A02.12 Cleanroom layout v5.pptx

PPTX presentation 35 KB Posted

Attached to
Clean Room Equipment
Solicitation number
W9132T20R0003
Issued by

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This solicitation from the U.S. Army Corps of Engineers seeks proposals for a cleanroom project at its Construction Engineering Research Laboratory facility in Champaign, Illinois. Offerors must provide all necessary materials, equipment, labor and installation to create a controlled cleanroom environment for research and device fabrication. Proposals are due by March 16, 2020. This is a small business set-aside solicitation issued under contract number W9132T20R0003. Interested parties should attend an optional site visit for additional details. Questions and answers from the site visit will be posted to the announcement.

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Other files

File Type Posted
B08.03 Clean Room Q&A 2.docx DOCX document
RFQ(R).pdf PDF
B08.03 Clean Room Q&A.DOCX DOCX document
RFQ.pdf PDF

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Text version

8’ 30 to 33’ 14’

Gowning room Photolithography 21 to 23’ Wet chemistry/Instrument Solvent fume hood w/o DI water and sink Stainless steel bench with overhead shelves Eye wash/shower station Acid/base fume hood (developer hood) w/ DI water and sink Solvent fume hood w/ DI water and sink Corrosive Chemical Storage Cabinet Storage cabinet Gas lines (5) and vacuum lines plumbed into the room Stainless steel bench on wheels

Cleanroom layout

E S N W

6’

N2

H/V

H/V

DIW

N2

DIW

N2

Ar

P/V

Ar

P/V

N2

O2

V/G

V/G

DIW

H/V

P/V

V/G Deionized water House vacuum Pumped vacuum Vacant gas line image1.png

File details come from the government source that posted it. Updated .