Chips r&d: photoresist atomic force microscope (AFM)
Closed Solicitation Posted
This opportunity was awarded. See the award notice from .
- Solicitation number
- 1333ND24QNB030291
- Agency
- National Institute of Standards and Technology Department of Commerce
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- Gaithersburg, Maryland 20899, United States
- Points of contact
-
- Forest Crumpler forest.crumpler@nist.gov (301) 575-6753
- Joni L. Laster joni.laster@nist.gov (301) 975-6205
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology (NIST) is seeking to procure a customized fluid immersion atomic force microscope (AFM) to support its CHIPS Metrology Program. The AFM will be used to develop advanced in-situ measurement methods of physical-chemical processes at the solid-liquid interfaces, which are relevant to semiconductor manufacturing. Key requirements include the ability to use both conventional cantilever probes and custom chip-scale optomechanical probes developed by NIST to achieve high bandwidth, high deflection sensitivity, and low perturbation during fluid exchange. The AFM must also be upgradeable to video-rate imaging. NIST will evaluate offers based on technical capability, past performance, and price, with technical capability and past performance being more important than price. Quotations must be submitted electronically by June 14, 2024.
This opportunity is not set aside for any specific business size or socioeconomic category. NIST will provide a trade-in Asylum Research Cypher S AFM to reduce costs. The government has not provided any information about potential incumbent contractors or award values. The place of performance is Gaithersburg, MD.
Notice text
The CHIPS Metrology Program at NIST advances metrology for accelerating R&D and for developing breakthroughs that support the development of the next-generation microelectronics and ensure the competitiveness and leadership of the United States. The Microsystems and Nanotechnology Division develops micro-/nano-fabrication technologies, devices and novel measurement methods enabled by integrated microsystems.
The National Institute of Standards and Technology (NIST) CHIPS metrology program has a requirement for a customized fluid immersion atomic force microscope (AFM) to develop advanced in-situ measurement methods of physical-chemical processes at the solid-liquid interfaces with relevance to semiconductor manufacturing. The measurement goal is to measure rapid changes in surface topography in response to the introduction of a liquid chemical reagent. In addition to using conventional cantilever probes, the AFM will be adapted to use custom chip-scale optomechanical probes developed at NIST to achieve high bandwidth, combined with high deflection sensitivity and low perturbation during fluid exchange. A system upgradeable to video-rate imaging is required.
Please see the attachments for the full notice details...
Attachments
| File | Type | Posted |
|---|---|---|
| Final 1333ND24QNB030291 .docx | DOCX document | |
| SOW FINAL.docx | DOCX document |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Chips r&d: photoresist atomic force microscope (AFM) | Award Notice | |
| Chips r&d: photoresist atomic force microscope (AFM) | Solicitation |
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