and Remedies (DEVIATION JAN 2026) 52.222-50, Combating Trafficking in Persons (DEVIATION JAN 2026) 52.222-90, Addressing DEI Discrimination by Federal Contractors (DEVIATION APR 2026) 52.225-1, Buy American- Supplies (DEVIATION MAR 2026) 52.226-8, Encouraging Contractor Policies to Ban Text Messaging While Driving (May 2024) 52.232-33, Payment by Electronic Funds Transfer-System for Award Management (Oct2018) 52.232-39, Unenforceability Of Unauthorized Obligations (JUNE 2013) 52.232-40, Providing Accelerated Payments to Small Business Subcontractors (Mar 2023) 52.233-3, Protest After Award (DEVIATION JAN 2026) 52.233-4, Applicable Law for Breach of Contract Claim (DEVIATION JAN 2026) 52.244-6, Subcontracts for Commercial Products and Commercial Services (DEVIATION APR 2026) 1352.201-70, Contracting Officer Authority (APR 2010) 1352.209-73, Compliance With The Laws (APR 2010) 1352.209-74, Organizational Conflict Of Interest (APR 2010)

CLAUSES/ PROVISIONS INCORPORATED BY FULL TEXT:

FAR 52.212-4 TERMS AND CONDITIONS—COMMERCIAL PRODUCTS AND COMMERCIAL SERVICES

(DEVIATION JAN 2026)

(a) Definitions. The clause at Federal Acquisition Regulation (FAR) 52.202-1, Definitions, is incorporated by reference.

(b) Inspection/Acceptance. The Contractor shall only tender for acceptance those items that conform to the requirements of this contract. The Government reserves the right to inspect or test any supplies or services that have been tendered for acceptance. The Government may require repair or replacement of nonconforming supplies or reperformance of nonconforming services at no increase in contract price. If repair/replacement or reperformance will not correct the defects or is not possible, the Government may seek an equitable price reduction or adequate consideration for acceptance of nonconforming supplies or services. The Government must exercise its post acceptance rights—

(1) Within a reasonable time after the defect was discovered or should have been discovered; and

(2) Before any substantial change occurs in the condition of the item, unless the change is due to the defect in the item.

(c) Assignment. The Contractor or its assignee may assign its rights to receive payment due as a result of performance of this contract to a bank, trust company, or other financing institution, including any Federal lending agency in accordance with the Assignment of Claims Act (31 U.S.C. 3727). However, when a third party makes payment (e.g., use of the Governmentwide commercial purchase card), the Contractor may not assign its rights to receive payment under this contract.

(d) Changes. Changes in the terms and conditions of this contract may be made only by written agreement of the parties.

(e) Disputes. This contract is subject to 41 U.S.C. chapter 71, Contract Disputes. Failure of the parties to this contract to reach agreement on any request for equitable adjustment, claim, appeal, or action arising under or relating to this contract shall be a dispute to be resolved in accordance with the clause FAR 52.233-1, Disputes, which is incorporated in this contract by reference. The Contractor shall proceed diligently with performance of this contract, pending final resolution of any dispute arising under the contract.

(f) Excusable delays. The Contractor shall be liable for default unless nonperformance is caused by an occurrence beyond the reasonable control of the Contractor and without its fault or negligence. Examples of occurrences include acts of God or the public enemy, acts of the Government in either its sovereign or

PAGE 15 OF 25 1333ND26QNB030563

contractual capacity, fires, floods, epidemics, quarantine restrictions, strikes, unusually severe weather, and delays of common carriers. When an excusable delay occurs, the Contractor shall

(1) Notify the Contracting Officer in writing as soon as possible;

(2) Remedy the delay as quickly as possible; and

(3) Notify the Contracting Officer when the occurrence is over.

(g) Invoice. The Government will handle invoices according to the Prompt Payment Act (31 U.S.C. 3903) and 5 CFR part 1315. The Contractor shall submit invoices to the address designated in the contract to receive invoices. An invoice must include the information required by 5 CFR part 1315.9(b).

