TIE – Montopolis Research Center

ULTRAPURE DI WATER SYSTEM 1

ULTRAPURE DI WATER SYSTEM

PART 1 - GENERAL

1.1 SUMMARY

A. Section Includes:

1. 300 GPM makeup capacity ultrapure DI water primary plant.

a. Expandable to makeup 400 GPM within allocated space.

b. Primary plant will be located in the Central Utility Building (CUB) with water storage tanks to be located outside on the east side of the CUB

2. 250 GPM (POU) ultrapure DI water polish system.

a. Expandable to 350 GPM (POU) within allocated space.

b. System will be located inside the CUB with the primary plant.

c. System will supply cold deionized water.

B. Related Sections:

1. Unless otherwise specified, installation and equipment must meet University Design and

Construction Standards as listed at the following website https://construction.utexas.edu/design-and-construction-standards

C. Products supplied but not installed under this section:

1. Building structure, general HVAC, lighting, fire protection, floor trenches

2. City water feed with blind flanges located outside the CUB

3. Waste water drain connection located in trench at east wall of CUB

4. Electrical source panels.

5. Compressed dry air and nitrogen connections

6. DI Water distribution system – connection point is a 6” valve (supply and return)

D. Alternates:

1. Provide design and costs for system to collect reverse osmosis concentrate for use as cooling tower makeup. Any excess effluent to discharge to the industrial waste system via a separate line.

2. Provide costs for intermediate piping between unit processes up to the primary mixed beds to be 304SS.

1.2 DEFINITIONS

A. N - Number of components required at each unit process to operate system at design conditions.

B. N+1 - Required number of components for each unit process to be installed to meet redundancy, maintenance or other requirements.

C. POD – Point Of Delivery which is located at the outlet of the polishing system.

D. POU – Point of Use which is the tool connections on the distribution piping system (Not in scope) https://construction.utexas.edu/design-and-construction-standards

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E. FBO – Full Build Out which is the fab’s maximum anticipated demand.

1.3 REFERENCES

A. SEMI Standards:

1. SEMI F40-0699 – Practice for Preparing Liquid Chemical Distribution Components for

Chemical Testing

2. SEMI F48-0200 – Method for Determining Trace Metals in Polymer Materials

3. SEMI E49.2-0298 – Guide for High Purity Deionized Water and Chemical Distribution

Systems in Semiconductor Manufacturing Equipment

4. SEMI E49.3-0298 – Guide for Ultrahigh Purity Deionized Water and Chemical

Distribution Systems in Semiconductor Manufacturing Equipment

5. SEMI E49.7-0702 – Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

6. SEMI F57-0301 – Provisional Specification for Polymer Components Used in Ultrapure

Water and Liquid Chemical Distribution Systems

7. SEMI F63-0701 – Guidelines for Ultrapure Water Used in Semiconductor Processing

B. Appendices:

1. Appendix A – Austin City Water Analysis

2. Appendix B – Polymer Distribution System Certification/Test Procedure

1.4 SYSTEM DESCRIPTION

A. Design Requirements

1. DI water plant and polish loop mechanical design:

a. Flow design design parameters(GPM):

Water Description Water Usage Polish Recirc FBO Use Primary Plant Water Makeup 300 gpm N/A 400 gpm

- Cooling Towers (R/O)

- Exhaust Scrubbers (R/O)

- Process Cooling Water (R/O)

- Process Vacuum (R/O)

50 gpm

50 gpm

Polish 18Mohm Cold DI Water 250 gpm 400 gpm 350 gpm

b. Provide P&ID and logic diagrams.

c. Provide the Sequence of Operations (Operations Manual) for the plant and polish systems.

d. Identify, specify, and establish the means to install monitoring devices (TOC, Resistivity, Specific Ions, and others).

e. Design for manual operation of plant without control and monitoring system operational.

f. Define performance requirements for PLC loop control and sequential logic.

g. Define and execute sequence of operations for start-up and continuous service.

h. Identify fault requirements, control parameters, input/output points and alarm conditions.

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i. Design interconnect piping between all unit processes and between the primary plant and polish system.

j. Design piping to the HPW tanks to provide manual control of the dissolved nitrogen via valves and connections to the top and bottom of the tanks.

k. Install both chilled water and hot water to the primary plant heat exchanger such that it can be switched depending on the make-up water temperature from the city.

Design the heat exchanger for FBO.

l. Chilled water to the plant and polish heat exchangers shall be approximately 42°F.

m. Hot water to the plant heat exchanger shall be approximately 105°F.

n. Specify and price the consumables required in the plant and polish loop and their installation.

