Attachment 2_Statement of Work_CL System.pdf

18 August 2026

Statement of Work

Cathodoluminescence (CL) Detector System

1. Scope: A CL detector requires installation in the AFIT Cleanroom lab. The CL system must be able to provide usable data on reasonable time scales to accommodate 10-week AFIT courses and fast-paced MS/PhD programs. The expendable material requirements in the form of chemicals, gases, power, etc.

must be compatible with AFIT's current Clean Room facility without the need for major new construction. Use of the tool must be possible given government regulations on IT, software, and equipment controllers, and should be flexible/adaptable to changing regulations.

1.1 Background: Materials characterization and analysis is the driving force for advancing technological capabilities and occurs from the macroscopic to the atomistic scale. While AFIT microelectronics and physics education has benefited greatly from the use of Scanning Electron Microscopy (SEM) characterization, SEM is limited to surface level analysis. Internal structural, chemical, and energetic analysis requires advanced microscopy and spectroscopy techniques, which requires a different suite of detectors. Fortunately, our existing Zeiss Crossbeam SEM can accommodate such a detector suite produced by manufacturers such as Gatan. The CL system will thus enable on the study of ultra-high temperature materials, microelectronics, microelectromechanical systems (MEMS), and materials for aerospace applications. The new CL capability at AFIT will enable materials research from many different research groups both internal and external to AFIT/WPAFB/DoD, providing a unique ability to link cross-correlative, multi-imaging and analysis modalities from the macroscopic to the atomic levels.

The ability to ‘link’ cross-correlative, imaging/analysis modalities across length scales on the same instrument system allows students and research groups for a more detailed and comprehensive materials analysis and increases experimental throughput. This instrument supports EENG 675, EENG 717, and

EENG 777.

2. Requirements/Salient Characteristics: The contractor shall provide a CL detector and required accessories for operation, compatible with a Zeiss Crossbeam 350 Scanning Electron Microscope, and capable of a detection range of at least 1000 – 300 nanometers with a range of 1550 – 200 nanometers being highly desirable. The detector shall have resolution sufficient for quantitative spectroscopic measurements to 0.1 eV of error or better. Temperature control necessary to achieve the stated resolution should be included, with an estimated minimum temperature of -185 degree Celsius. The capability for heating is highly desired, up to an estimated 200 degrees Celsius. The CL sensitivity should be able to detect as low as 1 part per million at a minimum. Temperature stability should not exceed 3 degree Celsius from the target temperature. Chemical storage requirements should be compatible with AFIT’s existing chemical infrastructure. The instrument should be compatible with instruments already installed on the Zeiss Crossbeam SEM, such as the Oxford Instruments ESD/EBSD. The software must be capable of controlling the CL instrument in situ without releasing the vacuum pressure from the chamber, and must be capable of providing the measured radiative transfers in units of eV or nanometer through on-board analysis.

3. Qualifying Country Product: All products delivered to satisfy this requirement shall be manufactured in a qualifying country source in accordance with Defense Federal Acquisition

Regulation Supplement (DFARS) 225.872. Products from other than qualifying countries will not be accepted, and any costs associated with products from other than qualifying countries, including shipping, etc., shall be at the contractor’s expense.

4. Training: The contractor shall train all AFIT microelectronics faculty and cleanroom staff at the time of installation such that current AFIT measurement campaigns can be completed and future students/staff can be trained by the AFIT personnel. Additional training may be requested by the AFIT member(s) while the contractor is on-site for calibration/adjustments/repairs through the life of the warranty.

5. Installation: The contractor is responsible for the final connection and installation to the facility and must identify that the product is functional and ready to use after installation.

6. Delivery:

Air Force Institute of Technology

AFIT/ENG

2950 Hobson Way, Area B

WPAFB, OH 45433-7765

7. Lead Time: The product shall be delivered no later than 6 months after contract award

8. Warranty: Minimum 1 year warranty on system, materials, and labor. Throughout the life of the warranty, the contractor will conduct on-site calibration of the system if needed or virtually assist in the calibration of the system completed by a trained AFIT member. If on-site calibration is required, the contractor will be available to provide hands-on training to the AFIT member while calibrating/adjusting the CL System.

