SOW BMF SPin Rinser Dryer.docx

Statement of Work BMF Spin Rinser Dryer

1. Background Information:

a. The National Institute of Standards and Technology (NIST) Boulder, CO campus has a state-of-the-art research laboratory (the Katharine Bloggett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-fabrication Facility (BMF). During the fabrication process, photomasks and wafers are cleaned by loading them into a cassette which is placed into a Spin Rinser Dryer (SRD) tool where they are spun in ultra-pure water and then with heated dry nitrogen. This process takes place automatically in specially designed chambers and cassettes to ensure that the wafers are not damaged and are completely dry without contamination. The BMF currently owns five (5) Semitool 870-S dual stack SRDs and one (1) Semitool 880-S dual stack SRD. Due to their age, the Government’s existing SRDs require refurbishment. Additionally, due to increased demand, the BMF requires an additional Semitool 870-S dual stack SRD and an additional Semitool 880-S dual stack SRD. Semitool 870-S dual stack SRDs are required so they are drop-in compatible with our existing SRDs.

2. Scope of Work:

a. Objectives:

i. The goal of this contract is to:

1. Supply one (1) Semitool 870-S dual stack SRD and one (1) Semitool 880-S dual stack SRD, or equivalent, that meets the needs of the BMF community.

2. Refurbish the Government’s existing five (5) Semitool 870-S dual stack SRDs and one (1) Semitool 880-S dual stack SRDs to OEM specifications or better.

b. General:

i. For the two (2) new SRDs, the contractor shall provide all new items. Prototypes, one-off systems, demonstration models, used instruments, or refurbished instruments will not be considered for award.

ii. For the six (6) existing SRDs, the contractor shall supply all parts, hardware, equipment, and labor required to refurbish them.

c. Specific Minimum Requirements:

i. Line Item 0001:

Description: Semitool 870-S dual stack SRD or equivalent Quantity: 1 Technical Specifications:

1. Be a factory new unit with all new parts.

2. Be constructed with materials that are compatible for use in an ISO Class 5 cleanroom.

3. Be designed for normal operation at an altitude of 5,500 feet above sea level.

4. Be drop-in compatible with the BMF’s existing Semitool 870-S dual stack SRDs. This criterion includes all parts required for repairs.

5. Be able to perform according to OEM specifications or better.

6. Be able to clean SEMI spec wafers and photomasks in SEMI spec cassettes in a two-cycle clean.

a. The first cycle shall consist of spinning the cassette while it is being rinsed with ASTM D5127-13, Ultra-pure water used in electronics and semiconductor, grade E-1 water. During this cycle:

i. The cassette shall be able to rotate in a range of at least 600 to 1000 RPM.

ii. The recipe shall be able to be timed in a range of at least 60 to 120 seconds.

b. The second cycle shall consist of spinning the cassette while it is being dried with heated nitrogen gas. During this cycle:

i. The cassette shall be able to rotate in a range of at least 1000 to 1200 RPM.

ii. The recipe shall be able to be timed in a range of at least 30 to 360 seconds.

c. Be able to control the ramp speed and speed of rotation of each step independently.

d. Be able to perform each step for a fixed amount of time.

7. Include appropriate interlocks to ensure that the tool is safely operated.

8. Be dual stack, front loading units with two SRD chambers.

9. Have a controller for each SRD chamber that is able to have one programmable rinse step and one programmable dry step where the duration and revolutions per minute of the cassette are programmable.