2. Distribution systems design:

a. Not included in scope

3. DI water controls design:

a. Specify supervisory monitoring and control hierarchy.

b. Develop software program for PLC and operator interface

c. Identify and develop operator interface including number of screens, loop face-plates, and management reporting capabilities.

d. Define requirements to tie control system to SCADA compatible factory control system in main building provided by others.

4. Provide means for plant and polish system effluents to enter industrial waste discharge point. Gravity industrial drain discharge point for plant effluents is located in the trench on the east wall of the CUB.

a. Reclaimable rinse waters shall be collected and recycled where possible.

b. Piping for discharge lines to be Schedule 80 PVC.

5. Provide and install sequential numbering and labeling system for identification of valving, vessels, and piping for each unit process. Utilize the Owner’s identification standard.

6. Owner will provide analysis of feedstock water to be used as basis for initial bid.

a. Obtain water analysis from mutually agreed upon constantly flowing sample port during design stage and be responsible for designing Ultrapure Water System based on this analysis.

b. Continue to analyze feed stock so that seasonal variations are comprehended.

7. Furnish proposed service cycle for each unit process in design. Regeneration proposal for each unit process will be detailed as to procedure, materials (including expendables) used, flow rates during regeneration, duration of regeneration, and requalification parameters. Following are the minimum service cycles required for deionizing columns if utilized:

a. Two Bed Function - 4 Days (Resin Regeneration)

b. Mixed Bed - 7 Days (Resin Regeneration)

c. Polish Deionizers - 1 Year (Resin Replacement)

8. Furnish proposed service cycle for all filters.

9. Furnish proposed service cycle for reverse osmosis units. The service cycle shall be based on 10 percent flow decrease or 10 percent pressure increase for each unit, whichever occurs first. A cleaning skid will be incorporated into the design to provide a method for cleaning R/O units.

10. Exclude from the design underground tanks or vessels which may contain process or non-process fluids.

11. Design chemical storage for mixed bed regeneration if required. Include a delivery method and frequency.

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a. Locate regeneration chemical storage tanks adjacent to DI water plant in existing concrete pits.

b. Include piping from chemical storage to DI plant. Piping between bulk chemical storage area and the DI water wing to be double contained and routed above ground.

c. Hydrochloric Acid storage tanks will require scrubber on vent system.

12. Provide backup capability (N+1) on pumping systems and unit processes. Reverse osmosis and distribution pumps to have variable speed drives.

13. Provide valving to allow reverse osmosis reject to be utilized for scrubber makeup or go to industrial drain. Piping for scrubber makeup will be by others.

14. Water recovery and waste minimization shall be incorporated.

15. Provide distributed control and monitoring system to manage operation of primary and polish plants.

16. Provide operator’s SCADA node in the primary plant to facilitate local visibility/operation for cleaning or regen purposes.

17. Provide a flow meter with instantaneous and totalizing capabilities on incoming city water feed to the main DI plant and makeup feed to new polish system.

18. Design unit processes within the DIW plant to be capable of utilizing 100% raw or city water to meet final water quality specifications at the point of use.

19. Provide 2” ball valve to supply make-up water to other utility systems with RO water from RO water storage tank forwarding pumps (see table above). Piping and automatic control valves for each of these systems will be provided by others.

1.5 PERFORMANCE REQUIREMENTS

A. Refer to Part 4 in this document.

1.6 SUBMITTALS

A. Shop Drawings: Indicate dimensions, sizes, weights and point loadings, material thickness, and locations and sizes of field connections. Submit construction layout and details.

B. Product Data: Provide manufacturers literature and date indicating rated capacities, dimensions, weights and point loadings, accessories, electrical requirements and wiring diagrams, and location and sizes of field connections.

C. System calculations.

D. Pump curves with specified operating point clearly plotted.

E. Submit sound power levels for inlet and outlet rated capacity.

F. Manufacturer’s Installation Instruction: Indicate assembly and installation instructions.

G. System Startup plan to include:

1. Cleaning and flushing procedures as required.

2. System filling procedure.

3. Position of all automatic and manual valves.

4. Verification of pump rotation, electrical requirements and VFD control.

5. Heat exchange and filter requirements.

ULTRAPURE DI WATER SYSTEM 5

6. Final leak check.

7. System sterilization plan.

H. Submit with Bid:

1. Design, installation, startup and certification schedule.

2. Schedule of need dates for infrastructure.

3. Material Control Plan.

4. Installation Procedures.

5. One-line flow diagrams in sufficient detail to describe unit processes.

6. Plan and cost onsite training for up to four Owner employees in the operation of the

Ultrapure Water Plant. Training to be a minimum of one week class time and one month of supervised operation.

