20251029 SOW Addendum.pdf

Additional information – Rev 10-29

MOCVD system’s purpose is to grow two dimensional materials such as graphene, boron nitride, transition metal dichalcogenides. We are planning to conduct 10 runs a week with each run having approximate duration of 30 minutes. We are looking for gas system consisting of:

a. Gas cabinets - Gas cabinets shall meet the requirements as set forth by the Uniform Fire Code (NFPA1). International Fire Code and other applicable codes.

b. System extraction for exhaust products

c. Ambient (room detection) - status displays and alarms

d. Scrubber cabinet (s)The exhaust/outlet of the scrubbing unit must be monitored for hydrides. The detection of hydrides passing through the scrubbing unit due to insufficient or inappropriate behavior, failing or any other malfunction of the scrubbing unit will activate a scrubber failure alarm to generate a shutdown of the AIXTRON system)

e. Exhaust duct pre blower unit

f. Additional gas monitoring points at specific locations such as cabinets main unit, key locations in the room and at the exhaust fan unit

Note: The gas detection system must be connected to individual Slamshut (High pressure) valves fitted on all flammable and toxic cylinders; these must be fail safe shut off valves. All process gases are stopped to the AIXTRON system in the event of any single gas detection alarm.

The Hazardous and toxic gas handling system must comply with general safety requirements as stated below:

a. Interlocked with facility safety system

b. Fail safe shut off valves

c. He-leak tightness < 10-9 mbar l/sec

d. Plumbing quality complies with regulations for specified gases

1. Gas types: argon (Ar), hydrogen (H2), nitrogen (N2), hydrogen sulfide (H2S), hydrogen selenide (H2Se), methane (CH4), forming gas (for the fume hood),NH3

2. Gas flow rates

Gas type Pressure [bar] Flow [sccm] H2 30 500

CH4 30 100

H2S 30 100

H2Se 30 100

NH3 30 100

3. Further gas line requirements – 316 SS tubing, electropolished, no PTFE tape, all gas lines labeled at each connection. All gas line connections outside of the exhausted cabinet must be welded. Any non-welded connection (Swagelok, KF, DN etc.) outside of the cabinets must be accommodated in an exhausted housing with appropriate safety monitoring.

i. ¼ inch line 316 SS 120PSI ¼ in VCR Male filtered to .003u or better

ii. Filtered process N2 4.5N Purity gas 6.0 Bar@ 50slm

iii. 1/4in VCR F

iv. Glove box N2 1.5 Bar 6.0 N PURITY 1.5Bar @200 slm intermittent

v. Ebara pump Purge N2 3.8 N 2.0 Bar @0slm

vi. Pneumatic supply N2 3.8N 10.5 Bar @20sl

vii. Note: average system usage is 2 l/min 24 hr per day

b. Hydrogen (H2) - Cabinet, ¼ inch line 316 SS. 2 tanks cabinet automatic switchover.

Continuous welded pipework, with any connections, valves, regulators etc., contained within an extracted enclosure (e.g., Valve Manifold Box - VMB) cabinet Analog scale [Note: hydrogen generator is considered due to high consumption of the gas] Please provide options.

c. Argon (Ar) – ¼ inch line Analog scale cylinder bracket – Ar Single stage regulation

e. Hydrogen sulfide (H2S)/ H2Se - Cabinet continuous welded pipework, with any connections, valves, regulators etc., contained within an extracted enclosure (e.g., Valve Manifold Box - VMB) Analog scale

f. Methane (CH4) - Cabinet flammable cat 1 continuous welded pipework, with any connections, valves, regulators etc., contained within an extracted enclosure (e.g., Valve Manifold Box - VMB) Analog scale

g. Ammonia (NH3) – cabinet continuous welded pipework, with any connections, valves, regulators etc., contained within an extracted enclosure (e.g., Valve Manifold Box - VMB) Analog scale

4. Cabinet 1 requirements listed below: Gas cabinets shall meet the requirements as set forth by the Uniform Fire Code (NFPA1). International Fire Code and other applicable codes.

5. Gas leak and monitoring system

a) Control system with 70 Analog Inputs 20 Digital Inputs (gas detectors)

b) Facilities Mapping

d) Two Light Towers-Red-Yellow-Green for system 2 E-Stop Buttons – one inside and one outside the lab

e) Two light trees with horns, one inside and one outside the lab

f) Remote touch screen (display monitor) outside the lab

g) Main PLC unit with touch screen inside the lab

e) Wired interfaces to tool, gas cabinets and facility

f) Misc.- extraction tubing, duct kits, etc. full installation and connection

g) Field Service-Start-up and Commissioning Facilities Mapping in displays

Typical detectors in the system

Detector number Cabinet Concentration #1 room multiple No cabinet, H2, NH3, CH4 0-1000 ppm (appr. 5 detectors) 2 cabinet H2 0-1000 ppm 3 cabinet H2S-H2Se 0-8 ppm 4 cabinet CH4 0-1000 ppm 5 cabinet NH3 70-800 ppb 6 cabinet Exhaust unit H2

7 MOCVD 1 H2 0-1000 ppm 8 MOCVD 1 NH3 30-100 ppm 9 MOCVD 1 H2S-H2Se 70-800 ppb 10 MOCVD 2 H2 0-1000 ppm 11 MOCVD 2 NH3 0-100 ppm 12 MOCVD 2 CH4 70-80 ppm

