Attachment (B) Technical Specifications.pdf

TECHNICAL SPECIFICATIONS

MODULAR AUTONOMOUS THIN FILM LABORATORY (MATL)

Kevin Yager Interim Director Center for Functional Nanomaterials

Aaron Stein Chief of Staff

WaiLin Ng ES&H Manager Center for Functional Nanomaterials

Nicole Magliulo Quality Assurance

Gregory Doerk Staff Scientist, Technical Representative

March 26, 2026

Brookhaven National Laboratory

Center for Functional Nanomaterials ii

Table of Contents

1. OVERVIEW ...........................................................................................ERROR! BOOKMARK NOT DEFINED.

2. GENERAL DESIGN...................................................................................ERROR! BOOKMARK NOT DEFINED.

2.1 FOOTPRINT

2.2 TABLES ..................................................................................................................................ERROR! BOOKMARK NOT DEFINED.

2.3 TABLE SPECIFICATIONS.............................................................................................................ERROR! BOOKMARK NOT DEFINED.

2.4 ROBOTS

2.5 PERIPHERALS

3. SAMPLE AND SOLUTION HANDLING

3.1 SAMPLE HANDLING

3.2 LIQUID HANDLING

4. SOFTWARE

4.1 PROGRAMMING INTERFACE

4.2 INTEROPERABILITY

5. PRIMARY TABLE PROCESSES

5.1 SPIN COATER(S)

5.2 BLADE COATER(S)

5.3 THERMAL ANNEALING INSTRUMENTS

5.4 SOLUTION PREPARATION

5.5 STORAGE

6. MISCELLANEOUS REQUIREMENTS AND OPTIONS

6.1 REFERENCES

6.2 COMPUTER

6.3 SOFTWARE COMPATIBILITY

6.4 INSTALLATION AND TRAINING

6.5 WARRANTY

6.6 SERVICE

6.7 CONSUMABLES AND PARTS

6.8 CERTIFICATION

6.9 POWER

7. ACCEPTANCE TESTING

6.1 SOLUTION PREPARATION

6.2 PROCESSING

6.3 ROBOTIC OPERATION

Technical Specifications iii

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1. Overview

1.1. This specification describes the technical requirements for a robotic system integrating multiple instruments, designed to autonomously prepare and characterize libraries of solutiondeposited thin films (10100000 nm thick) on rigid substrate coupon samples with systematically varied discrete material and process parameters; these include, but are not limited to, thickness, film composition, casting solution concentration, casting conditions (e.g., spin speed), and thermal annealing conditions.

This system, to be primarily located in building 735 lab 1L03B, will comprise multiple lockable, wheeled tables for transferring to different laboratories and experimental environments (e.g., synchrotron beamlines). The system is envisioned to include a single table comprising a primary robotic process station, additional interchangeable tables onto which ancillary process or characterization stations may be mounted, and a robot(s) for transferring samples from the primary station to ancillary stations or between ancillary stations. Ancillary stations will be interchangeable to enable flexible workflows that accommodate a wide range of experimental campaigns designed by users, both human and computer.

Only one primary table and one ancillary table are requested currently.

2. General Design

2.1 Footprint: The entire system should fit within a footprint no larger than 2.5 meters by 1.5 meters. The full height of all tables and associated instruments and peripheral and enclosures shall be less than 2.0 meters.

2.2 Tables: The system will comprise two tables:

2.2.1 Primary Table: A primary table designed for standard processing operations, including solution preparation, film deposition by both spin and blade casting, and thermal annealing

2.2.1 Ancillary Table: One ancillary table shall be included to support additional commercial and/or sample processing or characterization instruments. This table will serve as the template for future ancillary tables and must support third party robots.

2.3 Table Specifications: Tables must conform to the following characteristics:

2.3.1 Tabletops shall encompass square areas 2/3 to 1 meter (23.3 feet) per side. Larger areas within this range are preferred.

2.3.2 The height of table working area shall be between 0.9 and 1.1 meters.

2.3.3 All tables should be mobile and interchangeable, with lockable wheels.

2.3.4 All tables should have the same tabletop area.

2.3.5 Excluding robots, table designs and component or material lists shall be provided in full so that tables may be fabricated by BNL employees or purchased through third parties.