7. Water, chemical, and wastewater mass balance. Mass balance will include all liquid and gas phase fluids required for operation of Ultrapure Water plant 24 hours per day, 365 days per year. Mass balance will comprehend any operations which may occur simultaneously and the mass balance will delineate these simultaneous operations.

8. Quality specifications and quantity for expendables required to operate Ultrapure Water Plant.

9. Proposal to operate and maintain Ultrapure Water Plant. Include management and staffing plan as well as total cost to Owner. Proposal to be separate from design/build proposal. Include spare parts, unit costs, facility charges, maintenance schedules, and personnel requirements.

10. Provide hot backup PLC for the following loops:

a. Hot backup 1: DI water plant critical loops – tank level, temperature and pressure

b. Hot backup 2: DI water plant RO trains

c. Hot backup 3: Polish system critical loops – tank level, temperature, pressure, flow

11. Estimated annual operating cost based on manufacturer’s suggestions for consumable (filters, lamps, etc.) changes and utility costs based on the following utility rates:

a. Cost of water: $5.57/1000 gallons.

b. Cost of electricity: $0.04/kWh.

12. Proposed analytical equipment, detection limits and operating ranges.

13. Proposed equipment and material manufacturers: provide data to support product quality.

Include as a minimum: piping, valves, vessels and components.

14. Staffing plan for all applicable job functions. Ensure workload is reasonable for the number of personnel assigned to the project.

15. All other alternates as described above.

I. Submit during Design:

1. Concept of power distribution including emergency and UPS power. Provide one-line diagrams for each type of power used.

2. VFD and starter schematics.

3. Unit process design calculations for review.

4. Detailed schedule for completion, meeting specified schedule.

5. Procedures to control cleanliness, quality and cost. Include as a minimum: piping, valves, vessels and components. Submit equipment and unit process for approval prior to ordering equipment.

6. Equipment/materials: Identify equipment and material manufacturers used; provide data to support product quality. Include as minimum: piping, valves, vessels and components.

7. Documentation showing design water quality at various locations in the DI water plant.

As a minimum, expected water quality at the following data points will be provided: Post Reverse Osmosis, Post Degasification and Post Primary Mixed Bed.

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8. Space Layout Constraints.

9. Floor Loading Constraints.

10. Step-by-step commissioning plan for:

a. Controls Commissioning

b. Mechanical Commissioning

c. Electrical Commissioning

J. Submit during Installation:

1. Provide electronic copies of the system design and equipment drawings in a “.dwg” format using AutoCAD.

2. Submit coupon welds from every supply piping welder on daily basis, or when pipe size changes.

3. Project Close-out Documentation: Provide electronic and hard copy as much as possible.

Provide record documents including:

a. Design calculations

b. Equipment specifications

c. Major end equipment construction drawings (i.e. tanks, polish beds, etc.)

d. Distribution layouts

e. Maintenance manuals

f. Operations manuals

g. Operations theory

h. Spare parts list

i. Piping and instrumentation drawings

j. Process flow diagrams

k. Plan view drawings

l. Electrical one-line drawings

m. PLC and cabinet drawings

n. As-built drawings

1.7 QUALITY ASSURANCE

A. Provide highest quality and reliability with latest proven technology; utilize total cost of ownership concepts.

B. Comply with applicable environmental, safety and industrial hygiene regulations.

C. Maintain high level of communication with Owner on all levels of project.

D. Assign an individual solely responsible for quality control and commissioning functions who is resident on the job site.

1. Quality control functions to include as minimum cleanliness checks, component inspection, pipe welding inspections, craftsmanship inspections, certification and accuracy of installation.

2. Maintain records available for audits by Owner.

3. Coordinate development of commissioning inspections, plans and documentation with the TIE project manager.

4. Commissioning work will entail weekly coordination meetings. Other meetings may be required as work progresses or issues arise.

E. Provide skilled installation personnel certified in their trade.

ULTRAPURE DI WATER SYSTEM 7

F. Provide training and instruction of pipe joining techniques for personnel assigned to make such joints.

1. Include training and certification by pipe manufacturer for joining technique selected.

2. Include random inspections by representatives of the pipe manufacturer to ensure quality of joints on regular basis.

G. Coordinate with Owner for source inspections at manufacturer’s factory or assembly plant prior to shipping any equipment designated for this project.

