80GSFC23Q0004 - Mask Aligner II
Closed Special Notice Posted
- Solicitation number
- 80GSFC23Q0004
- Agency
- Goddard Space Center National Aeronautics and Space Administration
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Place of performance
- Greenbelt, Maryland 20771, United States
Notice details come from SAM.gov. Updated .
About this opportunity
The Federal Contract Opportunity is for the procurement of a contact mask-aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL) at the Goddard Space Flight Center (GSFC). The system will align a mask to a substrate and expose UV light onto the substrate through the mask, transferring patterns from metal patterned glass plates to silicon wafers. The contract also includes the design, production, delivery, and startup of the system, as well as installation, training, and technical support services. The period of performance is 22 months from the date of award, with delivery required 16 months after receipt of order.
List of products and services to be provided:
- Contact mask-aligner system with align-for-bond capabilities
- Design, production, delivery, and startup of the system
- Installation of the system at the NASA GSFC Detector Development Lab
- Training for up to three GSFC personnel on all functions of the system
- Technical support for the equipment
- All necessary software and hardware for precision alignment, force control, and temperature control
- All necessary fixtures or substrate-holding required to interface with an existing EVG 501 bonder
- All system manuals on cleanroom paper and digital copies
- Warranty of at least 12 months for parts and labor
- Compliance with GSFC safety requirements, SEMI S2 compliance, NFPA 318 standards, and Nationally Recognized Testing Laboratory (NRTL) standards.
Notice text
4 versions
Update #4 · Latest ·
Amendment 3: The purpose of this amendment is to post questions and answers 1 and extend the combine synopsis/solicitation to October 19, 2023, 4pm EST
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Ammendment 2: The purpose of this ammendment is to extend. the combine synopsis/solicotation to October 17, 2023, 4pm EST.
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Ammendment 1: The purpose of this ammendment is to extend. the combine synopsis/solicotation to October 11, 2023, 4pm EST.
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You are invited to submit a quote in response to the National Aeronautics and Space Administration (NASA) Goddard Space Flight Center’s Mask Aligner combined synopsis/solicitation.
This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC23Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.
This competitive acquisition will result in a Firm-Fixed Price Purchase Order. All comments or questions shall be submitted electronically via email to Stephanie Stephens (Stephanie.D.Stephens@nasa.gov), no later than September 20, 2023, by 4PM EST. Offers for the items(s) described in attached combined synopsis/solicitation are due by 4:00 PM EST on September 27, 2023, to Stephanie.D.Stephens@nasa.gov. When responding please reference 80GSFC23Q0004.
Please see the attached Combined Synopsis for further information.
Update #3 ·
Ammendment 2: The purpose of this ammendment is to extend. the combine synopsis/solicotation to October 17, 2023, 4pm EST.
-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
Ammendment 1: The purpose of this ammendment is to extend. the combine synopsis/solicotation to October 11, 2023, 4pm EST.
-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
You are invited to submit a quote in response to the National Aeronautics and Space Administration (NASA) Goddard Space Flight Center’s Mask Aligner combined synopsis/solicitation.
This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC23Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.
This competitive acquisition will result in a Firm-Fixed Price Purchase Order. All comments or questions shall be submitted electronically via email to Stephanie Stephens (Stephanie.D.Stephens@nasa.gov), no later than September 20, 2023, by 4PM EST. Offers for the items(s) described in attached combined synopsis/solicitation are due by 4:00 PM EST on September 27, 2023, to Stephanie.D.Stephens@nasa.gov. When responding please reference 80GSFC23Q0004.
Please see the attached Combined Synopsis for further information.
Update #2 ·
Ammendment 1: The purpose of this ammendment is to extend. the combine synopsis/solicotation to October 11, 2023, 4pm EST.
-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
You are invited to submit a quote in response to the National Aeronautics and Space Administration (NASA) Goddard Space Flight Center’s Mask Aligner combined synopsis/solicitation.
This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC23Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.
This competitive acquisition will result in a Firm-Fixed Price Purchase Order. All comments or questions shall be submitted electronically via email to Stephanie Stephens (Stephanie.D.Stephens@nasa.gov), no later than September 20, 2023, by 4PM EST. Offers for the items(s) described in attached combined synopsis/solicitation are due by 4:00 PM EST on September 27, 2023, to Stephanie.D.Stephens@nasa.gov. When responding please reference 80GSFC23Q0004.
Please see the attached Combined Synopsis for further information.
Update #1 ·
You are invited to submit a quote in response to the National Aeronautics and Space Administration (NASA) Goddard Space Flight Center’s Mask Aligner combined synopsis/solicitation.
This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC23Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.
This competitive acquisition will result in a Firm-Fixed Price Purchase Order. All comments or questions shall be submitted electronically via email to Stephanie Stephens (Stephanie.D.Stephens@nasa.gov), no later than September 20, 2023, by 4PM EST. Offers for the items(s) described in attached combined synopsis/solicitation are due by 4:00 PM EST on September 27, 2023, to Stephanie.D.Stephens@nasa.gov. When responding please reference 80GSFC23Q0004.
Please see the attached Combined Synopsis for further information.
Attachments
| File | Type | Posted |
|---|---|---|
| Questions and Answers 1.pdf | ||
| Mask Aligner II RFQ 9-14-23.pdf | ||
| Attachment A - SOW Mask Aligner 9-14-2023.pdf | ||
| SF1449-Mask Aligner.pdf |
Notice history
| Notice | Type | Posted |
|---|---|---|
| 80GSFC23Q0004 - Mask Aligner II | Special Notice | |
| Mask Aligner with Align for Bond | Pre-Solicitation |
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