(h) Patent indemnity. The Contractor shall indemnify the Government and its officers, employees, and agents against liability, including costs, for actual or alleged direct or contributory infringement of, or inducement to infringe, any United States or foreign patent, trademark, or copyright, arising out of the performance of this contract, provided the Contractor is reasonably notified of such claims and proceedings.

(i) Payment—

(1) Items accepted. Payment shall be made for items accepted by the Government that have been delivered to the delivery destinations set forth in this contract.

(2) Prompt payment. The Government will make payment in accordance with the Prompt Payment Act ( 31 U.S.C. 3903) and prompt payment regulations at 5 CFR part 1315.

(3) Discount. In connection with any discount offered for early payment, time shall be computed from the date of the invoice. For the purpose of computing the discount earned, payment shall be considered to have been made on the date that appears on the payment check or the specified payment date if an electronic funds transfer payment is made.

(4) Overpayments. If the Contractor becomes aware of a duplicate contract financing or invoice payment or that the Government has otherwise overpaid on a contract financing or invoice payment, the Contractor shall—

(i) Remit the overpayment amount to the payment office cited in the contract along with a description of the overpayment including the—

(A) Circumstances of the overpayment (e.g., duplicate payment, erroneous payment, liquidation errors, date(s) of overpayment);

(B) Affected contract number and delivery order number, if applicable;

(C) Affected line item or subline item, if applicable;

(D) Contractor point of contact; and

(ii) Provide a copy of the remittance and supporting documentation to the Contracting Officer.

(5) Interest.(i) All amounts that become payable by the Contractor to the Government under this contract shall bear simple interest from the date due until paid unless paid within 30 days of becoming due. The interest rate shall be the interest rate established by the Secretary of the Treasury as provided in 41 U.S.C. 7109, which is applicable to the period in which the amount becomes due, as provided in (i)(6)(v) of this clause, and then at the rate applicable for each six-month period as fixed by the Secretary until the amount is paid.

(ii) The Government may issue a demand for payment to the Contractor upon finding a debt is due under the contract.

(iii) Final decisions. The Contracting Officer will issue a final decision as required by FAR part 33 if–

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(A) The Contracting Officer and the Contractor are unable to reach agreement on the existence or amount of a debt within 30 days;

(B) The Contractor fails to liquidate a debt previously demanded by the Contracting Officer within the timeline specified in the demand for payment unless the amounts were not repaid because the Contractor has requested an installment payment agreement; or

(C) The Contractor requests a deferment of collection on a debt previously demanded by the Contracting Officer (see FAR part 32).

(iv) If a demand for payment was previously issued for the debt, the demand for payment included in the final decision shall identify the same due date as the original demand for payment.

(v) Amounts shall be due at the earliest of the following dates:

(A) The date fixed under this contract.

(B) The date of the first written demand for payment, including any demand for payment resulting from a termination for cause.

(vi) The interest charge shall be computed for the actual number of calendar days involved beginning on the due date and ending on-

(A) The date on which the designated office receives payment from the Contractor;

(B) The date of issuance of a Government check to the Contractor from which an amount otherwise payable has been withheld as a credit against the contract debt; or

(C) The date on which an amount withheld and applied to the contract debt would otherwise have become payable to the Contractor.

(vii) The interest charge made under this clause may be reduced under the procedures for interest credits prescribed in FAR part 32 in effect on the date of this contract.

(j) Risk of loss. Unless the contract specifically provides otherwise, risk of loss or damage to the supplies provided under this contract shall remain with the Contractor until, and shall pass to the Government upon—

(1) Delivery of the supplies to a carrier, if transportation is f.o.b. origin; or

(2) Delivery of the supplies to the Government at the destination specified in the contract, if transportation is f.o.b. destination.

(k) Taxes. The contract price includes all applicable Federal, State, and local taxes and duties.

