RFQ(R).pdf

W81EWF00441516

AMENDMENT OF SOLICITATION/MODIFICATION OF CONTRACT

Except as provided herein, all terms and conditions of the document referenced in Item 9A or 10A, as heretofore changed, remains unchanged and in full force and effect.

15A. NAME AND TITLE OF SIGNER (Type or print)

30-105-04EXCEPTION TO SF 30

APPROVED BY OIRM 11-84

STANDARD FORM 30 (Rev. 10-83)

Prescribed by GSA

FAR (48 CFR) 53.243

Modification of description of requirements. See also Q&A for additional questions.

1. CONTRACT ID CODE PAGE OF PAGES

J 1 8

16A. NAME AND TITLE OF CONTRACTING OFFICER (Type or print)

16C. DATE SIGNED

BY 04-Mar-2020

16B. UNITED STATES OF AMERICA15C. DATE SIGNED15B. CONTRACTOR/OFFEROR

(Signature of Contracting Officer)(Signature of person authorized to sign)

8. NAME AND ADDRESS OF CONTRACTOR (No., Street, County, State and Zip Code) X W9132T20R0003

X 9B. DATED (SEE ITEM 11)

24-Feb-2020

10B. DATED (SEE ITEM 13)

9A. AMENDMENT OF SOLICITATION NO.

11. THIS ITEM ONLY APPLIES TO AMENDMENTS OF SOLICITATIONS

X The above numbered solicitation is amended as set forth in Item 14. The hour and date specified for receipt of Offer is extended, is not extended.

Offer must acknowledge receipt of this amendment prior to the hour and date specified in the solicitation or as amended by one of the following methods:

(a) By completing Items 8 and 15, and returning copies of the amendment; (b) By acknowledging receipt of this amendment on each copy of the offer submitted;

or (c) By separate letter or telegram which includes a reference to the solicitation and amendment numbers. FAILURE OF YOUR ACKNOWLEDGMENT TO BE

RECEIVED AT THE PLACE DESIGNATED FOR THE RECEIPT OF OFFERS PRIOR TO THE HOUR AND DATE SPECIFIED MAY RESULT IN

REJECTION OF YOUR OFFER. If by virtue of this amendment you desire to change an offer already submitted, such change may be made by telegram or letter, provided each telegram or letter makes reference to the solicitation and this amendment, and is received prior to the opening hour and date specified.

12. ACCOUNTING AND APPROPRIATION DATA (If required)

13. THIS ITEM APPLIES ONLY TO MODIFICATIONS OF CONTRACTS/ORDERS.

IT MODIFIES THE CONTRACT/ORDER NO. AS DESCRIBED IN ITEM 14.

A. THIS CHANGE ORDER IS ISSUED PURSUANT TO: (Specify authority) THE CHANGES SET FORTH IN ITEM 14 ARE MADE IN THE

CONTRACT ORDER NO. IN ITEM 10A.

B. THE ABOVE NUMBERED CONTRACT/ORDER IS MODIFIED TO REFLECT THE ADMINISTRATIVE CHANGES (such as changes in paying office, appropriation date, etc.) SET FORTH IN ITEM 14, PURSUANT TO THE AUTHORITY OF FAR 43.103(B).

C. THIS SUPPLEMENTAL AGREEMENT IS ENTERED INTO PURSUANT TO AUTHORITY OF:

D. OTHER (Specify type of modification and authority)

E. IMPORTANT: Contractor is not, is required to sign this document and return copies to the issuing office.

14. DESCRIPTION OF AMENDMENT/MODIFICATION (Organized by UCF section headings, including solicitation/contract subject matter where feasible.)

10A. MOD. OF CONTRACT/ORDER NO.

