4.01 RFQ Q&A Part 1.docx
DOCX document 18 KB Posted
- Solicitation number
- N00244-26-Q-0086
About this file
This is a Questions and Answers document for RFQ N00244-26-Q-0086 addressing technical specifications for oilless vacuum pumps. The vendor inquiry clarifies critical application parameters including gas flow rates (maximum 200 sccm per process), specific corrosive gases involved (SF6, C4F8, Ar, O2, CF4, and N2O at specified volumetric levels), and pressure requirements. The government confirms ultimate pressure capability requirements of 5 mTorr during process operation and 1×10⁻⁶ Torr during idle operation, clarifying that atmospheric pressure is not the target specification.
This Q&A document supplements the RFQ for two oilless vacuum pumps required by Naval Postgraduate School's Physics Department. The underlying solicitation is a small business set-aside firm fixed-price acquisition issued by Naval Supply Systems Command Fleet Logistics Center San Diego. The pumps must support semiconductor processes with continuous 24/7 operation, include a twelve-month warranty, meet minimum flow specifications of 66-100 cubic meters per hour, achieve ultimate pressure of 1×1000 hPa or lower, feature DN 40 ISO-KF flanges, include water cooling capability, and operate on 230 Volt 3-Phase power systems.
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Other files
| File | Type | Posted |
|---|---|---|
| 4.01 RFQ Q&A Part 3.docx | DOCX document | |
| 4.01 RFQ Q&A Part 2.docx | DOCX document | |
| 4.01 COMBINED SYNOPSIS RFQ (draft).docx | DOCX document | |
| Solicitation - N0024426Q0086.pdf | ||
| 1.06 SoR - Draft.docx | DOCX document |
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Text version
RFQ N00244-26-Q-0086 Questions &Answers The vendor has asked:
1. “I would want to have a more technical conversation regarding the application specifics such as:
a. Flow rate of gasses,
i. No more than 200 sccm for any given process
b. Corrosive gasses involved / their amount,
i. SF6 – 140 sccm
ii. C4F8 – 140 sccm
iii. Ar – 50 sccm
iv. O2 – 100 sccm
v. CF4 – 100 sccm
vi. N2O – 100 sccm
c. Ultimate pressure callout on the RFQ, as it seemed to be atmospheric pressure, etc.”
i. We would like to be able to go down to 5 mTorr in process and 1e-6 Torr idle
File details come from the government source that posted it. Updated .