Attachment 1 - Gas System Specifications.pdf
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- Gas System
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- N00173-25-Q-GF35
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This document is a detailed technical specification for a Naval Research Laboratory MOCVD (Metalorganic Chemical Vapor Deposition) Laboratory in Room B3, Room 230, dated 6/29/2025. The specification outlines five key technical system requirements: 1) Gas Cabinets with three separate automatic gas cabinet configurations for different gases (NH3, H2S, H2) with nitrogen purge capabilities, 2) Gas Panels for Argon and Nitrogen with UHP (Ultra-High Purity) three-valve configurations, 3) A comprehensive Hazardous Gas Detection System featuring 16 gas detectors, a central PLC system with touchscreen, two light trees, remote displays, and wired interfaces, 4) Ultra-high Purity Piping using 316L electro-polished interconnects, and 5) Analytical testing including 4-hour pressure tests, helium leak testing to 1.0 x 10-8 atm-cc/sec, and optional purity testing for particles, moisture, and oxygen trace levels. The specification provides detailed technical requirements for each system component, focusing on precision, safety, and ultra-high purity standards typical of advanced scientific research laboratory environments.
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Text version
6/29/2025 Rev 1
1 Gas Cabinets GAS FLOW GAS FLOW
a. Two cylinder automatic gas cabinet NH3 Nitrogen Purge
b. Three cylinder automatic gas cabinet H2S H2Se Nitrogen Purge
c. Three cylinder automatic gas cabinet H2 CH4 Nitrogen Purge
2 Gas Panels
a. Argon UHP Three valve gas panel Argon
b. Nitrogen UHP three valve gas panel Nitrogen
3 Hazardous Gas Detection System
a. Fully Installed and validated system
b. 16 gas detectors
c. Central PLC system with touchscreen
d. Two light trees-one in room-one outside e Remote display outside room
f. Wired interfaces to tool, gas cabinets and facility
g. Low voltage signal and power wiring
Connect to facility as required Supply power by others
4 Ultra-high Purity Piping
a. All interconnect 316 L Electro-polished
b. Piping as defined on attached quotation
5 Analytical testing
a. All systems pressure tested-4 hours
b. All systems helium leak tested to
1.0 x 10-8 atm-cc/sec
c. Purity testing including particles, Moisture and Oxygen trace testing optional
Naval Research Laboratory- B3 Room 230 MOCVD Laboratory
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