Mask Aligner II RFQ 9-14-23.pdf

This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued.

This notice is being issued as a Request for Quotation (RFQ) under solicitation number 80GSFC23Q0004 for a contact mask aligner system with align-for-bond capabilities for use in the Detector Development Lab (DDL). The system has two main functions: 1) to align a mask to a substrate (typically a wafer) and, 2) to expose ultra-violet (UV) light onto the substrate through the mask.

The provisions and clauses in the RFQ are those in effect through FAC 2023-02.

The NAICS Code and Size Standard are 333242 and 1500 employees, respectively. The offeror shall state in their offer their size status for this acquisition.

All responsible sources may submit an offer which shall be considered by the agency.

Delivery to NASA Goddard Space Flight Center (GSFC) is required 16 months receipt of order. Delivery shall be free on board (FOB) Destination.

Additional delivery instructions are outlined in the attached Mask Aligner and Align-for- Bond Statement Of Work (SOW).

Offers for the items(s) described above are due by 4:00 PM EST on September 27, 2023, to Stephanie.D.Stephens@nasa.gov and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL:https://www.gsa.gov/forms-library/solicitationcontractorder-commercial-items

The following clauses and provisions are incorporated; full text of the clauses and provisions may be accessed electronically at:

FAR - https://www.acquisition.gov/browse/index/far

NFS - https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

Offerors shall provide the information required by FAR 52.212-1, Instructions to Offerors- Commercial Items (JUN 2020) which is incorporated by reference. Addenda to FAR 52.212- 1 are as follows:

52.204-7 System for Award Management (OCT 2018)

52.204-16 Commercial and Government Entity Code Reporting (AUG 2020)

52.204-24 Representation Regarding Certain Telecommunications and Video

Surveillance Services or Equipment (NOV 2021)

52.204-26 Covered Telecommunications Equipment or Services-Representation

(OCT 2020)

52.209-7 Information Regarding Responsibility Matters (OCT 2018)

52.225-25 Prohibition on Contracting With Entities Engaging in Certain activities or Transactions Relating to Iran—Representation and Certifications (JUN 2020)

1852.233-70 Protest to NASA (DEC 2015)

If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled “Buy American Act – Supplies,” the offeror shall so state and shall list the country of origin.

FAR 52.212-2, Evaluation -- Commercial Items (NOV 2021). The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforming to the solicitation will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers:

1. Technical Capability

2. Past Performance

3. Price

Technical and past performance, when combined, are significantly more important than price.

The proposal shall contain a narrative describing the technical approach for fulfilling the Mask Aligner requirements. If the proposed equipment can exceed the requirements listed in the Statement of Work (SOW), the vendor shall indicate a list of equipment capabilities having such technical merit as this may be considered in the technical appraisal.

Preference may be given to Offerors whose Mask Alignment unit is a production model with multiple similar units. Thus, having greater than 5 similar units working in the field demonstrating all capabilities listed in the SOW may be considered favorably.

The Offeror’s proposal shall demonstrate a verified track record of technical competence in producing mask and wafer alignment systems meeting each of the requirements listed in the SOW. Offeror’s shall provide a list of tools in the field as well as companies or government entities in which these tools were provided. Offeror’s shall also provide a brief history in the field as well as a history of experience with bonding equipment as it pertains to the align-for-bonding requirement. If applicable, a description of experience of align-for-bond capability and functionality with various bonding systems, in addition to stating the number of units in the field utilizing this function shall be provided.

The offeror shall also demonstrate their ability to provide service visits in a timely fashion using factory trained engineers on the Mask Aligner the offeror is proposing in addition to having common consumables and replacement parts in stock. The offeror may also provide data or metrics regarding service engineers to be deployed and equipment up-times.

The vendor shall ensure that products and services that use the Internet Protocol provide full feature functionality in both dual stack (IPv4 and IPv6) and IPv6-only environments in compliance with NIST USGv6 Testing Program, see Special Publication 500-267, A Profile for IPv6 in the U.S. Government – Version 1.0. The vendor shall identify all contract specifications that do not comply with providing full feature functionality for IPv6.