10. Have an Emergency Machine Off (EMO) button located on the front of the tool.

11. Have a single bolt rotor design.

12. Be able to be powered by 110 V.

13. Have an ultra-pure water recirculation system (WR-20).

14. Both chambers shall be able to accommodate substrates of the sizes including but not limited to the following sizes with an appropriate rotor and cassette change:

a. 3 inch SEMI spec wafers

b. 100 mm SEMI spec wafers

c. 150 mm SEMI spec wafers

d. 4 inch SEMI spec photomasks

e. 5 inch SEMI spec photomasks

f. 6 inch SEMI spec photomasks

15. Have the chambers outfitted in the following manner:

a. The first chamber shall have a rotor sized for 3 inch SEMI spec wafer cassettes.

i. This chamber shall be balanced for use with a fluoroware cassette part number A72-30M that has anywhere between 0 and 25 wafers inside.

b. The second chamber shall have a rotor sized for 150 mm SEMI spec wafer cassettes.

i. This chamber shall be balanced for use with a fluoroware cassette part number A194-60-MB that has anywhere between 0 and 25 wafers inside.

c. Each chamber shall include the appropriate rotor and cassette.

16. Have a method for the system to save the amount of N2 purge gas used when the system is not in use.

ii. Line Item 0002:

Description: Semitool 880-S dual stack SRD or equivalent Quantity: 1 Technical Specifications:

1. Be a factory new unit with all new parts.

2. Be constructed with materials that are compatible for use in an ISO Class 5 cleanroom.

3. Be designed for normal operation at an altitude of 5,500 feet above sea level.

4. Be drop-in compatible with the BMF’s existing Semitool 880-S dual stack SRDs. This criterion includes all parts required for repairs.

5. Be able to perform according to OEM specifications or better.

6. Be able to clean SEMI spec wafers and photomasks in SEMI spec cassettes in a two-cycle clean.

a. The first cycle shall consist of spinning the cassette while it is being rinsed with ASTM D5127-13, Ultra-pure water used in electronics and semiconductor, grade E-1 water. During this cycle:

i. The cassette shall be able to rotate in a range of at least 600 to 1000 RPM.

ii. The recipe shall be able to be timed in a range of at least 60 to 120 seconds.

b. The second cycle shall consist of spinning the cassette while it is being dried with heated nitrogen gas. During this cycle:

i. The cassette shall be able to rotate in a range of at least 1000 to 1200 RPM.

ii. The recipe shall be able to be timed in a range of at least 30 to 360 seconds.

c. Be able to control the ramp speed and speed of rotation of each step independently.

d. Be able to perform each step for a fixed amount of time.

7. Include appropriate interlocks to ensure that the tool is safely operated.

8. Be dual stack, front loading units with two SRD chambers.

9. Have a controller for each SRD chamber that is able to have one programmable rinse step and one programmable dry step where the duration and revolutions per minute of the cassette are programmable.

10. Have an Emergency Machine Off (EMO) button located on the front of the tool.

11. Have a single bolt rotor design.

12. Be able to be powered by 110 V.

13. Have an ultra-pure water recirculation system (WR-20).

14. Both chambers shall be able to accommodate substrates of the sizes including but not limited to the following sizes with an appropriate rotor and cassette change:

a. 3 inch SEMI spec wafers

b. 100 mm SEMI spec wafers

c. 150 mm SEMI spec wafers

d. 4 inch SEMI spec photomasks

e. 5 inch SEMI spec photomasks

f. 6 inch SEMI spec photomasks

g. 7 inch SEMI spec photomasks

15. Have the chambers outfitted in the following manner:

a. The first chamber shall have a rotor sized for 6 inch SEMI spec photomasks.

i. This chamber shall be balanced for use with a fluoroware cassette part number A189-60-15 that has anywhere between 0 and 10 plates inside.

b. The second chamber shall have a rotor sized for 7 inch SEMI spec photomasks.

i. This chamber shall be balanced for use with a fluoroware cassette part number A189-70-15 that has anywhere between 0 and 10 plates inside.

c. Each chamber shall include the appropriate rotor and cassette.

16. Have a method for the system to save the amount of N2 purge gas used when the system is not in use.

iii. Line Item 0003:

Description: Five (5) refurbishments of Semitool 870-S dual stack SRDs and one (1) refurbishment of a Semitool 880-S dual stack SRD Quantity: 6 Technical Specifications

1. The Government will send in two (2) of its existing SRD units for refurbishment at a time. The contractor shall repair these units to OEM like new specifications or better and then send them back to the Government for two (2) additional units to be sent in until all six (6) of the Governments units have been refurbished. This method is to ensure that the Government will be able to replace the two (2) units it sent out for repair with the two (2) new units the contractor shall supply as part of this contract to ensure that the Government does not have any down time with its existing capabilities.