2. AMENDMENT/MODIFICATION NO. 5. PROJECT NO.(If applicable)

6. ISSUED BY

3. EFFECTIVE DATE

04-Mar-2020

CODE

ERDC CONTRACTING OFFICE

CHAMPAIGN OFFICE

P O BOX 9005

CHAMPAIGN IL 61826-9005

W9132T 7. ADMINISTERED BY (If other than item 6)

4. REQUISITION/PURCHASE REQ. NO.

CODE

See Item 6

FACILITY CODECODE

EMAIL:TEL:

W9132T20R0003

SECTION SF 30 BLOCK 14 CONTINUATION PAGE

SUMMARY OF CHANGES

SECTION C - DESCRIPTIONS AND SPECIFICATIONS

The following have been modified:

DESCRIPTION OF REQUIREMENTS

1. INTRODUCTION: Materials and equipment are required, as well as labor to install a modular cleanroom located at ERDC CERL, Champaign, IL. The objective is to create a controlled environment for researchers and scientists to perform experiments and fabrication of micro/nano structured devices under high levels of cleanliness.

The facility must be designed to achieve levels down to ISO class 5 (Federal Standard 209E

Class 100), with less than 100000 particles (0.1um) per sq meter. A generalized depiction of the clean room is given in the accompanying diagram of a cleanroom layout (Attachment 1). This room will likely have a maximum of three to four people working in the room at the same time.

ERDC CERL has a space allocated for the cleanroom. Items are requested for creating a workable space. All examples of the types of items given below are on a brand name or equal basis.

2. GENERAL REQUIREMENTS: The following specifications/requirements are needed, with reference to the layout diagram:

STANDARDS: The room as a whole must be ISO class 5 (federal 209E class 100) with less than 100000 particles (0.1um) per sq meter.

FLEXIBILITY: The overall modular design shall focus on easy cleanroom installation as well as flexibility in the event that expansion or relocation is required.

DIMENSIONS: The modular cleanroom size must range from 30 to 33 ft. L x 21 to 23

ft. W (approximately 600 to 700 sq ft) in space, 8’ interior ceiling height. Interior rooms include a wet chemistry room (approx. 18’ x 22’ as shown on the diagram), a photolithography room (approx. 14’ x 22’), and a gowning room (approx. 8’ x 6’).

EQUIPMENT QUALITY: All cleanroom accessories or devices must be manufactured of higher grade materials such as stainless steel, and require no extraordinary measures to keep clean, and prevent exfiltration.

DOORS: Cleanroom doors must have good performance at outside face, flat, high structural strength, corrosion resistance, no dust, easy to clean. This includes (all four doors depicted on layout):

o One lockable outside entry standard door (3’ width) with a window into gowning room o One single standard door with a window between gowning room and wet chemistry room o One single standard door with a yellow tinted window between wet chemistry room and photolithography room o One double locking (two standard) door with no windows on outside wall

WINDOWS: There must be at least four windows along the east side long wall. This includes at least two windows into the photolithography room and two windows into the wet chemistry room. Windows must be yellow-tinted, detailed to have the appropriate sealing performance, flush glazed to avoid any horizontal surfaces that might create an extra cleaning burden, and preferably low condensation temperature without fogging.

WALLS: Cleanroom walls must comprise fiber-reinforced plastic panels for durability and easy cleaning. The walls must be moisture proof, and produce no VOC off gassing, while including heat preservation and noise reduction.

CEILINGS: Cleanroom ceilings must be constructed of gypsum wall board or a cleanroom-rated ceiling tiles and grid system as appropriate for ISO 5.

FLOORING: The current location is a concrete floor that must be leveled, sealed, and covered with epoxy. The final color and pattern of the floor must be approved by the

Government.

