Exhibit G.2 - AWN_Chemcial_Delivery_Requirements_Exported.pdf

Code Section

Research Equipment Requirements, Table of Contents AWN Chem. Dist.

1. Electrical 1

1.a Components* 1 Yes

1.b Incoming Supply* 1 Yes

1.c Earthing and Bonding (Grounding)* 2 Yes

1.d Protection from Hazardous Voltage* 3 Yes

1.e Over Current and Overload Protection* 4 Yes

1.f Electrical Enclosures* 4 Yes

1.g Wiring Practices* 5 Yes

1.h Electrical Tests* 6 Yes

1.i Electrical Labeling* 7 Yes

2. Shutdown, Interlocks, Alarms and Alerts 8

2.a Emergency Off* 8 Yes

2.b Interlocks & Alarms* 9 Yes

2.c Lockout Tagout* 10 Yes

3. Chemistry and Special Materials 11

3.a Chemical 11 No

4. Mechanical 13

4.a Ventilation 13 No

4.b Guarding 14 No

5. Pressure 15

5.a Compressed Gases 15 No

6. Fire Protection 17

6.a Fire Protection* 17 Yes

* = This section is required for all new equipment.

Code Section

Research Equipment Requirements, Table of Contents AWN Chem. Dist.

7. Thermal Management 19

7.d Fixed electric heating for process piping and vessels 19 No

9. Controls, User Interfaces, and Data Management 20

9.a Control Systems 20 No

9.b User Interfaces 21 No

9.c Data Collection (logging only)* 21 Yes

10. Documentation: Manuals, Drawings, and Labeling 23

10.a Manuals and Documentation* 23 Yes

10.b Hazard Warning Labels* 25 Yes

11. Miscellaneous 26

11.a Human Factors* 26 Yes

11.b Noise* 26 Yes

11.c Design for Maintenance* 27 Yes

* = This section is required for all new equipment.

NREL Equipment Requirements: AWN Chem. Dist.

1 ... Electrical

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.a Components

Electrical components and devices that are used in the following applications:

· A Hazardous Electrical Circuit

· A Safety Interlock Circuit

· An Emergency Machine Off (EMO) Circuit

Shall have been evaluated by a third party and carry a third party test mark (listed or recognized) indicating that they have been evaluated to the applicable component standard.

Exception: Specialty components that are needed for particular applications and are not readily available in a listed or recognized form can be accepted if they have undergone some limited additional evaluation consistent with the requirements of this document. (These include specialty controllers, generators, power supplies, transformers, and other devices not readily available in listed form.)

1.a.01

Components shall be used within their:

· Voltage rating

· Current rating

· Any other manufacturer conditions that restrict their use

(This includes wires, fuses, switches, etc.)

1.a.02

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.b Incoming Supply

Equipment shall receive incoming electrical power onto a single main disconnecting means. This main disconnecting means shall remove all electrical power supplied to the equipment when opened.

Exception 1: Multiple facility feeds can be accepted if:

· They are needed for the application

· All disconnecting means must have an adjacent label: “WARNING: Multiple Feed Locations. Disconnect all [number and location of feeds] sources of supply prior to servicing.”

Exception 2: This does not apply to cord and plug equipment if the plug can effectively be used as the main disconnecting means

1.b.01

The main disconnecting means shall be readily accessible.

Application Note: This requires it to be accessible without opening a panel and at a height of no more than 2m.

1.b.02

The main disconnecting means shall be lockable only in the de-energized position.1.b.03

NREL Equipment Requirements: AWN Chem. Dist., Page 1, Created: 7/19/2021

The isolation device from the supply has an "Off" (isolated) and "On" position only, clearly marked with "O" and "I".

1.b.04

Supply interruption will not cause a hazardous condition.1.b.05

The input terminals of the main disconnecting means shall be protected to prevent accidental contact by service personnel or by a tool that may be dropped from above.

1.b.06

The main disconnecting means (lock-out) handle shall not disengage from the main disconnecting means when the enclosure door is opened.

1.b.07

Wire bending space for connection to main disconnecting means shall be adequate.

Application Note: See wire tables in SEMI S22 or IEC 60204-33 for wire bending space as it relates to wire gage.

1.b.08

Incoming supply termination has a point warning (line voltage warning) to inform service personnel of the hazardous potentials present after the supply circuit disconnecting means is placed in the "Off" position. The sign is placed inside the enclosure adjacent to the terminals.

1.b.09

The main equipment overcurrent protection shall be rated adequately to protect components in the equipment that do not have other means of protection.

1.b.10

The equipment shall be provided with main overcurrent protection and shall have the following AIC rating.

· Equipment rated less than 240VAC - 10,000 AIC (rms)

· Equipment rated 240VAC or more - 14,000 AIC (rms)

1.b.11

Un-interruptible Power Supplies (UPS) requirements apply to UPSs with outputs greater than 30 Volts rms,

42.4 Volts peak, 50 Volts DC or 208 VAC.

a) UPS output cuts off when the EMO is pushed.

b) The UPS wiring and terminals shall be identified as “UPS Supply Output”.

c) UPS output shall have means of lockout/tagout.

Exception: When the UPS is supplying only safety circuits.