13 Exhaust pre-fan H2 14-15 scrubber

Recommended vendors for gas detection include:

• Draeger

• Crowcon

• Riken Keiki

• Honeywell

This is not an exclusive list – other local vendors may also have suitable solutions

Alarm interface is contact closure points on the reactor and Siemens Fire Alarm system further details refer to the electrical schematics:

Function

Connection Connector Pins

EMO External EMO 110EXT1 Primary 1A,1B Secondary 2A,2B

Quake Alarm 3A, 3B Fire Alarm 4A, 4B SMC HRW030 Heat Exchanger

Temperature 505EXT1 5A, 5B

Warning – temp, flow, level 6A, 6B Shorting Link 15A, 15B Toxic Detection Toxic Alarm 1 Primary 8A, 8B

Secondary 9A2,9B5 Hydrogen Detection

H2 Alarm 1 10A, 10B

Scrubber Scrubber Failure 7A, 7B Spare Ext. Spare 1 11A, 11B Process Stop External Process Stop 12A, 12B

6. Abatement system

Clean Scrubber 37 Gallon Cannister for gas abatement Bypass Cannister System sized to require canister service no more than once a year ( see projected system usage tables )

The abatement systems is properly interlocked with the equipment’s safety system:

• In case of malfunction, the abatement system stops sending the “ready” signal.

• Failure of the air extraction of the abatement system’s stops sending the “ready” signal.

• All status and control signals have been tested for correct functionality.

• Monitoring system for hazardous materials in the abatement system’s outlet, its functionality has been tested.

• Only one piece of equipment is connected to an inlet port of the abatement system.

If the abatement system’s out let is connected to the same extraction channel as the cabinet ventilation, the distance between the point connections is larger than 2m

6a. Equipment exhaust/abatement system interconnect requirements

• The exhaust line shall be in stainless steel

• Connection between the equipment and the scrubber must be without separable connections

• If the scrubber outlet is connected to the same extraction channel as the cabinet ventilation the distance of the point of connection shall be not less than 2 m downstream of the cabinet

• Failure of air extraction from the scrubber shall cause a safety alarm similar to scrubber failure

• Scrubber equipment shall be individual for each reactor in operation

6b. Scrubber requirements

• Process Tools feeding Scrubber: Aixtron 2D CCS MOCVD Process Exhaust Cabinet Exhaust

• Can be one or two systems - Abatement System for Aixtron Process Tool (Hydride, Ammonia, and Metal Organic Gases) and for cabinet cluster with multiple canisters [1 Control Box, 3 Function Boxes] - Additional Toxic Gas Monitor

• Replacement canisters- minimum single canister hydride, ammonia, and metal organic gases

• Maximum exhaust flow rate from MOCVD pump: 66 SLPM

• All Gases Present: NH3, H2S, H2Se plus metal organics (DETe, DTBS, DiPSe, TMGa, TMAl) - All gases heavily diluted

• Gases to be scrubbed: H2S, H2Se, NH3 + metal organics above

• Process flow from cabinet cluster 180 SLPM

• Process exhaust flow from cabinet cluster 180 SLPM

• Duty Cycle: estimated volume of abated gas: assuming 75% hydride media and 25% ammonia media ~ 6,550 liters of hydride gas, 4,400 liters of ammonia gas

• Alarms notification/shut down; monitors for chemical cell operation o Canister not in place o Over pressure o Lost Nitrogen o HPM Gas Break through o HPM Gas at TLV in Exhaust o Over-temp /TC failure

Proposal to include shipping and one year warranty testing and certification

7. Installation requirements

7.1 Provide detailed site plan with locations, interconnect specifics and power requirements as well as monitoring interface

7.2 Install gas cabinets and gas panels

7.3 Install all required ultra-high purity piping

7.4 Install gas detection system (multiple detector types at specified locations)

7.5 Connect detection system monitors with NRL’s fire systems and MOBUS System

7.6 Detection system field service-start-up and commissioning

7.5 Install 1.5-inch process exhaust scrubber

7.6 Install connecting lines to the scrubber(s)

7.7 Pressure-test all gas lines

7.8 Helium- leak test all process lines to1.0 x 10-8 atm-cc/sec

7.9 Provide detailed test report

A

IX

TR

O

N C

C S

13.9 4’ L x 4.125’ W

Maint. Area 4.125’ W x

36” L

D oo r C le arance

3.94 ’ L x 8.9

3’ W

C a b i n e t s 2 2 x 3 6

C a b i n e t s 2 2 x 3 6

Cabinets 226

226”

50.5” 77.5”

124”

350”

55.5”

28” 59.25”HVAC

71”

River

Window Window

¼” = 1’

W ater

C o n tro l

.2

’ W x

.4

’ L

Transform er 2.52’ W x 2.62’ L

Nitrogen generator

G a s ca b in ets Gas

Cabi nets

Room 230 overhead view

Chiller on roof

150”

84”

69”

Scrubber

HVAC

84”

Rev 10.21.25

Breaker panels Note: all dimensions are in inches. 1

MOCVD system for two-dimensional material growth

MOCVD system overhead view

MOCVD system side view

MOCVD gas requirements

Scrubber piping requirements