In accordance with CIO Directives and with agency Enterprise Architecture and Technical Reference Model (TRM), this acquisition requires all functionality, capabilities and features to be supported and operational in both a dual-stack IPv4/IPv6 environment and an IPv6 only environment. Furthermore, all management, user interfaces, configuration options, reports and other administrative capabilities that support IPv4 functionality will support comparable IPv6 functionality. Respondents are required to have their products tested in an IPv6 certified 3rd party test facility to ensure it works in an IPv6 only environment and meets this requirement. Agency reserves the right to require the respondent to provide additional information on any product capabilities that are identified as not being IPv6 capable.

In accordance with FAR 11.002(g), NFS 1811.101-70, and CIO Directives, this acquisition must comply with the NIST USGv6 Profile and IPv6 Test Program (http://www-x.antd.nist.gov/usgv6/supply.html). In addition, respondents are required to provide a Suppliers Declaration of Conformity (SDOC) or certify that the product operates on a platform that has an SDOC based on the attached Enclosure 1, “NASA Baseline IPv6 Requirements” or product specific “IPv6 requirements” and in accordance with NIST SP 500-267, NIST SP-273, and NIST SP 500-281.” If an SDOC is not immediately available, respondents must commit in writing to complete the necessary testing and provide the

SDOC.

The offeror shall submit existing product literature in addition to information on previously performed contracts or on-going contracts that are similar to the statement of work/item description in the solicitation performed for Federal, State, or local Governments, and for commercial firms. Information shall be provided on either 1) all such contracts within the past three years, or 2) the last three such contracts performed, whichever is fewer, and shall be limited to the name and address of the organization for which the product was supplied, and services were performed and the number (phone and fax) of a contact for each contract listed. The information should also include, discussion of any major problems encountered on the contract listed and the corrective actions taken to resolve them. The information may also include a description of any quality awards earned by the offeror. The Government reserves the right to obtain information for use in the evaluation of past performance from any and all sources including sources outside of the Government.

Offerors lacking relevant past performance history will not be evaluated favorably or unfavorably on past performance. However, the quote of an offeror with no relevant past performance history, while not rated favorably or unfavorably for past performance, may not represent the most advantageous quote to the Government and thus, may be an unsuccessful quote when compared to the responses of other quotes. The offeror should provide the information requested above for past performance evaluation, or affirmatively state that it possesses no relevant directly related or similar past performance.

All offerors shall include a completed copy of FAR 52.212-3, Offeror Representations and Certifications -- Commercial Products and Commercial Services (DEC 2022) – Alternate I (OCT 2014), or complete electronic annual representations and certifications at SAM.gov with its offer.

FAR 52.212-4, Contract Terms and Conditions-Commercial Items (DEC 2022) is applicable.

Addenda to FAR 52.212-4 are as follows:

52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998)

This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es):

Federal Acquisition Regulation https://www.acquisition.gov/browsefar

NASA FAR Supplement (NFS) clauses:

https://www.hq.nasa.gov/office/procurement/regs/NFS.pdf

(End of clause)

Clause No. Title

52.203-3 Gratuities (APR 1984)

52.203-12 Limitation on Payments to influence certain federal transactions (JUN

2020)

52.204-4 Printed or Copied Double-Sided on Postconsumer Fiber Content Paper

(MAY 2011)

52.204-13 System for Award Management Maintenance (OCT 2018)

52.204-18 Commercial and Government Entity Code Maintenance (AUG 2020)

52.204-19 Incorporation by Reference of Representations and Certifications.

(DEC 2014)

52.232-11 Extras. (APR 1984)

52.242-13 Bankruptcy (JUL 1995)

52.242-15 Stop Work Order (AUG 1989)

52.247-34 F.o.b. Destination (JAN 1991)

52.253-1 Computer Generated Forms. (JAN 1991)

1852.203-71 Requirement to Inform Employees of Whistleblower Rights (AUG

2014)

1852.215-84 Ombudsman (NOV 2011)*

1852.223-75 Major Breach of Safety or Security (FEB 2002) - Alternate I (FEB

2006)

1852.237-73 Release of Sensitive Information (JUN 2005)

*The Center Ombudsman can be found at http://prod.nais.nasa.gov/pub/pub library/Omb.html.

1852.216-78 Firm Fixed Price (DEC 1988)

The total firm fixed price of this contract is $To Be Proposed (TBP).

