B08.03 Clean Room Q&A 2.docx

Questions & Answers

Q: Can we use Al. wall panels with ESD compatible coating instead of Fiber Reinforced Plastic as described in tender?

A: No, Fiber Reinforced Plastic is a firm requirement

Q: Are there building drawings that can be provided? Specifically interested in 1) Plan View of area, 2) Cross View showing heights from building slab to overhead steel or obstructions above?

A: There is a layout document posted with the solicitation already. This is the only site related document that can be shared publically.

Q: Will you please share RFI Answers to questions that have been submitted on the project?

A: That information was posted in the prior Q&A

Q: Should we plan for the Cleanroom HVAC to be separate and stand-alone from the Building, or is there Chilled Water and Plant Steam to tie into?

A: No, the clean room will not be a stand-alone building. Yes, there is Chilled Water and a Plant Steam to tie into

Q: Classification Requirements (FS209E, EU, ISO, Other):

A: ISO 5

Q: Is the Shell or Host Building Existing or New Construction?

A: It is an existing building

Q: Is any Demolition Required, if so what and by whom?

A: No

Q: Describe the Shell or Host Building (Stories, Warehouse, etc.):

A: Warehouse in design

Q: What is the construction of the Shell or Host Building Walls?

A: Concrete block

Q: What is the construction of the Shell or Host Building Floors?

A: Concrete

Q: What is the location of the Cleanroom Area within the Shell or Host Building?

A: Centrally Located

Q: Are any of the Cleanroom Walls adjacent to exterior building walls-exposed to outdoors (if so provide sketch)?

A: No

Q: Can the Cleanroom Ceiling be supported from the existing Building Steelwork?

A: No

Q: Is the Cleanroom Project located in a Seismic Zone (if so please indicate)?

A: No

Q: Do any of the existing Building Columns interfere with the cleanroom layout (if so please provide sketch)?

A: No

Q: Does an Equipment Mezzanine exist (if not, is one required)?

A: No

Q: Is a new Independent Self Supported Steel Structure required for the cleanroom (if so, by whom)?

A: No

Q: What is the intended design location of the Cleanroom HVAC Equipment?

A: HVAC unit exterior to the building. Chilled water is available and preferred

Q: What is the Source and year-round Conditions of the Make-Up Air (MUA) (Outside or Inside)?

A: MUA will be supplied from inside air maintained at 68 F and ~50% humidity.

Q: What is the year-round Ambient Temperature and Humidity Conditions adjacent to and above the cleanroom?

A: 68 F and ~50% humidity; this is the requirement for the interior of the clean room

Q: Are any of the cleanroom areas classified as Bio-Hazardous (if so, please describe)?

A: No

Q: What is the HVAC Cooling Method (Chilled Water, Water Cooled DX, Air Cooled DX)?

A: Chilled Water is available

Q: Will the Cleanroom HVAC Controls be connected to a building management system (BMS) (if so, describe and by whom)?

A: The clean room must have its own HVAC.

Q: Will the Cleanroom Area require a Sprinkler System?

A: No

Q: Does a Sprinkler Main exist (if not, then it will be provided by whom)?

A: Yes – one is located above where the cleanroom will be installed

Q: Will the area above the Cleanroom Ceiling require sprinklers?

A: Currently sprinklers are already available.

Q: Will Smoke and Fire Alarms be required (if so, by whom)?

A: Yes

Q: What is the required Cleanroom HEPA/ULPA Filter ratings?

A: Filter system that can maintain ISO 5

Q: Describe the required Cleanroom Lights (Tear Drop, Flow-Thru Troffers, Lay-In, Top-Access, etc.):

A: Cleanroom lighting must consist of sealed fixtures, with the standard 70 foot candles of illumination. These specialized fixtures are designed for wash-down procedures and to prevent the exfiltration of air. The lighting in the photolithography room must be yellow-tinted to prevent unwanted exposure of photoresist to light of shorter wavelengths.

