Questions and Answers 1.pdf

QUESTION ANSWER

It appears that NASA intends to purchase the EVG

Mask/Bonder Aligner.

This requirement is full and open, and the SOW does not specify the brand of the Mask Aligner, however the Mask Aligner must interface with the

EVG 501 bonding system as well as meet the requirements in the SOW.

In your document Mask Aligner II RFQ 9-14-2023, NASA writes that it will “favor systems with more than 5 similar units in the field,” while referencing the use of the

EVG tool. This is designed to stifle competition rather than encourage it.

The Government states:

“ Preference may be given to Offerors whose

Mask Alignment unit is a production model with multiple similar units. Thus, having greater than 5 similar units working in the field demonstrating all capabilities listed in the SOW may be considered favorably."

As Government does not state the brand of similar units, however the Mask Aligner must interface with the EVG 501 bonding system. If an offeror demonstrates all capabilities listed in the SOW are met on the 5 similar units working in the field this may be considered favorably by the Government.

In addition, per the Scope in the SOW, no prototypes or one-of-a-kind systems will be considered. The unit must be a production model with similar units working in the field demonstrating all capabilities listed in the SOW.

NASA includes the Buy American Act by reference in this Solicitation yet has released specific verbiage which no American company can meet.

How is this Solicitation consistent with the Buy American

Act? Would NASA consider rescinding this embodiment of their solicitation?

NASA includes 52.225-1, Buy American Act-

Supplies (OCT 2022) and 52.225-5, Trade

Agreements (OCT 2019) in their solicitation.

NASA will follow all regulations and policies in accordance with the Buy American Act and Trade

Agreements (World Trade Organization

Government Procurement Agreement and Free

Trade Agreements) clauses identified in the solicitation. All offerors will be considered fairly and equally in accordance with their Buy American

Act/Trade Agreement status.

Section 14.22 of Attachment A, SOW Mask Aligner

What is meant by manual operation, semi-auto and fully auto? Is this new tool to be loaded manually with wafers/substrates and photomasks or would NASA prefer fully-automated handling by robot?

The system will be manual load in all respects. The statement refers to operation once the wafer is on the tool. The modes are for wafer/mask manipulation to achieve alignment.

Section 14.33 of Attachment A

What is meant by “Systems with enhanced Digital Zoom for Improved Image Quality and High-Contrast Images

The SOW shall be revised to remove the below:

will be favored”? And how is this different from Section

14.19 “TSA/BSA Camera system with at least 4x digital zoom”?

Section 14.33 Systems with enhanced digital zoom for improved image quality and high contrast images will be favored.

Installation, Training and Documentation Heading: “The vendor shall supply process support to adapt GSFC recipes to EVG recipes.” What does this mean: should the successful bidder adapt Bond Align programs from another EVG Bond Aligner or a SUSS BA tool to this tool?

The vendor shall provide support to enable interface between Mask Aligner and EVG Bonder.

The vendor shall only be responsible for their own hardware/software.

Has NASA already installed the EVG501 Bonder with 8” bonding capability within its facility?

NASA does own an EVG501 Bonder and it will be installed prior to the estimated delivery schedule of this requirement.

Are the 508 and IpV6 requirements to be in place prior to submitting the quotation and response to the SOW which is due Sept 27th , or can this be done in parallel or after submission.

In accordance with page 7, IPv6 and 508 compliance section of the SOW, during the performance of this SOW the vendor will be providing IT hardware and software items. The Contractor shall ensure all such items are approved through the

(IPv6) compliance and 508 Compliance. The

Contractor shall not purchase IT hardware and software prior to approval.

As such, this can be done in parallel or after submission, however (if selected for award) prior to purchasing IT hardware and software items the

Contractor shall ensure all such items are approved through the IPv6 compliance and 508 Compliance.

Will the combined synopsis/solicitation be extended? Yes, the combined synopsis/solicitation is extended through 10/19/2023.