HOODS and BENCHES: The solvent fume hood (#1 on the layout) should be 4 to 5 feet in width with a two foot work area depth. The bench top must be resistant to organic solvents and the hood must be ducted. This solvent hood must be equipped with a nitrogen gas drop and a vacuum drop. An example of this fume hood is seen at https://www.cleanairproducts.com/clean-benches/standard, CAP301

The acid/base bench with hood (developer hood, #4 on the layout) should be 5 to 6 feet in width with a two foot work area depth. It must be equipped with a sink, gooseneck faucet for DI water, N2 gun, and a DI water gun. The bench top must be resistant to strong acids and bases and the hood must be ducted. An example of this fume hood is seen at terrauniversal.com, P/N: 2000-16 (hood), P/N: 2000-18 (bench).

A solvent bench with hood (#5 on the layout) should be 5 to 6 feet in width with a two foot work area depth. It must be equipped with a sink, gooseneck faucet for DI water, N2 gun, and a DI water gun. The bench top must be resistant to strong acids and bases and the hood must be ducted. An example of this fume hood is seen at terrauniversal.com, P/N: 2001-06.

Four stainless steel benches with overhead shelves (#2 on the layout) should be L72” x

W36” x H36” and W60” x D15” x H28” in height respectively. An example of this type of stainless steel bench is seen at https://www.cleanairproducts.com/stainless-steel-cleanroom-table/cap62ct, CAP62CT; Wall mount cabinet, https://www.terrauniversal.com/wall-cabinets-with-sliding-or-hinged-doors.html, P/N:

5656-28A.

One stainless steel bench on wheels for a mobile work surface (#9 on the layout) should be L72” x W30” x H34” equipped with an open base and built-in mobility features designed for cleanliness, stability, and convenience in clean room.?. An example of this type of mobile stainless steel bench is seen at https://www.fishersci.com/shop/products/metro-hd-super-stainless-lab-worktable-mobile-

14/p-175115, 11-927-108.

EYE WASH STATIONS: Two eye wash/shower stations (#3 on the layout); one must be placed within both the photolithography and the wet chemistry rooms. An example of this station is seen at https://www.fishersci.com/us/en/catalog/search/products?keyword=safety+shower+with+ eye+wash, 18-888-310.

STORAGE: One corrosive chemical storage cabinet (#6 on the layout) should be H45” x

W43” x D 18”and cleanroom-safe polypropylene cabinet for acid and corrosive chemical storage. The height of this cabinet must not interfere with the window. An example of this type of corrosive chemical storage cabinet is seen at http://www.chemical-storagecabinet.com/sale-322198-laboratory-plastic-corrosive-storage-cabinet-for-clean-room-30-gallon.html, SSP400030.

The storage cabinet (#7 on the layout) should be H82” x W47” x D24” for storing hazardous solvents in clean rooms suitable for installation in ISO-5 class clean room. An example of this type of storage cabinet is seen at https://www.dueperthal.com/en/product-portfolio/safety-cabinets-for-clean-rooms/type-90-flammable-liquids/, 29-201267-006.

The storage shelving in the gowning room should be 60'' W x 24'' D x 83" H (Toolots, IA5W8EUIW)

LIGHTING: Cleanroom lighting must consist of sealed fixtures, with the standard 70 foot candles of illumination. These specialized fixtures are designed for wash-down procedures and to prevent the exfiltration of air. The lighting in the photolithography room must be yellow-tinted to prevent unwanted exposure of photoresist to light of shorter wavelengths.

WATER: Deionized water lines (DIW) from the house production tanks must be plumbed into the wet chemistry room in two locations to supply the two fume hoods (#4 and #5 on the layout). In addition, the design must allow floor water drainage in both the https://www.fishersci.com/us/en/catalog/search/products?keyword=safety+shower+with+eye+wash https://www.fishersci.com/us/en/catalog/search/products?keyword=safety+shower+with+eye+wash photolithography and the wet chemistry rooms, requiring penetration of the concrete floor. Schematics to the current underfloor drain lines will be provided.

ELECTRICAL OUTLETS: One 208 V receptacle and fifteen 110 V duplex receptacles must be provided for the photolithography room, two 208 V receptacles and fifteen 110

V duplex receptacles must be provided for the wet chemistry room, and one 110V duplex receptacle in the gowning room. Approximate equidistant locations can be provided, but final locations must be approved by the Government. An electrical panel and a junction box is available for use, located three feet away from the clean room location.

