Combined Synopsis/Solicitation: Spin Rinser Dryer Refurbishment and Additional Units
Closed Solicitation Posted
This opportunity was awarded. See the award notice from .
- Solicitation number
- 1333ND25QNB680212
- Agency
-
National Institute of Standards and Technology
Department of Commerce
- Responses due
- Set-aside
- Total Small Business
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Place of performance
- Boulder, Colorado 80305, United States
- Points of contact
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology (NIST) Boulder Microfabrication Facility is seeking to procure refurbishment services for six existing Semitool spin rinser dryers (SRDs) and acquire two additional new Semitool SRDs, specifically one Semitool 870-S dual stack and one Semitool 880-S dual stack unit. The equipment must be compatible with existing systems and designed for use in an ISO Class 5 cleanroom environment at 5,500 feet altitude, capable of cleaning SEMI spec wafers and photomasks using ultra-pure water and heated nitrogen gas. An optional touchscreen upgrade is available for all units, with vendors able to submit separate quotes for standard controllers versus touchscreen PLC systems. Quotations will be evaluated based on technical capability, experience, and price, with non-price factors weighted as significantly more important than price. The solicitation requires electronic submission of quotations by July 30, 2025, with Amendment 01 issued on July 24, 2025, clarifying that cassettes are not required and adjusting touchscreen quantities to 8 units.
This opportunity is designated as a total small business set-aside under NAICS code 333242 (Semiconductor Machinery Manufacturing) with a size standard of 1,500 employees. No specific incumbent contractors or award values are mentioned in the solicitation documents. The procurement involves refurbishing six existing units and delivering two new factory units within 6 months after receipt of order, with delivery terms specified as F.O.B. Destination. All equipment and services will be performed at or delivered to NIST's Boulder, Colorado campus located at Boulder, CO 80305. The contract includes a one-year warranty on all equipment, with payment terms of 30 days after receipt and acceptance of proper invoices.
Notice text
2 versions
Update #2 · Latest ·
7/24/25: See attached Amendment 01 for responses to solicitation quesitons received.
The National Institute of Standards and Technology (NIST) Boulder Microfabrication Facility requires refurbishment of its six exisitng spin rinser dryers (SRDs) and additionally seeks to acquire two additional new SRDs. Please see attached Combined Synopsis/Solcitation 1333ND25QNB680212 and Statement of Work (SOW) for full details.
Update #1 ·
The National Institute of Standards and Technology (NIST) Boulder Microfabrication Facility requires refurbishment of its six exisitng spin rinser dryers (SRDs) and additionally seeks to acquire two additional new SRDs. Please see attached Combined Synopsis/Solcitation 1333ND25QNB680212 and Statement of Work (SOW) for full details.
Files
| File | Type | Posted |
|---|---|---|
| Amendment 01 Q and A 7-24-25.docx | DOCX document | |
| Combined Synopsis Solicitation Spin Rinser Dryer.docx | DOCX document | |
| SOW BMF SPin Rinser Dryer.docx | DOCX document |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Award Notice: Spin Rinser Dryer Refurbishment and Additional Units | Award Notice | |
| This notice | Solicitation |
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