21-01417 Cluster Coat_Blueprint.pdf
PDF 119 KB Posted
- Attached to
- BOULDER MICRO-FABRICATION FACILITY (BMF) PHOTORESIST COATING AND DEVELOPING SYSTEM AMENDMENT A001
- Solicitation number
- 1333ND21QNB680480
About this file
This solicitation requests quotations for a photoresist coating and developing system for the Boulder Micro-fabrication Facility. The National Institute of Standards and Technology seeks to procure a turnkey system including ancillary equipment to be installed in a cleanroom. Interested vendors must submit pricing and technical responses by the closing date of April 30, 2021 to be considered for award. The system must meet specifications for throughput, particle levels, and integration with existing facility infrastructure.
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Other files
| File | Type | Posted |
|---|---|---|
| 1333ND21QNB680480 SF-30 A001.pdf | ||
| NB680000-21-01417 SOW.pdf | ||
| 1333ND21QNB680480 BV RFQ.pdf |
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Text version
Tool, User, and Maintenance Egress
1” = 2.5’ = 30”
Ancillary Equipment
110”
84”
72”
24”
12”
Cleanroom wall
Maintenance Only Egress
Chase
Cleanroom
File details come from the government source that posted it. Updated .