Boulder micro-fabrication facility (BMF) photoresist coating and developing system amendment A001
Closed Solicitation Posted
This opportunity was awarded. See the award notice from .
- Solicitation number
- 1333ND21QNB680480
- Agency
- National Institute of Standards and Technology Department of Commerce
- Responses due
- Set-aside
- Total Small Business
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Place of performance
- Boulder, Colorado 80305, United States
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology seeks to procure a photoresist coating and developing system for installation at its Boulder Microfabrication Facility. The automated system must coat, develop, bake, and cool 3-inch and 150mm silicon, gallium arsenide, glass, fused silica, quartz and sapphire wafers using closed rotating modules within a footprint of no more than 5 by 5 feet. Quotations will be evaluated based on technical approach, experience, past performance, and price. Proposals are due by August 26, 2021.
This total small business set-aside solicitation has an estimated budget of $2 million. The period of performance is 35 weeks with deliverables due between award date and completion. The photoresist coating and developing system NAICS code is 334516, the PSC code is Q1XD, and the place of performance is the Boulder Microfabrication Facility located at Boulder, Colorado.
Notice text
2 versions
Update #2 · Latest ·
This is a Request for Quotation (RFQ). See the attached.
*********************************************************************************************************************************************
The purpose of this amendment is to post Questions and Answers. See the attached and acknowledged the SF-30.
Update #1 ·
This is a Request for Quotation (RFQ). See the attached.
Attachments
| File | Type | Posted |
|---|---|---|
| 1333ND21QNB680480 SF-30 A001.pdf | ||
| 1333ND21QNB680480 BV RFQ.pdf | ||
| NB680000-21-01417 SOW.pdf | ||
| 21-01417 Cluster Coat_Blueprint.pdf |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Boulder micro-fabrication facility (BMF) photoresist coating and developing system amendment A001 | Award Notice | |
| Boulder micro-fabrication facility (BMF) photoresist coating and developing system amendment A001 | Solicitation |
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