AL-1704-8934A.pdf

Advanced Light Source Upgrade Project Lawrence Berkeley National Laboratory

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Printed hard copies of this document are for reference only.

SR - VC12-IR & VC12-Diag - ESD

Thomas GAUCHER

Release Date: Apr 10 2024 10:04:27 AM PDT

Document Number: AL-1704-8934 Revision: A

Document Status: Released

Document Type: SPECIFICATION

Category Code: AL7531

ALS-U - STORAGE RING

VACUUM CHAMBERS

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TABLE OF CONTENTS

1 Revision History

2 Approvals

3 Abbreviations and Acronyms

4 Introduction

4.1 Introduction to ALS-U

4.2 Subject of this Engineering Specification

5 Document Definitions

6 Description of the SR VC12-IR & VC12-Diag

6.1 VC12-IR

6.2 VC12-Diag

6.3 Fabrication process

7 Environmental requirements

7.1 Codes and Standards

7.2 Cleanliness environment

7.3 Cleaning fluids

7.4 Cutting fluids

7.5 Fasteners

7.6 Flange and Gaskets

8 Technical requirement

8.1 Vacuum pressure

8.2 Manufacturing process

8.2.1 Material

8.2.2 Fabrication

8.2.2.1 Part fabrication

8.2.2.2 Cleaning after manufacturing

8.2.2.3 Part joining

8.3 Final Cleaning

8.4 Final Assembly

8.5 Final test

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8.5.1 CMM Measurement before bakeout

8.5.2 Water pressure test

8.5.3 Bakeout

8.5.4 Residual Gas Analysis

8.5.5 Final He Leak Test

8.5.6 Final Pressure measurement

8.5.7 HPN2 Backfill

8.5.8 CMM Measurement after Bakeout

8.6 Packing and shipping

9 Applicable Documents ci al ly R el ea se d to th e

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1 REVISION HISTORY

Rev. CM Number Description of Change A Baseline

2 APPROVALS

The following individual(s) must approve this document:

Approver Project Role Ken Chow Chief Engineer and System Engineer Jiani Niu Project QA manager Olusola Omolayo Vacuum CAM Windchill Approved / Concurred By oomolayo,jianiniu,KPChow

3 ABBREVIATIONS AND ACRONYMS

ALS Advanced Light Source ALS-U Advanced Light Source Upgrade ASTM American Society for Testing and Materials AR Accumulator Ring CC Cooling Chanel CF Conflat Flange CMM Coordinate Measuring Machine COTS Commercial Off The Shelves DCC Document Control Center He Helium HPN2 High Pressure Nitrogen EN-ISO European International Organization for Standardization LBNL Lawrence Berkeley National Laboratory

US

UHV

Ultra sound Ultra High Vacuum

VC Vacuum Chamber VCR Vacuum Coupling Radiation WPS Welding Procedure Specification ci al ly R el ea se d to th e

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4 INTRODUCTION

4.1 Introduction to ALS-U

ALS-U is an upgrade project to the LBNL Advanced Light Source (ALS). The ALS is a 1.9

GeV storage ring operating at 500 mA of beam current. It is optimized to produce intense beams of soft x-rays, which offer spectroscopic contrast, nanometer-scale resolution, and broad temporal sensitivity. The ALS facility includes an accelerator complex and photon delivery system that is capable of providing the foundations for an upgrade that will achieve world-leading soft x-ray coherent flux. The existing ALS provides a ready-made foundation, including conventional facilities and also includes extensive beamlines (up to

40 simultaneously operating beamlines) and instrumentation, an experimental hall, computing resources, ancillary laboratories, offices, and related infrastructure that will be heavily utilized in an upgrade scenario.

The ALS will be upgraded with a multibend achromat (MBA) lattice design that will provide a soft x-ray source that is orders of magnitudes brighter — an up to 100-1000 times increase in brightness and will provide a significantly higher fraction of coherent light in the soft x-ray region than is currently available at ALS.

4.2 Subject of this Engineering Specification

The chambers VC12-IR & VC12-Diag are located respectively in sector #2, #5 #10 and sector #7 of the Storage Ring (SR). Further introductory details of theses chambers can be found in the SR VC12-IR & VC12-Diag Chamber Statement of Work - AL-1704-8935, §4.2.

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5 DOCUMENT DEFINITIONS

Must, will, may, and should are used to define every specification listed in this document.

The definitions of these terms are as follows

May – is used to indicate a desire or goal of a specification. This can also be interpreted

‘as nice to have’ and are not contractually binding.

Must –is a specification that is contractually binding and must be implemented.

Should – is used to indicate a desire or goal of a specification. This can also be interpreted ‘as nice to have’ and are not contractually binding.

Will – is used to inform intent or declaration of purpose. This is not a specification.

Example, the author will use the word ‘must’ to indicate that a specification is contractually binding and must be implemented.