1852.225-70 Export Licenses (FEB 2000)

(a) The Contractor shall comply with all U.S. export control laws and regulations, including the International Traffic in Arms Regulations (ITAR), 22 CFR Parts 120 through 130, and the Export Administration Regulations (EAR), 15 CFR Parts 730 through 799, in the performance of this contract. In the absence of available license exemptions/exceptions, the Contractor shall be responsible for obtaining the appropriate licenses or other approvals, if required, for exports of hardware, technical data, and software, or for the provision of technical assistance.

(b) The Contractor shall be responsible for obtaining export licenses, if required, before utilizing foreign persons in the performance of this contract, including instances where the work is to be performed on-site at [insert name of NASA installation], where the foreign person will have access to export-controlled technical data or software.

(c) The Contractor shall be responsible for all regulatory record keeping requirements associated with the use of licenses and license exemptions/exceptions.

(d) The Contractor shall be responsible for ensuring that the provisions of this clause apply to its subcontractors.

1852.232-80 Submission of Vouchers/Invoices for Payment (APR 2018)

(a) The designated payment office is the NASA Shared Services Center (NSSC) located at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center, MS 39529.

(b) Except for classified vouchers, the Contractor shall submit all vouchers and invoices using the steps described at NSSC’s Vendor Payment information web site at:

https://www.nssc.nasa.gov/vendorpayment. Please contact the NSSC Customer Contact Center at 1-877-NSSC123 (1-877-677-2123) with any additional questions or comments.

(c) Payment requests.

(1) The payment periods are stipulated in the payment clause(s) contained in this contract.

(2) Vouchers submitted under cost-type contracts and invoices submitted under fixed-price contracts shall include the items delineated in FAR 32.905(b) supported by relevant back-up documentation. Back-up documentation shall include at a minimum, the following information:

(i) Vouchers.

(A) Breakdown of billed labor costs and associated contractor generated supporting documentation for billed direct labor costs to include rates used and number of hours incurred.

(B) Breakdown of billed other direct costs (ODCs) and associated contractor generated supporting documentation for billed ODCs.

(C) Indirect rate(s) used to calculate the amount of billed indirect expenses.

(D) Progress reports, as required.

(ii) Invoices.

(A) Description of goods and services delivered as part of the contract’s terms and conditions, including the dates of delivery/performance.

(B) Progress reports, as required.

(C) Date goods and services were performed.

(iii) Fee vouchers.

(A) Listing of all provisionally-billed fee by period or date earned since contract award.

(B) A reconciliation of all billed and earned fee.

(C) A clear explanation of the fee calculations.

(d) Non-electronic payment requests. The Contractor may submit a non-electronic voucher/invoice using the steps for non-electronic payment requests described at https://www.nssc.nasa.gov/vendorpayment, when any of the following conditions are met:

(1) The Contracting Officer administering the contract for payment has determined, in writing, that electronic submission would be unduly burdensome to the Contractor.

(2) The contract includes provisions allowing the contractor to submit vouchers or invoices using the steps for non-electronic payment requests. In such instances the Contractor agrees to submit non-electronic payment requests using the method or methods specified in Section G of the contract.

(e) Improper vouchers/invoices. The NSSC Payment Office will notify the contractor of any apparent error, defect, or impropriety in a voucher/invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(f) Other payment clauses. In addition to the requirements of this clause, the Contractor shall meet the requirements of the appropriate payment clauses in this contract when submitting payment requests.

(g) In the event that amounts are withheld from payment in accordance with provisions of this contract, a separate payment request for the amount withheld will be required before payment for that amount may be made.

1852.245–74 Identification and Marking of Government Equipment. (JAN 2011)

(a) The Contractor shall identify all equipment to be delivered to the Government using NASA Technical Handbook (NASA–HDBK) 6003, Application of Data Matrix Identification Symbols to Aerospace Parts Using Direct Part Marking Methods/Techniques, and NASA Standard (NASA–STD) 6002, Applying Data Matrix Identification Symbols on Aerospace Parts or through the use of commercial marking techniques that: (1) are sufficiently durable to remain intact through the typical lifespan of the property: and, (2) contain the data and data format required by the standards. This requirement includes deliverable equipment listed in the schedule and other equipment when no longer required for contract performance and NASA directs physical transfer to NASA or a third party. The Contractor shall identify property in both machine and human readable form unless the use of a machine readable-only format is approved by the NASA Industrial Property Officer.

(b) Equipment shall be marked in a location that will be human readable, without disassembly or movement of the equipment, when the items are placed in service unless such placement would have a deleterious effect on safety or on the item’s operation.