1.b.12

The incoming power module shall be equipped with a VeriSafe Absence of Voltage Tester device.

https://www.panduit.com/en/products/safety-security/active-safety-devices.html

1.b.13

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.c Earthing and Bonding (Grounding)

The main protective earthing connection in the equipment shall be dedicated.

Application Note: This means incoming ground connection needs to be made on a ground stub on the electrical enclosure or a copper ground bus on the electrical enclosure and not on a terminal block. It also means that the incoming ground connection shall not be on the same stub with downstream ground connections.

Mounting hardware shall not be used for terminating, grounding, or bonding.

1.c.01

NREL Equipment Requirements: AWN Chem. Dist., Page 2, Created: 7/19/2021

The protective earthing conductor shall not be used as current carrying conductor.

Application Note: This prohibits its use as a return circuit to facilities, although it is acknowledged that this circuit will have some measurable current on it.

1.c.02

The earthing (grounding) conductor is copper.1.c.03

Earthing (grounding) conductors and connectors are sized to be compatible in current rating to their associated unearthed conductors.

Application Note: Reference SEMI S22, IEC 60204-33, or EN 60204-33 wire tables

1.c.04

At each incoming supply point, the terminal for the external protective conductor is identified with an earthing symbol.

1.c.05

Earthing wires must be green, green/yellow, or bare with identification.1.c.06

Bonding of Electrically Conductive Materials and Other Equipment (e.g., metal enclosures, conductive doors with equipment mounted on it, etc.): Normally non–current-carrying electrically conductive materials that are likely to become energized shall be connected together and to the electrical supply source in a manner that establishes an effective ground-fault current path.

1.c.07

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.d Protection from Hazardous Voltage

No hazardous voltages shall be accessible without using a tool to open an enclosure or overriding an interlock.1.d.01

Protection shall be provided from all hazardous voltage by one of the following means:

· It shall be contained within a grounded electrical enclosure or

· It shall be within a double insulated electrical enclosure or cable or

· If single insulated it shall have additional protection of a 5mA GFCI protective device

1.d.02

In maintenance or service areas, personnel shall be protected from incidental contact with hazardous voltage.

Application Note: Additional protection can be provided with touch safe terminals or barriers with probe holes.

Protection in these areas does NOT have to pass the “Jointed Finger Probe Test”, only the simpler requirement of avoiding incidental contact. Areas that can only be accessed by using a tool to open an enclosure or by overriding an interlock are considered maintenance and service areas.

1.d.03

All accessible dead metal surfaces shall be bonded to the main system ground and this bonding circuit shall have no more than 0.1 Ohm impedance. Application Note: The 0.1 Ohm test procedure can be found in IEC 60204-33 and SEMI S22

1.d.04

NREL Equipment Requirements: AWN Chem. Dist., Page 3, Created: 7/19/2021

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.e Over Current and Overload Protection

Conductors shall be protected at their ampacity by over current protective devices listed for the application.

Application Note: See wire tables in SEMI S22 and IEC 60204-33 for ampacity of wire gages. Wire ampacity is a function of the diameter of the wire, material of the wire, and the temperature rating of its insulation. It shall also be observed that if the wire termination has a lower temperature rating than the conductor, the lower temperature rating shall be used to evaluate the ampacity of the conductor.

1.e.01

Connectors and receptacles shall be protected at no more than their voltage, current, and temperature ratings.1.e.02

Components and other electrical devices shall have overcurrent protection at no more than 125% of their rating. Components that have no electrical rating shall be protected at no more than 125% of their maximum normal load.

Application Note: It is acceptable to go up to the next standard sized overcurrent device.

1.e.03

Transformers shall have overcurrent protection in accordance with the following requirements.

Primary protected at 125% of Rating or Primary protected at 250% of rating and the secondary protected at 125% of rating or For Transformers with less than 2A input rating protection of 300% of primary rating.

1.e.04

Motors rated over 240VA shall be provided with overload protection based on the name plate rating of the motor.

Application Note: Worst case is locked rotor. Overload protection shall open up before the motor overheats causing a fire or breakdown of insulation.

1.e.05

Heating elements that can overheat due to temperature control failure, where that overheating could result in a fire or breakdown of insulation protecting a hazardous voltage circuit, shall be protected with an over-temperature circuit that meets the requirements of a safety interlock. Ground-fault protection of equipment shall be provided for electric heat tracing and heating panels.

Application Note: This is usually done with a second thermocouple that monitors solely for thermal runaway and terminates power to the heating elements using an isolated (watchdog) control circuit. Some heater controllers are built with both circuits. The requirement can also be met using a snap-disc-switch (thermal-switch) if the application does not require manual reset.

1.e.06

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.f Electrical Enclosures

Electrical enclosures shall be constructed of the appropriate materials and rating for the environment.1.f.01

NREL Equipment Requirements: AWN Chem. Dist., Page 4, Created: 7/19/2021

Electrical enclosures shall be constructed so as to prevent the operators from being exposed to any electrical hazards.

Application Notes: Electrical enclosures shall have a complete bottom enclosure, all covers are installed, no exposed energized conductors, all knockouts are closed, no sharp edges or pinch points.