2.3.6 All tables shall incorporate a “staging area” onto or into which samples may be placed for transfer to other tables. Staging areas may be pedestals whose top surfaces shall be flat and shall be able to accommodate no fewer than three samples, simultaneously. Optionally, staging areas may incorporate storage racks designed to hold larger quantities of samples. In all cases, robots must be able to access all samples within the staging area.

2.3.7 All tables shall be able to support weights of at least 100 kg.

2.3.8 The working area (tabletop and above) shall be designed for full or partial enclosure. Fully enclosed working areas shall be able to sustaina slight positive pressure of pure nitrogen. Partial enclosure may include shields or windows on any side(s) and above the working area. Enclosures shall be designed so that they may be installed or uninstalled by BSA personnel as needed.

2.4 Robots: The system must include at least two robots:

2.4.1 Primary process robot: One primary multiaxis (4+) robot for handling samples and solutions and conducting process operations on the primary table. This robot shall be able to pick up samples from and place them on or in the staging area for the primary table.

2.4.2 Transfer robots: At least one robot must be mounted per table for transferring samples between staging areas on adjacent tables. These robots must be able to pick up samples from and place them on or in staging areas on the table onto which they are mounted and staging areas on all adjoining tables.

2.4.3 Ancillary process robot: An additional robot shall be mounted on the ancillary table to pick up samples from staging area on the ancillary table and transfer them to process modules on the same table.

2.4.4 Dual purpose: At the discretion of the contractor, a single robot may serve as both the process robot and transfer robot on each table.

2.4.5 Safety: Robotic operation shall be programmable to limit force to 51 N and the velocity to 200 mm/s, with emergency stop triggered on detection of a collision with objects. An Emergency stop device must be easily reachable by anyone operating a robot during all tasks. In the event of power restoration after power outage, the system will not restart without an intentional full system reboot performed by a trained operator.

2.5 Peripherals:

2.5.1 Inclusion: The system will supply all peripherals, including but not limited to controllers, pumps, motors, racks, cartridges, stands, clamps, balances, and other auxiliary equipment that are required to execute experimental tasks meeting the specifications described in this document.

2.5.2 Compactness: All peripherals shall be contained within the area of the table. Peripherals may be mounted on, above or below the table as appropriate for the design.

3. Sample and Solution Handling

All robots shall be able to precisely and accurately position and handle samples and solutions, subject to the following specifications:

3.1 Sample Handling:

3.1.1 Sample size: The system must be able to handle samples with rectangular projected areas within the range of 10 mm to 25mm on a side. Restrictions onsample length, area, andaspect ratiowithin this range may be accommodated based on discussion with the vendor.

3.1.2 Sample type and thickness: Samples should be rigid, between 200 and 800 micrometers thick.

Typical samples will be silicon or glass coupons; optional capabilities for handling thinner, flexible, or more brittle samples are preferred.

3.1.3 Temperature: Robots must be capable of sample pick up from and placement onto surfaces held at temperatures from room temperature (~20 °C) to 250 °C or higher.

3.2 Liquid Handling:

3.1.1 Dispense volume: The minimum and maximum liquid dispense volumes shall be less than 40 µL and greater than 500 µL, respectively.

3.1.2 Automation: All liquid handling operations shall incorporate automated pipette tip mounting and removal and automated vial capping and uncapping.

4. Software

4.1 Programming Interface: All provided robots and primary table operations must be programmable via an open and documented Pythonbased application programming interface (API). An integrated developer environment (IDE) that simulates the outcome of userwritten scripts to avoid potential errors is preferred.

4.2 Interoperability: This API must enable interoperability with thirdparty robots and/or programmable thirdparty instruments (characterization or process tools) that have a Pythonbased API or an API with commands that can be executed through Python scripts. Communication protocols must allow orchestration of workflows involving both systemintegrated instruments and thirdparty instruments with their own programming interface.

5. Primary Table Processes

The primary table must support the following instrumentation and capabilities:

5.1 Spin coater(s)

5.1.1 Number: At least one per system; two (or more) are preferred.

5.1.2 Speeds: Capable of spin speeds from 50 to 5000 rpm. Maximum speeds higher than 5000 rpm are preferred. Must be capable of ramp rates from 1 to 5000 rpm/s or higher.