2. Each refurbishment shall include but is not limiting to the following:

a. The contractor shall service and clean all of the plastic skins and the stainless steel frame of the system

b. Chemical clean and/or electropolishing the following metal parts:

i. SRD process chamber

ii. SRD Rotor

iii. Nitrogen manifold

iv. Brackets and other parts

c. Replace the following components with new items:

i. Door seal & rear bowl seal

ii. Motor vibration isolators

iii. DI water spray nozzles

iv. Nitrogen filter

v. Door switch

vi. Color-coded pneumatic tubing

vii. Teflon lines N2 and DI water

viii. Hardware

ix. All labeling

x. Start/stop switches

xi. Rotor retaining bar tubing

xii. Solenoid bank

d. Rebuild the following items:

i. ACR valves

ii. Rotor stop positioner

iii. Brushless motor

e. Cleaned, test and/or inspect the following items function:

i. SRD controller and associated cabling

ii. Rotor and balance

iii. Wiring harnesses

iv. Motor controller

v. Heater blankets

vi. N2 heater

vii. Pressure switches

viii. Solenoid valves

ix. Window

x. Tach sensors

xi. Cam assembly

xii. Ferrofluidic seal assembly

xiii. Static eliminator

xiv. Resistivity probe

3. The contractor shall upgrade the following items:

a. The contractor shall provide a method for the system to save the amount of N2 purge gas used when the system is not in use.

iv. OPTIONAL Line Item 0004 Description: Touchscreen upgrade for all SRDs (This option is exercisable at time of award) Quantity: 16 (2 on each SRD double stack, 4 for the new units and 12 for the refurbished units) Technical Specifications

1. The government prefers a system that has a touch screen interface that allows the user to run an automatic recipe and also allows the user to manually operate different parts of the system such as vales.

v. Before shipping each SRD, the contractor shall provide the Government a factory acceptance report demonstrating that the SRD performs according to OEM specifications. Once the report showing that the SRD performs according to OEM specifications or better has been accepted by the Government, the contractor shall ship the system.

3. Period of Performance and Deliverables:

a. Line Items 0001 and 0002 shall be delivered within 6 months ARO. The one-year warranty shall start upon acceptance by the Government.

b. Line Item 0003 shall be delivered within 1 year of the receipt of the two (2) new units. The one-year warranty for each refurbished unit shall start upon acceptance by the Government.

c. Line Item 0004, if exercised, shall be delivered with Line Items 0001 and 0002 within 6 months ARO, and with Line Item 0003 within 1-year of receipt of Line Items 0001 and 0002.

4. Delivery Terms:

a. Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery dates provided in Section 3 above.

b. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

c. The contractor shall deliver all items to:

NIST

325 Broadway Building 81, room 1B100.

Boulder, Colorado 80305

5. Government Furnished Property:

a. The Government shall supply the Contractor with its existing SRD units to be refurbished.

6. Inspection and Acceptance:

a. In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

b. The Government will test, inspect, and accept the equipment onsite within 7 business days of the receipt of each SRDs. A visual inspection of the will be performed by the NIST Contracting Officer’s Representative (COR) and/or Technical Point of Contact (TPOC) to identify surface defects or any form of indication that the item was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the SRDs due to defects and/or nonconformance.

7. Warranty:

a. The contractor shall warranty all SRDs for a period of a minimum of 12 months after acceptance of each SRD and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the SRD by the Government and at a minimum shall include the all parts and labor associated with repair or replacement of defective components.

8. Payment Schedule:

a. The contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after receipt and acceptance by the COR of fully installed system.

2. The Government anticipates inspection will occur upon:

3. After the testing procedures set forth in this document have been completed.