1.f.02

Electrical enclosures shall prevent the ingress of substances that may cause electrical faults within the electrical enclosure.

Application Note: The concern is that fluid may leak onto live electrical cause a risk of shock or risk of fire.

Where this is possible, a means of ensuring such fitting leaks will not result in fluid contacting live electrical should be provided a simple barrier between the potential leaks and electrical which will route fluids away from electrical is a basic means of addressing this issue.

1.f.03

Where liquid fittings could spray or leak, suitable barriers shall be provided to ensure that fluids under these fault conditions will not contact live parts.

1.f.04

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.g Wiring Practices

Plug-in devices located in the same area that handles hazardous and non hazardous voltage shall be provided with non-interchangeable interconnects.

1.g.01

All printed circuit boards shall have a flammability rating of V-1 or better (for low fire spread)1.g.02

Strength of insulation on individual conductors shall be sufficient to withstand damage during normal operation.

Application Note: This requirement may be satisfied by securely routing wiring away from areas where it may be subjected to abuse, without changing its insulation.

1.g.03

All connections shall be securely made to protect against accidental loosening

Application Note: Multiple terminations shall only be made when the terminal block is designed for that purpose. It also requires that all soldered connections are mechanically secured before soldering.

1.g.04

Wires shall not cross over terminals.

Application Note: The concern is wires running over and contacting terminals or being routed so closely they could touch the terminals. If this is a problem a simple solution is wire guides that will securely route wires away from terminals and where they could be harmed.

1.g.05

All conductors shall be continuous without splices.1.g.06

Where circuits operate at different voltages, the conductors of each voltage level shall be separated by suitable barriers, or routed separately and secured, or all conductors grouped or bundled together shall be insulated for the highest voltage present in the group or bundle.

1.g.07

Conductors shall not be exposed to temperatures greater than for which they are rated.1.g.09

NREL Equipment Requirements: AWN Chem. Dist., Page 5, Created: 7/19/2021

Only female cord connectors shall be used to supply power.1.g.10

Conductors that are supplied with hazardous voltage should be black and identified with labels or numbered matching the schematics. The grounded current carrying AC return conductor (neutral) shall be white or gray.

The equipment grounding (earthing) conductor shall be green, green with one or more yellow stripes, or bare copper.

Exception: Equipment that consistently follows the color coding of IEC standards will be an acceptable alternative.

1.g.11

Wires shall be routed away from sharp edges or other factors that may degrade their insulation.1.g.12

The total cross sectional area of conductors permitted in raceways and ducts shall not exceed 50 percent of the interior cross sectional area of the raceway or duct.

1.g.13

Conductors that run exterior to an enclosure must be double insulated, run in conduit, or suitable cable trays1.g.14

Conductors are not be connected in parallel to attain required amperage capacity.1.g.15

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.h Electrical Tests

Cables which exit an electrical enclosure are adequately provided with strain relief to ensure a mechanical pull cannot dislodge the cable’s termination points. Compliance is verified by conducting a 1 minute - 16 kg (35 pound) pull test. This test is passed when there is no evidence of pulling away of the cable terminations.

1.h.01

Cord connected equipment surface leakage does not exceed 3.5 mA

Application Note: See IEC 60204-33 18.3 (Touch Current Test) or SEMI S22 22.2 (Leakage Current Test) for detailed test procedures. This basically sets up voltage to the tool, disconnecting the ground, and looking for a ground fault.

1.h.02

Equipment shall pass a dielectric test where 1500 Volts AC or 2121 Volts DC is applied between the input conductors that are normally energized and dead metal parts on the system.

Application Note: See SEMI S22 22.6 or IEC 60204-33 18.4 for detailed test procedures. This test verifies proper electrical isolation between the grounded enclosure and the hazardous voltage.

1.h.03

Components shall be operated within their temperature limits.

Application Note: See SEMI S22 22.13 or IEC 60204-33 18.9 for detailed test procedures.

1.h.04

The equipment shall pass a ground impedance test which demonstrates that its ground paths have an impedance of no more the 0.1 ohms. This is either done with a low range ohmmeter or a low voltage current source capable of 10 Amps.

Application Note: See SEMI S22 22.3 or IEC 60204-33 18.2 for detailed test procedures.

1.h.05

NREL Equipment Requirements: AWN Chem. Dist., Page 6, Created: 7/19/2021

Applicability: The requirements of this section only apply to the electrical system of equipment that operates at hazardous voltage or hazardous electrical power as defined by the following:

· Hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 50 Volts DC.

· Hazardous electrical power — power levels equal to or greater than 208 VAC.

1.i Electrical Labeling

Receptacles are rated and labeled for the applied voltage and current.1.i.01

Controls shall be marked with functional identification (e.g., start, run, stop or off, emergency stop).1.i.02

Equipment shall have a clearly visible manufacturer name plate located next to the primary disconnect and must include the following information:

Manufacturer name Model number Serial number Voltage, Current, and Frequency.

Application Note: This can be very useful if there is a problem with the equipment or the equipment is moved.

