4.01 RFQ Q&A Part 3.docx

RFQ N00244-26-Q-0086 Q&A Part 3 The vendor has asked:

1. “I would want to have a more technical conversation regarding the application specifics such as:

a. Flow rate of gasses,

i. No more than 200 sccm for any given process

b. Corrosive gasses involved / their amount,

i. SF6 – 140 sccm

ii. C4F8 – 140 sccm

iii. Ar – 50 sccm

iv. O2 – 100 sccm

v. CF4 – 100 sccm

vi. N2O – 100 sccm

c. Ultimate pressure callout on the RFQ, as it seemed to be atmospheric pressure, etc.”

i. We would like to be able to go down to 5 mTorr in process and 1e-6 Torr idle

2. Ultimate pressure (item 6) The spec reads "1×1000 hPa or lower", which equals standard atmospheric pressure (~1013 hPa) — any vacuum pump would meet it. This appears to be a superscript lost during file conversion. Please confirm the actual value is: (a) 1×10⁻³ hPa (=0.001 mbar, achievable with Hanbell optional coating); or (b) 1×10⁻² hPa (=0.01 mbar, standard version). Also please state whether this ultimate pressure is measured with N₂ purge or without purge — purge degrades the ultimate, so the acceptance basis must be consistent.

(b)

3. Pump speed range meaning (item 5) Please confirm whether 66–100 m³/h means: (a) rated speed must fall within the full 66–100 range (then PDM 100; iPH 100's 110 slightly exceeds); or (b) minimum speed ≥ 66 m³/h, upper limit not constrained (then iPH 100 is usable and more stable under etch-gas load).

Minimum speed of 66 m^3/h is fine.

4. Flange interface (item 7) The spec reads "inlet/outlet flange DN40 ISO-KF". At 100 m³/h class, the semiconductor screw inlet is actually ISO63 / ISO80 (ISO-F); DN40 KF is typically the outlet. Please confirm whether the inlet flange is indeed KF40, or whether ISO63/ISO80 was intended, so we can configure the correct adapter.

KF40 are the inlet flanges.

5. Explosion protection & gas safety (item 8) Special note: Among the gases in item 8, SiH₄ (silane) is a pyrophoric, flammable gas — it ignites spontaneously on contact with air, and its mixture with O₂ (oxidizer) carries an explosion risk; C₄F₈/CF₄ are fluorinated etch gases with process hazards. This item therefore needs focused clarification:

· Whether formal explosion protection is required: please confirm if you require (a) a certified explosion-protected unit (e.g., ATEX / IECEx / national standard GB 3836 certificate), or (b) a SEMI-S2 inertization design + continuous N₂ purge + downstream abatement is sufficient (research cleanrooms with small gas volumes usually meet (b)). Either must be agreed in writing in the technical agreement to define the responsibility boundary.

Even in the rare occasion silane is used, it is a 1% mixture in nitrogen so no explosion certification is necessary.

· If explosion certification is required, what is the required protection level? Please specify the following so we can select the correct model: Applicable zone (Zone 1 continuous / Zone 2 occasional explosive atmosphere); Equipment protection level & gas group (e.g., ATEX II 2G/3G, gas group IIC (conservatively covering hydrogen-class risk), or IIB/IIA per your assessment); Maximum surface temperature class (typical T4 ≤135°C, or T3 ≤200°C); Certification scheme (ATEX 2014/34/EU / IECEx / national GB 3836). Note: The semiconductor dry-pump industry norm is not a "flameproof motor" but continuous N₂ purge keeping the pump cavity O₂ below silane's ignition point + downstream burn/wash abatement — an intrinsic-safety (pressurized/purged, Ex p) approach. If you insist on a traditional explosion certificate, lead time and price will increase accordingly, and we will quote separately by level.

See above.

6. Maintenance interval basis (item 2) Under SiH₄/CF₄ heavy etch load, the practical maintenance interval may shorten below the nominal "≥6 months". Please advise the estimated annual gas throughput / duty cycle, so we can commit a realistic interval and provide written MTBF / maintenance-interval data as an acceptance attachment.

As an academic facility, we are “low” users. Our small SF6 cylinder has lasted over 10 years. We have never replaced (tool life over 15 years) our C4F8 cylinder or our CF4 cylinder. Cylinder of oxygen lasts us 5 or so years.