1.8 PROJECT CONDITIONS

A. Power:

1. Power in CUB will be available from existing distribution panels and motor control centers. Provide and install properly sized breakers from distribution panels and starters from the MCC’s, wiring from power source to the local disconnecting means, and finally to the equipment.

2. UPS and emergency power will be available as necessary. Associated breakers, wiring and disconnecting means for any UPS power will be provided by this contract.

B. Domestic water, nitrogen, compressed dry air (CDA), industrial drain, 42-degree Fahrenheit chilled water and 105 degree Fahrenheit hot water will be available within the CUB.

C. Building shell, including roof, walls and floor, general lighting, fire protection and trenches is existing.

1. Coordination, installation and sealing of additional housekeeping pads, drain piping, pipe racks/supports, electrical cable trays and comm tray is the responsibility of this contract.

1.9 SCHEDULING AND PROJECT MEETINGS

A. Project design and installation reviews will be scheduled based upon milestone requirements.

B. Attend weekly communication & safety briefing with Owner and other contractors.

C. Establish and provide detailed schedules of supplier-related activities.

D. Update schedules weekly during installation phase.

PART 2 - PRODUCTS

2.1 INSTRUMENTATION AND CONTROLS EQUIPMENT

A. Provide a programmable logic controller for control and monitoring of ultrapure DI water plant and polish loop.

1. Use Allen Bradley PLC equipment

2. Use redundant controls for backup capability.

3. Provide manual control capability if problems with PLC are incurred.

ULTRAPURE DI WATER SYSTEM 8

B. Provide supervisory system for monitoring and trending and storing historical data based on

SCADA.

C. Cabinetry: Rittal or equal

D. Terminal Blocks: Wago

E. Do not use liquid level control or liquid level indicator devices which utilize sight glasses.

F. Monitoring: Provide following quality monitoring equipment to continuously monitor water parameters:

1. Pressure

2. Temperature

3. Resistivity

4. Particles

5. TOC

6. Dissolved Oxygen

7. Dissolved Nitrogen

8. Flow

2.2 DI WATER PLANT SYSTEM PROCESSES

A. Unit processes described below do not imply need to include these systems in design of plant or polish systems. If these unit processes are incorporated in design, comply with these requirements.

B. Reverse Osmosis:

1. R/O trains do not exceed four units high.

2. Provide adequate space for R/O membrane removal and service.

3. Provide one additional R/O unit above the required design number, i.e., (N+1), to allow for maintenance and standby.

4. Provide method for cleaning R/O units.

C. Vacuum Degasification:

1. Coordinate dimensions and location of unit with Owner’s project manager.

2. Construct vessels from carbon steel with 3mm EPDM lining.

3. Vessels to be ASME stamped for system working pressure.

4. Exterior surfaces to be protected from corrosion.

5. Provide flanged connections at the inlet and outlet.

6. Provide valving for maintenance.

7. Provide sample ports at inlet and outlet piping.

D. Carbon Beds:

1. Vessels to be ASME stamped and rated for working pressure of system.

2. Provide 3mm EPDM liner inside vessel.

3. Exterior surfaces to be protected from corrosion.

4. Make provisions for removal of activated carbon without extensive piping modifications.

5. Provide pressure gauges at inlet and outlet piping.

6. Provide sample ports at inlet and outlet piping.

7. Provide valving for maintenance and backwashing.

ULTRAPURE DI WATER SYSTEM 9

8. Provide acid washed carbon for use in the carbon beds.

E. Pumps:

1. Raw Water Pumps: Provide vertical, multi-stage centrifugal pumps, 316 Stainless Steel pumps, premium efficiency motors and variable speed drives. Minimum pump efficiency to be 80 percent at design conditions. Approved vendors are Goulds or Grundfos.

2. Reverse Osmosis feed water pumps: Utilize multi-stage centrifugal pumps with 316SS wetted parts, a minimum pumping efficiency of 40 percent and sound power levels of less than 70 dBA. Pumps to be by Grunfos or equal.

3. Polish Loop Feed Pumps: Provide vertical, multi-stage centrifugal pumps, 316 Stainless Steel pumps, premium efficiency motors and variable speed drives. Minimum pump efficiency to be 80 percent at design conditions. Approved vendors are Goulds or Grundfos.