Q: What Light Ballasts are required?

A: Please see above answer

Q: Are any special type of light fixture required?

A: Please see above answer

Q: Is other than 1P-120V required for the Cleanroom Lighting?

A: No Q: Is other than 60HZ require?

A: No

Q: If not white light, describe the color and wave length:

A: Yellow-tinted light to prevent unwanted exposure of photoresist.

Q: Are colored lamps or lamp shields preferred?

A: Yes

Q: Light levels will be measured at 30" AFF unless otherwise specified.

A: 70 foot candles of illumination

Q: Are any 3P Outlets required in the cleanroom (if so, by whom)?

A: Need one 208 V receptacle

Q: What type of Door Interlocks will be used for the Cleanroom Doors (Traffic Lights, Magnetics, Shoot Bolts), please provide Interlocking sequence?

A: Cleanroom doors must have good performance at outside face, flat, high structural strength, corrosion resistance, no dust, easy to clean.

Q: What type of Cleanroom Telephones and/or Intercoms are required (provide type, location and quantity)?

A: Government-issued phone will be installed and used.

Q: What is the Type and Quantity of Process Exhaust (Acid, Solvent, General)?

A: Acid/Base, Solvents (acetone, methanol, photoresist, isopropanol)

Q: What chemicals and/or gasses are used within the cleanroom (Type, Concentration, Amount, Container)?

A: Developers from the bottles for SU-8 and AZ photoresist, SUMA from the bottle cleaning solution, solvents, Nitrogen, Argon, and Oxygen.

Q: Please indicate the required level of Certification:

A: ISO 5

Q: Particle Counts:

A: >100,000 particles (0.1um) per sq meter

Q: HEPA Filter Integrity Test:

A: Yes

Q: Temperature:

A: 68 F +- 2 F

Q: Humidity:

A: 50% +- 10% relative humidity

Q: Light:

A: Cleanroom lighting must consist of sealed fixtures, with the standard 70 foot candles of illumination. These specialized fixtures are designed for wash-down procedures and to prevent the exfiltration of air. The lighting in the photolithography room must be yellow-tinted to prevent unwanted exposure of photoresist to light of shorter wavelengths.

Q: Is Third Party Testing Required (if so by whom and for which tests)?

A: No

Q: Who is providing and Validation Services (what services and by whom)?

A: Vendor

Q: Are the Cleanroom Installers to be Union members?

A: Davis Bacon Act terms and conditions are not included in this award as it is not considered construction

Q: Are there any Bonding requirements?

A: Davis Bacon Act terms and conditions are not included in this award as it is not considered construction

Q: Are any Permits or Fees required (if so, by whom)?

A: See prior Q&A regarding permitting questions

Q: Is any Ancillary Cleanroom Equipment to be included (if so, what and by whom)?

A: Solvent bench hood with bench, Acid/base bench with hood, stainless steel benches, one stainless steel bench with wheels, eye wash/safety shower systems, corrosive chemical storage cabinet, storage cabinet, storage shelving.

Q: Is there an Architect Firm already involved with this cleanroom project (if so, who is the contact)?

A: No

Q: Is there an Engineering Firm already involved with this cleanroom project (if so, who is the contact)?

A: No

Q: Is there a Cleanroom Consulting Firm already involved with this cleanroom project (if so, who is the contact)?

A: No

Q: Is there a Validation Consulting Firm already involved with this cleanroom project (if so, who is the contact)?

A: No

Q: Is there a General Contracting Firm already involved with this cleanroom project (if so, who is the contact)?

A: No

Q: Is there a Mechanical Contracting Firm already involved with this cleanroom project (if so, who is the contact)?

A: No

Q: Is there an Electrical Contracting Firm already involved with this cleanroom project (if so, who is the contact)?

A: No

Q: Is there a High Purity Process Contracting Firm already involved with this cleanroom project (if so, who is the contact)?

A: No