(l) Termination for the Government’s convenience. The Government reserves the right to terminate this contract, or any part hereof, for its sole convenience. In the event of such termination, the Contractor shall immediately stop all work and shall immediately cause any and all of its suppliers and subcontractors to cease work. Subject to the terms of this contract, the Contractor shall be paid a percentage of the contract price reflecting the percentage of the work performed prior to the notice of termination, plus reasonable charges the Contractor can demonstrate to the satisfaction of the Government using its standard record keeping system, have resulted from the termination. The Contractor shall not be required to comply with the cost accounting standards or contract cost principles for this purpose. This paragraph does not give the Government any right to audit the Contractor’s records. The Contractor shall not be paid for any work performed or costs incurred which reasonably could have been avoided.

(m) Termination for cause. The Government may terminate this contract, or any part hereof, for cause in the

PAGE 17 OF 25 1333ND26QNB030563

event of any default by the Contractor, or if the Contractor fails to comply with any contract terms and conditions, or fails to provide the Government, upon request, with adequate assurances of future performance.

The Government will send a cure notice to the Contractor, unless the reason for the termination is late delivery.

In the event of termination for cause, the Government shall not be liable to the Contractor for any amount for supplies or services not accepted, and the Contractor shall be liable to the Government for any and all rights and remedies provided by law. If it is determined that the Government improperly terminated this contract for default, such termination shall be deemed a termination for convenience.

(n) Title. Unless specified elsewhere in this contract, title to items furnished under this contract shall pass to the Government upon acceptance, regardless of when or where the Government takes physical possession.

(o) Warranty. The Contractor warrants and implies that the items delivered under this contract are merchantable and fit for use for the particular purpose described in this contract.

(p) Limitation of liability. Except as otherwise provided by an express warranty, the Contractor will not be liable to the Government for consequential damages resulting from any defect or deficiencies in accepted items.

(q) Compliance with laws unique to Government contracts. The Contractor agrees to comply with 31 U.S.C.

1352 relating to limitations on the use of appropriated funds to influence certain Federal contracts; 40 U.S.C.

chapter 37, Contract Work Hours and Safety Standards; 41 U.S.C. chapter 87, Kickbacks; 49 U.S.C. 40118, Government-financed air transportation; and 41 U.S.C. chapter 21 relating to procurement integrity.

(r) Order of precedence. Any inconsistencies in this solicitation or contract shall be resolved by giving precedence in the following order:

(1) The schedule of supplies/services;

(2) The Disputes, Payments, Invoice, Compliance with Laws Unique to Government Contracts, and Unauthorized Obligations paragraphs of this clause;

(3) Other contract clauses incorporated in the solicitation or contract;

(4) Addenda to this solicitation or contract;

(5) Solicitation provisions incorporated in the solicitation;

(6) Other paragraphs of this clause;

(7) Other documents, exhibits, and attachments; and

(8) The specification.

(s) Unauthorized obligations.

(1) Except as stated in paragraph (s)(2) of this clause, when any supply or service acquired under this contract is subject to any End User License Agreement (EULA), Terms of Service (TOS), or similar legal instrument or agreement, that includes any clause requiring the Government to indemnify the Contractor or any person or entity for damages, costs, fees, or any other loss or liability that would create an Anti-Deficiency Act violation (31 U.S.C. 1341), the following shall govern:

(i) Any such clause is unenforceable against the Government.

(ii) Neither the Government nor any Government-authorized end user shall be deemed to have agreed to such clause by virtue of it appearing in the EULA, TOS, or similar legal instrument or agreement. If the EULA, TOS, or similar legal instrument or agreement is invoked through an “I agree” click box or other comparable mechanism (e.g., “click-wrap” or “browse-wrap” agreements), execution does not bind the Government or any Government authorized end user to such clause.

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(iii) Any such clause is deemed to be stricken from the EULA, TOS, or similar legal instrument or agreement.

(2) Paragraph (s)(1) of this clause does not apply to indemnification by the Government that is expressly authorized by statute and specifically authorized under applicable agency regulations and procedures.

(t) Comptroller General examination of record. This paragraph applies if this contract was awarded using other than sealed bid procedures and is in excess of the simplified acquisition threshold on the date of award of this contract.

(1) The Comptroller General of the United States, or an authorized representative of the Comptroller General, shall have access to and right to examine any of the Contractor’s directly pertinent records involving transactions related to this contract.