5.1.3 Sample clamping: Vacuum suction standard. Options for mechanical substrate clamping are preferred.

5.1.4 Dispense: Pipette dispense standard. Options for syringe pump dispense or sequential solution dispense are preferred.

5.1.5 Replacement and Upgradability: The instruments shall be replaceable or upgradable to incorporate in situ treatment options (e.g., ultraviolet light exposure).

5.2 Blade coater(s)

5.2.1 Number: At least one per system; two (or more) are preferred.

5.2.2 Speeds: The velocity range shall be at least 1 to 50 mm/s. An extended velocity range from 0.1 mm/s or less to 100 mm/s or more is preferred.

5.2.3 Sample clamping: Vacuum suction standard. Options for mechanical substrate clamping are preferred.

5.2.4 Dispense: Pipette dispense standard.

5.2.5 Temperature: Temperature control from ambient to 100 °C or higher with 0.5 °C accuracy and precision.

5.2.6 Replacement and Upgradability: The instruments shall be replaceable or upgradable to incorporate options including, but not limited to, subambient temperature control and in situ treatment

(e.g., ultraviolet light exposure).

5.2.7 Blade handling: All blade coating operations shall incorporate automated blade exchange, replacement, and/or cleaning.

5.3 Thermal Annealing Instruments

5.3.1 Number: At least four instruments per system.

5.3.2 Area: Annealing surface area shall be equal to or larger than 25 mm by 25 mm.

5.3.3 Temperature range: The programmable temperature range must be at least 30 – 250 °C.

Temperature control to less than 30 and more than 250 °C is preferred.

5.3.4 Temperature accuracy and precision: Temperature accuracy shall be within ± 0.5 °C, with precision within ± 0.1 °C of the setpoint.

5.3.5 Replacement and Upgradability: The instruments shall be replaceable or upgradable to incorporate future options (e.g., hooded gas flow).

5.4 Solution preparation

5.4.1 Number: Solution preparation shall be performed in an automated manner via dispensation of 5 or more different liquids or powders.

5.4.2 Resolution: Weight and volume resolution shall be sufficient to prepare solutions with 1% dissolved solids (or less) without prior dilution steps.

5.4.3 Agitation: To accelerate dissolution, solution vials shall be agitated by stirring or spinning at speeds of up to 500 rpm or higher; options for agitation by ultrasonic vibration are preferred.

5.5 Storage: The primary process table shall incorporate racks with encoded positions for at least 20 solution vials (8 mL or larger), 96 pipette tips (1 mL), and 100 substrates and samples. Sample storage racks may also serve a dual purpose as a staging area.

6. Miscellaneous Requirements and Options

6.1 References: The contractor shall provide at least two references confirming past performance of similar instruments. These references shall be companies, laboratories, or user facilities using the similar instruments, preferably located within Department of Energy national laboratories.

6.2 Computer: The contractor shall describe the requirements for a computer capable of running software for instrument programming and operation. A computer configured to meet this requirement may be provided as an option.

6.3 Software Compatibility: Any software required for instrument programming, simulation, and operation shall be provided. This software shall be compatible with Windows 11 (or the present version or Windows) and copies of the software shall be made available to instrument users offline (i.e., when not immediately using the instrument). Necessary software updates, including upgrades for compatibility with newer operating systems, shall be provided without additional cost.

6.4 Installation and Training: Contractor shall be responsible for installation of all components and provision of all interconnecting power, communication, control and instrument cabling, and all liquid and gas piping, and tubing between components and to the supply points identified by BSA. Contractor shall provide documentation detailing all facility requirements prior to instrument delivery. Training no shorter than 1 day shall be provided to no fewer than two CFN staff members. This training will teach staff how to program and operate the system.

6.5 Warranty: A full warranty shall cover the system and any peripheral equipment provided by the contractor for 1 year or more. In addition:

6.5.1 Limited warranties extending beyond the full warranty period are preferable. The contractor shall describe what components are covered under these limited warranties.

6.5.1 Preferably, the contractor shall offer extended full warranties as an option.

6.6 Service: The contractor shall include options for service and maintenance. If service contracts are not provided, the contractor shall detail the mechanism by which preventative maintenance and repairs are provided for the instrument.

