9-Attachment 6 Material Specifications.doc

HP Polymer Piping Material Certification

March 20, 2026

TABLE OF CONTENTS

A. OBJECTIVE

B. SCOPE

C. APPLICABLE DOCUMENTS

D. EQUIPMENT

E. PROCEDURE

F. CHECKLIST

A. OBJECTIVE

· This document describes procedures for the testing and certification of polymer piping/tubing distribution systems.

B. SCOPE

· This procedure is applicable to polymer distribution systems located in source equipment, facilities systems and semiconductor production equipment.

· All procedures may not be required for every system due to differences in purity levels. The performance specification is not included in this document. The user shall obtain the purity level performance specification and system construction parameters to be used for certification.

· The polymer components used for the fabrication of the systems covered in this procedure are Perfluoroalkoxy (PFA), Polyvinylidene Fluoride (PVDF) and HP Polypropylene (PP).

C. APPLICABLE DOCUMENTS

· User manual for liquid particle counter

· User manuals for resistivity, total organic carbon (TOC) and dissolved oxygen analyzers

D. EQUIPMENT

· Liquid Particle Counter by Particle Measuring Systems or equivalent

· TOC, Resistivity Monitor by Anatel or equivalent

· Dissolved Oxygen Monitor by Mettler Toledo or equivalent

· The components used for the N2 and deionized water (DIW) certification sticks shall not cause degradation of the purity level required of the distribution system being tested.

· N2:

a) Regulator

b) Check Valve

c) Pressure Gauge

d) Isolation Valve

e) Filter rated at 0.01 um pore size

f) Fittings and PFA and/or 316 EPSS tubing to interconnect the listed components

· DI Water:

a) Pressure Gauge

b) Gauge Guard

c) Isolation Valve

d) Filter rated at 0.1 um pore size

e) PFA tubing and nonmetallic fittings to interconnect the above components.

· Nitrogen (N2)

a) Ultra High Purity (UHP) grade 99.9999999% (Purified Source)

· DI Water

a) Resistivity >/=18.1 Mohm-cm

b) Total Organic Compounds <10 ppb

c) Particles <1 cnt/ml >/=0.1 micron

d) Bacteria <10 colonies/100 ml

E. PROCEDURE

· Eye protection shall be worn at all times during this procedure.

· All these tests shall be completed in the sequence indicated by this procedure.

· Verify with the responsible project engineer that the installation of the distribution system is complete.

· N2 PRESSURE DECAY TEST:

a) This test is performed to detect any gross leaks in the system prior to the Hydrostatic Test.

b) Do not pressurize polymer distribution systems with gas (N2) to greater than 10 psi (0.7 kg/cm2). Over pressurization can lead to catastrophic failure of the polymer system which could cause serious injury to human life. This procedure should be approved by the appropriate safety personnel.

c) Connect N2 to the designated system certification valve using the N2 certification stick.

d) Slowly pressurize the system with N2 to a maximum of 10 psi (0.7 kg/cm2) pressure.

e) Close the isolation valve and record the pressure and the start time on the check list. If the pressure drops immediately, the system has a gross leak that shall be corrected before proceeding.

f) If the pressure does not drop immediately, record the final pressure after two hours and the time on check list. If the readings are the same (+/-1%), the system has passed the N2 Pressure Decay Test.

g) If the readings are not within 1%, the system fails the N2 Pressure Decay Test. The certifier shall identify the leak and repair it or report it to the appropriate personnel.

h) Do not use soapy solutions for leak detection. These solutions will contaminate the process line.

i) Upon successful repair of all leaks, the N2 Pressure Decay Test shall be repeated until passed.

j) Note the acceptable final pressure and time on the check list.

· HYDROSTATIC TEST:

a) This test is performed to detect smaller leaks that were not located and repaired in the N2 Pressure Decay Test. The elimination of smaller leaks further lessens the risk of introducing smaller sized atmospheric contamination into the distribution system and potential safety hazards.

b) Do not exceed the pressure rating of any component. Exceeding the pressure rating can cause catastrophic failure of a component.

c) Connect DI Water source to the designated certification valve using the DIW certification stick.

d) When filling the system with DIW, bleed out as much of the gas (air) as possible by opening and closing valves along the system. Trapped air could give a false indication of a leak.

e) Pressurize the system with UHP DIW to twice the operating pressure, 60 psig (4.2 kg/cm2), or the pressure of the lowest pressure rated component whichever is less.

f) Close the isolation valve and record the pressure, ambient temperature and the time on the check list. If the pressure drops, the system has a leak that shall be corrected before proceeding.

g) If the pressure does not drop, record the final pressure and ambient temperature after 24 hours and the time on the check list. If the readings are the same (+/-1%), the system has passed the Hydrostatic Test.

h) If the system experiences a significant change in thermal conditions during the 24 hour period, compensate for the pressure change due to the temperature change.

i) If the readings are not within 1%, the system fails the Hydrostatic Test. The certifier shall identify the leak(s) and repair it or report it to the appropriate personnel.

j) Upon successful repair of any leaks, the Hydrostatic Test shall be repeated and passed.

k) Note any problem(s) or failure(s) on the check list.

