SOW.pdf

APPENDIX B – Statement of Work

APPENDIX B – Statement of Work

Project title X-ray diffractometer for quantum and information processing material

Version created date

12/18/2025

Project No. Version # 1

Period of Performance

Version status

APPENDIX B – SOW for <Project Title> Page 2 of 4

Contents 1 Background

2 Scope

3 Objectives

4 Tasks

5 Deliverables, Timing, Location, and Documentation

5.1 Deliverables

5.2 Timing

5.3 Location

6 Place of Performance

7 Period of Performance

APPENDIX B – SOW for <Project Title> Page 3 of 4

1 Background

• Argonne National Laboratory needs an X-ray diffractometer capable of X-ray reflectivity, grazing incidence X-ray diffraction, and theta-two measurements; and with capability for high resolution that enables high resolution scans of epitaxial films. The diffractometer should be of high quality, and flexible: usable for both polycrystalline as well as epitaxial single crystal films. The films may be metal, oxide or semiconductor.

The instrument should also be compatible with automated sample placement and removal using a robot. The instrument should have an automatic radiation protection door opener that can be operated using a software program.

• This intrument will be used to measure a variety of thin oxide, metal and semiconductor films on silicon and other substrates for carrying out materials science studies of thin solid films. It will be configured for fully automated operation that includes robotic sample placement and removal.

2 Scope

Argonne expects to have a high throughput, fully automated (including sample placement and removal via robots) X-ray diffraction capability capable of a wide variety of diffraction techniques including GIXRD, XRR, theta two theta, high resolution scale of emit films

3 Objectives

• Configure the X-ray system with a robot and Python coded software that will lead to continuous measurements on this system without manual intervention.

• The results will be used to build predictive models for new quantum, electronic and photonic devices.

4 Tasks

The minimum set of work requirements are:

• Use of Gobel optics for high brightness

• Proven capability to do thin film x-ray reflectivity, theta two theta and grazing incidence x-ray diffraction measurements in the same sample without changing hardware

• Monochromator and eucentric cradle should be attachable for high resolution epitaxial thin film scans.

• Capability for instrument limited linewidth of at least 35 arc sec. i.e. a high quality single crystal silicon wafer should show a X-ray linewidth of at least 35-40 arc second).

• Should have a built-in automated sliding door mechanism that is appropriately safety interlocted d (controllable via software interfacing with the machine) for facile integration with automated sample insertion.

APPENDIX B – SOW for <Project Title> Page 4 of 4

• Should have a python programming interface or wrapper.

5 Deliverables, Timing, Location, and Documentation

5.1 Deliverables

Tool should be delivered within 4-5 months, latest by 6 months A.R.O.

5.2 Timing

All components noted above should be delivered with the tool.

5.3 Location

Tool will be delivered at Argonne National Lab.

6 Place of Performance

Place of performance will be Aronne National Laboratory.

7 Period of Performance

Will begin May-July timeframe 2026, will continue to till at least 2035.