9. Elimination of use of Class 1 Ozone Depleting Substances (ODS):

a. Contractors shall not:

1. Provide any service or product with any specification, standard, drawing, or other document that requires the use of a Class I ODS in the test, operation, or maintenance of any system, subsystem, item, component, or process; or a. Provide any specification, standard, drawing, or other document that establishes a test, operation, or maintenance requirement that can only be met by use of a Class I ODS as part of this contract/order.

2. For the purposes of Department of the Air Force policy, the following products that are pure (i.e., they meet the relevant product specification identified in AFI 32-7086[AR2]) are Class I ODSs: a. Halons: 1011, 1202, 1211, 1301, and 2402;

3. Chlorofluorocarbons (CFCs): CFC-11, CFC-12, CFC-13, CFC-111, CFC-112, CFC- 113, CFC-114, CFC-115, CFC-211, CFC-212, CFC-213, CFC-214, CFC-215, CFC-216, and CFC-217, and the blends R-500, R-501, R-502, and R-503; and

a. Carbon Tetrachloride, Methyl Chloroform, and Methyl Bromide.

10. Delivery Procedures – Commercial Vehicle:

a. The company shall properly ship the system to the Air Force Institute of Technology at WPAFB, OH. All shipping costs to include insurance will be included in contractor’s proposal. Great care using standard, approved packaging methods shall be taken.

b. All vehicles larger than a large pick-up truck are required to be inspected by the Wright- Patterson Air Force Base Commercial Vehicle Delivery Gate (CVDG) prior to entering the installation. Vehicles to be inspected include, but are not limited to, the following:

1. Step van/panel truck

2. Tractor/trailer, box and flatbed containing cargo

3. Tanker trucks

4. Box trucks

5. Tour buses

6. Garbage/recycled waste trucks

7. Concrete trucks/mixers, dump trucks

8. Cranes, recreational vehicles, petroleum tanker

This inspection will be conducted at Gate 26A located off State Route 235.

c. The following are exemptions to vehicles utilizing the CVDG:

1. If the vehicle has the product inside (concrete and asphalt trucks) and timely delivery is necessary due to product deterioration it does not need to enter the CVDG. To bypass the CVDG, the contractor shall submit a list containing drivers’ names, social security numbers and the state in which the driver's license is held for those drivers who will be entering the base. This shall be accomplished 24 hours prior to requested entry time. If entry is requested on Monday, this list must be submitted by Friday at 1630 hours. All lists shall be submitted to the 88th ABW/CE Directorate contract inspector. The only gates that may be used under this exemption shall be 15A, 26A, 38A, and gate 1B. If the driver's name is not on the list, he/she will not be allowed access to the installation through these gates and the base will not assume liability for denied access.

2. If a delivery vehicle must exit, and then re-enter the base to complete its route, the vehicle shall be resealed upon exiting the base. After initially passing through the commercial vehicle delivery gate, trucks shall be resealed at Gates 15A, 38A and 22B. The resealing of the trucks will allow them to continue to any other area of the installation (Areas A, B, or Kittyhawk) without reprocessing through the CVDG. To receive resealing assistance, the drivers shall physically stop at one of the three authorized gates and request the installation entry controller to reseal their truck and provide the next location of their delivery. The controller will reseal the truck and give the delivery driver a pre-clearance form. The driver shall present the pre-clearance form to the entry controller at the next point of installation entry. This reentry can be through any base gate.

d. Vehicles may be subject to an inspection at any of installation entry control points during a directed random antiterrorism measure (RAM.) Any commercial vehicle, regardless of size, can be directed to the CVDG at the discretion of the installation entry controller.

11. Invoice and payment: 100% payment after delivery. The contractor shall be paid upon submission of a properly prepared invoice and after final inspection and acceptance have been made. The invoice shall be submitted to in Wide Area Workflow (WAWF) in accordance with the terms of the final contract award.