1.i.03

NREL Equipment Requirements: AWN Chem. Dist., Page 7, Created: 7/19/2021

2 ... Shutdown, Interlocks, Alarms and Alerts

Applicability: The requirements of this section apply to equipment with any hazard requiring a safe shutdown condition, such as hazardous voltage, power, pressure, chemistry, radiation, mechanical energy, etc.

2.a Emergency Off

Equipment that has multiple hazards must have an integrated emergency machine off (EMO) circuit which when activated, will place the research equipment into a safe shutdown condition, without generating any additional hazards. A reference paper for guidance on EMO implementation for Research Equipment is available upon request.

2.a.01

Activation of the emergency off circuit shall de-energize all hazardous voltage and all power greater than 240 VA in the electrical equipment, except for voltage and power needed for the EMO circuit function and for reset following an EMO shutdown where that power is contained within the main electrical enclosure. EXCEPTION:

safety related devices (such as fire suppression systems) and computer systems performing data logging need not be de-energized by the EMO circuit. All components that remain energized at hazardous voltage or power following EMO activation shall be clearly labeled and identified in the user documentation, and protected against inadvertent contact.

2.a.02

The EMO circuit shall consist of electromechanical components or solid state components that have been evaluated for safety function. (Note: Clearly identify normally open valves that are used to ensure a requisite flow.)

2.a.03

The EMO circuit shall shut down the equipment by de-energizing rather than energizing control components.

Design note: When the de-energized state leaves some sources in an operational state (e.g., a normally open valve on a gas), those conditions shall be clearly documented.

2.a.04

Resetting the EMO button shall not re-energize circuits, equipment, or subassemblies. The EMO circuit shall require manual resetting so that power cannot be restored automatically.

2.a.05

The emergency off button shall be red and mushroom shaped. A yellow background for the EMO shall be provided. A reference paper for guidance on EMO implementation for Research Equipment is available upon request.

2.a.06

All emergency off buttons shall be clearly labeled as “EMO,” “Emergency Off,” or the equivalent and include the name of the system(s) the button de-energizes.

2.a.07

Emergency off buttons shall be readily accessible from operating and regularly scheduled maintenance locations. The maximum height on the side of the equipment shall be no more than 1372 mm (54 inches) and the minimum height shall be no less than 914 mm (36 inches).

2.a.08

EMO circuit shall be designed using non-hazardous voltage and power levels, consistent with the correct operation of the circuit.

2.a.09

The EMO shall be appropriately sized to enable activation by the heel of the palm.2.a.10

EMO circuit does not include features allowing it to be defeated or bypassed.2.a.11

NREL Equipment Requirements: AWN Chem. Dist., Page 8, Created: 7/19/2021

Relevant Codes Applicable to this Section: ANSI/ISA–18.2–2009

Applicability: When a single failure can result in an unacceptable level of risk, a dedicated safety interlock circuit—or other suitable means—shall be provided to protect against the consequences of that failure. See Section 2.d for details on safety rated controllers for high-hazard equipment.

2.b Interlocks & Alarms

The dedicated safety interlock circuit must operate independently of the process control/computer.2.b.01

Safety interlocks shall require manual reset after they are tripped.2.b.02

Safety interlock circuits shall be designed such that, upon activation, the relevant parts of the research equipment are automatically brought to a safe condition.

2.b.03

Safety-critical alarms are in place to protect workers from harm and are configured with both warning and shutdown alarms.

2.b.04

Safety interlock circuits shall eliminate hazardous situations by de-energizing circuit components rather than energizing them. Application Note: This means shunt trips are not acceptable for use in interlock circuits.

2.b.05

Safety interlock circuits shall consist of electromechanical components or solid-state devices that have been evaluated for suitability in a safety circuit.

2.b.06

Intentional operation shall be required to override interlocks.2.b.07

Upon exiting or completing the maintenance mode, all safety interlocks shall be automatically restored.2.b.08

Enclosures that protect personnel from hazards shall either be interlocked to shut down the hazards behind them when they are opened; or they shall require a tool to gain access and be labeled regarding the hazard against which it protects personnel.

2.b.09

Safety interlocks that safeguard personnel during operator tasks should not be defeatable without the use of a tool.

2.b.10

If presence sensing devices are used as part of the interlocking strategy they shall be in compliance with ANIS B11 (Europe Manufactures can reference EN 999)

2.b.11

Safety interlock circuits shall be designed using non-hazardous voltage and power levels, consistent with the correct operation of the circuit.

2.b.12

Process shutdowns are annunciated graphically on the appropriate window(s) for each unit operation affected, as well as on a separate status window which summarizes all shutdowns.

2.b.13

Upon activation, the safety interlocks shall provide operator notification (on GUI, light panel, etc.).2.b.14

Operator shall receive only those alarms that are meaningful and actionable.2.b.15

NREL Equipment Requirements: AWN Chem. Dist., Page 9, Created: 7/19/2021

Applicability: This section applies to equipment hard-wired to power or equipment requiring complex lockout tagout procedures (that involving more than one craft, more than one energy source and/or more than one disconnecting means). See chapter 1 for additional electrical requirements.

2.c Lockout Tagout

The equipment shall have a main electrical disconnect which shall be lockable in the off position.2.c.01

Lock-out/tag-out devices (e.g., manual valves) shall be in accessible locations and the equipment supplier shall identify these locations with signage and in the documentation.