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6 DESCRIPTION OF THE SR VC12-IR & VC12-DIAG

6.1 VC12-IR

The main functions and requirements of the SR VC12-IR are:

1. Host M1 drive insert assembly at the bottom of the chamber

2. Provide a keyhole shaped common entry flange port for the electron and photon beam

3. Provide dedicate exit flange ports of the electron.

4. Provide ancillary ports for gauges, pumps and right angle valves

The VC12-IR has been designed by LBNL to meet these requirements and perform these functions. VC12-IR is shown in Figure 6-1.

Figure 6-1: VC12-IR

Upstream Downstream

Keyhole aperture

M1 mirror assembly port for

IR beamline

Electron beam

Pumping port

Gauges port

Gate Valve port

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6.2 VC12-Diag

The main functions and requirements of the SR VC12-Diag are:

1. Host mask / cold finger assembly at the bottom of the chamber

2. Provide a square shaped and a round aperture in the common entry flange port for the photon and electron beam.

3. Provide dedicate exit flange ports of the electron.

4. Provide ancillary ports for gauges, pumps and right angle valves

5. Provide viewport port at the top of the chamber

The VC12-Diag has been designed by LBNL to meet these requirements and perform these functions. VC12-Diag is shown in Figure 6-2.

Figure 6-2: VC12-Diag

Upstream Downstream

Keyhole aperture

M1 mirror assembly port for

Diagnostic beamline

Electron beam

Pumping port

Gauges port

Viewport port

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6.3 Fabrication process

Both chambers are primarily constructed from stainless steel 316L and copper (C18150 and C10100). The fabrication process for the parts involves CNC and EDM machining.

The parts are joined by TIG welding and EB welding. The fabrication processes are mostly the same for both chambers.

All the main chamber body parts (Figure 6-3) are machined separately and joined by TIG welding. The body absorber (Figure 6-4) features are achieved by EDM machining. The features are design to minimize geometrical beam impedance through the vacuum chamber.

Figure 6-3: Main chamber body 316L of

VC12-IR

Figure 6-4: Body Absorber of VC12-IR

The body absorber is joined to the main chamber body using EB welding.

All copper parts are joined together using EB welding.

All ports are welded onto the main chamber body using TIG welding

Figure 6-5: VC12-IR

The beam entry port and the electron beam exit port flanges utilize Helicoflex vacuum seals, while other ports use standard CF copper gaskets.

VC12-Diag is manufactured using the same fabrication process.

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7 ENVIRONMENTAL REQUIREMENTS

7.1 Codes and Standards

ID NUM

(SYY-XX-) Specification

S09-94-000151

The following standards must apply for the fabrication and test of the SR

VC12-IR & VC12-Diag Chamber:

EN ISO 13919 or EN ISO 5817

EN ISO 17637

ASTM E498.

EN ISO 17640

ASTM E2734/E2734 M − 10.

7.2 Cleanliness environment

ID NUM

(SYY-XX-) Specification

S09-94-000152 The cleaning environment must comply with UHV Chamber and Component Production Requirements AL-1220-7841, §7.2

7.3 Cleaning fluids

ID NUM

(SYY-XX-) Specification

S09-94-000153 The cleaning fluids must comply with UHV Chamber and Component Production Requirements AL-1220-7841, §7.3

7.4 Cutting fluids

ID NUM

(SYY-XX-) Specification

S09-94-000154 The cutting fluids must comply with UHV Chamber and Component Production Requirements AL-1220-7841, §7.4

7.5 Fasteners

ID NUM

(SYY-XX-) Specification

S09-94-000155 The fasteners of the of vacuum chambers must comply with AL- 1220-7841, §7.6 ci al ly R el ea se d to th e

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7.6 Flange and Gaskets

ID NUM

(SYY-XX-) Specification

S09-94-000156 The flanges and gaskets of the vacuum chambers must comply with

AL-1220-7841, §7.7

8 TECHNICAL REQUIREMENT

8.1 Vacuum pressure

ID NUM

(SYY-XX-)

Specification

S09-94-000157 The maximum thermal outgassing rate must be better than 1.00e-11 Torr.l.s-1.cm-2

S09-94-000158 Achievable final pressure must be 5.00e-10 Torr

8.2 Manufacturing process

8.2.1 Material

The procurement of the raw material by the Sub-contractor must comply with the following requirements

ID NUM

(SYY-XX-) Specification

S09-94-000163 All materials must be new.

S09-94-000164 All material must be free from surface cracks and fissures, forge and other tool marks, burns, delamination and other defects that would make it incompatible with a high vacuum environment.

S09-94-000165 Certification must be in accordance with EN ISO 10204 3.1.

S09-94-000211 Magnetic permeability for vacuum chamber base material must be

1.01 and for welds or braze joints 1.04

S09-94-000168 The tube of the chamber must be seamless

S09-94-000169 The material must be compatible with synchrotron radiation ci al ly R el ea se d to th e

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8.2.2 Fabrication

8.2.2.1 PART FABRICATION

The fabrication of the chambers must comply with the following requirements

Cutting fluids

ID NUM

(SYY-XX-) Specification

S09-94-000170 A water-soluble and non-halogenated cutting fluids must be used for fabrication

S09-94-000171 All others requirements relative to the vacuum components fabrication must comply with AL-1220-7841, §8.1, §8.2, §8.3

8.2.2.2 CLEANING AFTER MANUFACTURING

An intermediate cleaning must be done after manufacturing and must comply with the following requirements

ID NUM

(SYY-XX-) Specification

S09-94-000172 UHV surfaces must be protected as per best practices during handling operations.