(c) Concurrent with equipment delivery or transfer, the Contractor shall provide the following data in an electronic spreadsheet format:

(1) Item Description.

(2) Unique Identification Number (License Tag).

(3) Unit Price.

(4) An explanation of the data used to make the unique identification number.

(d) For equipment no longer needed for contract performance and physically transferred under paragraph (a) of this clause, the following additional data is required:

(1) Date originally placed in service.

(2) Item condition.

(e) The data required in paragraphs (c) and (d) of this clause shall be delivered to the

NASA center receiving activity listed below:

Goddard Space Flight Center Building 30, Code 553 Greenbelt, MD 20771

(f) The contractor shall include the substance of this clause, including this paragraph (f), in all subcontracts that require delivery of equipment.

GSFC 52.211-90 Supplies and/or Services To Be Provided. (SEP 2017)

The Contractor shall provide all resources (except as may be expressly stated in the contract as furnished by the Government) necessary to deliver and/or perform the items below in accordance with the Statement of Work (SOW), incorporated as Attachment A.

Item Description Reference (SOW Section) Schedule Delivery

Method/Addressee(s)

Planned Design of tool and list of required utilities

Scope (a) & Deliverables

2 weeks after contract award date

Schedule meeting with the Contracting’s Officer Representative (COR) and Electronic Format of design to

COR

Factory Acceptance Test

Scope (b) & Deliverables

Within 16 months from date of award

Electronic Format (Report)

3 Shipping of Tool Scope (c) & Deliverables

Within 16 months of date of award Shipping to GSFC

4 Installation/Assembly of Tool

Scope (d), Installation, Training and Documentation & Deliverables

Within 17-20 months of date of award

GSFC

5 Final Acceptance Testing

Scope (e) & Deliverables

Within 21 months of date of award GSFC

6 Training

Scope (d), Installation, Training and Documentation & Deliverables

Within 22 months of date of award GSFC

7 Final Acceptance of Tool Deliverables Within 22 months of date of award GSFC

GSFC 52.211-91 Scope of Work. (FEB 2016)

The Contractor shall provide the personnel, materials, and facilities, except as otherwise specified in this contract, necessary to perform the work and to furnish the items specified in the Supplies and/or Services To Be Provided clause of this contract in accordance with the Statement of Work, Attachment A.

GSFC 52.211-101 List of Attachments. (FEB 2016)

The following documents are attached hereto and made a part of this contract:

Attachment Description Date

No. of Pages

(including the cover page) A SOW – Mask Aligner 09/14/2023 7

GSFC 52.217-92 Period of Performance (JAN 2014)

The period of performance of this contract shall be for a period of 22 months from the contract effective date of TBD.

GSFC 52.232-95 Invoices – Submission of (MAR 2018)

(a) Payment Office. The designated payment office is the NASA Shared Services Center

(NSSC) located at FMD Accounts Payable, Bldg. 1111, Jerry Hlass Road, Stennis Space Center, MS 39529. Please contact the NSSC Customer Contact Center at 1-877- NSSC123 (1-877-677-2123) with any additional questions or comments.

(b) Invoices. Except for classified invoices, invoices shall be prepared in accordance with the invoicing instructions in FAR 52.212-4(g). In addition, invoices shall be submitted using the steps described at the NSSC’s Vendor Payment information web site at https://www.nssc.nasa.gov/vendorpayment.

(c) Improper invoices. The NSSC Payment Office will notify the contractor of any apparent error, defect, or impropriety in any invoices within seven calendar days of receipt by the NSSC Payment Office. Inquiries regarding requests for payment should be directed to the NSSC as specified in paragraph (b) of this section.

(d) In the event that amounts are withheld from payment in accordance with provisions of this award, a separate payment request for the amount withheld will be required before payment for that amount may be made.

GSFC 52.232-99 Delivery Payment Schedule (FIXED PRICE) (SEP 2019)

(a) Subject to other limitations and conditions specified in this contract, delivery payments shall be made to the Contractor upon delivery and acceptance of the items described under paragraph (b). Contractor is authorized to invoice at the unit price indicated and up to the quantity stated.

(b) The following payment schedule shall be used:

(c) The Contractor may submit requests for payment not more frequently than monthly, in a form and manner acceptable to the Contracting Officer. Unless otherwise authorized by the Contracting Officer, all delivery - payments in any period for which payment is being requested shall be included in a single request, appropriately itemized and totaled.