2.c.02

All non-electrical facilities connections that provide hazardous or potentially hazardous energies and substances shall be provided with lockout/ tagout means that are lockable in the off position.

2.c.03

The equipment shall be provided with means to remove any potentially hazardous stored energy prior to lockout/ tagout.

2.c.04

The manuals shall document the lockout/tagout procedures including the procedure for removing the hazardous conditions prior to lockout/tagout implementation.

2.c.05

NREL Equipment Requirements: AWN Chem. Dist., Page 10, Created: 7/19/2021

3 ... Chemistry and Special Materials

Applicability: This section applies to equipment controlling solid, liquid, or gaseous chemistries with a 3 or 4 on the NFPA fire diamond.

3.a Chemical

Suppliers of processing and deposition equipment must generate a chemical inventory identifying the chemicals anticipated to be used or generated in the equipment. At a minimum, this shall include chemicals in the recipe used for equipment qualification or “baseline” recipe, as well as intended reaction products, anticipated by-products and chemicals used for maintenance. Chemicals on this list that can be classified as hazardous production materials (HPMs), or odorous (odor threshold < 1 ppm) or irritant chemicals (according to their safety data sheets), must also be identified. All custom or proprietary chemicals shall be identified and SDSs sheets shall be provided. The identified chemicals must all be approved for use per site EHS.

Application Note: Equipment must not use substances that are recognized by the International Agency for Research on Cancer (IARC) and the National Toxicology Program (NTP) or seek NREL approval for their use.

Chemicals identified for use and regulated as Green House Gases (GHGs) must also be identified and reviewed by EHS prior to acceptance.

3.a.01

If the contract is acquiring recipes as part of the purchase, the vendor shall identify real preliminary recipe data, what chemicals, flow ranges, etc. with baseline recipes. If it is custom equipment with no prior recipe development, the researcher will identify anticipated recipe data, what chemicals, flow ranges, etc.

3.a.02

A Single fault shall not permit the mixing of incompatible chemistries.

Application Note: NREL performs Process Hazard Analysis (PHA) as part of the initial design phase review.

3.a.03

Equipment hardware design shall prohibit conditions that would permit the equipment to exceed its pressure or chemical containment limitations, and ensure material compatibility under normal operating and fault conditions.

3.a.04

All measurements taken to demonstrate compliance to 3.a.06, 3.a.07, 3.a.08, and 3.a.10 below shall be done using recognized methods with documented sensitivities and accuracy. A report documenting the survey methods, equipment operating parameters, instrumentation used, calibration data, results, and discussion must be provided.

3.a.05

There shall be no chemical emissions to the workplace environment during normal equipment operation.

Conformance to this section can be shown by demonstrating ambient air concentrations to be less than 1% of the Occupational Exposure Limit (OEL).

Application Note: The sample location(s) need to be representative of the worst-case, realistic exposure locations(s). It is recommended that the representative measured exposure concentration be directly compared to the OEL to demonstrate conformance to Sections 23.5.1–23.5.3. Where a recognized method does not provide sufficient sensitivity to measure 1% OEL, then the lower detection limit of the method may be used to satisfy this criterion. An example of a referenced source for OELs is the American Conference of Governmental Industrial Hygienists (ACGIH) Threshold Limit Values (TLVs).

3.a.06

Chemical exposure to personnel during maintenance activities shall be minimized. Vendors are required to provide their plan complying with this requirement. For example, conformance to this section can be shown by demonstrating the worst case personnel exposure to be less than 25% of the OEL.

3.a.07

Chemical exposure to personnel during equipment failures shall be minimized. Vendors are required to provide their plan complying with this requirement. For example, conformance to this section can be shown by demonstrating the worst case personnel exposure to be less than 25% of the OEL.

3.a.08

NREL Equipment Requirements: AWN Chem. Dist., Page 11, Created: 7/19/2021

For equipment going into H5(6) facilities, all non-welded fittings on hazardous materials must be under local exhaust ventilation. Testing shall demonstrate compliance with 3.a.08 and 3.a.10. The exhaust shall be interlocked to disconnect the flow of hazardous chemistry if local exhaust ventilation decreases below a level that can satisfy 3.a.08 and 3.a.10.

EXCEPTION: Lines containing HPMs that operate under vacuum. However, those lines must be interlocked to failsafe if that vacuum is lost or they shall be enclosed within an exhausted enclosure.

3.a.09

Chemical emissions outside the enclosure during a realistic worst-case system failure shall be less than the lower of the following two values: 25% of the lower explosive limit (LEL), or 25% of the OEL.

Application Note: International Fire Code and National Electrical Code requirements define flammable environment as >25% the lower flammability level (LFL).

3.a.10

Equipment that uses hazardous production materials (HPMs) may require continuous detection and, if so, shall have:

- Recommended sampling points identified in the equipment installation and safety manuals.

- Where the HPM supply is part of or controlled by the equipment, the equipment shall be able to accept a signal from an external monitoring device and shut down the supply of the HPM.