4. Variable Speed Drives: ABB ACS880 series with internal communication module

5. Motors: TEFC construction, premium efficiency

F. Ultraviolet Sterilization:

1. UV lights to have inner PTFE gaskets.

2. UV units to have flanged connections with sample ports at inlet and outlet.

3. UV units to be by Avant and constructed of electropolished 316L SS with fused quartz for the sleeves.

4. UV units to have an hour meter and intensity meter.

5. Provide a redundant UV unit for maintenance purposes.

6. Allow space for the removal of the UV lamps and quartz sleeves from both ends.

7. Provide valving for maintenance.

8. Incorporate bead-blasted and passivated SS double 90 fittings on inlet and outlet flanges.

G. R/O Water Storage Tanks(s):

1. Provide tank constructed with a 3mm polypropylene liner or equal inside a UV protected fiberglass tank and having following flanged connections as minimum:

a. 8 inch inlet.

b. 10 inch discharge.

c. 10 inch overflow.

d. 4 inch drain w/ butterfly valve and blind flange.

e. 2 inch connection for level controls.

f. 6 inch vent for pressure/vacuum relief device.

g. 6 inch connection for manual inspection and complete wetted surface sterilization.

h. 2 inch connection for nitrogen blanket inlet.

i. 2 inch connection for nitrogen blanket bleed and monitoring.

j. others as needed.

2. Provide 30 inch manways for tanks larger than 60 inches (152.4 cm) in diameter.

3. Provide nitrogen blanket using SS tubing, 0.2 micron filters and a trap to prevent water from entering nitrogen system.

4. Provide continuous level controls, low- and high-level alarms and instrumentation for monitoring tank level.

5. Provide a vortex breaker at tank discharge to minimize any disturbances in flow to pump suctions.

6. Tanks must be capable of supplying makeup water continuously to polish loop for 30 minutes after makeup stream is shut off.

7. Provide an integral pressure/vacuum relief device for each tank.

8. Tanks to be rated for the working pressure of the system.

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H. Raw Water Storage Tank(s):

1. Provide fiberglass tank constructed in accordance with ASTM D3299 or D4097 with following flanged connections as minimum:

a. 6 inch inlet.

b. 8 inch discharge.

c. 10 inch overflow.

d. 4 inch drain w/ butterfly valve and blind flange.

e. Others as needed.

2. Tanks to have a UV resistant exterior coating.

3. Provide 30 inch manways for tanks larger than 60 inches (152.4 cm) in diameter.

4. Provide high and low level controls, alarms and instrumentation for monitoring tank level.

5. Provide vortex breaker at tank discharge to minimize any disturbances in flow to pump suctions.

I. Heat Exchangers:

1. Heat exchangers: Plate and frame type heat exchangers with 304SS surfaces for DI water service. EPDM gaskets are to be used for temperatures up to 250 degrees F.

2. Approved Manufacturers:

a. Tranter.

b. Alfa Laval

c. Substitutions: with approval of TIE project manager

J. Multimedia Filtration:

1. Vessels to be ASME stamped and rated for system working pressure.

2. Provide 3mm EPDM liner inside vessel.

3. Exterior surfaces to be protected from corrosion.

4. Provide flanged connections at the inlet and outlet.

5. Provide valving for maintenance and backwashing.

6. Provide pressure gauges at inlet and outlet piping.

7. Provide sample ports at inlet and outlet piping.

8. Provide a sight glass for visual inspection during backwashing.

9. Provide 316SS internal wetted parts.

K. Cartridge Filtration:

1. Vessels to be ASME stamped and rated for system working pressure.

2. Provide flanged connections at the inlet and outlet.

3. Provide pressure gauges at inlet and outlet piping.

4. Provide sample ports at inlet and outlet piping.

5. Filter housings to be electropolished 316L SS.

6. Provide a redundant filter unit for maintenance purposes.

7. Provide valving and flow measurement for maintenance, sterilization and rinsing to industrial waste system.

L. Deionizing Equipment:

1. Provide continuous electro deionization equipment

2. Provide sample ports at inlet and outlet piping.

M. Acid and Caustic Tanks:

1. Bulk storage to be located outside main building in bulk chemical storage area.

2. Provide adequate labeling in accordance with local codes.

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3. Provide continuous level monitoring and level alarm using RF capacitance sensing devices.

N. Backwash Lift Stations:

1. Where required, provide a common backwash tank to be located in the DIW plant.

2. Provide piping to discharge backwash from carbon or multimedia directly to waste neutralization plant (WNP).

O. Waste Lift Stations:

1. Where required, provide sump pump, level controls and piping within DI water plant and polish loop perimeter to lift waste effluent to waste water treatment system.

2.3 POLISH LOOP SYSTEM PROCESSES

A. Unit processes described below do not imply need to include these systems in design of plant or polish systems. If these unit processes are incorporated in design, comply with these requirements.