(d) The Contractor shall not be entitled to payment of a request for delivery payment prior to successful accomplishment and acceptance of the item by the Government. The Contracting Officer shall determine whether the item for which payment is requested has been successfully accomplished and accepted by the Government in accordance with the terms of the contract. The Contracting Officer may, at any time, require the Contractor to substantiate the acceptable performance of the services provided or supplies delivered.

(End of Clause)

GSFC 52.247-94 Shipping Instructions--Central Receiving. (FEB 2016)

Shipments of the items required under this contract shall be to:

Receiving Officer

Goddard Space Flight Center Building 35, Code 279 Greenbelt, Maryland 20771

Marked for:

Technical Officer: Timothy M Miller, Code 553 Building: 11 Room: E013 Contract No.: TBD Item(s) No.: TBD

Compliance with this clause is necessary to assure verification of delivery and acceptance and prompt payment.

Item No. Description Unit Qty Unit Price Total Amount

(1) Planned Design of tool and list of required utilities Each 1 TBD TBD

(2) & (3) Factory Acceptance Test and Shipping of Tool Each 1 TBD TBD

(6) & (7) Training and Final Acceptance of Tool Each 1 TBD TBD

If this is a fixed price type contract, delivery--for purposes of the Prompt Payment Act--must be through the above shipping address unless another location has been authorized by the Contracting Officer. If delivery is made to other than the Receiving Officer listed above and shipment to that other location has not been authorized by the Contracting Officer, a delivery for the purposes of the Prompt Payment Act has not occurred and no interest penalty under the Act shall result. Shipment to other than Receiving Officer listed above will be construed as contract noncompliance.

FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items (MAR 2023), is applicable and the following identified clauses are incorporated by reference:

52.203-6, Restrictions on Subcontractor Sales to the Government (JUN 2020), with Alternate

I (NOV 2021)

52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards (JUN 2020)

52.209-6, Protecting the Governments Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment. (NOV 2021)

52.209-9, Updates of Publicly Available Information Regarding Responsibility Matters

(OCT 2018)

52.219-8, Utilization of Small Business Concerns (OCT 2022)

52.219-28, Post Award Small Business Program Rerepresentation (MAR 2023)

52.222-3, Convict Labor (JUN 2003)

52.222-19, Child Labor Cooperation with Authorities and Remedies (DEC 2022)

52.222-21, Prohibition of Segregated Facilities (APR 2015)

52.222-26, Equal Opportunity (SEP 2016)

52.222-35, Equal Opportunity for Veterans (JUN 2020)

52.222-36, Affirmative Action for Workers with Disabilities (JUN 2020)

52.222-37, Employment Reports on Veterans (JUN 2020)

52.222-40, Notification of Employee Rights Under the National Labor Relations Act (DEC 2010)

52.222-50, Combating Trafficking in Persons (NOV 2021)

52.223-18, Encouraging Contractor Policies to Ban Text Messaging While Driving (JUN 2020)

52.225-1, Buy American Act-Supplies (OCT 2022)

52.225-5, Trade Agreements (OCT 2019) (19 U.S.C. 2501, et seq., 19 U.S.C. 3301 note).

52.225-13, Restrictions on Certain Foreign Purchases (FEB 2021)

52.232-33, Payment by Electronic Funds Transfer System for Award Management (OCT 2018)

This is not a Defense Priorities and Allocation System (DPAS) rated order.

NASA Clause 1852.215-84, Ombudsman, is applicable. The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html

This posting, in addition to any attached documents, will be available on www.Sam.gov.

Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any).

Prospective offerors are encouraged to notify this office of their intent to submit an offer.

All contractual and technical questions must be submitted electronically via email to Stephanie.D.Stephens@nasa.gov and Ricarda.E.Mason@nasa.gov not later than 09/20/2023at 4:00PM EST. Telephone questions will not be accepted.

Responses to this combined synopsis/solicitation must be received via email no later than 4:00 PM EST on 09/27/2023.

The Government is not responsible for any failure attributable to the transmission or receipt of documents submitted using electronic means, including the missing of any established deadlines.

Failure to submit a complete electronic proposal by the due date and time specified for this RFQ shall result in the proposal being considered late and shall be handled in accordance with FAR 52.212-1 (MAR 2023).