(2) The Contractor shall make available at its offices, at all reasonable times, the records, materials, and other evidence for examination, audit, or reproduction, until 3 years after final payment under this contract or for any shorter period specified in FAR part 4, longer period required by statute, or periods specified in other clauses of this contract. If this contract is completely or partially terminated, the records relating to the work terminated shall be made available for 3 years after any resulting final termination settlement. Records relating to appeals under the disputes clause or to litigation or the settlement of claims arising under or relating to this contract shall be made available until such appeals, litigation, or claims are finally resolved.

(3) As used in this clause, records include books, documents, accounting procedures and practices, and other data, regardless of type and regardless of form. This clause does not require the Contractor to create or maintain any record that the Contractor does not maintain in the ordinary course of business or pursuant to a provision of law.

(u) Incorporation by reference. The Contractor’s representations and certifications, including those completed electronically via the System for Award Management (SAM), are incorporated by reference into the contract.

(End of clause)

52.225-2 BUY AMERICAN CERTIFICATE (OCT 2022)

(a)(1) The Offeror certifies that each end product, except those listed in paragraph (b) of this provision, is a domestic end product and that each domestic end product listed in paragraph (c) of this provision contains a critical component.

(2) The Offeror shall list as foreign end products those end products manufactured in the United States that do not qualify as domestic end products. For those foreign end products that do not consist wholly or predominantly of iron or steel or a combination of both, the Offeror shall also indicate whether these foreign end products exceed 55 percent domestic content, except for those that are COTS items. If the percentage of the domestic content is unknown, select “no”.

(3) The Offeror shall separately list the line item numbers of domestic end products that contain a critical component (see FAR 25.105).

(4) The terms “commercially available off-the-shelf (COTS) item,” “critical component,” "domestic end product," "end product," and "foreign end product" are defined in the clause of this solicitation entitled "Buy American- Supplies."

(b) Foreign End Products:

Line item No. Country of origin Exceeds 55% domestic content

(yes/no)

PAGE 19 OF 25 1333ND26QNB030563

[List as necessary]

(c) Domestic end products containing a critical component:

Line Item No. ___ [List as necessary]

(d) The Government will evaluate offers in accordance with the policies and procedures of part 25 of the Federal Acquisition Regulation.

(End of provision)

52.225-18 PLACE OF MANUFACTURE (DEVIATION JAN 2026)

(a) Definitions. As used in this provision— Manufactured end product means any end product in product and service codes (PSCs) 1000-9999, except-

(1) PSC 5510, Lumber and Related Basic Wood Materials;

(2) Product or Service Group (PSG) 87, Agricultural Supplies;

(3) PSG 88, Live Animals;

(4) PSG 89, Subsistence;

(5) PSC 9410, Crude Grades of Plant Materials;

(6) PSC 9430, Miscellaneous Crude Animal Products, Inedible;

(7) PSC 9440, Miscellaneous Crude Agricultural and Forestry Products;

(8) PSC 9610, Ores;

(9) PSC 9620, Minerals, Natural and Synthetic; and

(10) PSC 9630, Additive Metal Materials.

Place of manufacture means the place where an end product is assembled out of components, or otherwise made or processed from raw materials into the finished product that is to be provided to the Government. If a product is disassembled and reassembled, the place of reassembly is not the place of manufacture.

(b) For statistical purposes only, the offeror shall indicate whether the place of manufacture of the end products it expects to provide in response to this solicitation is predominantly-

(1) □ In the United States (Check this box if the total anticipated price of offered end products manufactured in the United States exceeds the total anticipated price of offered end products manufactured outside the United States); or

(2) □ Outside the United States.

(End of provision)

52.240-90 SECURITY PROHIBITIONS AND EXCLUSIONS REPRESENTATIONS AND

CERTIFICATIONS (DEVIATION JAN 2026)

(a) Definitions. As used in this provision-— Backhaul, covered article, covered telecommunications equipment or services, critical technology, FASCSA order, Intelligence community, interconnection arrangements, national security system, roaming, sensitive compartmented information, sensitive compartmented information system, source, and substantial or essential component have the meanings provided…

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