SOW.pdf.pdf

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SEM with EDS for micromechanical testing
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5-B175-Q-00380-00
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This Statement of Work (SOW) details Argonne National Laboratory's requirement for a Scanning Electron Microscope (SEM) with Energy Dispersive Spectroscopy (EDS) for micromechanical testing. The procurement specifies a dedicated SEM system with specific technical requirements, including a Field Emission Gun (FEG) electron column with 500C-30kV range, resolution to 1nm, a 4-axis motorized stage with 50x50mm travel, and a vacuum system with oil-free, air-cooled pumps.

Key delivery specifications include installation in Building 205, G117 by August 2025, with the system needing to accommodate a Bruker PI89 picoindenter. The SOW requires the SEM to be either NRTL listed or pass an electrical inspection at Argonne. The system will support three identified research programs and potentially additional future programs. An annual service contract cost must be included with the quotation, and the system must be compatible with the existing micromechanical testing equipment.

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APPENDIX B – Statement of Work

APPENDIX B – Statement of Work

Project title SEM with EDS for micromechanical testing

Version created date

03/20/2025

Project No. Version # 1

Period of Performance

Version status

Abstract or description:

There is a need to procure an SEM for dedicated use with a separately purchased micromechanical testing system from Bruker. The SEM must have documented confirmation that the PI89 will fit and be able to be used within the chamber. The procurement must also include an EDS detector. The cost of an annual service contract should be supplied with the quotation.

APPENDIX B – SOW for <Project Title> Page 2 of 4

Contents 1 Background

2 Scope

3 Applicable Documents

4 Deliverables, Timing, Location, and Documentation

4.1 Deliverables

4.2 Timing

4.3 Location

4.4 Documentation

APPENDIX B – SOW for <Project Title> Page 3 of 4

1 Background

• Although an SEM was identified for initial installation of the micromechanical testing system (PI89 from Bruker), that system has other uses, so scheduling time to run a longer test will be a challenge. A dedicated SEM will enable the most efficient use of the micromechanical testing system. The EDS will enable characterization of the samples.

This system will be used by three identified programs, and may be of interest to additional programs.

2 Scope

The SEM must have confirmation that the PI89 will fit and be able to be used within the chamber. The procurement must also include an EDS detector. The cost of an annual service contract should be supplied with the quotation.

The system must be either NRTL listed, or undergo an electrical inspection at Argonne prior to acceptance.

Electron Column

FEG (500C-30kV), SED, Solid State BSED, In Chamber CCD

Resolution to 1nm

Stage

Front door access

4 axis motorized

50 x 50 mm travel

Tilt -50 to +70o, R: n x 350o

Ancillary Equipment

EDS

Vacuum System

Mode: Hi-Vac

Pumps: Oil free, air cooled PVP and TMP with 2 IGP

APPENDIX B – SOW for <Project Title> Page 4 of 4

3 Applicable Documents

See: https://www.bruker.com/en/products-and-solutions/test-and-measurement/nanomechanical-instruments-for-sem-tem/hysitron-pi-89-sem-picoindenter.html for details of the system that must be demonstrated to fit within the SEM.

4 Deliverables, Timing, Location, and Documentation

4.1 Deliverables

Installation of the SEM.

4.2 Timing

Delivery by August 2025, for installation of the system and the picoindenter by the end of the FY.

4.3 Location

Building 205, G117 installation

4.4 Documentation

NRTL listing or passing electrical inspection at Argonne. If electrical inspection is needed, the wiring diagrams of the system must be provided to the electrical inspector.

https://www.bruker.com/en/products-and-solutions/test-and-measurement/nanomechanical-instruments-for-sem-tem/hysitron-pi-89-sem-picoindenter.html https://www.bruker.com/en/products-and-solutions/test-and-measurement/nanomechanical-instruments-for-sem-tem/hysitron-pi-89-sem-picoindenter.html

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