- Continuous gas detection in the workspace around the equipment will be provided by NREL and should be reviewed with the vendor to determine specific criteria.

3.a.11

Appropriate hazard warning labels shall be placed at all chemical enclosure access openings.3.a.12

Check valves should be used to prevent back flow of hazardous chemistry into facilities supply lines.3.a.13

If the process has hazardous materials and the equipment is providing point of use abatement of process chemistry, it must be designed to remove 150% of the highest process flow. The abatement system must be approved by NREL prior acquisition.

3.a.14

NREL Equipment Requirements: AWN Chem. Dist., Page 12, Created: 7/19/2021

4 ... Mechanical

Applicability: This section applies to equipment that utilizes ventilation as an engineering control to prevent potentially hazardous chemical exposures to employees or preventing a combustible environment within the equipment.

4.a Ventilation

Equipment exhaust ventilation utilized as an engineering control shall be designed to prevent potentially hazardous chemical exposures to employees as follows:

· As primary control when normal operations present potentially hazardous chemical exposures to employees.

See also chemical exposure requirements in section 3.a.

· As supplemental control when intermittent activities present potentially hazardous chemical exposures to employees which cannot reasonably be controlled by other means.

· As secondary control when a single-point failure presents the potential for employee exposures to hazardous materials, and this exposure cannot be controlled by other means (e.g., use of all welded fittings).

Application Note: Secondary exhaust control enclosures for non-welded connections (e.g., valve manifold boxes that enclose piping jungles) are not included in this guideline for those hazardous gases that are transported below atmospheric pressure (e.g., via vacuum piping systems) if it can be demonstrated that equivalent leak protection is provided. Equivalent protection may include such things as equipping the vacuum delivery system with a fail-safe (e.g., to close) valve automatically activated by a loss of vacuum pressure. Loss of vacuum pressure shall also activate a visual and audible alarm provided in range of the operator.

4.a.01

Equipment exhaust ventilation shall be designed and a ventilation assessment conducted to control, efficiently and safely, for potential worst-case, realistic employee exposures to chemicals during normal operation, maintenance, or failure of other equipment components (hardware or software). All design criteria and test protocols shall be based on recognized methods. Additional guidance can be provided by NREL upon request.

Application Note: See also Section 3 requirements for meeting OEL levels during normal operation, maintenance and fault conditions.

4.a.02

Documentation needs to be developed showing the equipment exhaust parameters and relevant test methods, and must at a minimum include:

· volumetric flow rate Q;

· duct static pressure;

· enclosure static pressure SPh;

· duct diameter at the point of connection to facilities;

· location(s) on the duct or hood where all ventilation measurements were taken.

Additional documentation requirements as applicable for the exhaust design & approved operation:

· capture velocity (where airborne contaminants are generated outside an enclosure); face velocity

· hood entry loss factor Fh or K;

· coefficient of entry Ce.; and

· duct velocity (where needed to transport solid particles).

4.a.03

Exhaust flow interlocks shall be provided by the manufacturer on all equipment that uses hazardous production materials (HPMs) where loss of exhaust may create a hazard. Flow (e.g., pitot probe) or static pressure (e.g., manometer) switches are the preferred sensing methods. These interlocks shall meet all the safety interlock requirements of this document. Low exhaust will trigger controlled equipment response.

4.a.04

NREL Equipment Requirements: AWN Chem. Dist., Page 13, Created: 7/19/2021

When the exhaust falls below the prescribed set point, an alarm shall be provided within audible and visible range of the operator, and the process equipment shall be placed in a safe stand-by mode. A time delay and exhaust setpoint for the equipment to go into standby mode may be allowable, based on an appropriate risk assessment. The system shall be capable of interfacing with the facility alarm system.

4.a.05

Materials must be compatible with potential chemical release and if required at the point of use, filtration or abatement must be provided. If plastic materials are used, they must FM4910 compliant.

4.a.06

Applicability: This section applies to equipment that has moving parts, hot surfaces, open chemistry, etc. to which workers could be exposed and risk injury.

4.b Guarding

Operators shall not be exposed to moderate or high risk of moving parts (Based on SEMI S-10 risk process) that may cause injury while loading or unloading the equipment.

4.b.01

Service and Maintenance technicians shall be protected against incidental contact with moving parts while performing their functions. An option would be to create maintenance mode that is at reduced mechanical speed.

4.b.02

Unanchored equipment in its installed condition shall not overbalance when tilted in any direction to an angle of 10 degrees from its normal position.

4.b.03

Piping and vessels shall be able to withstand the foreseen internal stresses and external stresses and shall be firmly attached or protected against external stresses and strains, including over constraints. This is particularly true of stresses due to thermal expansion.

4.b.04

External components exceeding 60°C shall have adequate guarding to prevent contact and a hazard warning label.

4.b.05

If internal temperatures exceed 60°C, a hazard warning label shall be placed on the external panel which provides access to that internal hot surface.

4.b.06

All pressure systems and vessels shall be provided with suitable pressure relief devices in accordance with ASME or Compressed Gas Association standard applicable to the design type (e.g., powered piping, pressure vessel code, cryogenic systems, etc.).

4.b.07

Enclosures which readily allow a person to fully enter shall be provided with means to permit someone inside to escape.

