1.06 SoR - Draft.docx
DOCX document 46 KB Posted
- Solicitation number
- N00244-26-Q-0086
About this file
This is a Statement of Requirements (SOR) for the procurement of two new oilless vacuum pumps for the Physics Department at Naval Postgraduate School. The Naval Supply Systems Command (NAVSUP) Fleet Logistics Center San Diego is requesting quotations through Solicitation Number N00244-26-Q-0086, issued as a firm fixed-price Request for Quotation (RFQ) set aside for small business concerns under NAICS code 333912. The required delivery date is September 18, 2026.
The pumps must meet specific technical specifications including a minimum pump speed of 66-100 cubic meters per hour, ultimate pressure of 1 x 1000 hPa or lower, DN 40 ISO-KF inlet/outlet flanges, and water-cooling capability. The equipment must be oilless type, capable of processing SF6, C4F8, CF4, O2, and SiH4 gases, and operate on 230-volt 3-phase systems while supporting continuous 24/7 operation with preventative maintenance required no more than every six months. A twelve-month warranty is required. Deliveries must be made to the NPS Warehouse Monday through Friday between 0700-1130 and 1230-1600 PST, with the USG Contract Number included on all packaging materials. The requirement addresses the replacement of aging oil-based pumps that exceed their lifecycle and pose contamination risks to clean room operations supporting officer student classwork and thesis research.
View the file
Other files
| File | Type | Posted |
|---|---|---|
| 4.01 RFQ Q&A Part 3.docx | DOCX document | |
| 4.01 RFQ Q&A Part 2.docx | DOCX document | |
| 4.01 RFQ Q&A Part 1.docx | DOCX document | |
| 4.01 COMBINED SYNOPSIS RFQ (draft).docx | DOCX document | |
| Solicitation - N0024426Q0086.pdf |
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Text version
Statement of Requirements Clean Room Replacement Vacuum Pumps Physics Department Naval Postgraduate School
1.0 Background/Introduction:
The Physics Dept at Naval Postgraduate School (NPS) requires two new oilless vacuum pumps for its Clean Room operations to support officer student classwork, thesis research and reimbursable faculty research. Oil-based pumps require continuous 24/7 filtering of oil, which require adjacent filtration systems, frequent rebuilding and leak oil, impairing clean room operations. Seven of the nine oil-based vacuum pumps on hand were built in 2010 or earlier, exceed their life cycle, and are no longer cost-effective to repair and are unreliable due to risk of oil leak contamination. Oilless pumps operate longer and require a fraction of the maintenance required of oil-based pumps. Critical factor: the existing pumps are a failure risk for all master students using the Clean Room. The immediate need is two roughing pumps for our plasma systems, Oxford Instruments 100 ICP and Trion Technologies Sirus 2.
2.0 Requested Delivery Date: 9/18/2026
3.0 Minimal Technical Requirements/Salient Characteristics:
| Item No. |
| Qty |
| Unit |
| Manufacturer (If known) |
| Part Number |
(If known) Description ea
Hanbell
Dry (oilless) vacuum pump Salient Characteristics:
1. Support semiconductor processes.
2. Support continuous 24/7 operation without requiring preventative maintenance more than every six months.
3. Twelve-month warranty.
4. Must be of oilless type.
5. Minimum pump speed (Flow): 66-100 cubic meters/hr
6. Ultimate Pressure: 1 x 1000 hPa or lower
7. Inlet/outlet Flanges: DN 40 ISO-KF
8. Capable of processing SF6, C4F8, CF4, O2, SiH4
9. Water cooled
10. Operate on 230Volt 3-Phase system.
Delivery Instructions:
Deliveries shall be made to the NPS Warehouse Monday through Friday between the hours of 0700-1130 and 1230-1600 PST. Make sure to include the USG Contract Number on the package and/or packaging slip for ease of reference and processing.
Office of Contracting and Logistics Management Revised 25 April 2022
File details come from the government source that posted it. Updated .