S09-94-000173 Parts must be stored in a clean area from the workshop (See §7.2).

S09-94-000174 Parts must be suspended in tanks by wire, hooks or in baskets

S09-94-000175 All others requirements relative to the vacuum components cleaning must comply with AL-1220-7841, §9

8.2.2.3 PART JOINING

The joining process of the components must comply with the following requirements

General requirement

ID NUM

(SYY-XX-) Specification

S09-94-000176 Step change in geometrical profile across weld must be less than 0.2mm

S09-94-000177 All parts must be cleaned prior to welding (See §8.3)

S09-94-000178 A WPS is not required

S09-94-000179 The weld quality must be level D according to EN ISO 13919 or EN

ISO 5817

S09-94-000182 All welds must be free from cracks and fissures or other defects that would make it incompatible with a high vacuum environment.

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Inspection of welded joints

(SYY-XX-) Specification

S09-94-000183 100% of the vacuum boundary welded joints must be visually inspected

S09-94-000184 The visual inspection must comply with EN ISO 17637

Component leak check

ID NUM

(SYY-XX-) Specification

S09-94-000185 100% of the vacuum boundary welded joints must be leak tested.

S09-94-000186 The leak test of the welded joint must comply with ASTM E498.

S09-94-000187 The criteria and parameter expected for the He leak check must comply with AL-1220-7841, §14

8.3 Final Cleaning

The final cleaning of the chambers must comply with the following requirements

General requirement

ID NUM

(SYY-XX-) Specification

S09-94-000188 Once the final cleaning process has started, it must not be stopped before the end.

S09-94-000189 After the final cleaning, all subsequent operations must be performed in a cleanroom.

Cleaning

ID NUM

(SYY-XX-) Specification

S09-94-000190 The cleaning agent used must be identified and approved by LBNL prior to the Factory acceptance test.

S09-94-000191 All other requirements regarding the final cleaning and intermediate inspection must comply with AL-1220-7841, §11 and §12.

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8.4 Final Assembly

(SYY-XX-) Specification

S09-94-000192 All requirement with final assembly must comply AL-1220-7841, §13

8.5 Final test

The final tests to ensure the performance of the SR VC12-IR & VC12-Diag Chamber must be performed in the sequence shown in Figure 8-1.

Figure 8-1: Final test sequence ci al ly R el ea se d to th e

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General requirement

(SYY-XX-) Specification

S09-94-000193 All test must take place in a clean room

S09-94-000194 During pumping down of the part, all connection above the turbo pump must be all-metal

S09-94-000195 The HPN2 port must be all-metal

S09-94-000196 The HPN2 port must be a VCR to CF16 adapter that is replaced with a CF16 blank as the last connection to the chamber prior to shipping.

S09-94-000197 LBNL must have right to visit the contractor during these tests

8.5.1 CMM Measurement before bakeout

ID NUM

(SYY-XX-) Specification

S09-94-000198 A CMM measurement must be performed, on all chambers

S09-94-000200 The dimensions to be controlled must be specified by the University technical representative.

8.5.2 Water pressure test

The water pressure for the cooling channel must comply with the following requirements

ID NUM

(SYY-XX-) Specification

S09-94-000201 The cooling channel pressure test must be conducted at 120 psi

S09-94-000202 The cooling channel pressure test must last 10 mins

Criteria

ID NUM

(SYY-XX-) Specification

S09-94-000203 No leak must appear at the completion of the pressure test

8.5.3 Bakeout

ID NUM

(SYY-XX-) Specification

S09-94-000204 Bakeout must comply with AL-1220-7841, §14.1 ci al ly R el ea se d to th e

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8.5.4 Residual Gas Analysis

(SYY-XX-) Specification

S09-94-000205 Residual Gas Analysis must comply with AL-1220-7841, §14.2

8.5.5 Final He Leak Test

ID NUM

(SYY-XX-) Specification

S09-94-000208 Final pressure measurement must comply with AL-1220-7841, §14.5

8.5.6 Final Pressure measurement

ID NUM

(SYY-XX-) Specification

S09-94-000207 Final He leak test must comply with UHV Chamber and Component Production Requirements AL-1220-7841, §14.4

8.5.7 HPN2 Backfill

ID NUM

(SYY-XX-) Specification

S09-94-000209 HPN2 Back fill must comply with AL-1220-7841, §14.6

8.5.8 CMM Measurement after Bakeout

ID NUM

(SYY-XX-) Specification

S09-94-000328 A CMM measurement must be performed on all chamber with the same critical dimension given in §8.5.1 after the bakeout

8.6 Packing and shipping

ID NUM

(SYY-XX-) Specification

S09-94-000210 Packing and shipping must comply with AL-1220-7841, §15

9 APPLICABLE DOCUMENTS

See applicable document in section 10 in the AL-1704-8935 SR - VC12-IR & VC12-Diag -

SOW.

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