GAS LINES: A total of five lines must be installed into the interior of the room for

Argon (Ar), Nitrogen (N2), Oxygen (O2), and two other vacant lines (V/G) that can be used for other gases as needs develop. The compressed gas tanks will be situated outside the room (#8 on the layout) but not affixed to the exterior wall of the cleanroom. The gas lines must drop into specified locations as depicted on the layout.

VACUUM LINES: Two vacuum lines must be installed into the interior of the room from the existing house vacuum system. The vacuum lines must drop into the specified locations as depicted on the layout (H/V).

Two more vacuum lines must be installed into the interior of the room from a vacuum pump outside, and in close proximity to, the cleanroom. The vacuum lines must drop into the specified locations as depicted on the layout (P/V).

MEDIA CONNECTIVITY: The cleanroom must provide a conduit for cable connections into the room for computer and phone. This conduit must drop into both the photolithography and the wet chemistry rooms.

HVAC CONFIGURATION A: The clean room must have its own HVAC system. A recirculating air flow arrangement is required. The clean room should control temperature and humidity to achieve working conditions that maintain 68 F +- 2 F and

50% +- 10% relative humidity.

HVAC CONFIGURATION B: The clean room must have its own HVAC system. A once through type air flow arrangement is required. The clean room should control temperature and humidity to achieve working conditions that maintain 68 F +- 2 F and

50% +- 10% relative humidity.

3. PROJECT SCHEDULE and DELIVERABLES: All work under this contract must be completed by 31 Dec 2020.

See Section L of this solicitation document for pre-award schedule details to include a site visit for interested vendors. The anticipated contract award date is 10 Apr 2020. The post-award project schedule is as follows:

KICKOFF: A project kickoff meeting will be held via telephone within one week of contract award, at a date and time mutually agreeable to both parties, to discuss overall expectations and requirements for having contractor employees onsite at ERDC-CERL.

This meeting is anticipated to last 1-2 hours. The government will designate a primary technical point of contract (TPOC) for the contractor to coordinate with throughout the project.

INITIAL REVIEW: An initial equipment design review meeting will be held onsite approximately 30 days after contract award, at a date and time mutually agreeable to both parties. The contractor shall present their initial design for the clean room to include a list of equipment to be purchased and plans for installing that equipment. The government will review and provide initial feedback at the meeting. The government will then have 2 weeks to provide final feedback and approval of the selections. The contractor will have another 2 weeks after that to submit a final equipment design incorporating government feedback.

MONTHLY REVIEWS: After the final equipment design is approved the contractor shall begin the onsite work. The contractor shall coordinate shipment of large items directly to CERL with the government TPOC as necessary. The contractor shall meet with the TPOC to review overall progress at least once per month until the work is complete. These progress review meetings can occur on site or via telephone, at dates and time mutually agreeable to both parties. A summary report of the progress discussed shall be submitted.

Invoices may be submitted on a monthly basis to coincide with the percentage of the overall effort confirmed complete at the monthly progress review and reflected in the summary report. The government TPOC will be responsible for the determination that the amount invoiced is commensurate with the percentage of the effort that has been completed at that time.

FINAL ISO 5 CERTIFICATION TEST: After all of the equipment has been installed the contractor shall perform final testing to ensure full compliance with ISO 5 standards.

A final report detailing the testing performed, any issues encountered, and actions taken to resolve those issues shall be submitted as a final deliverable no later than 31 December

2020. Formal certification of ISO 5 operation shall also be submitted as a final deliverable. The final invoice submission shall coincide with these final deliverables.

4. SECURITY REQUIREMENTS:

Access and General Protection/Security Policy and Procedures.