B. Ultrapure Water (UPW) Makeup Tank(s):

1. Provide redundant tanks constructed with 3mm polypropylene liner or equal inside fiberglass tank and having following flanged connections as a minimum:

a. 6 inch inlet.

b. 10 inch discharge.

c. 8 inch overflow.

d. 4 inch drain w/ butterfly valve and blind flange.

e. 2 inch connection for level controls.

f. 4 inch vent for pressure/vacuum relief device.

g. 2 inch connection for nitrogen blanket.

h. others as needed.

2. Provide manways for tanks larger than 60 inches (152.4 cm) in diameter.

3. Provide nitrogen blanket using SS tubing, 0.2 micron filters and trap to prevent water from entering nitrogen system.

4. Provide continuous level controls, low and high level alarms and instrumentation for monitoring tank level.

5. Provide vortex breaker at tank discharge to minimize any disturbances in flow to pump suctions.

6. Tanks to be capable of supplying makeup water continuously to polish loop for 30 minutes after makeup stream is shut off.

7. Provide an integral pressure/vacuum relief device for each tank.

8. Tanks must be rated for the working pressure of system.

C. Pumps:

1. Provide vertical, multi-stage centrifugal pumps, 316 Stainless Steel pumps, premium efficiency motors and variable speed drives. Minimum pump efficiency to be 80 percent at design conditions. Approved vendors are Goulds or Grundfos.Variable Speed Drives:

ABB ACS880 series with internal communication module

2. Motors: TEFC construction, premium efficiency

D. Ultraviolet sterilization (UV):

1. UV lights to have inner PTFE gaskets.

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2. UV units to have flanged connections with sample ports at inlet and outlet.

3. UV units to be by Avant, or equal, and constructed of electropolished 316L SS with fused quartz for sleeves.

4. Provide a redundant UV unit for maintenance purposes.

5. UV units to have an hour meter and intensity meter.

6. Allow space for the removal of the UV lamps and quartz sleeves.

7. Provide valving for maintenance.

8. Incorporate bead-blasted and passivated SS double 90 fittings on inlet and outlet flanges.

E. Ion Exchange:

1. Provide 3mm PVDF or Halar (ECTFE) lined carbon steel vessels for final ion exchange polishing step.

2. Replaceable cartridges not acceptable as final ion exchange vessels.

3. Ion exchange resins to be of type that is readily available.

4. Provide automated resin transfer system to load/unload resin into ion exchange vessels.

5. Test vessels prior to shipment to confirm integrity of liner.

F. Cartridge Filters:

1. Filter housings to be electropolished 316L SS.

2. Provide a redundant filter unit for maintenance purposes.

3. Provide valving and flow measurement for maintenance, sterilization and rinsing to industrial waste system.

G. Ultrafiltration: Utilize ultrafilters by Pall, or equal, as last unit process with molecular cut off of 6000 or lower.

H. Heat Exchangers:

1. All heat exchangers are to be plate and frame type heat exchangers with titanium surfaces for DI water service and 316SS surfaces for hot/cold water service.

2. Expanded PTFE gaskets by W.L. Gore or equal are to be used.

3. Approved manufacturers:

a. Tranter.

b. Alfa Laval

c. Substitutions: with approval of TIE project manager

2.4 PIPING AND VALVES

A. Main DI Water Plant:

1. Pre-Primary Plant Deionization Vessels, including piping up to Primary Plant

Deionization Vessels:

a. Primary piping between groups of unit processes: Schedule 80, PVC with 150 lb.

ANSI raised face, flanged connections. Vanstone flanges are not permitted. See alternates outlined above.

b. Provide ASAHI Type AV, full face, EPDM gaskets, or equal.

c. Provide fully lugged butterfly valves with 316SS disc, EPDM seats and cast iron body.

d. Provide gear operators on valves 6 inches and larger.

e. Approved valve manufacturers:

1) Grinnell.

2) Centerline.

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3) Keystone.

4) AMRI.

5) Neotecha.

6) Substitutions: With approval of project manager

2. Primary Plant Deionization Vessels and Pre-Polish Loop Piping:

a. Piping at mixed beds or anion/cation beds and prior to Polish loop: Schedule 80, PVC pipe with 150 lb. ANSI raised face, flanged connections and EPDM gaskets.

See alternates outlined above.

b. Provide ASAHI, Type AV, full face, EPDM gaskets, or equal.

c. Provide fully lugged butterfly valves with 316SS disc, EPDM seats and cast iron body.

d. Approved valve manufacturers:

1) Grinnell.

2) Centerline.

3) Keystone.