· PARTICLE TESTING:

a) This test is performed to determine the particle burden generated by the distribution system.

b) The certifier shall have an equivalent of six months experience with particle counters before proceeding. The certifier shall read and understand the operating manual for the particle counter being used.

c) Following the hydrostatic test, flush the system with DIW for 12 hours prior to the particle test.

d) Connect the particle counter to the designated certification valve.

e) Follow the setup/startup procedures for the particle counter being used.

f) Note on the check list starting date and time.

g) Allow the counter to run for a period of 24 hours, collecting online data during this period to see the decline of particle counts (PC’s) over the 24 hour timeframe.

h) If the system fails to meet compliance after the 24 hour test, terminate the test, disconnect the particle counter, and proceed with a high velocity DIW flush for two hours.

i) Reconnect the particle counter and perform the particle test again. If compliance is still not achieved, the certifier shall inform the appropriate personnel for corrective action.

j) Note on the check list the ending date and time.

k) Note the particle count level on the check list and attach a hard copy of the actual counts to the check list.

· RESISTIVITY, TOC, DISSOLVED OXYGEN TEST:

a) Prior to sampling, flush the sample port for 30 seconds.

b) Connect the monitoring equipment to the designated certification valve.

c) Follow the setup/startup procedures for the equipment being used.

d) Note on the check list starting date and time.

e) Allow the equipment to run for a period of 24 hours, collecting online data during this period to monitor the performance of each parameter over the 24 hour timeframe.

f) If the system fails to meet compliance after the 24 hour test, inspect the piping system for debris. If none found, verify:

i. Ion exchange units are operating properly, i.e., resin well mixed for fixed IX beds, EDI equipment output parameters are in spec, and/or degasification and UV equipment is operating properly

g) Note and correct any findings or concerns. Restart testing per the procedures above. If compliance is still not achieved, the certifier shall inform the appropriate personnel for corrective action.

h) Note on the check list the ending date and time.

· CATION, ANION, and METALS ANALYSIS:

a) Obtain sample bottles from a 3rd party analysis laboratory capable of performing Inductively Coupled Plasma Mass Spectrometry analysis (ICP-MS). Follow the laboratory procedures when pulling samples and shipping the samples for analysis.

b) Once the results are received, note the results on the check list.

c) If the system fails to meet compliance, verify resistivity, TOC and DO are in spec. If so, continue to flush the piping and sample every other day until the system rinses up to specification.

· CHEMICAL DISPENSE AND DISTRIBUTION SYSTEM TESTING:

a) Perform pressure testing, particle and resistivity analysis as outline above for all chemical systems using deionized water as the test fluid

b) Remove water from the system using a low pressure nitrogen purge

c) Ensure fresh chemical is available through the distribution system at the point to be sampled.

d) Obtain sample bottles from a 3rd party analysis laboratory capable of performing assay and Inductively Coupled Plasma Mass Spectrometry analysis (ICP-MS) or the analysis technique required for the chemical being sampled. Follow the laboratory procedures when pulling samples and shipping the samples for analysis.

e) Note any problems on the check list.

· LABELING AND MARKING:

a) Verify that the system has been properly marked (labeled) as required per specifications or owner’s guidelines.

· CERTIFICATION:

a) Note on the check list the successful completion of all required certification tests.

b) Provide a copy of the check list including all pertinent data and documentation to the appropriate personnel.

F. CHECKLIST

· EXAMPLE CHECKLIST

1. Polymer type (__________) used for _____________ delivery system.

2. Installation technique utilized for the fabrication of the delivery system is_______________.

3. Check - N2 Pressure Decay Test

4. Starting pressure:__________ Starting time:________________

5. Ending pressure:____________ Ending time:__________________

6. Date:______________________Performed by:_________________

7. Comments:__________________________________________________

8. Check - Hydrostatic Test

9. Starting pressure:__________ Starting time:________________

10. Starting temp:______________

11. Ending pressure:____________ Ending time:__________________

12. Ending temp:________________

13. Date:_______________________ Performed by:_________________

14. Comments:__________________________________________________

15. Check - Particle Counts Test

16. Starting time:_____________ Starting date:_________________

17. Ending Time:_______________ Ending date:___________________

18. _________ Counts @ > 0.30 micron

19. _________ Counts @ > 0.10 micron

20. _________ Counts @ > 0.05 micron

21. _________ Counts @ _______ micron

22. _________ Counts @ _______ micron

23. Pass/Fail:________________

24. Performed by:______________________________________________

25. Equipment model:___________________________________________

26. Equipment serial number:___________________________________

27. Comments:__________________________________________________

28. Check - System has been properly marked (labeled)

29. Check - Certification has been completed and passed

30. Date:_______________________ Performed by:_________________

31. A copy of the Check List including all pertinent data and documentation provided to the appropriate personnel.

32. Date:_______________________ Performed by:_________________