1333ND21QNB680480 SF-30 A001.pdf

Offers must acknowledge receipt of this amendment prior to the hour and date specified in the solicitation or as amended, by one of the following methods:

(a) By completing items 8 and 15, and returning or (c) By separate letter or electronic communication which includes a reference to the solicitation and amendment numbers. FAILURE OF YOUR ACKNOWLEDGMENT TO BE RECEIVED AT THE PLACE DESIGNATED FOR THE RECEIPT OF OFFERS PRIOR TO THE HOUR AND DATE SPECIFIED MAY RESULT IN REJECTION OF YOUR OFFER. If by virtue of this amendment you desire to change an offer already submitted, such change may be made by letter or electronic communication, provided each letter or electronic communication makes reference to the solicitation and this amendment, and is received prior to the opening hour and date specified.

E. IMPORTANT: Contractor is not is required to sign this document and return copies to the issuing office.

AMENDMENT OF SOLICITATION/MODIFICATION OF CONTRACT 1. CONTRACT ID CODE

2. AMENDMENT/MODIFICATION NUMBER 3. EFFECTIVE DATE 4. REQUISITION/PURCHASE REQUISITION NUMBER 5. PROJECT NUMBER (If applicable)

7. ADMINISTERED BY (If other than Item 6) CODE

STANDARD FORM 30 (REV. 11/2016)

Prescribed by GSA FAR (48 CFR) 53.243

FACILITY CODE

9A. AMENDMENT OF SOLICITATION NUMBER

9B. DATED (SEE ITEM 11)

10A. MODIFICATION OF CONTRACT/ORDER NUMBER

10B. DATED (SEE ITEM 13)

11. THIS ITEM ONLY APPLIES TO AMENDMENTS OF SOLICITATIONS

The above numbered solicitation is amended as set forth in Item 14. The hour and date specified for receipt of Offers is extended. is not extended.

12. ACCOUNTING AND APPROPRIATION DATA (If required) copies of the amendment; (b) By acknowledging receipt of this amendment on each copy of the offer submitted;

13. THIS ITEM APPLIES ONLY TO MODIFICATIONS OF CONTRACTS/ORDERS. IT MODIFIES THE CONTRACT/ORDER NUMBER AS DESCRIBED IN ITEM 14.

CHECK ONE A. THIS CHANGE ORDER IS ISSUED PURSUANT TO: (Specify authority) THE CHANGES SET FORTH IN ITEM 14 ARE MADE IN THE CONTRACT ORDER NUMBER

IN ITEM 10A.

B. THE ABOVE NUMBERED CONTRACT/ORDER IS MODIFIED TO REFLECT THE ADMINISTRATIVE CHANGES (such as changes in paying office, appropriation data, etc.) SET FORTH IN ITEM 14, PURSUANT TO THE AUTHORITY OF FAR 43.103(b).

C. THIS SUPPLEMENTAL AGREEMENT IS ENTERED INTO PURSUANT TO AUTHORITY OF:

D. OTHER (Specify type of modification and authority)

Except as provided herein, all terms and conditions of the document referenced in Item 9A or 10A, as heretofore changed, remains unchanged and in full force and effect.

15C. DATE SIGNED

15A. NAME AND TITLE OF SIGNER (Type or print)

16C. DATE SIGNED

16A. NAME AND TITLE OF CONTRACTING OFFICER (Type or print)

14. DESCRIPTION OF AMENDMENT/MODIFICATION (Organized by UCF section headings, including solicitation/contract subject matter where feasible.)

PAGE OF PAGES

6. ISSUED BY CODE

8. NAME AND ADDRESS OF CONTRACTOR (Number, street, county, State and ZIP Code) (X)

CODE

15B. CONTRACTOR/OFFEROR

(Signature of person authorized to sign)

16B. UNITED STATES OF AMERICA

(Signature of Contracting Officer)

Previous edition unusable

PHOTORESIST COAT & DEVELOP SYS/A001 Q&A

The purpose of this amendment is to post Questions and Answers. See the attached and acknowledged the SF-30.