4) AMRI.

5) Neotecha.

6) Substitutions: Under provisions of Section 01630.

3. All chemical piping to be double contained with automatic leak detection devices provided for monitoring by building control system.

B. Polish Loop System:

1. Polish Loop Piping (post polish MB’s):

a. PVDF material, installed in a minimum bead butt fusion fashion using infra-red technology with a nitrogen purge.

b. Perform welds in a class 10 horizontal laminar flow hood.

c. Perform ultraclean welds outside of class 10 hood in P.I.B. (Process Isolation

Bubble) or similar clean environment.

2. Cold DI Return System Piping: High Purity Polypropylene (HP-PP) pipe.

3. HP-PP Piping to have an ultra-smooth finish. Use only on cold DI return piping.

4. All PVDF and PP is to be high purity (HP) material. Foreign material embedded in pipe wall or fittings shall not be accepted.

5. Provide ASAHI, Type AV, full face, PTFE coated gaskets at flanges and butterfly valves installed in polish loop or equal.

6. Provide a means to control DI water system pressure per the specification.

PART 3 - EXECUTION

3.1 INSTALLATION OF INSTRUMENTATION AND CONTROLS EQUIPMENT

A. Field installed transmitters, including pressure, temperature, flow, and others, to be easily accessible for calibration purposes. For each unit process with instrumentation, construct rack on which all instrumentation will be mounted to provide a safe and accessible working location.

Multiplexing groups of similar instrumentation is acceptable.

B. Provide cooling for all I/O and PLC control cabinets and equipment cabinets with high heat loads, e.g., EDI control panels.

C. Equip pressure transmitters with calibration header constructed from SS tubing.

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D. Loss of signal or air pressure on pneumatically controlled valves to cause valves in main process stream to remain in their current position. Other valves to fail in closed position.

E. All analog transmitters should be provided with local readout capability.

F. TOC monitoring to be installed:

1. R/O Product Header.

2. After R/O Storage Tank.

3. After Primary Plant Deionization Vessels.

4. After last unit process in polish loop.

5. On the DI return main in polish loop.

G. Dissolved oxygen monitoring to be installed:

1. After last unit process in polish loop.

2. After each individual component in a unit process designed to eliminate dissolved oxygen.

H. Resistivity/conductivity monitoring to be installed:

1. Conductivity

a. Incoming city water stream.

b. Feed to R/O units.

c. Permeate side of each R/O unit.

d. R/O Product Header.

2. Resistivity:

a. Primary plant deionization unit process.

b. After last unit process in polish loop.

c. On DI return main in polish loop.

I. Particle monitoring to be installed as follows:

1. After the last unit process in the polish loop.

2. On the DI return main in the polish loop

J. Flow rate monitoring to be installed as follows:

1. Incoming city water feed to the DI plant

2. At each of following unit processes:

a. Carbon beds.

b. Cation/anion beds and/or mixed beds.

c. Membrane contactors

d. Reverse osmosis permeate.

e. Reverse osmosis concentrate

f. UF product

g. UF concentrate

3. On the cold DI water supply and return piping mains.

K. Temperature monitoring to be installed as follows:

1. Before and after any heat exchange device.

2. After last unit process in the polish loop on cold DI feeds

L. Pressure monitoring to be installed as follows:

1. After last unit process in polish loop on cold DI feed.

2. On the return water distribution system.

ULTRAPURE DI WATER SYSTEM 15

3. At filter inlet and outlet headers.

4. At carbon bed inlet and outlet headers.

5. At intermediate stages on the R/O feed, permeate and concentrate piping.

6. At mixed bed inlet and outlet headers.

7. Vacuum pressure for degasification processes

8. Storage tank N2 blankets

3.2 INSTALLATION OF PIPING AND VALVES

A. Plan and install pipe and cable tray supports in the CUB. Provide proper clamp support, Unistrut or equivalent.

B. Organize piping to provide common supports and establish a piping hierarchy with changes in direction.

C. Provide and install equipment, piping, tanks, pipe supports, electrical distribution, cable trays, instrumentation within primary and polishing plants.

D. Provide resin traps on outlet piping of any ion exchange vessels.

E. Perform any primary ion exchange resin conditioning outside of the ultrapure water plant. Ion exchange resin will be conditioned by manufacturer or supplier prior to loading into process vessels.

F. Provide sequential numbering and labeling system for identification of valving, vessels, pumps, and face piping for each unit process in accordance with owners guidelines.

