4.01 RFQ Q&A Part 2.docx
DOCX document 18 KB Posted
- Solicitation number
- N00244-26-Q-0086
About this file
This file is a Questions and Answers (Q&A) document related to a Request for Quotation (RFQ) for oilless vacuum pumps.
The document addresses clarifications and inquiries submitted by potential quoters regarding solicitation N00244-26-Q-0086 issued by Naval Supply Systems Command (NAVSUP) Fleet Logistics Center San Diego. The RFQ seeks two new oilless vacuum pumps for the Physics Department at Naval Postgraduate School (NPS), with technical requirements including support for semiconductor processes, continuous 24/7 operation, minimum pump speed of 66-100 cubic meters/hour, ultimate pressure of 1 x 1000 hPa or lower, DN 40 ISO-KF inlet/outlet flanges, water cooling capability, and operation on 230 Volt 3-Phase systems. This acquisition is set aside for small business concerns under NAICS code 333912, with a small business size standard of 1,000 employees. The contract will be awarded as firm fixed price (FFP) with evaluation conducted under commercial item procedures. The Q&A portion of this document provides responses to questions submitted by prospective quoters, serving to clarify ambiguities or provide additional guidance on the technical specifications, submission requirements, or evaluation criteria. Without access to the specific questions and answers contained within the document, the precise nature of clarifications provided cannot be detailed; however, such Q&A documents typically address topics such as technical specifications, warranty requirements, delivery schedules, packaging, or administrative submission procedures.
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Other files
| File | Type | Posted |
|---|---|---|
| 4.01 RFQ Q&A Part 3.docx | DOCX document | |
| 4.01 RFQ Q&A Part 1.docx | DOCX document | |
| 4.01 COMBINED SYNOPSIS RFQ (draft).docx | DOCX document | |
| Solicitation - N0024426Q0086.pdf | ||
| 1.06 SoR - Draft.docx | DOCX document |
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Text version
RFQ N00244-26-Q-0086 Questions &Answers Part 2 The vendor has asked:
1. “I would want to have a more technical conversation regarding the application specifics such as:
a. Flow rate of gasses,
i. No more than 200 sccm for any given process
b. Corrosive gasses involved / their amount,
i. SF6 – 140 sccm
ii. C4F8 – 140 sccm
iii. Ar – 50 sccm
iv. O2 – 100 sccm
v. CF4 – 100 sccm
vi. N2O – 100 sccm
c. Ultimate pressure callout on the RFQ, as it seemed to be atmospheric pressure, etc.”
i. We would like to be able to go down to 5 mTorr in process and 1e-6 Torr idle
2. Please confirm whether products from manufacturers other than Hanbell that meet all stated salient characteristics are acceptable as an equal/equivalent product.
That is correct. Oilless vacuum pumps proposed must meet all minimum technical requirements in order to be considered for award, regardless of brand or manufacturer.
File details come from the government source that posted it. Updated .