4.b.08

NREL Equipment Requirements: AWN Chem. Dist., Page 14, Created: 7/19/2021

5 ... Pressure

Relevant Codes Applicable to this Section: Piping systems for compressed gases and liquefied gases must comply with the applicable requirements of the IFC, International Mechanical Code, NFPA, applicable ASME B31 requirements. When the pressure vessel’s internal diameter is greater than six inches and operated above 15 psig, the following requirements apply: NREL designs, builds, tests, inspects, maintains, and operates PVSs in accordance with applicable American Society of Mechanical Engineers (ASME) Boiler and Pressure Vessel Code (BPVC) and B31-series piping codes (both available through the NREL library subscription) as well as the State of Colorado Boiler and Pressure Vessel Regulations using trained and qualified workers. When national consensus codes (NCCs) are not applicable because of pressure range, pressure vessel geometry, or use of special materials, NREL must implement measures to provide equivalent protection and provide a level of safety greater than or equal to the level of safety afforded by ASME or applicable state or local code. When conflicts exist between applicable regulations, the more conservative requirement must take precedence.

Relevant NREL LLPs: Laboratory-level Procedure 600-21, Pressure Safety Laboratory-level Procedure 600-19, Hazardous Production Materials Safety

Applicability: This section applies to equipment that connects to compressed gases in excess of 15 psig, or equipment that is connected to compressed gas below 15 psig but has components that are unable to be exposed to 15 psig.

5.a Compressed Gases

Materials of construction shall be compatible with the chemistries to which they will be exposed, including secondary reactions should mixing be a part of the process.

5.a.01

Components that are not rated for the worst credible pressure event must be have either an approved pressure relief devices or secondary regulation to limit pressure excursions.

5.a.02

Proper connections must be rated for the pressure and gas type in use. For example, for highly toxic and pryrophoric gases, weld and gasketed (VCR) connections must be used. Compression (Swagelok) fittings maybe used on other gases except where a fitting is expected to be made and remade more frequently than in repair operations in which case those fittings should be gasketed.

5.a.03

If a pressure increase or other event could cause a flow rate that can damage the equipment or endanger personnel an appropriately sized restricting flow orifice (RFO) shall be installed to limit flow to a none damaging value.

5.a.04

If a operator error, valve failure or other event could cause a misdirected flow that can damage the equipment or endanger personnel this misdirected flow shall be mitigated with redundancy, interlocks and logic, check valves, etc.

5.a.05

If a operator error, valve failure or other event could cause incompatible chemistries to mix in a way that can damage the equipment or endanger personnel this risk shall be mitigated with barriers and/or separating subsystems, interlocks, check valves, etc.

5.a.06

When components of the equipment require purging of hazardous chemistry prior to maintenance or opening, a purging mechanism and procedure must provided.

5.a.07

Components that can clog (filters, purifiers, etc.) shall have valved bypasses routes for high-purity or hazardous gas applications. Pressure relief is required upstream of such potential clogs if upstream components are susceptible to damage or the pressure can not be readily release from the trapped volume.

5.a.08

NREL Equipment Requirements: AWN Chem. Dist., Page 15, Created: 7/19/2021

Extremely hazardous materials need a secondary way to safely exhaust from the equipment should the primary route become clogged.

5.a.09

If a credible event could cause a temperature increase that would increase pressure within the equipment enough to damage the equipment or endanger personnel pressure relief must be provided.

5.a.10

If the equipment uses gases or vapors that should not escape into the work space, the equipment shall be constructed to be connected to local exhaust ventilation (LEV) to direct process effluent and vented gases for maintenance to the LEV. See section 4.a for more details on ventilation.

5.a.11

NREL Equipment Requirements: AWN Chem. Dist., Page 16, Created: 7/19/2021

6 ... Fire Protection

Applicability: This section applies to equipment that handles flammable liquids or gases, or combustible liquids, or could be constructed out of >10% of combustible materials by weight.

6.a Fire Protection

Equipment shall be made of metal or nonflammable plastic (FM4910, ASTM E84, or equivalent).

Application Note: Equipment that is made out of a minimum 90% of metal and nonflammable plastic combined meets this requirement. The entire construction of the equipment must be summarized listing in % weight of the overall equipment weight.

Exception: If the material of which the equipment is constructed includes less than 90% combined metal and non-flammable plastic, then a fire suppression system shall be integrated into the equipment.

6.a.01

For contracted chemical supply systems, the vendor shall supply continuous gas / vapor detection for flammable chemicals, and will provide visual and audible alarms both inside and outside the area being monitored. (NREL provides general gas detection within its facilities.)

6.a.02

For contracted chemical supply systems, the vendor shall supply detection for flammable and/or pyrophoric gaseous chemicals that has a set-point that ensures a flammable environment (defined as ≥ 25% LEL) will not be reached at any potential ignition source. (Tracer Gas Testing.)

Application Note: Ignition sources include all electrical components including low voltage that are not listed as intrinsically safe components.

6.a.03

Primary exhaust ventilation protecting flammable liquids and gases (including combustibles heated above their flashpoint) will be safety interlocked to chemical supply valves.