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1333ND21QNB680480A001 AUG 23, 2021 NB680000-21-01417

000014

NATIONAL INST OF STDS AND TECHNOLOGY

325 BROADWAY

BOULDER CO 80305-3328

See Block 6

1333ND21QNB680480

AUG 12, 2021

See Schedule

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Question 1: Page 3, Section c. ii 9 d – is the minimum width of the corridor a maximum of 5 feet or a “minimum of 5 feet” as described? Is this Section stating the maximum of either the length or width of the system can be no larger than 5 feet?

ANSWER 1: NIST is uncertain of the question. However, if we think we understand your questions, there is a hallway with a place that necks down to 5 feet across. The tool must be able to fit through this.

Question 2: Page 4, Section c. ii 11 – The approximate time to switch from 3” to 150mm is 10 minutes in our closed rotating cover and bottom coat module. Since this does not meet the less than 2 minutes requirement, could we offer a second module, one dedicated to each substrate size, if the overall tool size still fits into the designated area? This solution would mean zero time to switch from one substrate size to another.

ANSWER 2: If the duration to switch between formats is zero seconds, that will meet the requirement.

Question 3: Page 4, Section c. ii 16 iii – May we ask for clarification on this requirement? Is there an exclusion zone on the bottom outer edge of the substrate?

ANSWER 3: We have not specified an exact exclusion zone on the bottom edge so that we will rely on the written specification and the general understanding of the term “edge.”

Question 4: Page 5, Section c ii 16 l v – May we ask for clarification of the mechanism to measure the volume or mass of resist dispensed? Are you asking for a flow meter or flow controller tied to a recipe to program volume?

ANSWER 4: Any mechanism is acceptable. For example, the mass or volume may be directly measured.

Or it may be that the pump has a certified cycle to volume relationship independent of other possible parameters. In the latter case, the volume is indirectly measured with a duration control/measurement.

Question 5: Page 5, Section c ii 16 m iv – Should we include a pressureless pump for edge bead removal in our system price or list as an option since this feature is considerably more expensive than a canister dispense system?

ANSWER 5: The offer will be weighted by a balance of criteria, including price and meeting preferred requirements.

Question 6: Page 5, Section c ii 16 m v – May we ask for clarification of a solvent control system? Are you asking for a flow meter to monitor the flow or flow controller tied to a recipe to program volume?

ANSWER 6: The offer will be weighted by a balance of criteria, including price and meeting preferred requirements. Here it is preferred that the control system be able to measure flow rates rather than just utilize pressure and time.

Question 7: Page 6, Section c ii 17 a – May we ask for clarification of the open rotating cover and bottom for the develop module? This is an unusual request, and we are wondering if this was inserted by mistake or taken from the coat module specification.

ANSWER 7: Yes, open bowl develop module.

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Question 8: Page 6, Section c ii 17 h iii - Should we include a pressureless pump for the developer in our system price or list as an option since this feature is considerably more expensive than a canister dispense system?

ANSWER 8: The offer will be weighted by a balance of criteria, including price and meeting preferred requirements.

Question 9: Page 7, Section c ii 17 h iv - May we ask for clarification of the developer media flow control system? Are you asking for a flow meter to monitor the flow or flow controller tied to a recipe to program volume?

ANSWER 9: The offer will be weighted by a balance of criteria, including price and meeting preferred requirements. Here it is preferred that the control system be able to measure flow rates rather than just utilize pressure and time.

Question 10: Page 7, Section c ii 17 ii - Are you asking for a flow meter to monitor the flow of DI water or flow controller tied to a recipe to program volume?

ANSWER 10: The offer will be weighted by a balance of criteria, including price and meeting preferred requirements. Here it is preferred that the control system be able to measure flow rates rather than just utilize pressure and time.

Question 11: Page 7, Section c ii 18 b ii – Our chill plate temperature is controlled by chilled water coming from a chiller circulating through the chill plate; the chiller temperature is adjustable. Is this an acceptable method, or are you requesting active cooling?

ANSWER 11: The “cool plate unit” may include elements external to the cool plate as you describe.