All contractor and all associated sub-contractors employees shall comply with applicable installation, facility and area commander installation/facility access and local security policies and procedures (provided by government representative). The contractor shall also provide all information required for background checks to meet installation/facility access requirements to be accomplished by installation Provost Marshal Office, Director of Emergency Services or

Security Office. Contractor workforce must comply with all personal identity verification requirements (FAR clause 52.204-9, Personal Identity Verification of Contractor Personnel) as directed by DOD, HQDA and/or local policy. In addition to the changes otherwise authorized by the changes clause of this contract, should the Force Protection Condition (FPCON) at any installation or facility change, the Government may require changes in contractor security matters or processes.

For contractors who do not require CAC, but require access to a DoD facility or installation.

Contractor and all associated sub-contractors employees shall comply with adjudication standards and procedures using the National Crime Information Center Interstate

Identification Index (NCIC-III) and Terrorist Screening Database (TSDB) (Army Directive

2014-05 / AR 190-13), applicable installation, facility and area commander installation/facility access and local security policies and procedures (provided by government representative, as

NCIC and TSDB are available), or, at OCONUS locations, in accordance with status of forces agreements and other theater regulations.

5. VETERANS EMPLOYMENT EMPHASIS FOR U.S. ARMY CORPS OF ENGINEERS

CONTRACTS: In addition to complying with the requirements outlined in FAR Part 22.13, FAR Provision 52.222-38, FAR Clause 52.222-35, FAR Clause 52.222-37, DFARS 222.13 and

Department of Labor regulations, U.S. Army Corps of Engineers (USACE) contractors and subcontractors at all tiers are encouraged to promote the training and employment of U.S.

veterans while performing under a USACE contract. While no set-aside, evaluation preference, or incentive applies to the solicitation or performance under the resultant contract, USACE contractors are encouraged to seek out highly qualified veterans to perform services under this contract. The following resources are available to assist USACE contractors in their outreach efforts:

Federal Veteran employment information at http://www.fedshirevets.gov/index.aspx

Department of Labor Veterans Employment Assistance http://www.dol.gov/vets/

Department of Veterans Affairs–VOW to Hire Heroes Act http://benefits.va.gov/vow/

Army Wounded Warrior Program – http://wtc.army.mil/modules/employers/index.html

U.S. Chamber of Commerce Foundation–Hiring Our Heroes http://www.hiringourheroes.org/

Guide to Hiring Veterans – Reference Material http://www.whitehouse.gov/sites/default/files/docs

6. OTHER INFORMATION REGARDING ONSITE WORK:

HOURS OF OPERATION: CERL’s standard hours of operation are from 0600 – 1800

Monday through Friday, except on Legal Public Holidays, and during Presidential or

Administrative closing days. The following legal holidays are observed at this installation:

http://www.fedshirevets.gov/index.aspx http://www.dol.gov/vets/ http://benefits.va.gov/vow/ http://wtc.army.mil/modules/employers/index.html http://www.hiringourheroes.org/ http://www.whitehouse.gov/sites/default/files/docs

New Year's Day January 1st

Martin Luther King's Birthday Third Monday in January

President's Day Third Monday in February

Memorial Day Last Monday in May

Independence Day July 4th

Labor Day First Monday in September

Columbus Day Second Monday in October

Veteran's Day November 11th

Thanksgiving Day Fourth Thursday in November

Christmas Day December 25th

SCHEDULE OF INSURANCE: As a supplement to clause 52.228-5 in Section I, the contractor shall, at their own expense, procure and maintain adequate insurance coverage during the entire period of performance of this contract. This includes:

General Liability Insurance per Occurrence: $500,000.00

Comprehensive Automobile Liability Insurance: Minimum limits of $200,000.00 per person, and $500,000.00 per occurrence for bodily injury, and $20,000.00 per occurrence for property damage

Workman’s Compensation and Employer’s Liability Insurance: $100,000.00

(End of Summary of Changes)