Gas Cabinet Specifications REVISED AND EXPANDED.pdf

Gas Cabinet requirements

Specification for Gas system

1. Nitrogen ¼ inch line 316 SS 120PSI ¼ in VCR Male filtered to .003u or better

a. Filtered process N2 4.5N Purity gas 6.0 Bar@ 50slm

1/4in VCR F

b. glove box N2 1.5 Bar 6.0 N PURITY 1.5Bar @200 slm intermittent

c. Ebara pump Purge N2 3.8 N 2.0 Bar @0slm

d. Pneumatic supply N2 3.8N 10.5 Bar @20sl average system usage is 2 l/min 24 hr per day

2. H2 Cabinet ¼ inch line 316 SS. N gtr than 8 90 PSIG with over pressure and blow off filtered to

.0003um

3. AR tank ¼ line

4. H2Se Continuous welded pipework, with any connections, valves, regulators etc., contained within an extracted enclosure (e.g., Valve Manifold Box - VMB) cabinet

5. H2S Continuous welded pipework, with any connections, valves, regulators etc., contained within an extracted enclosure (e.g., Valve Manifold Box - VMB) Cabinet

5.CH3 Cabinet flammable cat 1

6. NH3 cabinet

Notes need further details for additional gases nt listed here

Gas system specs

1. 316 SS tubing welded

2. Electro polished

3. All lines test He leak rate of less than 10-9 mbar l/s

4. Flame arrestors on all outlets and vents flammable gases

5. Gas Cabinets for all non-inert gases with individual extraction

6. NH3 ,AsH3, PH3 and H2 require separate gas cabinet enclosure or outside location any connections valves regulators must be contained in extracted cabinet.

7.

8. No PTFE tape

9. All gas lines labeled at each connection and every 3 feet of run PH3 ,ASH3 need dual containment lines with monitor and alarm on outside jacket vacuum pressure

10. Overpressure protection for gas lines will be done accordance with local regulations

11. All connections of H2 or Hydrides must be extracted

12. Provide inline purifiers for all reactant and carrier gases

13. Fail safety shut off valves

14. Interlocked to facility alarm systems and safety system

15. System must be leak test by certify body and written records provide to user

16. Toxic gas and flammable gases shall be monitored in room gas cabinets and exhaust and have shutdown feature for any detected gas outside of the system and a manual shut off feature at the point of egress to the room.

Cabinets

1 types

a. Fully Automatic Gas Cabinet for NH3 and purge N2

b. 3 Cylinder Fully Automatic Gas Cabinet for H2S, H2Se and purge N2

c. 3 Cylinder Semi Automatic Gas Cabinet for H2, CH4 and purge N2

d. Three Valve Wall Mount Panel- Ar 0-3000 psig inlet 0-100 psig outlet Ultra High Purity

Single stage regulation with Cylinder Bracket

e. Three Valve Wall Mount Panel- N2 0-3000 psig inlet 0-100 psig outlet Ultra High Purity

Single stage regulation with Cylinder Bracket

f. 5 valve panels w/fully automated purge procedures for cylinder automation

Automatic shutdown- Excess flow sensor, excess pressure, exhaust duct flow sensor remote inputs Analog scale for NH3 Ultra-high purity system design with all electropolished components Helium Leak Detection to 1.0 x 10-9 Atm-cc/sec Cabinet air extraction

•All ducting flanges are connected to suitable fans and ducts are monitored for the relief of toxic gases. See monitoring system

• Cabinet air extraction flow is at least 20% above the alarm threshold for all extracted cabinets.

• Each branch includes a damper - individual baffles are required for each extraction branch to balance extract flow.

• Extraction connections are mechanically clamped onto the system. Unsecured ducts or taped seals are not acceptable

Automatic Purge Process Monitors System Conditions Visual and Audible Warning Alarms

Automatic System Shutdown in the Event of a Sensor Trip Emergency Off Button Rigid Pigtails with CGA Cylinder Connections Pneumatically Actuated Valves and switches

• Ethernet interconnect for controls

Installation requirements

a) Install Gas Cabinets and Gas Panels Install all required Ultra-High Purity Piping

b) Install Gas Detection System

c) Install 1.5 inch Process Exhaust line scrubber

d) Install Vent Lines to scrubbers

e) Pressure Test all gas lines provide detailed test report

g) Helium leak test all process lines to1.0 x 10-8 atm-cc/sec

Gas leak and monitoring system

a) Control system System with 80 Analog Inputs 16 Digital Inputs

b) Facilities Mapping- 1 Drawing webserver- email/test

c) Second Display Monitor

d) Two Light Towers-Red-Yellow-Green for system 2 E-Stop Buttons

e) 18 Gas Detectors

f) Misc.- extraction tubing, duct kits, etc.

full installation and connection

k) Field Service-Start-up and Commissioning

Abatement system Clean Scrubber 37 Gallon Cannister for gas abatement Bypass Cannister System sized to require canister service no more than once a year ( see projected system usage tables ) The abatement systems is properly interlocked with the equipment’s safety system:

• In case of malfunction, the abatement system stops sending the “ready” signal.

• Failure of the air extraction of the abatement system’s stops sending the “ready” signal.

• All status and control signals have been tested for correct functionality.

• monitoring system for hazardous materials in the abatement system’s outlet, its functionality has been tested.

• Only one piece of equipment is connected to an inlet port of the abatement system.

If the abatement system’s out let is connected to the same extraction channel as the cabinet ventilation, the distance between the point connections is larger than 2m

Proposal to include shipping and one year warranty

Facility details

Background and Purpose

The AIXTRON 3x2 CCS MOCVD (Metal-Organic Chemical Vapor Deposition) reactor is a high-precision tool for epitaxial growth used in semiconductor and optoelectronic device fabrication. Due to its stringent requirements for utilities, environmental control, and safety infrastructure, there is a requirement for a complex Gas delivery system to support the facility

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