G. Install readily accessible sample ports at each unit process.

H. Provide flanges throughout the DI water plant and polish loop for ease of installation and repair.

I. Provide chain operators on valves located above 15’-0” above finished floor (AFF).

J. Provide insulation for all exterior piping with heat trace added to piping with intermittent flow.

K. Minimize dead legs in piping systems for both primary plant and polish system.

L. System and components to be designed for hydrogen peroxide sterilization. Provide all necessary eductors, pumps, vents, etc. for sterilization efforts. Provide owners representative with sterilization plan for the polish loop. Sterilization of the system distribution piping will not be required.

M. Provide line size bypass capabilities on all actuated control valves to facilitate service or replacement without system interruption.

N. Provide a means to protect any gas piping systems such as high purity oxygen, nitrogen, argon, etc utilized in the DIW system from contamination during both the construction and operational phases of the project.

ULTRAPURE DI WATER SYSTEM 16

3.3 INSTALLATION OF ELECTRICAL

A. Coordinate electrical distribution and equipment power in both primary DI water plant and polish plant to evenly distribute parallel equipment on the even and odd electrical feeds.

B. Provide labeling for all circuits. Show power source, including panel name, circuit breaker and location.

C. Provide adequate electrical grounding for CEDI or EDI processes. Refer to manufacturer’s installation requirements.

D. Provide NEMA 1 electrical enclosures in primary and polish area. Position electrical equipment with open grills such that risk of water spray is minimized in the event of a water release.

Install drip hoods above electrical equipment where risks that of overhead leaks could damage electrical equipment exist, E. Refer to owners guidelines for additional information.

3.4 CERTIFICATION

A. Certify through continuous testing resistivity, particles, TOC, pressure, temperature, and dissolved oxygen are within specifications 100 percent of time for a 30 day period at the POD at a makeup flow rate of not less than 100 GPM.

B. Submit analytical and sampling methods to the Owner’s representative for approval.

C. During 30 day period, the Owner shall have a weekly sample pulled from POD and tested for impurities. All samples must be within specification. All data will be shared with the supplier.

D. During this same 30 day period, the Owner will run weekly bacteria tests at each submain. All samples must be within specification. All data will be shared with the supplier.

E. Document and submit sterilization procedure to Owner.

3.5 FIELD QUALITY CONTROL

A. Hydrostatically pressure test new lines at 60 PSIG or 1.5 times operating pressure, whichever is greater, for 24 hours.

B. Maximum degradation: +/- 1% over 24 hour testing period.

C. Submit 3 copies of all test and start-up documentation, Owner’s manuals, operations manuals, and as built drawings at completion of project. Format to be approved by Owner.

D. Demonstrate automatic pump rotation and pump failure modes for all pumps.

E. Provide power consumption, pump performance and heat exchanger performance at design conditions.

F. Provide and execute training as specified under Submittals.

ULTRAPURE DI WATER SYSTEM 17

G. Spark test lined vessels. Provide documentation to Owner.

H. Provide matrix showing electrical power sources for each piece of equipment in both DI water plant and polish loop.

PART 4 - Texas Institute for Electronics – PROPRIETARY INFORMATION

4.1 PERFORMANCE REQUIREMENTS

A. Operation Schedule: The plant must operate 365 days per year, 24 hours per day including maintenance periods.

B. Ultrapure Water Polish System to meet the following performance requirements as measured at the point of delivery:

END OF SECTION

ULTRAPURE DI WATER SYSTEM 18

TIE UPW Spec Parameter Units Planned

Resistivity Mohm/cm > 18.18 Pressure Cold psi 55 +/- 3 location EOM Temp Cold Celsius 22 +/-1 Particles > 0.05 um/ml < 5

> 0.1 um/ml < 0.1 > 0.5 um/ml

Bacteria 96 hr Test col/ltr < 1 TOC ppb < 2 Dissolved O2 ppb < 10 Dissolved N2 ppm 8-18 +/-2 Cations Na+ ppt < 10

K+ ppt < 30 NH4+ ppt < 50 Ca++ ppt < 10 Mg++ ppt < 10

Anions F- ppt < 50 Cl- ppt < 50 Br- ppt < 50

NO3- ppt < 50 NO2- ppt < 50 PO4= ppt < 20 SO4= ppt < 50

Metals Al ppt < 10 Ba ppt < 10 B ppt < 1000 Cr ppt < 20 Cu ppt < 20 Fe ppt < 50 Li ppt < 10

Mn ppt < 10 Ni ppt < 20 Sr ppt < 10 Zn ppt < 20

SiO2 Total ppb < 0.5 Dissolved ppb < 0.5

UPW Specification Comparison