Application note: If exhaust is lost, flammable sources must close.

6.a.04

Secondary exhaust ventilation protecting flammable liquids and gases (including combustibles heated above their flashpoint) in the case of a fault will be safety interlocked to chemical supply valves.

6.a.05

Electrical devices/equipment supplied by the vendor within 5 feet of equipment containing flammable or pyrophoric gases, and/or flammable liquids will be NEC Class 1, Div 2, unless a ventilated enclosure or other engineering controls provide a nonflammable environment on a continuous basis.

6.a.06

Grounding/Bonding: Where flammable mixtures could be ignited by static electricity, means shall be provided to prevent accumulation of static charge. Static-producing equipment located in flammable gas storage areas shall be grounded. Grounding and bonding will be used wherever flammable Class I or Class II liquids are transferred or dispensed.

6.a.07

All materials used to supply / convey flammable or combustible chemicals must be rated for their intended use.6.a.08

Pressure supplied flammable liquid distribution shall use an inert gas (e.g. nitrogen, argon).6.a.09

Un-pressurized flammable liquid containers shall be constructed of 0.044 inch (1.12 mm) (18 gage) metal or compatible approved fire rated plastics or better.

6.a.10

NREL Equipment Requirements: AWN Chem. Dist., Page 17, Created: 7/19/2021

Equipment using flammable liquids or gases, or combustible liquids at pressures greater than ambient or temperatures greater than 35º C shall be equipped with optical flame detectors, gas suppression and interlocked power shutdown.

Application Note:

· Requirement applies to tools regardless of whether they are built of combustible or non-combustible materials.

· Optical flame detectors include dual wavelength IR and multi-spectrum IR.

· Clean agents (e.g. FM-200, Inergen, Argonite) are preferred for use as total flooding gas suppression agents.

· Carbon dioxide may be used in local applications and total flooding systems with no potentially occupied spaces.

6.a.11

Equipment not using flammable liquids or gases, or combustible liquids at pressures greater than ambient or temperatures greater than 35º C, but which are constructed primarily of combustible materials, need to be equipped with smoke detectors and interlocked for shutdown.Application Note:

· The primary material of concern is polypropylene.

· High efficiency smoke detectors are preferred (e.g. VESDA, VIEW)

· Polycarbonate materials are not included within this requirement and are adequately covered by ensuring adequate separation from ignition sources.

6.a.12

Equipment power and chemical sources that present Moderate or High fire risks (Based on SEMI S-10 risk process) shall be interlocked with the fire detection and suppression systems to prevent start-up of the equipment or delivery of chemicals when the fire detection or suppression is inactive.

6.a.13

Shutdown or failure of a fire detection or suppression system need not interrupt the processing of product within the equipment by immediately shutting down the equipment, but shall prevent additional processing until the fire detection or suppression is restored. Software or hardware may be used for this function.

6.a.14

The fire detection system, which includes detectors, alarms and their associated controls, shall be certified by an accredited testing laboratory and suitable for the application and for the environment in which it is to be used.

6.a.15

The fire detection, alarm and control system shall be installed in accordance with the requirements of an appropriate international or national codes or standards (e.g., NFPA 72).

6.a.16

The fire detection system shall be capable of interfacing with the facility’s alarm system. It may be preferable for the equipment supplier to specify the location and performance of detectors, but not provide them, so that the user may better integrate the detection in the equipment with that in the facility. This alternative shall be negotiated explicitly with the user.

6.a.17

The fire detection system shall activate alarms audibly and visually at the equipment.6.a.18

The fire detection system shall remain active following EMO activation.6.a.19

NREL Equipment Requirements: AWN Chem. Dist., Page 18, Created: 7/19/2021

7 ... Thermal Management

Relevant Codes Applicable to this Section: NFPA 79, NEC, NFPA 45

Applicability: This section applies to equipment that incorporates electric heating of process piping and/or vessels over 60°C.

7.d Fixed electric heating for process piping and vessels

Electric heating equipment shall be installed in such a manner as to be afforded protection from physical damage.

7.d.01

External surfaces of lines and vessel heating equipment that operated temperatures exceeding 60° C (140°F) shall be physically guarded, isolated, or thermally insulated to protect against contact the person on the area.

7.d.02

The presence of electrically heated lines, vessels, or both, shall be evident by the posting of appropriate caution signs or markings at intervals not exceeding 6 m (20 feet) along the lines or vessel and on or adjacent to equipment in the system that requires periodic servicing.

7.d.03

Ground-fault protection equipment shall be provided for electric heat tracing and heating panels.7.d.04

Electric heating equipment shall be listed and have a grounded conductive covering or insulation rated for the highest likely temperature.

7.d.05

Electric heating devices need to be provided to simultaneously disconnect all fixed electric liner vessel heating equipment from all ungrounded conductors. The disconnecting means shall be readily accessible to the user the equipment.

7.d.06

All unattended electrical heating equipment shall be equipped with a manual reset over-temperature shutoff switch in addition to the normal temperature controls.

7.d.07

NREL Equipment Requirements: AWN Chem. Dist., Page 19, Created: 7/19/2021

9 ... Controls, User Interfaces, and Data Management

Applicability:…