6.7 Consumables and Parts: The contractor shall guarantee availability of consumables and replacement parts necessary for continued operation of the instrument from the date of installation and acceptance.

6.8 Certification: The contractor shall provide proof that the instruments are listed by a Nationally Recognized Testing Laboratory (NRTL). If the equipment is not already NRTLlisted, the contractor shall provision for evaluation by an approved thirdparty Field Evaluation Body at the contractor’s manufacturing facility.

6.9 Power: All instruments and peripheral electronics associated with the system shall be compatible with U.S. standard electrical wall sockets (110120 VAC, 16A).

7. Acceptance Testing

For the processes described below, the Contractor shall be responsible for demonstrating that the proposed Instrument meets or exceeds the stated criteria. Square silicon wafer coupons approximately 300-600 micrometers thick and 10-25 mm on a side (by prior agreement with the Contractor) shall be provided by BSA for the purpose of testing. All materials and solvents used for testing shall be provided by BSA.

Testing details and procedures shall be documented in a BSA-approved acceptance test procedure, as described in the SOW.

7.1 Solution Preparation:

7.1.1 Dissolution: The system shall demonstrate independent preparation of at least five (5) distinct material “stock solutions” at concentrations from 13% (weight or volume), as specified in agreement with BSA, directly from dissolution of a polymer or another soluble, solid material (e.g. a metal salt).

Evidence of complete dissolution or mixing shall be assessed by BSA personnel.

7.1.2 Blending: No fewer than 20 distinct solutions prepared by blending stock solutions in prescribed ratios. At least some blend solutions must be composed of at least three (3) different stock solutions.

Blend compositions will be specified in consultation with CFN staff.

7.2 Processing:

7.2.1 General: The system shall demonstrate the preparation of ninety (90) unique polymer film samples based on five (5) different solutions and three (3) different annealing temperatures. Samples will be coated by both spin coating and blade coating using three (3) different rotation rates (spin speeds) and three (3) different blade velocities. The specific parameter combinations shall be determined through discussion with CFN staff. A subset of ten (10) samples will undergo additional manual processing and characterization by CFN staff to assess process fidelity.

7.2.2 Spin coating: Additionally, ten (10) polymer film samples will be spin coated from a single solution at a specified spin speed. The standard deviation in the thickness of these samples shall be no more than

10% of the mean value, as measured by CFN staff using spectral reflectance or another suitable method.

The specific solution and spin speed will be determined in discussion with CFN staff.

7.2.3 Spin rinsing: The instrument will demonstrate spinrinsing, defined as dispensing enough solvent to fully cover a sample on a spin coater, followed by solvent removal by spinning at a high enough speed.

This demonstration will be incorporated into the general process requirement (7.2.1).

7.2.4 Blade coating: Additionally, ten (10) polymer film samples will be blade coated from a single solution at a specified blade velocity. The standard deviation in the thickness of these samples shall be no more than 10% of the mean value, as measured by CFN staff using spectral reflectance or another suitable method. The specific solution and blade velocity will be determined in discussion with CFN staff.

7.2.5 Thermal annealing: Sample thermal annealing for a period between 30 seconds and 30 minutes at three different temperatures shall be demonstrated. At least one temperature will be 250 °C or higher. Annealing times and temperatures will be determined in consultation with CFN staff.

Temperatures shall be logged in the software and independently verified by CFN staff to be within ± 0.5

°C of the setpoint using a thermocouple or other suitable method. This demonstration will be incorporated into the general process requirement (7.2.1).

7.3 Robotic Operation:

3.3.1. Sample Placement at High Temperature: The robots shall demonstrate direct placement and removal of samples onto the incorporated hot plates, which are held at a temperature of 250 °C or higher. This must be performed while the hot plates are heated, without cooling before sample placement or removal. This test will be incorporated into the General process requirement (7.2.1)

3.3.1. Sample Transfer: The robots shall demonstrate successful movement of samples to the staging area on the primary table, from the primary table staging area to a designated staging area on the ancillary table, and from the ancillary staging area to a specified “target location” on the ancillary table.

All movement of samples in the reverse direction (e.g., ancillary table staging area to primary table staging area) shall also be demonstrated. These operations must be repeated for 10 distinct samples.

The sequence of operations and the position of the “target location” on the ancillary table shall be determined in discussion with CFN staff.